Abstract

This paper discusses the results of a study of how the synthesis conditions of circular optical scales fabricated using a laser image generator affect their angular errors.

© 2012 OSA

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  1. D. U. Kruchinin, “Method of fabricating optical scales by inverse photolithography,” Russian Patent No. 2 370 799 (2009).
  2. D. U. Kruchinin, “Photolithography in the production of circular optical scales at the Ural Optomechanical Factory,” Opt. Zh. 75, No. 4, 92 (2008). [J. Opt. Technol. 75, 282 (2008)].
  3. Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. U. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006). [J. Opt. Technol. 73, 544 (2006)].
  4. D. U. Kruchinin and O. B. Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011). [J. Opt. Technol. 78, 383 (2011)].
  5. S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angle-measuring structures,” in Tenth IMEKO TC7 International Symposium, Saint-Petersburg, 2004, pp. 316–320.

2011

D. U. Kruchinin and O. B. Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011). [J. Opt. Technol. 78, 383 (2011)].

2008

D. U. Kruchinin, “Photolithography in the production of circular optical scales at the Ural Optomechanical Factory,” Opt. Zh. 75, No. 4, 92 (2008). [J. Opt. Technol. 75, 282 (2008)].

2006

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. U. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006). [J. Opt. Technol. 73, 544 (2006)].

Abramov, Yu. F.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. U. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006). [J. Opt. Technol. 73, 544 (2006)].

Bartik, S. A.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angle-measuring structures,” in Tenth IMEKO TC7 International Symposium, Saint-Petersburg, 2004, pp. 316–320.

Chugui, Yu. V.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. U. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006). [J. Opt. Technol. 73, 544 (2006)].

Frizin, S. E.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angle-measuring structures,” in Tenth IMEKO TC7 International Symposium, Saint-Petersburg, 2004, pp. 316–320.

Kir’yanov, A. V.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. U. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006). [J. Opt. Technol. 73, 544 (2006)].

Kir’yanov, V. P.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. U. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006). [J. Opt. Technol. 73, 544 (2006)].

Kiryanov, A. V.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angle-measuring structures,” in Tenth IMEKO TC7 International Symposium, Saint-Petersburg, 2004, pp. 316–320.

Kiryanov, V. P.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angle-measuring structures,” in Tenth IMEKO TC7 International Symposium, Saint-Petersburg, 2004, pp. 316–320.

Kokarev, S. A.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. U. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006). [J. Opt. Technol. 73, 544 (2006)].

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angle-measuring structures,” in Tenth IMEKO TC7 International Symposium, Saint-Petersburg, 2004, pp. 316–320.

Kruchinin, D. U.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. U. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006). [J. Opt. Technol. 73, 544 (2006)].

Kruchinin, D. U.

D. U. Kruchinin and O. B. Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011). [J. Opt. Technol. 78, 383 (2011)].

D. U. Kruchinin, “Photolithography in the production of circular optical scales at the Ural Optomechanical Factory,” Opt. Zh. 75, No. 4, 92 (2008). [J. Opt. Technol. 75, 282 (2008)].

Kruchinin, D. Y.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angle-measuring structures,” in Tenth IMEKO TC7 International Symposium, Saint-Petersburg, 2004, pp. 316–320.

Nikitin, V. G.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angle-measuring structures,” in Tenth IMEKO TC7 International Symposium, Saint-Petersburg, 2004, pp. 316–320.

Yakovlev, O. B.

D. U. Kruchinin and O. B. Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011). [J. Opt. Technol. 78, 383 (2011)].

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. U. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006). [J. Opt. Technol. 73, 544 (2006)].

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angle-measuring structures,” in Tenth IMEKO TC7 International Symposium, Saint-Petersburg, 2004, pp. 316–320.

Opt. Zh.

D. U. Kruchinin, “Photolithography in the production of circular optical scales at the Ural Optomechanical Factory,” Opt. Zh. 75, No. 4, 92 (2008). [J. Opt. Technol. 75, 282 (2008)].

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. U. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006). [J. Opt. Technol. 73, 544 (2006)].

D. U. Kruchinin and O. B. Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011). [J. Opt. Technol. 78, 383 (2011)].

Other

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angle-measuring structures,” in Tenth IMEKO TC7 International Symposium, Saint-Petersburg, 2004, pp. 316–320.

D. U. Kruchinin, “Method of fabricating optical scales by inverse photolithography,” Russian Patent No. 2 370 799 (2009).

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