Abstract

This paper discusses the main mechanisms of laser transport of matter. The method of decontamination of metallic surfaces by laser transport is considered. The dependence of the thickness of the removed layer on the power density of the laser radiation is investigated. The boundaries of the evaporative and thermomechanical regimes of laser decontamination are determined. A method of oblique decontamination is proposed.

© 2007 Optical Society of America

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  1. V. P. Veĭko, B. N. Kotletsov, and M. N. Libenson, Laser Lithography (Élektronika, 1970).
  2. T. Szörényi and Zs. Tóth, "Pulsed laser synthesis and printing of compound semiconductors," Proc. SPIE 1022, 93 (1989).
  3. J. M. Fitz-Gerald, A. Piqué, D. B. Chrisey, "Laser direct writing of phosphor screens high-definition displays," Appl. Phys. Lett. 76, 1386 (2000).
    [Crossref]
  4. Y. F. Lu and Z. M. Ren, "Laser microprocessing and the applications in microelectronics industry," Proc. SPIE 4157, 191 (2001).
    [Crossref]
  5. A. Piqué, C. B. Arnold, R. C. Wartena, "Laser direct-write of miniature and microbattery systems," RIKEN Rev. No. 50, 57 (2003).
  6. B. S. Luk'yanchuk, ed., Laser Cleaning (World Scientific, Singapore, 2002).
  7. V. P. Veiko and S. M. Metev, Laser-Assisted Microtechnology (Springer Verlag, Heidelberg, 1994 [first edition], 1998 [second edition]).
  8. P. Mogyorósi, T. Szörényi, K. Bali, Zs. Tóth, and I. Hevesi, "Pulsed laser ablative deposition of thin metal films," Appl. Surf. Sci. 36, 157 (1989).
    [Crossref]
  9. V. P. Veiko, A. I. Kajdanov, H. A. Kovachki, and E. A. Shakhno, "Mechanisms of local laser-induced forward transfer of films," Proc. SPIE 1856, 11 (1993).
    [Crossref]
  10. V. P. Veiko, E. A. Shakhno, and L. Nánai, "Local laser-induced film transfer," in Modern Topics in Chemical Physics, ed. T.F.George, X.Sun, and G.Zhang (Research Singpost, Kerala, India, 2002), pp. 303-319.
  11. A. S. Holmes, "Laser processes for MEMS manufacture," RIKEN Rev. No. 43, 63 (2002).
  12. Z. Tóth, B. Hopp, T. Szörényi, Z. Bor, V. P. Veiko, and E. A. Shakhno, "Pulsed laser ablation mechanisms of thin metal films," Proc. SPIE 3822, 18 (1999).
    [Crossref]
  13. G. D. Nikishin and V. N. Smirnov, "Using laser decontamination when utilizing APL in Rossudostroenie," in Fourth International Conference on Radiation Safety: Ecology--Atomic Energy, St. Petersburg, 24-28 September 2001, Collection of Papers.
  14. V. P. Veĭko, E. A. Shakhno, and V. N. Smirnov, "Low-threshold mechanisms of laser cleaning of the surface," in Optical Technologies in Fundamental and Applied Research, ed. V.N.Vasil'eva (St. Petersburg, 2001), pp. 132-145.
  15. V. N. Smirnov, G. D. Nikishin, M. A. Pimenova, and G. K. Ivakhnyuk, "Laser decontamination. Principles and prospects of the use during utilization of atomic submarines," Vest. Sankt-Pet. Inst. Gos. Protivopozh. Sluzhby No. 2 (9), 33 (2005).
  16. J. M. Lee and K. G. Watkins, "Real-time surface monitoring in the laser cleaning of copper for soldering processes," Lasers Eng. 8, 229 (1999).

2005 (1)

V. N. Smirnov, G. D. Nikishin, M. A. Pimenova, and G. K. Ivakhnyuk, "Laser decontamination. Principles and prospects of the use during utilization of atomic submarines," Vest. Sankt-Pet. Inst. Gos. Protivopozh. Sluzhby No. 2 (9), 33 (2005).

2003 (1)

A. Piqué, C. B. Arnold, R. C. Wartena, "Laser direct-write of miniature and microbattery systems," RIKEN Rev. No. 50, 57 (2003).

