Abstract

We present a single shot low coherence white light Hilbert phase microscopy (WL-HPM) for quantitative phase imaging of Si opto-electronic devices, i.e., Si integrated circuits (Si-ICs) and Si solar cells. White light interferograms were recorded by a color CCD camera and the interferogram is decomposed into the three colors red, green and blue. Spatial carrier frequency of the WL interferogram was increased sufficiently by means of introducing a tilt in the interferometer. Hilbert transform fringe analysis was used to reconstruct the phase map for red, green and blue colors from the single interferogram. 3D step height map of Si-ICs and Si solar cells was reconstructed at multiple wavelengths from a single interferogram. Experimental results were compared with Atomic Force Microscopy and they were found to be close to each other. The present technique is non-contact, full-field and fast for the determination of surface roughness variation and morphological features of the objects at multiple wavelengths.

© 2016 Optical Society of Korea

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  1. O. Sasaki and H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement,” Appl. Opt. 25, 3137-3140 (1986).
    [Crossref]
  2. B. S. Lee and T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784-3788 (1990).
  3. T Dresel, G Häusler, and H Venzke “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919-925 (1992).
    [Crossref]
  4. P. J. Caber “Interferometric profiler for rough surfaces,” Appl. Opt. 32, 3438-3444 (1993).
    [Crossref]
  5. T. C. Strand and Y. Katzir “Extended Unambiguous Range Interferometry,” Appl. Opt. 26, 4274-4281 (1987).
    [Crossref]
  6. S. Mirza and C. Shakher, “Surface profiling using phase shifting Talbot interferometric technique,” Opt. Eng. 44, 013601-013606 (2005).
    [Crossref]
  7. S. S. C. Chim and G. S. Kino “Three-dimensional image realization in interference microscopy,” Appl. Opt. 31, 2550-2553 (1992).
    [Crossref]
  8. B. L. Danielson and C. Y. Boisrobert “Absolute optical ranging using low coherence interferometry,” Appl. Opt. 30, 2975-2979 (1991).
    [Crossref]
  9. T. Anna, S. K. Dubey, C. Shakher, A. Roy, and D. S. Mehta, “Sinusoidal fringe projection system based on compact and non-mechanical scanning low-coherence Michelson interferometer for three-dimensional shape measurement,” Opt. Comm. 282, 1237-1242 (2009).
    [Crossref]
  10. T. Anna, V. Srivastava, D. S. Mehta, and C. Shakher, “High resolution full-field optical coherence microscopy using Mirau interferometer for the quantitative imaging of biological cells,” Appl. Opt. 50, 6343-6351 (2011).
    [Crossref]
  11. B. Bowe and V. Toal, “White light interferometric surface profiler,” Opt. Eng. 37, 1796-1799 (1998). 
    [Crossref]
  12. J. C. Wyant, “White light interferometry,” Proc. SPIE 4737, 98-107 (2002).
  13. G. S. Kino and S. S. C. Chim, “Mirau correlation microscope,” Appl. Opt. 29, 3775-3783 (1990).
    [Crossref]
  14. P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389-401 (1995).
    [Crossref]
  15. R. Dai, T. B. Xie, and S. P. Chang, “A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface,” Key Eng. Mater. 364, 364-370 (2007).
  16. L. M. Smith and C. C. Dobson, “Absolute displacement measurements using modulation of the spectrum of white light in a Michelson interferometer,” Appl. Opt. 28, 3339-3342 (1989).
    [Crossref]
  17. B. Bhushan, J. C. Wyant, and C. L. Koliopoulos, “Measurement of surface topography of magnetic tapes by mirau interferometry,” Appl. Opt. 24, 1489-1497 (1985).
    [Crossref]
  18. Z. Buchta, B. Mikel, J. Lazar, and O. Číp, “White-light fringe detection based on a novel light source and colour CCD camera,” Meas. Sci. and Tech. 22, 094031-094036 (2011).
    [Crossref]
  19. P. Sandoz, “An algorithm for profilometry by white-light phase-shifting interferometry,” J. Mod. Opt. 43, 1545-1554 (1996).
  20. M. Li, C. Quan and J. C. Tay “Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry,” Opt. Laser Technol. 40, 920-929 (2008).
    [Crossref]
  21. V. Srinivasan, H. C. Liu, and M. Halioua, “Automated phase-measuring profilometry of 3-D diffuse objects,” Appl. Opt. 23, 3105-3108 (1984).
    [Crossref]
  22. H. Su, J. Li, and X. Su, “Phase algorithm without the influence of carrier frequency,” Opt. Eng. 36, 1799-1805 (1997).
    [Crossref]
