Abstract

This paper discusses the possibilities of determining the thickness distribution of layers over the surface of a substrate when stops are used whose radius and distance from the evaporator vary with time. The characteristic thickness distributions of the layers are presented for certain positions of the stop relative to a thin annular surface evaporator. The effect of varying the size and position of a stop on the thickness distribution of a layer over the substrate surface is analyzed. © 2003 Optical Society of America

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