Abstract

This paper describes structurally integrated capacitive sensors that measure the displacement and tilt angles of the movable mount of the lens module of a system for compensating the image-scale variations caused by thermobaric misalignment of a photolithographic projection objective. We present a technique for choosing the optimum design parameters of capacitive sensors, an algorithm for calculating the displacement and tilt angles from the measured capacitance values of the sensors, and a rough calculation of the error and of the measurement for various displacement ranges.

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