  23. X. Su, W. Zhou, G. V. Bally, and D. Vukicevic, “Automated phase-measuring profilometry using defocused projection of a Ronchi grating,” Opt. Commun. 94, 561-573 (1992).
    [Crossref]
  24. M. Pawlowski, Y. Sakano, Y. Miyamoto, and M. Takeda, “Phase-crossing algorithm for white-light fringes analysis,” Opt. Commun. 260, 68-72 (2006).
    [Crossref]
  25. Z. Zhang, D. P. Towers, and C. E. Towers, “Snapshot color fringe projection for absolute three-dimensional metrology of video sequences,” App. Opt. 49, 5947-5953 (2010).
    [Crossref]
  26. D. A. Zweig and R. E. Hufnagel, “Hilbert transform algorithm for fringe-pattern analysis,” Proc. SPIE 1333, 295-302 (1990).
  27. M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. of Am. 72, 156-160 (1982).
    [Crossref]
  28. K. Qian, H. Wang, and W. Gao, “Windowed Fourier transform for fringe pattern analysis: theoretical analyses,” App. Opt. 47, 5408-5419 (2008). 
    [Crossref]
  29. R. Green, J. Walker, and D. Robinson, “Investigation of the Fourier-transform method of fringe pattern analysis,” Opt. Lasers Eng. 8, 29-44 (1988).
    [Crossref]
  30. X. Su and W. Chen, “Fourier transform profilometry: a review,” Opt. Lasers Eng. 35, 263-284 (2001).
    [Crossref]
  31. M. Davidson, K. Kaufman, I. Mazor and F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology in Integrated Circuit Microscopy,” Proc. SPIE 775, 233-247 (1987).
  32. J. M. Desse, F. Albe, and J. L. Tribillon, “Real-time color holographic interferometry,” Appl. Opt. 41, 5326-5333 (2002).
    [Crossref]
  33. J. M. Desse, “Three-color differential interferometry,” Appl. Opt. 36, 7150-7156 (1997).
    [Crossref]
  34. J. M. Dessel, P. Picart and P. Tankam, “Digital three-color holographic interferometry for flow analysis,” Opt. Express 16, 5471-5480 (2008).
    [Crossref]
  35. A. Pförtner and J. Schwider “Red-Green-Blue interferometer for the metrology of discontinuous structures,” Appl. Opt. 42, 667-673 (2003).
    [Crossref]
  36. H. C. Hsu, C. H. Tung, C. F. Kao, and C. C. Chang, “A white-light profiling algorithm adopting the multiwavelength interferometry technique,” Proc. SPIE 5531, 244-249 (2004).
  37. Z. Buchta, P. Jedlička M. Matějka, V. Kolařík, B. Mikel, J. Lazar, and O. Číp, “White-light interference fringe detection using color CCD camera,” in Proc IEEE AFRICON 2009 (Safari Park Hotel, Kenya, Sep. 2012), pp. 1-5.
  38. S. Zhang and P. Huang, “High-resolution, real-time three-dimensional shape measurement,” Opt. Eng. 45, 123601-123608 (2006).
    [Crossref]
  39. K. Khare, P. T. S. Ali, and J. Joseph, “Single shot high resolution digital holography,” Opt. Express 21, 2581-91 (2013).
    [Crossref]
  40. S. K. Debnath, M. P. Kothiyal, and S. W. Kim, “Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques,” Opt. Lasers Eng. 47, 1125-1130 (2009).
    [Crossref]
  41. U. Paul Kumar, N. Krishna Mohan, and M. P. Kothiyal, “Characterization of micro-lenses based on single interferogram analysis using Hilbert transformation,” Opt. Commun. 284, 5084-5092 (2011).
    [Crossref]
  42. D. C. Ghiglia and L. A. Romero, “Minimum Lp-norm two-dimensional phaseunwrapping,” J. Opt. Soc. of Am. A 13, 1999-2013 (1996).
  43. T. Ikeda, G. Popescu, R. R. Dasari, and M. S. Feld, “Hilbert phase microscopy for investigating fast dynamics in transparent systems,” Opt. Lett. 30, 1165-1167 (2005).
    [Crossref]
  44. Y. Verma, P. Nandi, K. D. Rao, M. Sharma, and P. K. Gupta, “Use of common path phase sensitive spectral domain optical coherence tomography for refractive index measurements,” Appl. Opt. 50, E7-E12 (2011).
  45. J. Schmit and P. Hariharan, “Two-wavelength interferometry profilometry with a phase-step error–compensating algorithm,” Opt. Eng. 45, 115602-115605 (2006).
    [Crossref]
  46. Y. Y. Cheng and J. C. Wyant, “Multiple-wavelength phase-shifting interferometry,” Appl. Opt. 24, 804-807 (1985).
    [Crossref]
  47. K. Creath “Step height measurement using two-wavelength phase-shifting interferometry,” Appl. Opt. 26, 2810-2816 (1987).
    [Crossref]
  48. Ma. Suodong, C. Quan, R. Zhu, J. Tay, and L. Chen, “Surface profile measurement in white-light scanning interferometry using a three-chip color CCD,” Appl. Opt. 50, 2246-2254 (2011).
    [Crossref]
  49. D. K. Jain, G. Saxena, and V. K. Singh, “Image Mosaicing Using Corner Techniques,” in Proc 2012 International Conference on Communication Systems and Network Technologies (Gujarat, India, May 2012), pp. 79-84.

