Microscanner with large scanning field for a probe microscope

A. O. Golubok; E. N. Rodionova; I. D. Sapozhnikov

doi:10.1364/JOT.69.000198

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Journal of Optical Technology
Vol. 69,
Issue 3,
pp. 198-
(2002)
•https://doi.org/10.1364/JOT.69.000198

Microscanner with large scanning field for a probe microscope

A. O. Golubok, E. N. Rodionova, and I. D. Sapozhnikov

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A Golubok
E Rodionova
I Sapozhnikov

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A. O. Golubok, E. N. Rodionova, and I. D. Sapozhnikov, "Microscanner with large scanning field for a probe microscope," J. Opt. Technol. 69, 198- (2002)

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