On the theory of the ellipsometry of an actual surface

I. S. Gaĭnutdinov; E. A. Nesmelov; R. G. Shaĭmardanov; V. A. Ivanov; A. V. Mikhaĭlov

doi:10.1364/JOT.75.000041

Journal of Optical Technology
Vol. 75,
Issue 1,
pp. 41-43
(2008)
•https://doi.org/10.1364/JOT.75.000041

On the theory of the ellipsometry of an actual surface

I. S. Gaĭnutdinov, E. A. Nesmelov, R. G. Shaĭmardanov, V. A. Ivanov, and A. V. Mikhaĭlov

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I. S. Gaĭnutdinov, E. A. Nesmelov, R. G. Shaĭmardanov, V. A. Ivanov, and A. V. Mikhaĭlov, "On the theory of the ellipsometry of an actual surface," J. Opt. Technol. 75, 41-43 (2008)

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Abstract

This paper discusses the question of why it is not justified to describe surface roughness by an effective layer in the case of ellipsometric measurements. It is shown that the residual signal of an ellipsometer is determined by radiation scattering at the surface being measured.

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Journal of Optical Technology