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Visualizing defects on a silicon surface by means of nematic liquid crystals

S. Yu. Kerpeleva, V. Kh. Kudoyarova, E. I. Terukov, and M. G. Tomilin

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Abstract

This paper is devoted to the visualization of defects on a silicon surface by means of nematic liquid crystals. Clusters of dislocations not observed in an optical microscope are detected, and this is confirmed independently by an etching method. It is shown that the defect density on the surface of the samples depends on the process by which they were fabricated.

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