2013 (1)

2011 (5)

2010 (1)

Z. Zhang, D. P. Towers, and C. E. Towers, “Snapshot color fringe projection for absolute three-dimensional metrology of video sequences,” App. Opt. 49, 5947-5953 (2010).
[Crossref]

2009 (2)

S. K. Debnath, M. P. Kothiyal, and S. W. Kim, “Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques,” Opt. Lasers Eng. 47, 1125-1130 (2009).
[Crossref]

T. Anna, S. K. Dubey, C. Shakher, A. Roy, and D. S. Mehta, “Sinusoidal fringe projection system based on compact and non-mechanical scanning low-coherence Michelson interferometer for three-dimensional shape measurement,” Opt. Comm. 282, 1237-1242 (2009).
[Crossref]

2008 (3)

M. Li, C. Quan and J. C. Tay “Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry,” Opt. Laser Technol. 40, 920-929 (2008).
[Crossref]

J. M. Dessel, P. Picart and P. Tankam, “Digital three-color holographic interferometry for flow analysis,” Opt. Express 16, 5471-5480 (2008).
[Crossref]

K. Qian, H. Wang, and W. Gao, “Windowed Fourier transform for fringe pattern analysis: theoretical analyses,” App. Opt. 47, 5408-5419 (2008). 
[Crossref]

2007 (1)

R. Dai, T. B. Xie, and S. P. Chang, “A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface,” Key Eng. Mater. 364, 364-370 (2007).

2006 (3)

M. Pawlowski, Y. Sakano, Y. Miyamoto, and M. Takeda, “Phase-crossing algorithm for white-light fringes analysis,” Opt. Commun. 260, 68-72 (2006).
[Crossref]

S. Zhang and P. Huang, “High-resolution, real-time three-dimensional shape measurement,” Opt. Eng. 45, 123601-123608 (2006).
[Crossref]

J. Schmit and P. Hariharan, “Two-wavelength interferometry profilometry with a phase-step error–compensating algorithm,” Opt. Eng. 45, 115602-115605 (2006).
[Crossref]

2005 (2)

T. Ikeda, G. Popescu, R. R. Dasari, and M. S. Feld, “Hilbert phase microscopy for investigating fast dynamics in transparent systems,” Opt. Lett. 30, 1165-1167 (2005).
[Crossref]

S. Mirza and C. Shakher, “Surface profiling using phase shifting Talbot interferometric technique,” Opt. Eng. 44, 013601-013606 (2005).
[Crossref]

2003 (1)

2002 (1)

2001 (1)

X. Su and W. Chen, “Fourier transform profilometry: a review,” Opt. Lasers Eng. 35, 263-284 (2001).
[Crossref]

1998 (1)

B. Bowe and V. Toal, “White light interferometric surface profiler,” Opt. Eng. 37, 1796-1799 (1998). 
[Crossref]

1997 (2)

J. M. Desse, “Three-color differential interferometry,” Appl. Opt. 36, 7150-7156 (1997).
[Crossref]

H. Su, J. Li, and X. Su, “Phase algorithm without the influence of carrier frequency,” Opt. Eng. 36, 1799-1805 (1997).
[Crossref]

1996 (2)

P. Sandoz, “An algorithm for profilometry by white-light phase-shifting interferometry,” J. Mod. Opt. 43, 1545-1554 (1996).

D. C. Ghiglia and L. A. Romero, “Minimum Lp-norm two-dimensional phaseunwrapping,” J. Opt. Soc. of Am. A 13, 1999-2013 (1996).

1995 (1)

P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389-401 (1995).
[Crossref]

1993 (1)

1992 (3)

1991 (1)

1990 (2)

1989 (1)

1988 (1)

R. Green, J. Walker, and D. Robinson, “Investigation of the Fourier-transform method of fringe pattern analysis,” Opt. Lasers Eng. 8, 29-44 (1988).
[Crossref]

1987 (2)

1986 (1)

1985 (2)

1984 (1)

1982 (1)

M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. of Am. 72, 156-160 (1982).
[Crossref]

Albe, F.

Ali, P. T. S.

Anna, T.

T. Anna, V. Srivastava, D. S. Mehta, and C. Shakher, “High resolution full-field optical coherence microscopy using Mirau interferometer for the quantitative imaging of biological cells,” Appl. Opt. 50, 6343-6351 (2011).
[Crossref]

T. Anna, S. K. Dubey, C. Shakher, A. Roy, and D. S. Mehta, “Sinusoidal fringe projection system based on compact and non-mechanical scanning low-coherence Michelson interferometer for three-dimensional shape measurement,” Opt. Comm. 282, 1237-1242 (2009).
[Crossref]

Bally, G. V.

X. Su, W. Zhou, G. V. Bally, and D. Vukicevic, “Automated phase-measuring profilometry using defocused projection of a Ronchi grating,” Opt. Commun. 94, 561-573 (1992).
[Crossref]

Bhushan, B.

Boisrobert, C. Y.

Bowe, B.

B. Bowe and V. Toal, “White light interferometric surface profiler,” Opt. Eng. 37, 1796-1799 (1998). 
[Crossref]

Buchta, Z.

Z. Buchta, B. Mikel, J. Lazar, and O. Číp, “White-light fringe detection based on a novel light source and colour CCD camera,” Meas. Sci. and Tech. 22, 094031-094036 (2011).
[Crossref]

Z. Buchta, P. Jedlička M. Matějka, V. Kolařík, B. Mikel, J. Lazar, and O. Číp, “White-light interference fringe detection using color CCD camera,” in Proc IEEE AFRICON 2009 (Safari Park Hotel, Kenya, Sep. 2012), pp. 1-5.

Caber, P. J.

Chang, C. C.

