Abstract

A method of monitoring local nanometer-level deviations of the surfaces of large optical components (elements) from a given profile has been developed, scientifically validated, and experimentally confirmed. The method is based on an algorithm for calculating the objective function—the spectral density of a one-dimensional correlation function in a wide spectral range of spatial frequencies. Theoretical and experimental studies have been made of the nonexcluded systematic and random error components of determining the optimization parameter of the objective function being used—the rms deviation of the local deviations of the surfaces of large optical components from a given profile.

© 2018 Optical Society of America

Time shifting deviation method enhanced laser interferometry: ultrahigh precision localizing of traffic vibration using an urban fiber link

Guan Wang, Zhongwang Pang, Bohan Zhang, Fangmin Wang, Yufeng Chen, Hongfei Dai, Bo Wang, and Lijun Wang
Photon. Res. 10(2) 433-443 (2022)

Hybrid method for monitoring large Fabry-Pérot cavity displacements with nanometer precision

Daniel C. Sweeney, Anthony Birri, and Christian M. Petrie
Opt. Express 30(16) 29148-29160 (2022)

Rapid fabrication technique for nanometer-precision aspherical surfaces

Wenlin Liao, Yifan Dai, Xuqing Nie, Xuhui Xie, and Ci Song
Appl. Opt. 54(7) 1629-1638 (2015)

Surface characterization of micro-optical components by Foucault’s knife-edge method: the case of a micromirror array

Frédéric Zamkotsian and Kjetil Dohlen
Appl. Opt. 38(31) 6532-6539 (1999)

Time shifting deviation method enhanced laser interferometry: ultrahigh precision localizing of traffic vibration using an urban fiber link: publisher’s note

Guan Wang, Zhongwang Pang, Bohan Zhang, Fangmin Wang, Yufeng Chen, Hongfei Dai, Bo Wang, and Lijun Wang
Photon. Res. 10(8) 1839-1839 (2022)