Abstract

A four beam interference optical system for laser micro structuring using a pulse laser was demonstrated. The four beam interference optical system using a pulse laser(picosecond laser) can fabricate micro structure on mold material(NAK80) directly. Micro structure on the polymer can be reproduced economically by injection molding of the micro structure on the mold material. The four beam interference optical system was composed by the DOE(Diffractive Optical Element) and two lenses. The laser intensity distribution of four beam interference was explained by an interference optics point of view and by the image optics point of view. We revealed that both views showed the same result. The laser power distribution of a <TEX>$1{\mu}m$</TEX> peak pattern was made by the four beam interference optical system and measured by the objective lens and CCD. A <TEX>$1{\mu}m$</TEX> pitch dot pattern on the mold material was fabricated and measured by SEM(Scanning Electron Microscopy).

© 2009 Optical Society of Korea

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  1. N. N. Nedialkov, S. E. Imamova, P. A. Atanasov, G. Heusel, D. Breitling, A. Ruf, H. Hugel, F. Dausinger, and P. Berger, "Laser ablation of iron by ultrashort laser pulses," Thin Solid Films 453-454, 496-500 (2004)
    [CrossRef]
  2. N. M, Bulgakova and Igor M. Bourakov, "Phase explosion under ultrashort pulsed laser blation: modeling with analysis of metastable state of melt," Applied Surface Science 197-198, 41-44 (2002)
    [CrossRef]
  3. K. R. Chen, J. N. Leboeuf, R. F. Wood, D. B. Geohegan, J. M. Donato, C. L. Liu, and A. A. Puretzky, "Laser-solid interaction and dynamics of laser-ablated materials," Applied Surface Science 96-98, 45-49 (1996)
    [CrossRef]
  4. I.-B. Sohn, Y.-C. Noh, Y.-S. Kim, D.-K. Ko, J. Lee, and Y.-J. Choi, "Laser ablation of polypropylene films using nanosecond, picosecond, and femtosecond laser," J. Opt. Soc. Korea 12, 38-41 (2008)
    [CrossRef]
  5. B. Wolff-Rottke, J. Ihlemann, H. Schmit, and A. Scholl, "Influence of the laser-spot diameter on photo-ablation rates," Appl. Phys. A 60, 13-17 (1995)
    [CrossRef]
  6. A. Yoshida, and T. Asakura, "Propagation and focusing of Gaussian laser beams beyond conventional diffraction limit," Opt. Comm. 123, 694-704 (1996)
    [CrossRef]
  7. T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, "Fabrication of three-dimensional periodic microstructures in photo resist SU-8 by phase-controlled holographic lithography," New journal of Physics 8, 250-257 (2006)
    [CrossRef]
  8. T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, "Multi photon fabrication of periodic structures by multi beam interference of femtosecond pulses," Appl. Phys. lett. 82, 28-35 (2003)
  9. T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, "Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals," Appl. Phys. lett. 79, 6-13 (2001)
    [CrossRef]
  10. H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, "Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8," Opt. Exp. 14, 7943-7953 (2006)
    [CrossRef]
  11. Y. Nakata, T. Okada, and M. Maeda, "Lithographical laser ablation using femtosecond laser," Appl. Phys. A 79, 2858-2865 (2004)
    [CrossRef]
  12. B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996)
    [CrossRef]
  13. B. C. Choi, M. S. Lee, J.-H. Choi, and C. S. Park, "Application of micromachining in the PLC optical splitter packaging," J. Opt. Soc. Korea 7, 166-173 (2003)
  14. T. Baldacchini, J. E. Carey, M. Zhou, and E. Mazur, "Super hydrophobic surfaces prepared by micro structuring of silicon using a femtosecond laser," Langmuir 22, 4917-4919 (2006)
    [CrossRef]
  15. M. T. Khorasani, H. Mirzadeh, and P. G. Sammes, "Laser induced surface modification of polydimethylsiloxane as a super-hydrophobic material," Radiat. Phys. Chem. 47, 881-888 (1996)
    [CrossRef]
  16. V. Zorba, L. Persano, D. Pisignano, A. Athanassiou, E. Stratakis, R. Cingolani, P. Tzanetakis, and C. Fotakis, "Making silicon hydrophobic: wettability control by two-length scale simultaneous pattering with femtosecond laser irradiation," Institute of physics publishing Nanotechnology 17, 3234-3238 (2006)
    [CrossRef]

