Abstract

This paper discusses the possibility of obtaining uniformly thick coatings on large areas. Evaporation of film-forming material from two sources lying at different distances from the axis of rotation of the substrate holder is used to increase the coating-uniformity zone. A discussion is given of how the evaporation rates of the film-forming material and the distance from the axis of rotation to the evaporators affect the thickness distribution of the deposited layer on a flat substrate holder.

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