Abstract

An acousto-optic tunable filter based 3-D micro surface profile measurement using an equally spaced 5 spectral phase shifting is described. The 5-bucket spectral phase shifting method is compared with a Fourier-transform method in the spectral domain. It can provide a fast measurement capability while maintaining high accuracy since it needs only 5 pieces of spectrally phase shifted imaging data and a simple calculation in comparison with the Fourier transform method that requires full wavelength scanning data and relatively complicated computation. The 3-D profile data of micro objects can be obtained in a few seconds with an accuracy of <TEX>${\sim}10nm$</TEX>. The 3-D profile method also has an inherent benefit in terms of being speckle-free in measuring diffuse micro objects by employing an incoherent light source. Those simplicity and practical applicability is expected to have diverse applications in 3-D micro profilometry such as semiconductors and micro-biology.

© 2008 Optical Society of Korea

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]

2007

D. Kim, B. J. Baek, Y. D. Kim and B. Javidi, “3D nano object recognition based on phase measurement technique,” J. Opt. Soc. Korea, vol. 11, no. 3, pp. 108-112, 2007

2006

D. Kim, J. W. You and S. Kim, “White light on-axis digital holographic microscopy based on spectral phase shifting,” Opt. Exp., vol. 14, no. 1, pp. 229-234, 2006
[CrossRef]

H. J. Lee and S. K. Gil, “Error Analysis for Optical Security by means of 4-Step Phase-Shifting Digital Holography,” J. Opt. Soc. Korea, vol. 10, no. 3, pp. 118-123, 2006

2004

D. Kim and S. Kim, “Direct spectral phase function calculation for dispersive interferometric thickness profilometry,” Opt. Exp., vol. 12, no. 21, pp. 5117-5124, 2004
[CrossRef]

2003

J. Gass, A. Dakoff, and M. K. Kim, “Phase imaging without <TEX>$2{\pi}$</TEX> ambiguity by multiwavelength digital holography,” Opt. Lett., vol. 28, no. 13, pp. 1141-1143, 2003
[CrossRef]

2002

D. Kim, S. Kim, H. Kong and Y. Lee, “Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter,” Opt. Lett., vol. 27, no. 21, pp. 1893-1895, 2002
[CrossRef]

1999

M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe, and T. Kurokawa, “Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device,” Appl. Opt., vol. 38, no. 34, pp. 7063-7068, 1999
[CrossRef]

M. K. Kim, “Wavelength scanning digital interference holography for optical section imaging,” Opt. Lett., vol. 24, no. 23, pp. 1693-1695, 1999
[CrossRef]

P. Sandoz, J. Calatroni and G. Ttribillon, “Potential of a wavelength sampling approach for profilometry by phase shifting interferometry,” J. of Mod. Opt., vol. 46, no. 2, pp. 327-339, 1999
[CrossRef]

1998

L. Deck and P. de Groot, “Punctuated quadrature phase-shifting interferometry,” Opt. Lett., vol. 23, no. 1, pp. 19-21, 1998
[CrossRef]

1997

S. Kuwamura and I. Yamaguchi, “Wavelength scanning profilometry for real-time surface shape profiling,” Appl. Opt., vol. 37, no. 19, pp. 4473-4482, 1997
[CrossRef]

1994

1993

K. Creath, “Step height measurement using two wavelength phase shifting interferometry,” Appl. Opt., vol. 26, no. 14, pp. 2810-2816, 1993

P. de Groot and L. Deck, “Three-dimensional imaging by sub-Nyquist sampling of white-light interferomgrams,” Opt. Lett., vol 18, no. 17, pp. 1462-1464, 1993
[CrossRef]

1988

Y. Ishii, J. Chen, and K. Murata, “Digital phase-measuring interferometry with a tunable laser diode,” Opt. Lett., vol. 12, no. 4, pp. 233-235, 1988
[CrossRef]

1987

1984

Y. Cheng and J. C. Wyant, “Two-wavelength phase shifting interferometry,” Appl. Opt., vol. 23, no. 24, pp. 4539-4543, 1984

K. Osak Y, “Multi channel phase shifted interferometry,” Opt. Lett., vol. 9, no. 2, pp. 59-61, 1984
[CrossRef]

1982

M. Takeda, Hideki Ina and Seiji Kobayashi, “Fouriertransform method of fringe-pattern analysis for computerbased topography and interferometry,” J. Opt. Soc. Am., vol. 72, no. 1, pp. 156 -160, 1982
[CrossRef]

1973

C. Polhemus, “Two-wavelength interferometry,” Appl. Opt., vol. 12, no. 9, pp. 2071-2074, 1973
[CrossRef]

Appl. Opt.