2002 (3)

B. S. Luk'yanchuk, ed., Laser Cleaning (World Scientific, Singapore, 2002).

V. P. Veiko, E. A. Shakhno, and L. Nánai, "Local laser-induced film transfer," in Modern Topics in Chemical Physics, ed. T.F.George, X.Sun, and G.Zhang (Research Singpost, Kerala, India, 2002), pp. 303-319.

A. S. Holmes, "Laser processes for MEMS manufacture," RIKEN Rev. No. 43, 63 (2002).

2001 (2)

V. P. Veĭko, E. A. Shakhno, and V. N. Smirnov, "Low-threshold mechanisms of laser cleaning of the surface," in Optical Technologies in Fundamental and Applied Research, ed. V.N.Vasil'eva (St. Petersburg, 2001), pp. 132-145.

Y. F. Lu and Z. M. Ren, "Laser microprocessing and the applications in microelectronics industry," Proc. SPIE 4157, 191 (2001).
[Crossref]

2000 (1)

J. M. Fitz-Gerald, A. Piqué, D. B. Chrisey, "Laser direct writing of phosphor screens high-definition displays," Appl. Phys. Lett. 76, 1386 (2000).
[Crossref]

1999 (2)

Z. Tóth, B. Hopp, T. Szörényi, Z. Bor, V. P. Veiko, and E. A. Shakhno, "Pulsed laser ablation mechanisms of thin metal films," Proc. SPIE 3822, 18 (1999).
[Crossref]

J. M. Lee and K. G. Watkins, "Real-time surface monitoring in the laser cleaning of copper for soldering processes," Lasers Eng. 8, 229 (1999).

1994 (1)

V. P. Veiko and S. M. Metev, Laser-Assisted Microtechnology (Springer Verlag, Heidelberg, 1994 [first edition], 1998 [second edition]).

1993 (1)

V. P. Veiko, A. I. Kajdanov, H. A. Kovachki, and E. A. Shakhno, "Mechanisms of local laser-induced forward transfer of films," Proc. SPIE 1856, 11 (1993).
[Crossref]

1989 (2)

P. Mogyorósi, T. Szörényi, K. Bali, Zs. Tóth, and I. Hevesi, "Pulsed laser ablative deposition of thin metal films," Appl. Surf. Sci. 36, 157 (1989).
[Crossref]

T. Szörényi and Zs. Tóth, "Pulsed laser synthesis and printing of compound semiconductors," Proc. SPIE 1022, 93 (1989).

1970 (1)

V. P. Veĭko, B. N. Kotletsov, and M. N. Libenson, Laser Lithography (Élektronika, 1970).

Arnold, C. B.

A. Piqué, C. B. Arnold, R. C. Wartena, "Laser direct-write of miniature and microbattery systems," RIKEN Rev. No. 50, 57 (2003).

Bali, K.

P. Mogyorósi, T. Szörényi, K. Bali, Zs. Tóth, and I. Hevesi, "Pulsed laser ablative deposition of thin metal films," Appl. Surf. Sci. 36, 157 (1989).
[Crossref]

Bor, Z.

Z. Tóth, B. Hopp, T. Szörényi, Z. Bor, V. P. Veiko, and E. A. Shakhno, "Pulsed laser ablation mechanisms of thin metal films," Proc. SPIE 3822, 18 (1999).
[Crossref]

Chrisey, D. B.

J. M. Fitz-Gerald, A. Piqué, D. B. Chrisey, "Laser direct writing of phosphor screens high-definition displays," Appl. Phys. Lett. 76, 1386 (2000).
[Crossref]

Fitz-Gerald, J. M.

J. M. Fitz-Gerald, A. Piqué, D. B. Chrisey, "Laser direct writing of phosphor screens high-definition displays," Appl. Phys. Lett. 76, 1386 (2000).
[Crossref]

Hevesi, I.

P. Mogyorósi, T. Szörényi, K. Bali, Zs. Tóth, and I. Hevesi, "Pulsed laser ablative deposition of thin metal films," Appl. Surf. Sci. 36, 157 (1989).
[Crossref]

Holmes, A. S.

A. S. Holmes, "Laser processes for MEMS manufacture," RIKEN Rev. No. 43, 63 (2002).

Hopp, B.

