Abstract

This paper proposes a method of diffraction monitoring based on illuminating the test object with a pair of wave fronts propagating at an angle to each other. It is established that such illumination results in the formation of a moiré pattern whose form is associated with the geometrical parameters of the test object. The possibility of using this method to monitor the thickness of objects is considered.

© 2010 Optical Society of America

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  1. V. N. Nazarov and A. N. Ivanov, “Using the moiré effect to increase the accuracy of diffraction methods for monitoring the geometrical parameters and the spatial position of objects,” Opt. Zh. 76, No. 1, 46 (2009) V. N. Nazarov and A. N. Ivanov,[J. Opt. Technol. 76, 39 (2009)].
  2. A. N. Ivanov and V. N. Nazarov, “Diffraction test method based a mirror aperture,” Izv. Vyssh. Uchebn. Zaved. Prib. 50, No. 4, 38 (2007).
  3. Yu. V. Chuguĭ, “Determining the geometrical parameters of extended objects of constant thickness from their diffraction patterns,” Avtometriya No. 6, 76 (1991).
  4. Yu. A. Lemeshko and Yu. V. Chuguĭ, “Dimensional monitoring of circular reflecting cylinders by an interference method,” Avtometriya 39, No. 5, 42 (2003).
  5. K. A. Zebreva and Yu. V. Chuguĭ, “Calculating diffraction effects on 3D objects of constant thickness with various illumination configurations,” in Papers of the Seventh International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 3, pp. 236-267.

2009 (1)

V. N. Nazarov and A. N. Ivanov, “Using the moiré effect to increase the accuracy of diffraction methods for monitoring the geometrical parameters and the spatial position of objects,” Opt. Zh. 76, No. 1, 46 (2009) V. N. Nazarov and A. N. Ivanov,[J. Opt. Technol. 76, 39 (2009)].

V. N. Nazarov and A. N. Ivanov, “Using the moiré effect to increase the accuracy of diffraction methods for monitoring the geometrical parameters and the spatial position of objects,” Opt. Zh. 76, No. 1, 46 (2009) V. N. Nazarov and A. N. Ivanov,[J. Opt. Technol. 76, 39 (2009)].

2007 (1)

A. N. Ivanov and V. N. Nazarov, “Diffraction test method based a mirror aperture,” Izv. Vyssh. Uchebn. Zaved. Prib. 50, No. 4, 38 (2007).

2003 (1)

Yu. A. Lemeshko and Yu. V. Chuguĭ, “Dimensional monitoring of circular reflecting cylinders by an interference method,” Avtometriya 39, No. 5, 42 (2003).

1991 (1)

Yu. V. Chuguĭ, “Determining the geometrical parameters of extended objects of constant thickness from their diffraction patterns,” Avtometriya No. 6, 76 (1991).

Chugui, Yu. V.

Yu. A. Lemeshko and Yu. V. Chuguĭ, “Dimensional monitoring of circular reflecting cylinders by an interference method,” Avtometriya 39, No. 5, 42 (2003).

Yu. V. Chuguĭ, “Determining the geometrical parameters of extended objects of constant thickness from their diffraction patterns,” Avtometriya No. 6, 76 (1991).

K. A. Zebreva and Yu. V. Chuguĭ, “Calculating diffraction effects on 3D objects of constant thickness with various illumination configurations,” in Papers of the Seventh International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 3, pp. 236-267.

Ivanov, A. N.

V. N. Nazarov and A. N. Ivanov, “Using the moiré effect to increase the accuracy of diffraction methods for monitoring the geometrical parameters and the spatial position of objects,” Opt. Zh. 76, No. 1, 46 (2009) V. N. Nazarov and A. N. Ivanov,[J. Opt. Technol. 76, 39 (2009)].

V. N. Nazarov and A. N. Ivanov, “Using the moiré effect to increase the accuracy of diffraction methods for monitoring the geometrical parameters and the spatial position of objects,” Opt. Zh. 76, No. 1, 46 (2009) V. N. Nazarov and A. N. Ivanov,[J. Opt. Technol. 76, 39 (2009)].

A. N. Ivanov and V. N. Nazarov, “Diffraction test method based a mirror aperture,” Izv. Vyssh. Uchebn. Zaved. Prib. 50, No. 4, 38 (2007).

Lemeshko, Yu. A.

Yu. A. Lemeshko and Yu. V. Chuguĭ, “Dimensional monitoring of circular reflecting cylinders by an interference method,” Avtometriya 39, No. 5, 42 (2003).

Nazarov, V. N.

V. N. Nazarov and A. N. Ivanov, “Using the moiré effect to increase the accuracy of diffraction methods for monitoring the geometrical parameters and the spatial position of objects,” Opt. Zh. 76, No. 1, 46 (2009) V. N. Nazarov and A. N. Ivanov,[J. Opt. Technol. 76, 39 (2009)].

V. N. Nazarov and A. N. Ivanov, “Using the moiré effect to increase the accuracy of diffraction methods for monitoring the geometrical parameters and the spatial position of objects,” Opt. Zh. 76, No. 1, 46 (2009) V. N. Nazarov and A. N. Ivanov,[J. Opt. Technol. 76, 39 (2009)].

A. N. Ivanov and V. N. Nazarov, “Diffraction test method based a mirror aperture,” Izv. Vyssh. Uchebn. Zaved. Prib. 50, No. 4, 38 (2007).

Zebreva, K. A.

K. A. Zebreva and Yu. V. Chuguĭ, “Calculating diffraction effects on 3D objects of constant thickness with various illumination configurations,” in Papers of the Seventh International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 3, pp. 236-267.

Avtometriya (2)

Yu. V. Chuguĭ, “Determining the geometrical parameters of extended objects of constant thickness from their diffraction patterns,” Avtometriya No. 6, 76 (1991).

Yu. A. Lemeshko and Yu. V. Chuguĭ, “Dimensional monitoring of circular reflecting cylinders by an interference method,” Avtometriya 39, No. 5, 42 (2003).

Izv. Vyssh. Uchebn. Zaved. Prib. (1)

A. N. Ivanov and V. N. Nazarov, “Diffraction test method based a mirror aperture,” Izv. Vyssh. Uchebn. Zaved. Prib. 50, No. 4, 38 (2007).

Opt. Zh. (1)

V. N. Nazarov and A. N. Ivanov, “Using the moiré effect to increase the accuracy of diffraction methods for monitoring the geometrical parameters and the spatial position of objects,” Opt. Zh. 76, No. 1, 46 (2009) V. N. Nazarov and A. N. Ivanov,[J. Opt. Technol. 76, 39 (2009)].

Other (1)

K. A. Zebreva and Yu. V. Chuguĭ, “Calculating diffraction effects on 3D objects of constant thickness with various illumination configurations,” in Papers of the Seventh International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 3, pp. 236-267.

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