Abstract

This paper discusses two processes for forming microstructures, based on selective photopolymerization of a composite and the volume-reduction effect of a composite when it undergoes photopolymerization. Both processes belong to the group of grey-scale lithography methods and make it possible to accurately form the surface of microlenses when the optical density distribution of a photomask over the radius of the microlens is given.

High pulsed power VCSEL arrays with polymer microlenses formed by photoacid diffusion

Siew Li Tan, Yong Keong Yap, Jia Jun Wong, Jun Da Ng, Gianluca Grenci, and Aaron J. Danner
Opt. Express 28(14) 20095-20105 (2020)

Holographic nanoparticle-polymer composites based on step-growth thiol-ene photopolymerization

Eiji Hata, Ken Mitsube, Keisuke Momose, and Yasuo Tomita
Opt. Mater. Express 1(2) 207-222 (2011)

Optically isotropic, electrically tunable liquid crystal droplet arrays formed by photopolymerization-induced phase separation

Haitao Dai, Lin Chen, Bin Zhang, Guangyuan Si, and Yan Jun Liu
Opt. Lett. 40(12) 2723-2726 (2015)

Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques

Jeremy Béguelin, Wilfried Noell, Toralf Scharf, and Reinhard Voelkel
Appl. Opt. 59(13) 3910-3919 (2020)

Fabrication, characterization, and applications of microlenses

Tingxiu Hou, Chong Zheng, Shi Bai, Qian Ma, Denzel Bridges, Anming Hu, and W. W. Duley
Appl. Opt. 54(24) 7366-7376 (2015)