A high angular tolerance spectral filter was realized incorporating an etalon, which
consists of a TiO<sub>2</sub> cavity sandwiched between a pair of Ag/Ge mirrors. The
effective angle was substantially extended thanks to the cavity's high refractive index. The
device was created by embedding a 313-nm thick TiO<sub>2</sub> film in 16-nm thick
Ag/Ge films through sputtering, with the Ge layer alleviating the roughness and adhesion of the Ag
layer. For normal incidence, the observed center wavelength and transmission were ~900 nm and ~60%,
respectively; throughout the range of 50°, the relative wavelength
shift and transmission variation amounted to only ~0.06 and ~4%, respectively.
© 2012 Optical Society of Korea
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