Abstract

This paper investigates applications of femtosecond lasers for the micromachining of transparent materials and fabrication of optical devices. We show commercial micromachining examples of transparent materials which have been fabricated for various applications. Near infrared femtosecond laser processing is an attractive method to fabricate three-dimensional optical waveguides into various transparent materials. Focused femtosecond laser pulses induce a permanent refractive-index change only near the focal point. We also demonstrate a Y coupler with the splitting ratio of 1:1 written by femtosecond laser pulses into a fused silica glass. The minimum propagation loss of 0.8 ㏈/㎝ awl the refractive-index change of 0.006-0.01 at the wavelength of 1550 ㎚ were achieved by optimization of the laser fluence.

© 2004 Optical Society of Korea

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  1. S. Juodkazis, S. Matsuo, H. Misawa, V. Mizeikis, A. Marcinkevicius, H. B. Sun, Y. Tokuda, M. Takahashi, T. Yoko, and J. Nishii, "Application of femtosecond laser pulses for microfabrication of transparent media," Applied Surface Science, vol. 197-198, pp. 705-709, 2002
    [CrossRef]
  2. T. Juhasz, F. H. Loesel, R. M. Kurtz, C. Horvath, J. F. Bille, and G. Moruou, "Corneal refractive surgery with femtosecond lasers," IEEE J. Quantum Electron., vol. 5, no. 4, pp. 902-910, 1999
    [CrossRef]
  3. K. H. Leong, A. A. Said, and R. L. Maynard, "Femtosecond micromachining applications for electro-optic components," in Electronic Components and Technology Conference, IEEE, vol. 29, pp. 210-214, 200l
    [CrossRef]
  4. W. Rudolph, P. Dorn, X. Liu, N. Vretenar, and R. Stock, "Microscopy with femtosecond laser pulses: applications in engineering, physics and biomedicine," Applied Surface Science, vol. 9614, pp. 1-6, 2003
    [CrossRef]
  5. A. Salleo, T. Sands, and F. Y. Genin, "Machining of transparent materials using an IR and UV nanosecond pulsed laser," Appl. Phys. A, vol. 71, pp. 601-608, 2000
    [CrossRef]
  6. J. Zhang, K. Sugioka, and K. Midorikawa, "High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers," Appl. Phys. A, vol. 69, pp. 879-882, 1999
    [CrossRef]
  7. R. Teghil, L. D"Alessio, A. Santagata, M. Zaccagnino, D. Ferro, and D. J. Sordelet, "Picosecond and femtosecond pulsed laser ablation and deposition of quasicrystals," Applied Surface Science, vol. 210, pp. 307-317, 2003
    [CrossRef]
  8. M. R. Kasaai, V. Kacham, F. Theberge, and S. L. Chin, "The interaction of femtosecond and nanosecond laser pulses with the surface of glass," J. Non-Crystalline Solids, vol. 319, pp. 129-135, 2003
    [CrossRef]
  9. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten optical waveguides in various glasses with ultrashort pulse laser," Appl. Phys. Lett., vol. 71, no. 23, pp. 3329-3331, 1997
    [CrossRef]
  10. K. Hirao and K. Miura, "Writing waveguides and gratings in silica and related materials by a femtosecond laser," J. Non-Cryst. Solids, vol. 239, pp. 91-95, 1998
    [CrossRef]
  11. Y. Kondo, K. Nouchi, T. Mitsuyu, M. Watanabe, P. Kazansky, and K. Hirao, "Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses," Optics Lett., vol. 24, no. 10, pp. 646-1648, 1999
    [CrossRef]
  12. Y. Sikorski, A. A. Said, P. Bado, R. Maynard, C. Flrea, and D. K. Killinger, "Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses," Electron. Lett., vol. 36, pp. 396-398, 2000
    [CrossRef]
  13. D. Homoelle, S. Wielandy, and A. Gaeta, "Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses," Opt. Lett., vol. 24, no. 18, pp. 1311-1313, 1999
    [CrossRef]

2003 (3)

W. Rudolph, P. Dorn, X. Liu, N. Vretenar, and R. Stock, "Microscopy with femtosecond laser pulses: applications in engineering, physics and biomedicine," Applied Surface Science, vol. 9614, pp. 1-6, 2003
[CrossRef]

R. Teghil, L. D"Alessio, A. Santagata, M. Zaccagnino, D. Ferro, and D. J. Sordelet, "Picosecond and femtosecond pulsed laser ablation and deposition of quasicrystals," Applied Surface Science, vol. 210, pp. 307-317, 2003
[CrossRef]

M. R. Kasaai, V. Kacham, F. Theberge, and S. L. Chin, "The interaction of femtosecond and nanosecond laser pulses with the surface of glass," J. Non-Crystalline Solids, vol. 319, pp. 129-135, 2003
[CrossRef]

2002 (1)

S. Juodkazis, S. Matsuo, H. Misawa, V. Mizeikis, A. Marcinkevicius, H. B. Sun, Y. Tokuda, M. Takahashi, T. Yoko, and J. Nishii, "Application of femtosecond laser pulses for microfabrication of transparent media," Applied Surface Science, vol. 197-198, pp. 705-709, 2002
[CrossRef]

2001 (1)

K. H. Leong, A. A. Said, and R. L. Maynard, "Femtosecond micromachining applications for electro-optic components," in Electronic Components and Technology Conference, IEEE, vol. 29, pp. 210-214, 200l
[CrossRef]

