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Using the moiré effect to create high-accuracy diffraction systems for monitoring the geometrical parameters of objects

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Abstract

This paper proposes a method of diffraction monitoring based on illuminating the test object with a pair of wave fronts propagating at an angle to each other. It is established that such illumination results in the formation of a moiré pattern whose form is associated with the geometrical parameters of the test object. The possibility of using this method to monitor the thickness of objects is considered.

© 2010 Optical Society of America

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