Abstract

The authors discuss a prototype stylus profilometer designed to measure large optics. It consists of a low contact force type probe system, laser reference system, interferometric distance measurement system, and horizontal driving system. The probe contacts the surface ; the height and the horizontal distances of the measurement points are measured by the interferometer. The freely propagated laser beam provides the reference line during the measurement. The developed stylus profilometry shows only <TEX>$\pm$</TEX>60 nm of P-V error for the 157 mm diameter spherical mirror.

© 2001 Optical Society of Korea

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  1. L. Allen, J. R. P. Angle, J. D. Mogus, G. A. Rodney, R. R. Shannon, and C. P. Spoelhof, The Hubble Space Telescope optical systems failure report. (NASA, 1990)
  2. J. F. Song and T. V. Vorburger, Appl. Opt. 30, 42 (1991)
    [CrossRef]
  3. F. Kratz, G. Ringel, H. Tobben, and D. R. Schmitt, Proc. SPIE 2775, 263 (1996)
    [CrossRef]
  4. V. Y. Mendeleyev, Appl. Opt. 36, 9005 (1997)
    [CrossRef]
  5. K. A. O"Donnell, Appl. Opt. 32, 4922 (1993)
    [CrossRef]
  6. E. Hansen, Gemini Telescope f/16 optical design summary (1994)
  7. H. S. Yang, Developments in Stylus Profilometry (Ph.D. dissertation, University College London, 1999), 49
  8. P. B. Leadbeater, W. J. Wills-Moren, Proc. SPIE 1333, 183 (1990)
    [CrossRef]
  9. D. J. Whitehouse, Handbook of surface metrology (IOP,1994)
  10. A. L. Gauler, Opt. Eng. 21, 991 (1982)
  11. G. W. C. KAYE, T. H. Laby, Tables of physical and chemical constants (Longman, 16th edition)

1999 (1)

H. S. Yang, Developments in Stylus Profilometry (Ph.D. dissertation, University College London, 1999), 49

1997 (1)

V. Y. Mendeleyev, Appl. Opt. 36, 9005 (1997)
[CrossRef]

1996 (1)

F. Kratz, G. Ringel, H. Tobben, and D. R. Schmitt, Proc. SPIE 2775, 263 (1996)
[CrossRef]

1994 (2)

E. Hansen, Gemini Telescope f/16 optical design summary (1994)

D. J. Whitehouse, Handbook of surface metrology (IOP,1994)

1993 (1)

K. A. O"Donnell, Appl. Opt. 32, 4922 (1993)
[CrossRef]

1991 (1)

J. F. Song and T. V. Vorburger, Appl. Opt. 30, 42 (1991)
[CrossRef]

1990 (2)

L. Allen, J. R. P. Angle, J. D. Mogus, G. A. Rodney, R. R. Shannon, and C. P. Spoelhof, The Hubble Space Telescope optical systems failure report. (NASA, 1990)

P. B. Leadbeater, W. J. Wills-Moren, Proc. SPIE 1333, 183 (1990)
[CrossRef]

1982 (1)

A. L. Gauler, Opt. Eng. 21, 991 (1982)

Applied Optics (3)

V. Y. Mendeleyev, Appl. Opt. 36, 9005 (1997)
[CrossRef]

K. A. O"Donnell, Appl. Opt. 32, 4922 (1993)
[CrossRef]

J. F. Song and T. V. Vorburger, Appl. Opt. 30, 42 (1991)
[CrossRef]

Opt. Eng. (1)

A. L. Gauler, Opt. Eng. 21, 991 (1982)

Proc. SPIE (2)

F. Kratz, G. Ringel, H. Tobben, and D. R. Schmitt, Proc. SPIE 2775, 263 (1996)
[CrossRef]

P. B. Leadbeater, W. J. Wills-Moren, Proc. SPIE 1333, 183 (1990)
[CrossRef]

Other (5)

D. J. Whitehouse, Handbook of surface metrology (IOP,1994)

E. Hansen, Gemini Telescope f/16 optical design summary (1994)

H. S. Yang, Developments in Stylus Profilometry (Ph.D. dissertation, University College London, 1999), 49

G. W. C. KAYE, T. H. Laby, Tables of physical and chemical constants (Longman, 16th edition)

L. Allen, J. R. P. Angle, J. D. Mogus, G. A. Rodney, R. R. Shannon, and C. P. Spoelhof, The Hubble Space Telescope optical systems failure report. (NASA, 1990)

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