The authors discuss a prototype stylus profilometer designed to measure large optics. It consists of a low contact force type probe system, laser reference system, interferometric distance measurement system, and horizontal driving system. The probe contacts the surface ; the height and the horizontal distances of the measurement points are measured by the interferometer. The freely propagated laser beam provides the reference line during the measurement. The developed stylus profilometry shows only <TEX>$\pm$</TEX>60 nm of P-V error for the 157 mm diameter spherical mirror.
© 2001 Optical Society of KoreaPDF Article