Abstract
This paper analyzes how the rms wavefront deviation from the nominal shape is interconnected
with the character of the deformation of surfaces undergoing processing, modelled by
means of a power series, Zernike polynomials, and Chebyshev polynomials for a constant value
of the peak-to-valley wavefront deformation. The region of values of the rms wavefront
deviation is determined within which these values can be legitimately used to estimate the achieved
quality of the surface shape. A possible relationship of the rms deviation and the peak-tovalley
wavefront deformation is established.
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