The main regularities of the method for producing films by sputtering targets with an ion beam

N. N. Smirnov

doi:10.1364/JOT.68.000287

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Journal of Optical Technology
Vol. 68,
Issue 4,
pp. 287-
(2001)
•https://doi.org/10.1364/JOT.68.000287

The main regularities of the method for producing films by sputtering targets with an ion beam

N. N. Smirnov

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N. N. Smirnov , "The main regularities of the method for producing films by sputtering targets with an ion beam," J. Opt. Technol. 68, 287- (2001)

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