Abstract

One of main error sources in white light scanning interferometry is the inaccuracy of scanning mechanisms in that PZT(piezoelectric transducer) micro-actuators are preferably used. We propose a new calibration method that is capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. This calibration provides an effective means of self-compensation for the non-linearity errors caused by PZT hysteresis, enhancing the measurement uncertainty to a level of 5 nanometers over an entire measuring range of 100 <TEX>${\mu}{\textrm}{m}$</TEX>.

© 1999 Optical Society of Korea

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  1. K. Creath, Proc. Fringe "97, 52 (1997)
  2. S. Kim, S. Jung, Precision Engineering 16, 49 (1994)
    [CrossRef]
  3. M. Kanai, W. Gao, I. Ogura, S. Kiyono, Proc. of the ASPE, 414 (1997)
  4. B. Danielson and C. Boisrobert, Appl. Opt. 30, 2975 (1991)
    [CrossRef]
  5. M. Born and E. Wolf, Principles of Optics (Pergamon Press, Sixth ed., 1985) p. 316
  6. S. Chim and G. Kino, Appl. Opt. 31, 2550 (1992)
    [CrossRef]
  7. D. Malacara, Optical Shop Testing (Wiley, New York, 2nd ed., 1992) Chapter 14

1997

K. Creath, Proc. Fringe "97, 52 (1997)

M. Kanai, W. Gao, I. Ogura, S. Kiyono, Proc. of the ASPE, 414 (1997)

1994

S. Kim, S. Jung, Precision Engineering 16, 49 (1994)
[CrossRef]

1992

D. Malacara, Optical Shop Testing (Wiley, New York, 2nd ed., 1992) Chapter 14

S. Chim and G. Kino, Appl. Opt. 31, 2550 (1992)
[CrossRef]

1991

B. Danielson and C. Boisrobert, Appl. Opt. 30, 2975 (1991)
[CrossRef]

1985

M. Born and E. Wolf, Principles of Optics (Pergamon Press, Sixth ed., 1985) p. 316

Appl. Opt.

Applied Optics

B. Danielson and C. Boisrobert, Appl. Opt. 30, 2975 (1991)
[CrossRef]

Precision Engineering

S. Kim, S. Jung, Precision Engineering 16, 49 (1994)
[CrossRef]

Proc. Fringe '97

K. Creath, Proc. Fringe "97, 52 (1997)

Proc. of the ASPE

M. Kanai, W. Gao, I. Ogura, S. Kiyono, Proc. of the ASPE, 414 (1997)

Other

M. Born and E. Wolf, Principles of Optics (Pergamon Press, Sixth ed., 1985) p. 316

D. Malacara, Optical Shop Testing (Wiley, New York, 2nd ed., 1992) Chapter 14

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