H. C. Hsu, C. H. Tung, C. F. Kao, and C. C. Chang, “A white-light profiling algorithm adopting the multiwavelength interferometry technique,” Proc. SPIE 5531, 244-249 (2004).

Chang, S. P.

R. Dai, T. B. Xie, and S. P. Chang, “A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface,” Key Eng. Mater. 364, 364-370 (2007).

Chen, L.

Chen, W.

X. Su and W. Chen, “Fourier transform profilometry: a review,” Opt. Lasers Eng. 35, 263-284 (2001).
[Crossref]

Cheng, Y. Y.

Chim, S. S. C.

Cíp, O.

Z. Buchta, B. Mikel, J. Lazar, and O. Číp, “White-light fringe detection based on a novel light source and colour CCD camera,” Meas. Sci. and Tech. 22, 094031-094036 (2011).
[Crossref]

Z. Buchta, P. Jedlička M. Matějka, V. Kolařík, B. Mikel, J. Lazar, and O. Číp, “White-light interference fringe detection using color CCD camera,” in Proc IEEE AFRICON 2009 (Safari Park Hotel, Kenya, Sep. 2012), pp. 1-5.

Cohen, F.

M. Davidson, K. Kaufman, I. Mazor and F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology in Integrated Circuit Microscopy,” Proc. SPIE 775, 233-247 (1987).

Creath, K.

Dai, R.

R. Dai, T. B. Xie, and S. P. Chang, “A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface,” Key Eng. Mater. 364, 364-370 (2007).

Danielson, B. L.

Dasari, R. R.

Davidson, M.

M. Davidson, K. Kaufman, I. Mazor and F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology in Integrated Circuit Microscopy,” Proc. SPIE 775, 233-247 (1987).

de Groot, P.

P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389-401 (1995).
[Crossref]

Debnath, S. K.

S. K. Debnath, M. P. Kothiyal, and S. W. Kim, “Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques,” Opt. Lasers Eng. 47, 1125-1130 (2009).
[Crossref]

Deck, L.

P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389-401 (1995).
[Crossref]

Desse, J. M.

Dessel, J. M.

Dobson, C. C.

Dresel, T

Dubey, S. K.

T. Anna, S. K. Dubey, C. Shakher, A. Roy, and D. S. Mehta, “Sinusoidal fringe projection system based on compact and non-mechanical scanning low-coherence Michelson interferometer for three-dimensional shape measurement,” Opt. Comm. 282, 1237-1242 (2009).
[Crossref]

Feld, M. S.

Gao, W.

K. Qian, H. Wang, and W. Gao, “Windowed Fourier transform for fringe pattern analysis: theoretical analyses,” App. Opt. 47, 5408-5419 (2008). 
[Crossref]

Ghiglia, D. C.

D. C. Ghiglia and L. A. Romero, “Minimum Lp-norm two-dimensional phaseunwrapping,” J. Opt. Soc. of Am. A 13, 1999-2013 (1996).

Green, R.

R. Green, J. Walker, and D. Robinson, “Investigation of the Fourier-transform method of fringe pattern analysis,” Opt. Lasers Eng. 8, 29-44 (1988).
[Crossref]

Gupta, P. K.

Halioua, M.

Hariharan, P.

J. Schmit and P. Hariharan, “Two-wavelength interferometry profilometry with a phase-step error–compensating algorithm,” Opt. Eng. 45, 115602-115605 (2006).
[Crossref]

Häusler, G

Hsu, H. C.

H. C. Hsu, C. H. Tung, C. F. Kao, and C. C. Chang, “A white-light profiling algorithm adopting the multiwavelength interferometry technique,” Proc. SPIE 5531, 244-249 (2004).

Huang, P.

S. Zhang and P. Huang, “High-resolution, real-time three-dimensional shape measurement,” Opt. Eng. 45, 123601-123608 (2006).
[Crossref]

Hufnagel, R. E.

D. A. Zweig and R. E. Hufnagel, “Hilbert transform algorithm for fringe-pattern analysis,” Proc. SPIE 1333, 295-302 (1990).

Ikeda, T.

Ina, H.

M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. of Am. 72, 156-160 (1982).
[Crossref]

Jain, D. K.

D. K. Jain, G. Saxena, and V. K. Singh, “Image Mosaicing Using Corner Techniques,” in Proc 2012 International Conference on Communication Systems and Network Technologies (Gujarat, India, May 2012), pp. 79-84.

Jedlicka, P.

Z. Buchta, P. Jedlička M. Matějka, V. Kolařík, B. Mikel, J. Lazar, and O. Číp, “White-light interference fringe detection using color CCD camera,” in Proc IEEE AFRICON 2009 (Safari Park Hotel, Kenya, Sep. 2012), pp. 1-5.

Joseph, J.

Kao, C. F.

H. C. Hsu, C. H. Tung, C. F. Kao, and C. C. Chang, “A white-light profiling algorithm adopting the multiwavelength interferometry technique,” Proc. SPIE 5531, 244-249 (2004).

Katzir, Y.

Kaufman, K.

M. Davidson, K. Kaufman, I. Mazor and F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology in Integrated Circuit Microscopy,” Proc. SPIE 775, 233-247 (1987).

Khare, K.

Kim, S. W.

