Abstract

We have developed an efficient electron beam (e-beam) source, a microcolumn, that can be used as a source module for of microscopy and its applications. To obtain a low operating voltage, a very sharp cold field electron emitter was developed by electrochemically etching a tungsten wire. Laser diffraction was used for the fabrication of high-quality electron lenses and for their precise alignment. The measurement of the e-beam currents, and SEM images captured by the microcolumn confirmed the potential of the device as a very good e-beam source.

© 2010 Optical Society of Korea

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  1. S.-S. Choi, J. S. Kim, E. D. Fabrizio, M. Gentili, H. B. Chung, H. J. Yoo, and B. W. Kim, “A novel X-ray mask for mix-and-match of optical and X-ray lithography applied in SOI device fabrication,” J. Korean Phys. Soc. 32, 727-730(1998).
  2. S. Kwon, P. Kim, S. Jeong, W. Chang, C. Chun, and D.-Y. Kim, “Fabrication of nano dot and line arrays using NSOM lithography,” J. Opt. Soc. Korea 9, 16-21 (2005).
    [CrossRef]
  3. D.-G. Kim, S.-Y. Woo, D.-K. Kim, T.-Y. Hwang, S.-H. Park, and D. Y. Kim, “Generation of 1.5 Gbps pseudorandom binary sequence optical signals by using a gain switched Fabry-Perot semiconductor laser,” J. Opt. Soc. Korea9, 103-106 (2005).
    [CrossRef]
  4. C. Kang, C.-S. Kee, I.-B. Sohn, and J. Lee, “Spectral properties of THz-periodic metallic structures,” J. Opt. Soc. Korea 12, 196-199 (2008).
    [CrossRef]
  5. H. Jeong, J. Jeong, G. H. Song, and Y.-D. Jho, “Excitation wavelength dependence of terahertz radiation from InAs: UV versus IR,” J. Korean Phys. Soc. 56, 262-264 (2010).
    [CrossRef]
  6. N. E. Yu, C. Kang, H. K. Yoo, C. Jung, Y. L. Lee, C.-S. Kee, D.-K. Ko, and J. Lee, “Temperature dependent terahertz generation at periodically poled stoichiometric lithium tantalate crystal using femtosecond laser pulses,” J. Opt. Soc. Korea 12, 200-204 (2008).
    [CrossRef]
  7. M. L. Yu, B. W. Hussey, H.-S. Kim, and T. H. P. Chang, “Emission characteristics of ultrasharp cold field emitters,” J. Vac. Sci. Technol. B 12, 3431-3435 (1994).
    [CrossRef]
  8. H. S. Kim, M. L. Yu, E. Kratschmer, B. W. Hussey, M. G. R. Thomson, and T. H. P. Chang, “Miniature Schottky electron source,” J. Vac. Sci. Technol. B 13, 2468-2472 (1995).
    [CrossRef]
  9. E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, S. Zolgharnain, B. W. Hussey, and T. H. P. Chang, “Experimental evaluation of a <TEX>$20{\times}20$</TEX> mm footprint microcolumn,” J. Vac. Sci. Technol. B 14, 3792-3796 (1996).
    [CrossRef]
  10. S. Ahn, D. W. Kim, H. S. Kim, C. G. Park, and S. J. Ahn, “Study on the precise alignment of micro-lenses in the microcolumn by using the laser diffraction pattern,” Mat. Sci. Forum 544-545, 845-848 (2007).
    [CrossRef]
  11. M. L. Yu, H.-S. Kim, B. W. Hussey, T. H. P. Chang, and W. A. Mackie, “Energy distributions of field emitted electrons from carbide tips and tungsten tips with diamondlike carbon coatings,” J. Vac. Sci. Technol. B 14, 3797-3801 (1996).
    [CrossRef]

2010 (1)

H. Jeong, J. Jeong, G. H. Song, and Y.-D. Jho, “Excitation wavelength dependence of terahertz radiation from InAs: UV versus IR,” J. Korean Phys. Soc. 56, 262-264 (2010).
[CrossRef]

2008 (2)

N. E. Yu, C. Kang, H. K. Yoo, C. Jung, Y. L. Lee, C.-S. Kee, D.-K. Ko, and J. Lee, “Temperature dependent terahertz generation at periodically poled stoichiometric lithium tantalate crystal using femtosecond laser pulses,” J. Opt. Soc. Korea 12, 200-204 (2008).
[CrossRef]

C. Kang, C.-S. Kee, I.-B. Sohn, and J. Lee, “Spectral properties of THz-periodic metallic structures,” J. Opt. Soc. Korea 12, 196-199 (2008).
[CrossRef]

2007 (1)

S. Ahn, D. W. Kim, H. S. Kim, C. G. Park, and S. J. Ahn, “Study on the precise alignment of micro-lenses in the microcolumn by using the laser diffraction pattern,” Mat. Sci. Forum 544-545, 845-848 (2007).
[CrossRef]

2005 (2)

1998 (1)

S.-S. Choi, J. S. Kim, E. D. Fabrizio, M. Gentili, H. B. Chung, H. J. Yoo, and B. W. Kim, “A novel X-ray mask for mix-and-match of optical and X-ray lithography applied in SOI device fabrication,” J. Korean Phys. Soc. 32, 727-730(1998).

