Abstract

This study describes the conceptual design of a soft x-ray microscope system based on a laserbased source for biomedical application with high resolution (<TEX>${\leq}$</TEX>50nm). The laboratory scale soft x-ray microscope consists of high power laser plasma x-ray source and grazing incidence mirrors with high reflectivity. The laser plasma source used for developing this system employs Q-switched Nd-YAG pulsed laser. The laser beam is focused on a tantalum (Ta) target. The Wolter type I mirror was used as condenser optics for sample illumination and as objective mirror for focusing on a detector. The fabrication of the Wolter type I mirror was direct internal cutting using ultraprecision DTM. A hydrated biological specimen was put between the two silicon wafers, the center of which was <TEX>$Si_3N_4$</TEX> windows of 100㎚ thickness. The main issues in the future development work are to make a stable, reliable and reproducible x-ray microscope system.

© 2003 Optical Society of Korea

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  1. J. Kirz, C. Jacobsen, and M. Howells, "Soft x-ray microscopes and their biological applications," Quarterly Reviews of Biophysics, vol. 28, no. 1, pp. 33-130, 1995
    [CrossRef]
  2. J. Thieme, J. Niemeyer, G. Machulla, and U. Schulte-Ebbert, "Aggregation of colloids observed by X-ray microscopy," X-Ray Microscopy and Spectromicroscopy, pp. II-11 - II-20, 1998
  3. V. H. Wolter, "Spiegelsysteme streifenden Einfalls als abbildende Optiken fur Rontgenstrahlen," Annalen der Physik, vol. 10, pp. 94 - 114, 1952
    [CrossRef]
  4. G. Schmahl and D. Rudolph, "Lichtstarke Zonenplatten als abbildende Systeme fur weiche Rontgenstrahlung (High power zone plates as image forming systems for soft x-rays)," Optik, vol. 29, pp. 577-585, 1969
  5. C. Jacobsen, "Soft x-ray microscopy;" Trends in Cell Biology, vol. 9, pp. 44-47, 1999
    [CrossRef]
  6. B. Niemann, D. Rudolph, G. Schmahl, M. Diehl, J. Thieme, W. Meyer-Ilse, W. Neff, R. Holz, R. Lebert, F. Richter, and G. Herziger, "An x-ray microscope with a plasma x-ray source," Optik; vol. 84, pp. 35-36, 1990
  7. D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation, (Cambridge University Press, Cambridge, UK, 1999)
  8. K. H. Yoon, K. W. Kim, and Y. D. Shin, "Design of laser plasma-based X-ray microscope system using grazing incidence mirror for biology application," in VII International Conference on X-ray Microscopy 02, pp. 79, 2002
  9. http://www-cxro.lbl.gov

2002 (1)

K. H. Yoon, K. W. Kim, and Y. D. Shin, "Design of laser plasma-based X-ray microscope system using grazing incidence mirror for biology application," in VII International Conference on X-ray Microscopy 02, pp. 79, 2002

1999 (2)

D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation, (Cambridge University Press, Cambridge, UK, 1999)

C. Jacobsen, "Soft x-ray microscopy;" Trends in Cell Biology, vol. 9, pp. 44-47, 1999
[CrossRef]

1998 (1)

J. Thieme, J. Niemeyer, G. Machulla, and U. Schulte-Ebbert, "Aggregation of colloids observed by X-ray microscopy," X-Ray Microscopy and Spectromicroscopy, pp. II-11 - II-20, 1998

1995 (1)

J. Kirz, C. Jacobsen, and M. Howells, "Soft x-ray microscopes and their biological applications," Quarterly Reviews of Biophysics, vol. 28, no. 1, pp. 33-130, 1995
[CrossRef]

1990 (1)

B. Niemann, D. Rudolph, G. Schmahl, M. Diehl, J. Thieme, W. Meyer-Ilse, W. Neff, R. Holz, R. Lebert, F. Richter, and G. Herziger, "An x-ray microscope with a plasma x-ray source," Optik; vol. 84, pp. 35-36, 1990

1969 (1)

G. Schmahl and D. Rudolph, "Lichtstarke Zonenplatten als abbildende Systeme fur weiche Rontgenstrahlung (High power zone plates as image forming systems for soft x-rays)," Optik, vol. 29, pp. 577-585, 1969

1952 (1)

V. H. Wolter, "Spiegelsysteme streifenden Einfalls als abbildende Optiken fur Rontgenstrahlen," Annalen der Physik, vol. 10, pp. 94 - 114, 1952
[CrossRef]

Annalen der Physik (1)

V. H. Wolter, "Spiegelsysteme streifenden Einfalls als abbildende Optiken fur Rontgenstrahlen," Annalen der Physik, vol. 10, pp. 94 - 114, 1952
[CrossRef]

Optik (2)

G. Schmahl and D. Rudolph, "Lichtstarke Zonenplatten als abbildende Systeme fur weiche Rontgenstrahlung (High power zone plates as image forming systems for soft x-rays)," Optik, vol. 29, pp. 577-585, 1969

B. Niemann, D. Rudolph, G. Schmahl, M. Diehl, J. Thieme, W. Meyer-Ilse, W. Neff, R. Holz, R. Lebert, F. Richter, and G. Herziger, "An x-ray microscope with a plasma x-ray source," Optik; vol. 84, pp. 35-36, 1990

Quarterly Reviews of Biophysics (1)

J. Kirz, C. Jacobsen, and M. Howells, "Soft x-ray microscopes and their biological applications," Quarterly Reviews of Biophysics, vol. 28, no. 1, pp. 33-130, 1995
[CrossRef]

Trends in Cell Biology (1)

C. Jacobsen, "Soft x-ray microscopy;" Trends in Cell Biology, vol. 9, pp. 44-47, 1999
[CrossRef]

VII International Conference on X-ray Microscopy 02 (1)

K. H. Yoon, K. W. Kim, and Y. D. Shin, "Design of laser plasma-based X-ray microscope system using grazing incidence mirror for biology application," in VII International Conference on X-ray Microscopy 02, pp. 79, 2002

Other (3)

http://www-cxro.lbl.gov

D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation, (Cambridge University Press, Cambridge, UK, 1999)

J. Thieme, J. Niemeyer, G. Machulla, and U. Schulte-Ebbert, "Aggregation of colloids observed by X-ray microscopy," X-Ray Microscopy and Spectromicroscopy, pp. II-11 - II-20, 1998

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