2008 (1)

I.-B. Sohn, Y.-C. Noh, Y.-S. Kim, D.-K. Ko, J. Lee, and Y.-J. Choi, "Laser ablation of polypropylene films using nanosecond, picosecond, and femtosecond laser," J. Opt. Soc. Korea 12, 38-41 (2008)
[CrossRef]

2006 (4)

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, "Fabrication of three-dimensional periodic microstructures in photo resist SU-8 by phase-controlled holographic lithography," New journal of Physics 8, 250-257 (2006)
[CrossRef]

H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, "Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8," Opt. Exp. 14, 7943-7953 (2006)
[CrossRef]

T. Baldacchini, J. E. Carey, M. Zhou, and E. Mazur, "Super hydrophobic surfaces prepared by micro structuring of silicon using a femtosecond laser," Langmuir 22, 4917-4919 (2006)
[CrossRef]

V. Zorba, L. Persano, D. Pisignano, A. Athanassiou, E. Stratakis, R. Cingolani, P. Tzanetakis, and C. Fotakis, "Making silicon hydrophobic: wettability control by two-length scale simultaneous pattering with femtosecond laser irradiation," Institute of physics publishing Nanotechnology 17, 3234-3238 (2006)
[CrossRef]

2004 (2)

Y. Nakata, T. Okada, and M. Maeda, "Lithographical laser ablation using femtosecond laser," Appl. Phys. A 79, 2858-2865 (2004)
[CrossRef]

N. N. Nedialkov, S. E. Imamova, P. A. Atanasov, G. Heusel, D. Breitling, A. Ruf, H. Hugel, F. Dausinger, and P. Berger, "Laser ablation of iron by ultrashort laser pulses," Thin Solid Films 453-454, 496-500 (2004)
[CrossRef]

2003 (2)

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, "Multi photon fabrication of periodic structures by multi beam interference of femtosecond pulses," Appl. Phys. lett. 82, 28-35 (2003)

B. C. Choi, M. S. Lee, J.-H. Choi, and C. S. Park, "Application of micromachining in the PLC optical splitter packaging," J. Opt. Soc. Korea 7, 166-173 (2003)

2002 (1)

N. M, Bulgakova and Igor M. Bourakov, "Phase explosion under ultrashort pulsed laser blation: modeling with analysis of metastable state of melt," Applied Surface Science 197-198, 41-44 (2002)
[CrossRef]

2001 (1)

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, "Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals," Appl. Phys. lett. 79, 6-13 (2001)
[CrossRef]

1996 (4)

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996)
[CrossRef]

K. R. Chen, J. N. Leboeuf, R. F. Wood, D. B. Geohegan, J. M. Donato, C. L. Liu, and A. A. Puretzky, "Laser-solid interaction and dynamics of laser-ablated materials," Applied Surface Science 96-98, 45-49 (1996)
[CrossRef]

A. Yoshida, and T. Asakura, "Propagation and focusing of Gaussian laser beams beyond conventional diffraction limit," Opt. Comm. 123, 694-704 (1996)
[CrossRef]

M. T. Khorasani, H. Mirzadeh, and P. G. Sammes, "Laser induced surface modification of polydimethylsiloxane as a super-hydrophobic material," Radiat. Phys. Chem. 47, 881-888 (1996)
[CrossRef]

1995 (1)

