This paper discusses how the cathodoluminescence luminosity of a submicron phosphor based on yttrium oxide depends on the annealing temperature. Increasing the annealing temperature from 1000 to 1400 °C increases the cathodoluminescence luminosity by a factor of more than 1.5. As the firing temperature of the phosphor is increased, the size of the coherent-scattering regions (CSRs) of x rays also increases. It is established that the most significant processes in forming an efficient low-voltage phosphor with submicron particle size are an increase of the linear size of the CSRs and a decrease of the linear size of the interblock boundaries. © 2005 Optical Society of America

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