Abstract

This paper presents the results of a study of the spectral characteristics of the plasma radiation (175–200 nm) of a pulse-periodic capacitive-discharge lamp that operates with a mixture of water vapor and argon. It is shown that capacitive discharge at low argon pressure is a broad-band source of vacuum ultraviolet radiation. The intensity of the emission bands of the capacitive-discharge plasma is optimized as a function of the partial pressures of argon and water vapor. The electron kinetic coefficients are calculated for a discharge in a mixture of argon and water vapor.

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  1. A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “Investigation of a glow discharge in a mixture of Ar and OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 8, 62 (1999). [Tech. Phys. Lett. 25, 321 (1999)].
  2. A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “New efficient low-pressure gas-discharge source of optical radiation using hydroxyl OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 1, 10 (1999). [Tech. Phys. Lett. 25, 4 (1999)].
  3. A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, “A water-vapor electric-discharge vacuum ultraviolet source,” Pis’ma Zh. Tekh. Fiz. 27, No. 8, 46 (2001). [Tech. Phys. Lett. 27, 642 (2001)].
  4. A. K. Shuaibov, A. I. Minya, A. N. Malinin, Z. T. Gomoki, and R. V. Gritsak, “A VUV lamp with pumping by a capacitive discharge based on mixtures of inert gases with water molecules,” Zh. Prikl. Spektrosk. 78, 927 (2011).
  5. http://siglo-kinema.com/bolsig.htm.

2011 (1)

A. K. Shuaibov, A. I. Minya, A. N. Malinin, Z. T. Gomoki, and R. V. Gritsak, “A VUV lamp with pumping by a capacitive discharge based on mixtures of inert gases with water molecules,” Zh. Prikl. Spektrosk. 78, 927 (2011).

2001 (1)

A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, “A water-vapor electric-discharge vacuum ultraviolet source,” Pis’ma Zh. Tekh. Fiz. 27, No. 8, 46 (2001). [Tech. Phys. Lett. 27, 642 (2001)].

1999 (2)

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “Investigation of a glow discharge in a mixture of Ar and OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 8, 62 (1999). [Tech. Phys. Lett. 25, 321 (1999)].

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “New efficient low-pressure gas-discharge source of optical radiation using hydroxyl OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 1, 10 (1999). [Tech. Phys. Lett. 25, 4 (1999)].

Dashchenko, A. I.

A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, “A water-vapor electric-discharge vacuum ultraviolet source,” Pis’ma Zh. Tekh. Fiz. 27, No. 8, 46 (2001). [Tech. Phys. Lett. 27, 642 (2001)].

Gomoki, Z. T.

A. K. Shuaibov, A. I. Minya, A. N. Malinin, Z. T. Gomoki, and R. V. Gritsak, “A VUV lamp with pumping by a capacitive discharge based on mixtures of inert gases with water molecules,” Zh. Prikl. Spektrosk. 78, 927 (2011).

Gritsak, R. V.

A. K. Shuaibov, A. I. Minya, A. N. Malinin, Z. T. Gomoki, and R. V. Gritsak, “A VUV lamp with pumping by a capacitive discharge based on mixtures of inert gases with water molecules,” Zh. Prikl. Spektrosk. 78, 927 (2011).

Khodorkovs’kii, M. A.

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “Investigation of a glow discharge in a mixture of Ar and OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 8, 62 (1999). [Tech. Phys. Lett. 25, 321 (1999)].

Khodorkovs’kii, M. A.

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “New efficient low-pressure gas-discharge source of optical radiation using hydroxyl OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 1, 10 (1999). [Tech. Phys. Lett. 25, 4 (1999)].

Kidalov, S. V.

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “New efficient low-pressure gas-discharge source of optical radiation using hydroxyl OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 1, 10 (1999). [Tech. Phys. Lett. 25, 4 (1999)].

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “Investigation of a glow discharge in a mixture of Ar and OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 8, 62 (1999). [Tech. Phys. Lett. 25, 321 (1999)].

Malinin, A. N.

A. K. Shuaibov, A. I. Minya, A. N. Malinin, Z. T. Gomoki, and R. V. Gritsak, “A VUV lamp with pumping by a capacitive discharge based on mixtures of inert gases with water molecules,” Zh. Prikl. Spektrosk. 78, 927 (2011).

Milenin, V. M.

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “New efficient low-pressure gas-discharge source of optical radiation using hydroxyl OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 1, 10 (1999). [Tech. Phys. Lett. 25, 4 (1999)].

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “Investigation of a glow discharge in a mixture of Ar and OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 8, 62 (1999). [Tech. Phys. Lett. 25, 321 (1999)].

Minya, A. I.

A. K. Shuaibov, A. I. Minya, A. N. Malinin, Z. T. Gomoki, and R. V. Gritsak, “A VUV lamp with pumping by a capacitive discharge based on mixtures of inert gases with water molecules,” Zh. Prikl. Spektrosk. 78, 927 (2011).

Shevera, I. V.

A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, “A water-vapor electric-discharge vacuum ultraviolet source,” Pis’ma Zh. Tekh. Fiz. 27, No. 8, 46 (2001). [Tech. Phys. Lett. 27, 642 (2001)].

Shimon, L. L.

A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, “A water-vapor electric-discharge vacuum ultraviolet source,” Pis’ma Zh. Tekh. Fiz. 27, No. 8, 46 (2001). [Tech. Phys. Lett. 27, 642 (2001)].

Shuaibov, A. K.

A. K. Shuaibov, A. I. Minya, A. N. Malinin, Z. T. Gomoki, and R. V. Gritsak, “A VUV lamp with pumping by a capacitive discharge based on mixtures of inert gases with water molecules,” Zh. Prikl. Spektrosk. 78, 927 (2011).

A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, “A water-vapor electric-discharge vacuum ultraviolet source,” Pis’ma Zh. Tekh. Fiz. 27, No. 8, 46 (2001). [Tech. Phys. Lett. 27, 642 (2001)].

Timofeev, N. M.

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “New efficient low-pressure gas-discharge source of optical radiation using hydroxyl OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 1, 10 (1999). [Tech. Phys. Lett. 25, 4 (1999)].

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “Investigation of a glow discharge in a mixture of Ar and OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 8, 62 (1999). [Tech. Phys. Lett. 25, 321 (1999)].

Vul’, A. Ya.

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “Investigation of a glow discharge in a mixture of Ar and OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 8, 62 (1999). [Tech. Phys. Lett. 25, 321 (1999)].

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “New efficient low-pressure gas-discharge source of optical radiation using hydroxyl OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 1, 10 (1999). [Tech. Phys. Lett. 25, 4 (1999)].

Pis’ma Zh. Tekh. Fiz. (3)

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “Investigation of a glow discharge in a mixture of Ar and OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 8, 62 (1999). [Tech. Phys. Lett. 25, 321 (1999)].

A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “New efficient low-pressure gas-discharge source of optical radiation using hydroxyl OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 1, 10 (1999). [Tech. Phys. Lett. 25, 4 (1999)].

A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, “A water-vapor electric-discharge vacuum ultraviolet source,” Pis’ma Zh. Tekh. Fiz. 27, No. 8, 46 (2001). [Tech. Phys. Lett. 27, 642 (2001)].

Zh. Prikl. Spektrosk. (1)

A. K. Shuaibov, A. I. Minya, A. N. Malinin, Z. T. Gomoki, and R. V. Gritsak, “A VUV lamp with pumping by a capacitive discharge based on mixtures of inert gases with water molecules,” Zh. Prikl. Spektrosk. 78, 927 (2011).

Other (1)

http://siglo-kinema.com/bolsig.htm.

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