Abstract
A high reflectance mirror, which has very low absorption and scattering loss,
was coated onto a crystalline substrate by ion beam sputtering and then annealed at
45055 °C. We carefully selected the mirror coating
material, and designed the high reflectance mirror, in order to avoid UV degradation
which comes from the He-Ne plasma. We measured the surface roughness of the Zerodur
substrate using phase shift interferometry and atomic force microscopy, and compared
it with the TIS scattering of the mirror. The cavity ring-down method was used to
measure the absorption of the mirror, and the thin film structure was correlated to
its results. We also compared the optical properties of coated mirrors before and
after annealing.
© 2012 Optical Society of Korea
PDF Article
More Like This
Cited By
Optica participates in Crossref's Cited-By Linking service. Citing articles from Optica Publishing Group journals and other participating publishers are listed here.