1996 (2)

E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, S. Zolgharnain, B. W. Hussey, and T. H. P. Chang, “Experimental evaluation of a <TEX>$20{\times}20$</TEX> mm footprint microcolumn,” J. Vac. Sci. Technol. B 14, 3792-3796 (1996).
[CrossRef]

M. L. Yu, H.-S. Kim, B. W. Hussey, T. H. P. Chang, and W. A. Mackie, “Energy distributions of field emitted electrons from carbide tips and tungsten tips with diamondlike carbon coatings,” J. Vac. Sci. Technol. B 14, 3797-3801 (1996).
[CrossRef]

1995 (1)

H. S. Kim, M. L. Yu, E. Kratschmer, B. W. Hussey, M. G. R. Thomson, and T. H. P. Chang, “Miniature Schottky electron source,” J. Vac. Sci. Technol. B 13, 2468-2472 (1995).
[CrossRef]

1994 (1)

M. L. Yu, B. W. Hussey, H.-S. Kim, and T. H. P. Chang, “Emission characteristics of ultrasharp cold field emitters,” J. Vac. Sci. Technol. B 12, 3431-3435 (1994).
[CrossRef]

J. Korean Phys. Soc. (2)

H. Jeong, J. Jeong, G. H. Song, and Y.-D. Jho, “Excitation wavelength dependence of terahertz radiation from InAs: UV versus IR,” J. Korean Phys. Soc. 56, 262-264 (2010).
[CrossRef]

S.-S. Choi, J. S. Kim, E. D. Fabrizio, M. Gentili, H. B. Chung, H. J. Yoo, and B. W. Kim, “A novel X-ray mask for mix-and-match of optical and X-ray lithography applied in SOI device fabrication,” J. Korean Phys. Soc. 32, 727-730(1998).

J. Opt. Soc. Korea (2)

J. Vac. Sci. Technol. B (4)

M. L. Yu, H.-S. Kim, B. W. Hussey, T. H. P. Chang, and W. A. Mackie, “Energy distributions of field emitted electrons from carbide tips and tungsten tips with diamondlike carbon coatings,” J. Vac. Sci. Technol. B 14, 3797-3801 (1996).
[CrossRef]

M. L. Yu, B. W. Hussey, H.-S. Kim, and T. H. P. Chang, “Emission characteristics of ultrasharp cold field emitters,” J. Vac. Sci. Technol. B 12, 3431-3435 (1994).
[CrossRef]

H. S. Kim, M. L. Yu, E. Kratschmer, B. W. Hussey, M. G. R. Thomson, and T. H. P. Chang, “Miniature Schottky electron source,” J. Vac. Sci. Technol. B 13, 2468-2472 (1995).
[CrossRef]

E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, S. Zolgharnain, B. W. Hussey, and T. H. P. Chang, “Experimental evaluation of a <TEX>$20{\times}20$</TEX> mm footprint microcolumn,” J. Vac. Sci. Technol. B 14, 3792-3796 (1996).
[CrossRef]

Journal of the Optical Society of Korea (2)

C. Kang, C.-S. Kee, I.-B. Sohn, and J. Lee, “Spectral properties of THz-periodic metallic structures,” J. Opt. Soc. Korea 12, 196-199 (2008).
[CrossRef]

N. E. Yu, C. Kang, H. K. Yoo, C. Jung, Y. L. Lee, C.-S. Kee, D.-K. Ko, and J. Lee, “Temperature dependent terahertz generation at periodically poled stoichiometric lithium tantalate crystal using femtosecond laser pulses,” J. Opt. Soc. Korea 12, 200-204 (2008).
[CrossRef]

Mat. Sci. Forum (1)

S. Ahn, D. W. Kim, H. S. Kim, C. G. Park, and S. J. Ahn, “Study on the precise alignment of micro-lenses in the microcolumn by using the laser diffraction pattern,” Mat. Sci. Forum 544-545, 845-848 (2007).
[CrossRef]

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