2000 (2)

A. Salleo, T. Sands, and F. Y. Genin, "Machining of transparent materials using an IR and UV nanosecond pulsed laser," Appl. Phys. A, vol. 71, pp. 601-608, 2000
[CrossRef]

Y. Sikorski, A. A. Said, P. Bado, R. Maynard, C. Flrea, and D. K. Killinger, "Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses," Electron. Lett., vol. 36, pp. 396-398, 2000
[CrossRef]

1999 (4)

D. Homoelle, S. Wielandy, and A. Gaeta, "Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses," Opt. Lett., vol. 24, no. 18, pp. 1311-1313, 1999
[CrossRef]

Y. Kondo, K. Nouchi, T. Mitsuyu, M. Watanabe, P. Kazansky, and K. Hirao, "Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses," Optics Lett., vol. 24, no. 10, pp. 646-1648, 1999
[CrossRef]

J. Zhang, K. Sugioka, and K. Midorikawa, "High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers," Appl. Phys. A, vol. 69, pp. 879-882, 1999
[CrossRef]

T. Juhasz, F. H. Loesel, R. M. Kurtz, C. Horvath, J. F. Bille, and G. Moruou, "Corneal refractive surgery with femtosecond lasers," IEEE J. Quantum Electron., vol. 5, no. 4, pp. 902-910, 1999
[CrossRef]

1998 (1)

K. Hirao and K. Miura, "Writing waveguides and gratings in silica and related materials by a femtosecond laser," J. Non-Cryst. Solids, vol. 239, pp. 91-95, 1998
[CrossRef]

1997 (1)

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten optical waveguides in various glasses with ultrashort pulse laser," Appl. Phys. Lett., vol. 71, no. 23, pp. 3329-3331, 1997
[CrossRef]

Applied Physics A: Materials Science & Processing (2)

A. Salleo, T. Sands, and F. Y. Genin, "Machining of transparent materials using an IR and UV nanosecond pulsed laser," Appl. Phys. A, vol. 71, pp. 601-608, 2000
[CrossRef]

J. Zhang, K. Sugioka, and K. Midorikawa, "High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers," Appl. Phys. A, vol. 69, pp. 879-882, 1999
[CrossRef]

Applied Physics Letters (1)

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten optical waveguides in various glasses with ultrashort pulse laser," Appl. Phys. Lett., vol. 71, no. 23, pp. 3329-3331, 1997
[CrossRef]

Applied Surface Science (3)

R. Teghil, L. D"Alessio, A. Santagata, M. Zaccagnino, D. Ferro, and D. J. Sordelet, "Picosecond and femtosecond pulsed laser ablation and deposition of quasicrystals," Applied Surface Science, vol. 210, pp. 307-317, 2003
[CrossRef]

S. Juodkazis, S. Matsuo, H. Misawa, V. Mizeikis, A. Marcinkevicius, H. B. Sun, Y. Tokuda, M. Takahashi, T. Yoko, and J. Nishii, "Application of femtosecond laser pulses for microfabrication of transparent media," Applied Surface Science, vol. 197-198, pp. 705-709, 2002
[CrossRef]

W. Rudolph, P. Dorn, X. Liu, N. Vretenar, and R. Stock, "Microscopy with femtosecond laser pulses: applications in engineering, physics and biomedicine," Applied Surface Science, vol. 9614, pp. 1-6, 2003
[CrossRef]

Electronic Components and Technology Conference, 2001. Proceedings., 51st (1)

K. H. Leong, A. A. Said, and R. L. Maynard, "Femtosecond micromachining applications for electro-optic components," in Electronic Components and Technology Conference, IEEE, vol. 29, pp. 210-214, 200l
[CrossRef]

Electronics Letters (1)

Y. Sikorski, A. A. Said, P. Bado, R. Maynard, C. Flrea, and D. K. Killinger, "Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses," Electron. Lett., vol. 36, pp. 396-398, 2000
[CrossRef]

Journal of Non-Crystalline Solids (2)

K. Hirao and K. Miura, "Writing waveguides and gratings in silica and related materials by a femtosecond laser," J. Non-Cryst. Solids, vol. 239, pp. 91-95, 1998
[CrossRef]

M. R. Kasaai, V. Kacham, F. Theberge, and S. L. Chin, "The interaction of femtosecond and nanosecond laser pulses with the surface of glass," J. Non-Crystalline Solids, vol. 319, pp. 129-135, 2003
[CrossRef]

Optics Letters (2)

Y. Kondo, K. Nouchi, T. Mitsuyu, M. Watanabe, P. Kazansky, and K. Hirao, "Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses," Optics Lett., vol. 24, no. 10, pp. 646-1648, 1999
[CrossRef]

D. Homoelle, S. Wielandy, and A. Gaeta, "Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses," Opt. Lett., vol. 24, no. 18, pp. 1311-1313, 1999
[CrossRef]

Selected Topics in Quantum Electronics, IEEE Journal of (1)

T. Juhasz, F. H. Loesel, R. M. Kurtz, C. Horvath, J. F. Bille, and G. Moruou, "Corneal refractive surgery with femtosecond lasers," IEEE J. Quantum Electron., vol. 5, no. 4, pp. 902-910, 1999
[CrossRef]

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