S. K. Debnath, M. P. Kothiyal, and S. W. Kim, “Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques,” Opt. Lasers Eng. 47, 1125-1130 (2009).
[Crossref]

Kino, G. S.

Kobayashi, S.

M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. of Am. 72, 156-160 (1982).
[Crossref]

Kolarík, V.

Z. Buchta, P. Jedlička M. Matějka, V. Kolařík, B. Mikel, J. Lazar, and O. Číp, “White-light interference fringe detection using color CCD camera,” in Proc IEEE AFRICON 2009 (Safari Park Hotel, Kenya, Sep. 2012), pp. 1-5.

Koliopoulos, C. L.

Kothiyal, M. P.

U. Paul Kumar, N. Krishna Mohan, and M. P. Kothiyal, “Characterization of micro-lenses based on single interferogram analysis using Hilbert transformation,” Opt. Commun. 284, 5084-5092 (2011).
[Crossref]

S. K. Debnath, M. P. Kothiyal, and S. W. Kim, “Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques,” Opt. Lasers Eng. 47, 1125-1130 (2009).
[Crossref]

Krishna Mohan, N.

U. Paul Kumar, N. Krishna Mohan, and M. P. Kothiyal, “Characterization of micro-lenses based on single interferogram analysis using Hilbert transformation,” Opt. Commun. 284, 5084-5092 (2011).
[Crossref]

Lazar, J.

Z. Buchta, B. Mikel, J. Lazar, and O. Číp, “White-light fringe detection based on a novel light source and colour CCD camera,” Meas. Sci. and Tech. 22, 094031-094036 (2011).
[Crossref]

Z. Buchta, P. Jedlička M. Matějka, V. Kolařík, B. Mikel, J. Lazar, and O. Číp, “White-light interference fringe detection using color CCD camera,” in Proc IEEE AFRICON 2009 (Safari Park Hotel, Kenya, Sep. 2012), pp. 1-5.

Lee, B. S.

Li, J.

H. Su, J. Li, and X. Su, “Phase algorithm without the influence of carrier frequency,” Opt. Eng. 36, 1799-1805 (1997).
[Crossref]

Li, M.

M. Li, C. Quan and J. C. Tay “Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry,” Opt. Laser Technol. 40, 920-929 (2008).
[Crossref]

Liu, H. C.

Matejka, M.

Z. Buchta, P. Jedlička M. Matějka, V. Kolařík, B. Mikel, J. Lazar, and O. Číp, “White-light interference fringe detection using color CCD camera,” in Proc IEEE AFRICON 2009 (Safari Park Hotel, Kenya, Sep. 2012), pp. 1-5.

Mazor, I.

M. Davidson, K. Kaufman, I. Mazor and F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology in Integrated Circuit Microscopy,” Proc. SPIE 775, 233-247 (1987).

Mehta, D. S.

T. Anna, V. Srivastava, D. S. Mehta, and C. Shakher, “High resolution full-field optical coherence microscopy using Mirau interferometer for the quantitative imaging of biological cells,” Appl. Opt. 50, 6343-6351 (2011).
[Crossref]

T. Anna, S. K. Dubey, C. Shakher, A. Roy, and D. S. Mehta, “Sinusoidal fringe projection system based on compact and non-mechanical scanning low-coherence Michelson interferometer for three-dimensional shape measurement,” Opt. Comm. 282, 1237-1242 (2009).
[Crossref]

Mikel, B.

Z. Buchta, B. Mikel, J. Lazar, and O. Číp, “White-light fringe detection based on a novel light source and colour CCD camera,” Meas. Sci. and Tech. 22, 094031-094036 (2011).
[Crossref]

Z. Buchta, P. Jedlička M. Matějka, V. Kolařík, B. Mikel, J. Lazar, and O. Číp, “White-light interference fringe detection using color CCD camera,” in Proc IEEE AFRICON 2009 (Safari Park Hotel, Kenya, Sep. 2012), pp. 1-5.

Mirza, S.

S. Mirza and C. Shakher, “Surface profiling using phase shifting Talbot interferometric technique,” Opt. Eng. 44, 013601-013606 (2005).
[Crossref]

Miyamoto, Y.

M. Pawlowski, Y. Sakano, Y. Miyamoto, and M. Takeda, “Phase-crossing algorithm for white-light fringes analysis,” Opt. Commun. 260, 68-72 (2006).
[Crossref]

Nandi, P.

Okazaki, H.

Paul Kumar, U.

U. Paul Kumar, N. Krishna Mohan, and M. P. Kothiyal, “Characterization of micro-lenses based on single interferogram analysis using Hilbert transformation,” Opt. Commun. 284, 5084-5092 (2011).
[Crossref]

Pawlowski, M.

M. Pawlowski, Y. Sakano, Y. Miyamoto, and M. Takeda, “Phase-crossing algorithm for white-light fringes analysis,” Opt. Commun. 260, 68-72 (2006).
[Crossref]

Pförtner, A.

Picart, P.

Popescu, G.

Qian, K.

K. Qian, H. Wang, and W. Gao, “Windowed Fourier transform for fringe pattern analysis: theoretical analyses,” App. Opt. 47, 5408-5419 (2008). 
[Crossref]

Quan, C.

