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Deterioration of the limiting characteristics of antireflection coatings due to thickness fluctuations of the layers

I. S. Gainutdinov, E. A. Nesmelov, R. S. Sabirov, G. I. Abzalova, and A. V. Mikhalov

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Abstract

Approximate expressions are obtained for analyzing how the roughness of the interlayer surfaces of a multilayer antireflection coating and the substrate affect the optical properties. It is shown that the reflectance of an antireflection coating increases because of surface roughness. © 2004 Optical Society of America

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