This paper discusses a technique for determining the dispersion of the optical constants and the thickness of thin, weakly absorbing oxide films from the experimental interference transmission spectra. Formulas and techniques are given for calculating the film parameters, based on a numerical iterative solution of a system of transcendental equations. A mathematical model of the transmission spectrum is obtained by the authors and is used to set up the equations. Examples are considered of determining the optical constants and the thickness of amorphous tantalum oxide films from the transmission spectra in the wavelength region 0.3-1.1 µm.
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