Ma. Suodong, C. Quan, R. Zhu, J. Tay, and L. Chen, “Surface profile measurement in white-light scanning interferometry using a three-chip color CCD,” Appl. Opt. 50, 2246-2254 (2011).
[Crossref]

M. Li, C. Quan and J. C. Tay “Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry,” Opt. Laser Technol. 40, 920-929 (2008).
[Crossref]

Rao, K. D.

Robinson, D.

R. Green, J. Walker, and D. Robinson, “Investigation of the Fourier-transform method of fringe pattern analysis,” Opt. Lasers Eng. 8, 29-44 (1988).
[Crossref]

Romero, L. A.

D. C. Ghiglia and L. A. Romero, “Minimum Lp-norm two-dimensional phaseunwrapping,” J. Opt. Soc. of Am. A 13, 1999-2013 (1996).

Roy, A.

T. Anna, S. K. Dubey, C. Shakher, A. Roy, and D. S. Mehta, “Sinusoidal fringe projection system based on compact and non-mechanical scanning low-coherence Michelson interferometer for three-dimensional shape measurement,” Opt. Comm. 282, 1237-1242 (2009).
[Crossref]

Sakano, Y.

M. Pawlowski, Y. Sakano, Y. Miyamoto, and M. Takeda, “Phase-crossing algorithm for white-light fringes analysis,” Opt. Commun. 260, 68-72 (2006).
[Crossref]

Sandoz, P.

P. Sandoz, “An algorithm for profilometry by white-light phase-shifting interferometry,” J. Mod. Opt. 43, 1545-1554 (1996).

Sasaki, O.

Saxena, G.

D. K. Jain, G. Saxena, and V. K. Singh, “Image Mosaicing Using Corner Techniques,” in Proc 2012 International Conference on Communication Systems and Network Technologies (Gujarat, India, May 2012), pp. 79-84.

Schmit, J.

J. Schmit and P. Hariharan, “Two-wavelength interferometry profilometry with a phase-step error–compensating algorithm,” Opt. Eng. 45, 115602-115605 (2006).
[Crossref]

Schwider, J.

Shakher, C.

T. Anna, V. Srivastava, D. S. Mehta, and C. Shakher, “High resolution full-field optical coherence microscopy using Mirau interferometer for the quantitative imaging of biological cells,” Appl. Opt. 50, 6343-6351 (2011).
[Crossref]

T. Anna, S. K. Dubey, C. Shakher, A. Roy, and D. S. Mehta, “Sinusoidal fringe projection system based on compact and non-mechanical scanning low-coherence Michelson interferometer for three-dimensional shape measurement,” Opt. Comm. 282, 1237-1242 (2009).
[Crossref]

S. Mirza and C. Shakher, “Surface profiling using phase shifting Talbot interferometric technique,” Opt. Eng. 44, 013601-013606 (2005).
[Crossref]

Sharma, M.

Singh, V. K.

D. K. Jain, G. Saxena, and V. K. Singh, “Image Mosaicing Using Corner Techniques,” in Proc 2012 International Conference on Communication Systems and Network Technologies (Gujarat, India, May 2012), pp. 79-84.

Smith, L. M.

Srinivasan, V.

Srivastava, V.

Strand, T. C.

Su, H.

H. Su, J. Li, and X. Su, “Phase algorithm without the influence of carrier frequency,” Opt. Eng. 36, 1799-1805 (1997).
[Crossref]

Su, X.

X. Su and W. Chen, “Fourier transform profilometry: a review,” Opt. Lasers Eng. 35, 263-284 (2001).
[Crossref]

H. Su, J. Li, and X. Su, “Phase algorithm without the influence of carrier frequency,” Opt. Eng. 36, 1799-1805 (1997).
[Crossref]

X. Su, W. Zhou, G. V. Bally, and D. Vukicevic, “Automated phase-measuring profilometry using defocused projection of a Ronchi grating,” Opt. Commun. 94, 561-573 (1992).
[Crossref]

Suodong, Ma.

Takeda, M.

M. Pawlowski, Y. Sakano, Y. Miyamoto, and M. Takeda, “Phase-crossing algorithm for white-light fringes analysis,” Opt. Commun. 260, 68-72 (2006).
[Crossref]

M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. of Am. 72, 156-160 (1982).
[Crossref]

Tankam, P.

Tay, J.

Tay, J. C.

M. Li, C. Quan and J. C. Tay “Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry,” Opt. Laser Technol. 40, 920-929 (2008).
[Crossref]

Toal, V.

B. Bowe and V. Toal, “White light interferometric surface profiler,” Opt. Eng. 37, 1796-1799 (1998). 
[Crossref]

Towers, C. E.

Z. Zhang, D. P. Towers, and C. E. Towers, “Snapshot color fringe projection for absolute three-dimensional metrology of video sequences,” App. Opt. 49, 5947-5953 (2010).
[Crossref]

Towers, D. P.

Z. Zhang, D. P. Towers, and C. E. Towers, “Snapshot color fringe projection for absolute three-dimensional metrology of video sequences,” App. Opt. 49, 5947-5953 (2010).
[Crossref]

Tribillon, J. L.

Tung, C. H.

H. C. Hsu, C. H. Tung, C. F. Kao, and C. C. Chang, “A white-light profiling algorithm adopting the multiwavelength interferometry technique,” Proc. SPIE 5531, 244-249 (2004).

