Abstract

The fundamental methods for analyzing the parameters of diffraction gratings (DGs) are presented. The features of the application of DGs as measurement scales in a linear-displacement sensor system are analyzed. A method and quality criteria for monitoring the parameters of real samples of measurement scales are proposed. These criteria generalize all diffraction efficiencies that affect the formation of quadrature signals in the system of an interferometric linear-displacement sensor.

© 2018 Optical Society of America

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