Z. Tóth, B. Hopp, T. Szörényi, Z. Bor, V. P. Veiko, and E. A. Shakhno, "Pulsed laser ablation mechanisms of thin metal films," Proc. SPIE 3822, 18 (1999).
[Crossref]

Ivakhnyuk, G. K.

V. N. Smirnov, G. D. Nikishin, M. A. Pimenova, and G. K. Ivakhnyuk, "Laser decontamination. Principles and prospects of the use during utilization of atomic submarines," Vest. Sankt-Pet. Inst. Gos. Protivopozh. Sluzhby No. 2 (9), 33 (2005).

Kajdanov, A. I.

V. P. Veiko, A. I. Kajdanov, H. A. Kovachki, and E. A. Shakhno, "Mechanisms of local laser-induced forward transfer of films," Proc. SPIE 1856, 11 (1993).
[Crossref]

Kotletsov, B. N.

V. P. Veĭko, B. N. Kotletsov, and M. N. Libenson, Laser Lithography (Élektronika, 1970).

Kovachki, H. A.

V. P. Veiko, A. I. Kajdanov, H. A. Kovachki, and E. A. Shakhno, "Mechanisms of local laser-induced forward transfer of films," Proc. SPIE 1856, 11 (1993).
[Crossref]

Lee, J. M.

J. M. Lee and K. G. Watkins, "Real-time surface monitoring in the laser cleaning of copper for soldering processes," Lasers Eng. 8, 229 (1999).

Libenson, M. N.

V. P. Veĭko, B. N. Kotletsov, and M. N. Libenson, Laser Lithography (Élektronika, 1970).

Lu, Y. F.

Y. F. Lu and Z. M. Ren, "Laser microprocessing and the applications in microelectronics industry," Proc. SPIE 4157, 191 (2001).
[Crossref]

Luk'yanchuk, B. S.

B. S. Luk'yanchuk, ed., Laser Cleaning (World Scientific, Singapore, 2002).

Metev, S. M.

V. P. Veiko and S. M. Metev, Laser-Assisted Microtechnology (Springer Verlag, Heidelberg, 1994 [first edition], 1998 [second edition]).

Mogyorósi, P.

P. Mogyorósi, T. Szörényi, K. Bali, Zs. Tóth, and I. Hevesi, "Pulsed laser ablative deposition of thin metal films," Appl. Surf. Sci. 36, 157 (1989).
[Crossref]

Nánai, L.

V. P. Veiko, E. A. Shakhno, and L. Nánai, "Local laser-induced film transfer," in Modern Topics in Chemical Physics, ed. T.F.George, X.Sun, and G.Zhang (Research Singpost, Kerala, India, 2002), pp. 303-319.

Nikishin, G. D.

V. N. Smirnov, G. D. Nikishin, M. A. Pimenova, and G. K. Ivakhnyuk, "Laser decontamination. Principles and prospects of the use during utilization of atomic submarines," Vest. Sankt-Pet. Inst. Gos. Protivopozh. Sluzhby No. 2 (9), 33 (2005).

G. D. Nikishin and V. N. Smirnov, "Using laser decontamination when utilizing APL in Rossudostroenie," in Fourth International Conference on Radiation Safety: Ecology--Atomic Energy, St. Petersburg, 24-28 September 2001, Collection of Papers.

Pimenova, M. A.

V. N. Smirnov, G. D. Nikishin, M. A. Pimenova, and G. K. Ivakhnyuk, "Laser decontamination. Principles and prospects of the use during utilization of atomic submarines," Vest. Sankt-Pet. Inst. Gos. Protivopozh. Sluzhby No. 2 (9), 33 (2005).

Piqué, A.

A. Piqué, C. B. Arnold, R. C. Wartena, "Laser direct-write of miniature and microbattery systems," RIKEN Rev. No. 50, 57 (2003).

J. M. Fitz-Gerald, A. Piqué, D. B. Chrisey, "Laser direct writing of phosphor screens high-definition displays," Appl. Phys. Lett. 76, 1386 (2000).
[Crossref]

Ren, Z. M.

Y. F. Lu and Z. M. Ren, "Laser microprocessing and the applications in microelectronics industry," Proc. SPIE 4157, 191 (2001).
[Crossref]

Shakhno, E. A.

