Abstract

We present a single shot low coherence white light Hilbert phase microscopy (WL-HPM) for quantitative phase imaging of Si opto-electronic devices, i.e., Si integrated circuits (Si-ICs) and Si solar cells. White light interferograms were recorded by a color CCD camera and the interferogram is decomposed into the three colors red, green and blue. Spatial carrier frequency of the WL interferogram was increased sufficiently by means of introducing a tilt in the interferometer. Hilbert transform fringe analysis was used to reconstruct the phase map for red, green and blue colors from the single interferogram. 3D step height map of Si-ICs and Si solar cells was reconstructed at multiple wavelengths from a single interferogram. Experimental results were compared with Atomic Force Microscopy and they were found to be close to each other. The present technique is non-contact, full-field and fast for the determination of surface roughness variation and morphological features of the objects at multiple wavelengths.

© 2016 Optical Society of Korea

Measurement of large discontinuities using single white light interferogram

Paul Kumar Upputuri, Li Gong, Haifeng Wang, Manojit Pramanik, Krishna Mohan Nandigana, and Mahendra Prasad Kothiyal
Opt. Express 22(22) 27373-27380 (2014)

Surface profile measurement in white-light scanning interferometry using a three-chip color CCD

Suodong Ma, Chenggen Quan, Rihong Zhu, Cho Jui Tay, and Lei Chen
Appl. Opt. 50(15) 2246-2254 (2011)

Single-shot absolute 3D shape measurement with deep-learning-based color fringe projection profilometry

Jiaming Qian, Shijie Feng, Yixuan Li, Tianyang Tao, Jing Han, Qian Chen, and Chao Zuo
Opt. Lett. 45(7) 1842-1845 (2020)

Single-shot optical surface profiling using extended depth of field 3D microscopy

Pol Martinez, Carlos Bermudez, Roger Artigas, and Guillem Carles
Opt. Express 30(19) 34328-34342 (2022)

Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry

Pei Zhu and Kaiwei Wang
Appl. Opt. 51(21) 4971-4975 (2012)