Applied Optics

M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe, and T. Kurokawa, “Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device,” Appl. Opt., vol. 38, no. 34, pp. 7063-7068, 1999
[CrossRef]

K. Creath, “Step height measurement using two wavelength phase shifting interferometry,” Appl. Opt., vol. 26, no. 14, pp. 2810-2816, 1993

C. Polhemus, “Two-wavelength interferometry,” Appl. Opt., vol. 12, no. 9, pp. 2071-2074, 1973
[CrossRef]

S. Kuwamura and I. Yamaguchi, “Wavelength scanning profilometry for real-time surface shape profiling,” Appl. Opt., vol. 37, no. 19, pp. 4473-4482, 1997
[CrossRef]

JOSA

M. Takeda, Hideki Ina and Seiji Kobayashi, “Fouriertransform method of fringe-pattern analysis for computerbased topography and interferometry,” J. Opt. Soc. Am., vol. 72, no. 1, pp. 156 -160, 1982
[CrossRef]

Journal of Modern Optics

P. Sandoz, J. Calatroni and G. Ttribillon, “Potential of a wavelength sampling approach for profilometry by phase shifting interferometry,” J. of Mod. Opt., vol. 46, no. 2, pp. 327-339, 1999
[CrossRef]

Journal of the Optical Society of Korea

H. J. Lee and S. K. Gil, “Error Analysis for Optical Security by means of 4-Step Phase-Shifting Digital Holography,” J. Opt. Soc. Korea, vol. 10, no. 3, pp. 118-123, 2006

D. Kim, B. J. Baek, Y. D. Kim and B. Javidi, “3D nano object recognition based on phase measurement technique,” J. Opt. Soc. Korea, vol. 11, no. 3, pp. 108-112, 2007

Optics Express

D. Kim, J. W. You and S. Kim, “White light on-axis digital holographic microscopy based on spectral phase shifting,” Opt. Exp., vol. 14, no. 1, pp. 229-234, 2006
[CrossRef]

D. Kim and S. Kim, “Direct spectral phase function calculation for dispersive interferometric thickness profilometry,” Opt. Exp., vol. 12, no. 21, pp. 5117-5124, 2004
[CrossRef]

Optics Letters

P. de Groot and L. Deck, “Three-dimensional imaging by sub-Nyquist sampling of white-light interferomgrams,” Opt. Lett., vol 18, no. 17, pp. 1462-1464, 1993
[CrossRef]

Y. Ishii, J. Chen, and K. Murata, “Digital phase-measuring interferometry with a tunable laser diode,” Opt. Lett., vol. 12, no. 4, pp. 233-235, 1988
[CrossRef]

J. Schwider and L. Zhou, “Dispersive interferometric profilometer,” Opt. Lett., vol. 19, no. 13, pp. 995-997, 1994
[CrossRef]

K. Osak Y, “Multi channel phase shifted interferometry,” Opt. Lett., vol. 9, no. 2, pp. 59-61, 1984
[CrossRef]

L. Deck and P. de Groot, “Punctuated quadrature phase-shifting interferometry,” Opt. Lett., vol. 23, no. 1, pp. 19-21, 1998
[CrossRef]

D. Kim, S. Kim, H. Kong and Y. Lee, “Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter,” Opt. Lett., vol. 27, no. 21, pp. 1893-1895, 2002
[CrossRef]

M. K. Kim, “Wavelength scanning digital interference holography for optical section imaging,” Opt. Lett., vol. 24, no. 23, pp. 1693-1695, 1999
[CrossRef]

J. Gass, A. Dakoff, and M. K. Kim, “Phase imaging without <TEX>$2{\pi}$</TEX> ambiguity by multiwavelength digital holography,” Opt. Lett., vol. 28, no. 13, pp. 1141-1143, 2003
[CrossRef]

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