V. P. Veiko, E. A. Shakhno, and L. Nánai, "Local laser-induced film transfer," in Modern Topics in Chemical Physics, ed. T.F.George, X.Sun, and G.Zhang (Research Singpost, Kerala, India, 2002), pp. 303-319.

V. P. Veĭko, E. A. Shakhno, and V. N. Smirnov, "Low-threshold mechanisms of laser cleaning of the surface," in Optical Technologies in Fundamental and Applied Research, ed. V.N.Vasil'eva (St. Petersburg, 2001), pp. 132-145.

Z. Tóth, B. Hopp, T. Szörényi, Z. Bor, V. P. Veiko, and E. A. Shakhno, "Pulsed laser ablation mechanisms of thin metal films," Proc. SPIE 3822, 18 (1999).
[Crossref]

V. P. Veiko, A. I. Kajdanov, H. A. Kovachki, and E. A. Shakhno, "Mechanisms of local laser-induced forward transfer of films," Proc. SPIE 1856, 11 (1993).
[Crossref]

Smirnov, V. N.

V. N. Smirnov, G. D. Nikishin, M. A. Pimenova, and G. K. Ivakhnyuk, "Laser decontamination. Principles and prospects of the use during utilization of atomic submarines," Vest. Sankt-Pet. Inst. Gos. Protivopozh. Sluzhby No. 2 (9), 33 (2005).

V. P. Veĭko, E. A. Shakhno, and V. N. Smirnov, "Low-threshold mechanisms of laser cleaning of the surface," in Optical Technologies in Fundamental and Applied Research, ed. V.N.Vasil'eva (St. Petersburg, 2001), pp. 132-145.

G. D. Nikishin and V. N. Smirnov, "Using laser decontamination when utilizing APL in Rossudostroenie," in Fourth International Conference on Radiation Safety: Ecology--Atomic Energy, St. Petersburg, 24-28 September 2001, Collection of Papers.

Szörényi, T.

Z. Tóth, B. Hopp, T. Szörényi, Z. Bor, V. P. Veiko, and E. A. Shakhno, "Pulsed laser ablation mechanisms of thin metal films," Proc. SPIE 3822, 18 (1999).
[Crossref]

T. Szörényi and Zs. Tóth, "Pulsed laser synthesis and printing of compound semiconductors," Proc. SPIE 1022, 93 (1989).

P. Mogyorósi, T. Szörényi, K. Bali, Zs. Tóth, and I. Hevesi, "Pulsed laser ablative deposition of thin metal films," Appl. Surf. Sci. 36, 157 (1989).
[Crossref]

Tóth, Z.

Z. Tóth, B. Hopp, T. Szörényi, Z. Bor, V. P. Veiko, and E. A. Shakhno, "Pulsed laser ablation mechanisms of thin metal films," Proc. SPIE 3822, 18 (1999).
[Crossref]

Tóth, Zs.

P. Mogyorósi, T. Szörényi, K. Bali, Zs. Tóth, and I. Hevesi, "Pulsed laser ablative deposition of thin metal films," Appl. Surf. Sci. 36, 157 (1989).
[Crossref]

T. Szörényi and Zs. Tóth, "Pulsed laser synthesis and printing of compound semiconductors," Proc. SPIE 1022, 93 (1989).

Veiko, V. P.

V. P. Veiko, E. A. Shakhno, and L. Nánai, "Local laser-induced film transfer," in Modern Topics in Chemical Physics, ed. T.F.George, X.Sun, and G.Zhang (Research Singpost, Kerala, India, 2002), pp. 303-319.

V. P. Veĭko, E. A. Shakhno, and V. N. Smirnov, "Low-threshold mechanisms of laser cleaning of the surface," in Optical Technologies in Fundamental and Applied Research, ed. V.N.Vasil'eva (St. Petersburg, 2001), pp. 132-145.

Z. Tóth, B. Hopp, T. Szörényi, Z. Bor, V. P. Veiko, and E. A. Shakhno, "Pulsed laser ablation mechanisms of thin metal films," Proc. SPIE 3822, 18 (1999).
[Crossref]

V. P. Veiko and S. M. Metev, Laser-Assisted Microtechnology (Springer Verlag, Heidelberg, 1994 [first edition], 1998 [second edition]).