Venzke, H

Verma, Y.

Vukicevic, D.

X. Su, W. Zhou, G. V. Bally, and D. Vukicevic, “Automated phase-measuring profilometry using defocused projection of a Ronchi grating,” Opt. Commun. 94, 561-573 (1992).
[Crossref]

Walker, J.

R. Green, J. Walker, and D. Robinson, “Investigation of the Fourier-transform method of fringe pattern analysis,” Opt. Lasers Eng. 8, 29-44 (1988).
[Crossref]

Wang, H.

K. Qian, H. Wang, and W. Gao, “Windowed Fourier transform for fringe pattern analysis: theoretical analyses,” App. Opt. 47, 5408-5419 (2008). 
[Crossref]

Wyant, J. C.

Xie, T. B.

R. Dai, T. B. Xie, and S. P. Chang, “A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface,” Key Eng. Mater. 364, 364-370 (2007).

Zhang, S.

S. Zhang and P. Huang, “High-resolution, real-time three-dimensional shape measurement,” Opt. Eng. 45, 123601-123608 (2006).
[Crossref]

Zhang, Z.

Z. Zhang, D. P. Towers, and C. E. Towers, “Snapshot color fringe projection for absolute three-dimensional metrology of video sequences,” App. Opt. 49, 5947-5953 (2010).
[Crossref]

Zhou, W.

X. Su, W. Zhou, G. V. Bally, and D. Vukicevic, “Automated phase-measuring profilometry using defocused projection of a Ronchi grating,” Opt. Commun. 94, 561-573 (1992).
[Crossref]

Zhu, R.

Zweig, D. A.

D. A. Zweig and R. E. Hufnagel, “Hilbert transform algorithm for fringe-pattern analysis,” Proc. SPIE 1333, 295-302 (1990).

App. Opt. (2)

Z. Zhang, D. P. Towers, and C. E. Towers, “Snapshot color fringe projection for absolute three-dimensional metrology of video sequences,” App. Opt. 49, 5947-5953 (2010).
[Crossref]

K. Qian, H. Wang, and W. Gao, “Windowed Fourier transform for fringe pattern analysis: theoretical analyses,” App. Opt. 47, 5408-5419 (2008). 
[Crossref]

Appl. Opt. (19)

J. M. Desse, F. Albe, and J. L. Tribillon, “Real-time color holographic interferometry,” Appl. Opt. 41, 5326-5333 (2002).
[Crossref]

J. M. Desse, “Three-color differential interferometry,” Appl. Opt. 36, 7150-7156 (1997).
[Crossref]

A. Pförtner and J. Schwider “Red-Green-Blue interferometer for the metrology of discontinuous structures,” Appl. Opt. 42, 667-673 (2003).
[Crossref]

O. Sasaki and H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement,” Appl. Opt. 25, 3137-3140 (1986).
[Crossref]

B. S. Lee and T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784-3788 (1990).

T Dresel, G Häusler, and H Venzke “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919-925 (1992).
[Crossref]

P. J. Caber “Interferometric profiler for rough surfaces,” Appl. Opt. 32, 3438-3444 (1993).
[Crossref]

T. C. Strand and Y. Katzir “Extended Unambiguous Range Interferometry,” Appl. Opt. 26, 4274-4281 (1987).
[Crossref]

S. S. C. Chim and G. S. Kino “Three-dimensional image realization in interference microscopy,” Appl. Opt. 31, 2550-2553 (1992).
[Crossref]

B. L. Danielson and C. Y. Boisrobert “Absolute optical ranging using low coherence interferometry,” Appl. Opt. 30, 2975-2979 (1991).
[Crossref]

T. Anna, V. Srivastava, D. S. Mehta, and C. Shakher, “High resolution full-field optical coherence microscopy using Mirau interferometer for the quantitative imaging of biological cells,” Appl. Opt. 50, 6343-6351 (2011).
[Crossref]

G. S. Kino and S. S. C. Chim, “Mirau correlation microscope,” Appl. Opt. 29, 3775-3783 (1990).
[Crossref]

L. M. Smith and C. C. Dobson, “Absolute displacement measurements using modulation of the spectrum of white light in a Michelson interferometer,” Appl. Opt. 28, 3339-3342 (1989).
[Crossref]

B. Bhushan, J. C. Wyant, and C. L. Koliopoulos, “Measurement of surface topography of magnetic tapes by mirau interferometry,” Appl. Opt. 24, 1489-1497 (1985).
[Crossref]

V. Srinivasan, H. C. Liu, and M. Halioua, “Automated phase-measuring profilometry of 3-D diffuse objects,” Appl. Opt. 23, 3105-3108 (1984).
[Crossref]

Y. Verma, P. Nandi, K. D. Rao, M. Sharma, and P. K. Gupta, “Use of common path phase sensitive spectral domain optical coherence tomography for refractive index measurements,” Appl. Opt. 50, E7-E12 (2011).

