Abstract

The rms deviation of the coordinate of the center of the light mark on a CCD detector has been measured for a triangulation-measuring device in which the surface being monitored is illuminated along the normal and at an angle. The coordinate of the center was calculated by processing the video signal read from the CCD detector by various algorithms. The measurements were carried out for samples that differ in surface structure and roughness. © 2005 Optical Society of America

PDF Article

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.