B. Wolff-Rottke, J. Ihlemann, H. Schmit, and A. Scholl, "Influence of the laser-spot diameter on photo-ablation rates," Appl. Phys. A 60, 13-17 (1995)
[CrossRef]

Appl. Phys. lett. (2)

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, "Multi photon fabrication of periodic structures by multi beam interference of femtosecond pulses," Appl. Phys. lett. 82, 28-35 (2003)

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, "Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals," Appl. Phys. lett. 79, 6-13 (2001)
[CrossRef]

Applied Physics A: Materials Science & Processing (2)

Y. Nakata, T. Okada, and M. Maeda, "Lithographical laser ablation using femtosecond laser," Appl. Phys. A 79, 2858-2865 (2004)
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996)
[CrossRef]

Applied Physics A:Materials Science & Processing (1)

B. Wolff-Rottke, J. Ihlemann, H. Schmit, and A. Scholl, "Influence of the laser-spot diameter on photo-ablation rates," Appl. Phys. A 60, 13-17 (1995)
[CrossRef]

Applied Surface Science (2)

N. M, Bulgakova and Igor M. Bourakov, "Phase explosion under ultrashort pulsed laser blation: modeling with analysis of metastable state of melt," Applied Surface Science 197-198, 41-44 (2002)
[CrossRef]

K. R. Chen, J. N. Leboeuf, R. F. Wood, D. B. Geohegan, J. M. Donato, C. L. Liu, and A. A. Puretzky, "Laser-solid interaction and dynamics of laser-ablated materials," Applied Surface Science 96-98, 45-49 (1996)
[CrossRef]

Journal of the Optical Society of Korea (2)

I.-B. Sohn, Y.-C. Noh, Y.-S. Kim, D.-K. Ko, J. Lee, and Y.-J. Choi, "Laser ablation of polypropylene films using nanosecond, picosecond, and femtosecond laser," J. Opt. Soc. Korea 12, 38-41 (2008)
[CrossRef]

B. C. Choi, M. S. Lee, J.-H. Choi, and C. S. Park, "Application of micromachining in the PLC optical splitter packaging," J. Opt. Soc. Korea 7, 166-173 (2003)

Langmuir (1)

T. Baldacchini, J. E. Carey, M. Zhou, and E. Mazur, "Super hydrophobic surfaces prepared by micro structuring of silicon using a femtosecond laser," Langmuir 22, 4917-4919 (2006)
[CrossRef]

Nanotechnology (1)

V. Zorba, L. Persano, D. Pisignano, A. Athanassiou, E. Stratakis, R. Cingolani, P. Tzanetakis, and C. Fotakis, "Making silicon hydrophobic: wettability control by two-length scale simultaneous pattering with femtosecond laser irradiation," Institute of physics publishing Nanotechnology 17, 3234-3238 (2006)
[CrossRef]

New J. Phys. (1)

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, "Fabrication of three-dimensional periodic microstructures in photo resist SU-8 by phase-controlled holographic lithography," New journal of Physics 8, 250-257 (2006)
[CrossRef]

Optics Communications (1)

A. Yoshida, and T. Asakura, "Propagation and focusing of Gaussian laser beams beyond conventional diffraction limit," Opt. Comm. 123, 694-704 (1996)
[CrossRef]

Optics Express (1)

H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, "Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8," Opt. Exp. 14, 7943-7953 (2006)
[CrossRef]

Radiation Physics and Chemistry (1)

M. T. Khorasani, H. Mirzadeh, and P. G. Sammes, "Laser induced surface modification of polydimethylsiloxane as a super-hydrophobic material," Radiat. Phys. Chem. 47, 881-888 (1996)
[CrossRef]

Thin Solid Films (1)

N. N. Nedialkov, S. E. Imamova, P. A. Atanasov, G. Heusel, D. Breitling, A. Ruf, H. Hugel, F. Dausinger, and P. Berger, "Laser ablation of iron by ultrashort laser pulses," Thin Solid Films 453-454, 496-500 (2004)
[CrossRef]

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