Y. Y. Cheng and J. C. Wyant, “Multiple-wavelength phase-shifting interferometry,” Appl. Opt. 24, 804-807 (1985).
[Crossref]

K. Creath “Step height measurement using two-wavelength phase-shifting interferometry,” Appl. Opt. 26, 2810-2816 (1987).
[Crossref]

Ma. Suodong, C. Quan, R. Zhu, J. Tay, and L. Chen, “Surface profile measurement in white-light scanning interferometry using a three-chip color CCD,” Appl. Opt. 50, 2246-2254 (2011).
[Crossref]

J. Mod. Opt. (2)

P. Sandoz, “An algorithm for profilometry by white-light phase-shifting interferometry,” J. Mod. Opt. 43, 1545-1554 (1996).

P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389-401 (1995).
[Crossref]

J. Opt. Soc. of Am. (1)

M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. of Am. 72, 156-160 (1982).
[Crossref]

J. Opt. Soc. of Am. A (1)

D. C. Ghiglia and L. A. Romero, “Minimum Lp-norm two-dimensional phaseunwrapping,” J. Opt. Soc. of Am. A 13, 1999-2013 (1996).

Key Eng. Mater. (1)

R. Dai, T. B. Xie, and S. P. Chang, “A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface,” Key Eng. Mater. 364, 364-370 (2007).

Meas. Sci. and Tech. (1)

Z. Buchta, B. Mikel, J. Lazar, and O. Číp, “White-light fringe detection based on a novel light source and colour CCD camera,” Meas. Sci. and Tech. 22, 094031-094036 (2011).
[Crossref]

Opt. Comm. (1)

T. Anna, S. K. Dubey, C. Shakher, A. Roy, and D. S. Mehta, “Sinusoidal fringe projection system based on compact and non-mechanical scanning low-coherence Michelson interferometer for three-dimensional shape measurement,” Opt. Comm. 282, 1237-1242 (2009).
[Crossref]

Opt. Commun. (3)

U. Paul Kumar, N. Krishna Mohan, and M. P. Kothiyal, “Characterization of micro-lenses based on single interferogram analysis using Hilbert transformation,” Opt. Commun. 284, 5084-5092 (2011).
[Crossref]

X. Su, W. Zhou, G. V. Bally, and D. Vukicevic, “Automated phase-measuring profilometry using defocused projection of a Ronchi grating,” Opt. Commun. 94, 561-573 (1992).
[Crossref]

M. Pawlowski, Y. Sakano, Y. Miyamoto, and M. Takeda, “Phase-crossing algorithm for white-light fringes analysis,” Opt. Commun. 260, 68-72 (2006).
[Crossref]

Opt. Eng. (5)

S. Zhang and P. Huang, “High-resolution, real-time three-dimensional shape measurement,” Opt. Eng. 45, 123601-123608 (2006).
[Crossref]

B. Bowe and V. Toal, “White light interferometric surface profiler,” Opt. Eng. 37, 1796-1799 (1998). 
[Crossref]

S. Mirza and C. Shakher, “Surface profiling using phase shifting Talbot interferometric technique,” Opt. Eng. 44, 013601-013606 (2005).
[Crossref]

H. Su, J. Li, and X. Su, “Phase algorithm without the influence of carrier frequency,” Opt. Eng. 36, 1799-1805 (1997).
[Crossref]

J. Schmit and P. Hariharan, “Two-wavelength interferometry profilometry with a phase-step error–compensating algorithm,” Opt. Eng. 45, 115602-115605 (2006).
[Crossref]

Opt. Express (2)

Opt. Laser Technol. (1)

M. Li, C. Quan and J. C. Tay “Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry,” Opt. Laser Technol. 40, 920-929 (2008).
[Crossref]

Opt. Lasers Eng. (3)

S. K. Debnath, M. P. Kothiyal, and S. W. Kim, “Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques,” Opt. Lasers Eng. 47, 1125-1130 (2009).
[Crossref]

R. Green, J. Walker, and D. Robinson, “Investigation of the Fourier-transform method of fringe pattern analysis,” Opt. Lasers Eng. 8, 29-44 (1988).
[Crossref]

X. Su and W. Chen, “Fourier transform profilometry: a review,” Opt. Lasers Eng. 35, 263-284 (2001).
[Crossref]

Opt. Lett. (1)

Other (6)

D. K. Jain, G. Saxena, and V. K. Singh, “Image Mosaicing Using Corner Techniques,” in Proc 2012 International Conference on Communication Systems and Network Technologies (Gujarat, India, May 2012), pp. 79-84.

M. Davidson, K. Kaufman, I. Mazor and F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology in Integrated Circuit Microscopy,” Proc. SPIE 775, 233-247 (1987).

D. A. Zweig and R. E. Hufnagel, “Hilbert transform algorithm for fringe-pattern analysis,” Proc. SPIE 1333, 295-302 (1990).

H. C. Hsu, C. H. Tung, C. F. Kao, and C. C. Chang, “A white-light profiling algorithm adopting the multiwavelength interferometry technique,” Proc. SPIE 5531, 244-249 (2004).

Z. Buchta, P. Jedlička M. Matějka, V. Kolařík, B. Mikel, J. Lazar, and O. Číp, “White-light interference fringe detection using color CCD camera,” in Proc IEEE AFRICON 2009 (Safari Park Hotel, Kenya, Sep. 2012), pp. 1-5.

J. C. Wyant, “White light interferometry,” Proc. SPIE 4737, 98-107 (2002).

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