V. P. Veiko, A. I. Kajdanov, H. A. Kovachki, and E. A. Shakhno, "Mechanisms of local laser-induced forward transfer of films," Proc. SPIE 1856, 11 (1993).
[Crossref]

V. P. Veĭko, B. N. Kotletsov, and M. N. Libenson, Laser Lithography (Élektronika, 1970).

Wartena, R. C.

A. Piqué, C. B. Arnold, R. C. Wartena, "Laser direct-write of miniature and microbattery systems," RIKEN Rev. No. 50, 57 (2003).

Watkins, K. G.

J. M. Lee and K. G. Watkins, "Real-time surface monitoring in the laser cleaning of copper for soldering processes," Lasers Eng. 8, 229 (1999).

Appl. Phys. Lett. (1)

J. M. Fitz-Gerald, A. Piqué, D. B. Chrisey, "Laser direct writing of phosphor screens high-definition displays," Appl. Phys. Lett. 76, 1386 (2000).
[Crossref]

Appl. Surf. Sci. (1)

P. Mogyorósi, T. Szörényi, K. Bali, Zs. Tóth, and I. Hevesi, "Pulsed laser ablative deposition of thin metal films," Appl. Surf. Sci. 36, 157 (1989).
[Crossref]

Lasers Eng. (1)

J. M. Lee and K. G. Watkins, "Real-time surface monitoring in the laser cleaning of copper for soldering processes," Lasers Eng. 8, 229 (1999).

Proc. SPIE (4)

T. Szörényi and Zs. Tóth, "Pulsed laser synthesis and printing of compound semiconductors," Proc. SPIE 1022, 93 (1989).

Z. Tóth, B. Hopp, T. Szörényi, Z. Bor, V. P. Veiko, and E. A. Shakhno, "Pulsed laser ablation mechanisms of thin metal films," Proc. SPIE 3822, 18 (1999).
[Crossref]

V. P. Veiko, A. I. Kajdanov, H. A. Kovachki, and E. A. Shakhno, "Mechanisms of local laser-induced forward transfer of films," Proc. SPIE 1856, 11 (1993).
[Crossref]

Y. F. Lu and Z. M. Ren, "Laser microprocessing and the applications in microelectronics industry," Proc. SPIE 4157, 191 (2001).
[Crossref]

Other (9)

A. Piqué, C. B. Arnold, R. C. Wartena, "Laser direct-write of miniature and microbattery systems," RIKEN Rev. No. 50, 57 (2003).

B. S. Luk'yanchuk, ed., Laser Cleaning (World Scientific, Singapore, 2002).

V. P. Veiko and S. M. Metev, Laser-Assisted Microtechnology (Springer Verlag, Heidelberg, 1994 [first edition], 1998 [second edition]).

V. P. Veiko, E. A. Shakhno, and L. Nánai, "Local laser-induced film transfer," in Modern Topics in Chemical Physics, ed. T.F.George, X.Sun, and G.Zhang (Research Singpost, Kerala, India, 2002), pp. 303-319.

A. S. Holmes, "Laser processes for MEMS manufacture," RIKEN Rev. No. 43, 63 (2002).

G. D. Nikishin and V. N. Smirnov, "Using laser decontamination when utilizing APL in Rossudostroenie," in Fourth International Conference on Radiation Safety: Ecology--Atomic Energy, St. Petersburg, 24-28 September 2001, Collection of Papers.

V. P. Veĭko, E. A. Shakhno, and V. N. Smirnov, "Low-threshold mechanisms of laser cleaning of the surface," in Optical Technologies in Fundamental and Applied Research, ed. V.N.Vasil'eva (St. Petersburg, 2001), pp. 132-145.

V. N. Smirnov, G. D. Nikishin, M. A. Pimenova, and G. K. Ivakhnyuk, "Laser decontamination. Principles and prospects of the use during utilization of atomic submarines," Vest. Sankt-Pet. Inst. Gos. Protivopozh. Sluzhby No. 2 (9), 33 (2005).

V. P. Veĭko, B. N. Kotletsov, and M. N. Libenson, Laser Lithography (Élektronika, 1970).

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