Abstract

This article presents the results of experimental and model studies carried out in order to estimate the metrological characteristics of a goniometer. The measurement is based on determining the angular position of the image of an optical mark on a digital-camera array, using algorithms for processing video data. According to the results of metrologic studies of an experimental sample of a goniometer with an array size of 5.7×6.3mm, the error of the measuring device does not exceed 1<sup>″</sup>. By using a mathematical model of the goniometer, it is shown to be possible to obtain a measurement accuracy of the angular position at the level of hundredths of an arc second.

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References

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  1. Prospectus of SKB IS (www.skbis.ru).
  2. Prospectus of HEIDENHAIN GmbH (www.heidenhain.de).
  3. Prospectus of RENISHAW (www.renishaw.com).
  4. A. N. Korolev, G. S. Polishchuk, and A. Ya. Lukin, “Goniometer,” Russian Federation Patent No. 109 847 (2011).
  5. Prospectus of ES-Éksperts (www.es-experts.ru).
  6. S. V. Gordeev and B. G. Turukhano, “Investigation of the interference field of two spherical waves for holographic recording of precision radial diffraction gratings,” Opt. Laser Technol. 28, 255 (1996).
    [CrossRef]
  7. A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Metrological studies and the choice of the shape of an optical mark in digital measuring systems,” Opt. Zh. 77, No. 6, 25 (2010). [J. Opt. Technol. 77, 370 (2010)].

2010 (1)

A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Metrological studies and the choice of the shape of an optical mark in digital measuring systems,” Opt. Zh. 77, No. 6, 25 (2010). [J. Opt. Technol. 77, 370 (2010)].

1996 (1)

S. V. Gordeev and B. G. Turukhano, “Investigation of the interference field of two spherical waves for holographic recording of precision radial diffraction gratings,” Opt. Laser Technol. 28, 255 (1996).
[CrossRef]

Gartsuev, A. I.

A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Metrological studies and the choice of the shape of an optical mark in digital measuring systems,” Opt. Zh. 77, No. 6, 25 (2010). [J. Opt. Technol. 77, 370 (2010)].

Gordeev, S. V.

S. V. Gordeev and B. G. Turukhano, “Investigation of the interference field of two spherical waves for holographic recording of precision radial diffraction gratings,” Opt. Laser Technol. 28, 255 (1996).
[CrossRef]

Korolev, A. N.

A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Metrological studies and the choice of the shape of an optical mark in digital measuring systems,” Opt. Zh. 77, No. 6, 25 (2010). [J. Opt. Technol. 77, 370 (2010)].

Polishchuk, G. S.

A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Metrological studies and the choice of the shape of an optical mark in digital measuring systems,” Opt. Zh. 77, No. 6, 25 (2010). [J. Opt. Technol. 77, 370 (2010)].

Tregub, V. P.

A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Metrological studies and the choice of the shape of an optical mark in digital measuring systems,” Opt. Zh. 77, No. 6, 25 (2010). [J. Opt. Technol. 77, 370 (2010)].

Turukhano, B. G.

S. V. Gordeev and B. G. Turukhano, “Investigation of the interference field of two spherical waves for holographic recording of precision radial diffraction gratings,” Opt. Laser Technol. 28, 255 (1996).
[CrossRef]

Opt. Laser Technol. (1)

S. V. Gordeev and B. G. Turukhano, “Investigation of the interference field of two spherical waves for holographic recording of precision radial diffraction gratings,” Opt. Laser Technol. 28, 255 (1996).
[CrossRef]

Opt. Zh. (1)

A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Metrological studies and the choice of the shape of an optical mark in digital measuring systems,” Opt. Zh. 77, No. 6, 25 (2010). [J. Opt. Technol. 77, 370 (2010)].

Other (5)

Prospectus of SKB IS (www.skbis.ru).

Prospectus of HEIDENHAIN GmbH (www.heidenhain.de).

Prospectus of RENISHAW (www.renishaw.com).

A. N. Korolev, G. S. Polishchuk, and A. Ya. Lukin, “Goniometer,” Russian Federation Patent No. 109 847 (2011).

Prospectus of ES-Éksperts (www.es-experts.ru).

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