Abstract

We present a novel method for three-dimensional optical memory and microchannel embedded in fused silica glass. Three-dimensional dot patterning with a femtosecond laser pulse and observation with optical microscope are performed. Dot patterns are created by use of a 0.42 N.A. objective to focus 100 fs laser pulses inside the material. We demonstrate data storage with <TEX>$2{\mu}m$</TEX> dot pitch and <TEX>$7{\mu}m$</TEX>layer spacing <TEX>$(36 Gbit/cm^3)$</TEX>. A three-dimensional microchannel acting as microfluidic and microoptical components is directly fabricated inside a silica glass. The optical micrographs of the microchannel are obtained by a digital camera of a microscope.

© 2005 Optical Society of Korea

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  1. S. Juodkazis, S. Matsuo, H. Misawa, V. Mizeikis, A. Marcinkevicius, H. B. Sun, Y. Tokuda, M. Takahashi, T. Yoko, J. Nushii, "Application of femtosecond laser pulse for microfabrication of transparent media," Appl. Surf Scien., 197-198, pp. 705-709, 2002
    [CrossRef]
  2. Ik-Bu Sohn, Man-Seop Lee, and Jeong-Sik Woo, "Femtosecond micromachining applications for optical devices," J. Optical Society of Korea, vol. 8, pp. 127-131, 2004
    [CrossRef]
  3. K. Hirao and K. Miura, "Writing waveguides and gratings in silica and related materials by a femtosecond laser," J. Non-Cryst. Solids., vol. 239, pp. 91-95, 1998
    [CrossRef]
  4. D. Grobnic, C. W. Smelser, S. J. Mihilov, R. B. Walker, and P. Lu, "Fiber Bragg gratings with suppressed cladding modes made in SMF-28 with a femtosecond IR laser and a phase mask," IEEE Photon. Technol. Lett., vol. 16, pp. 1864-1866, 2004
    [CrossRef]
  5. C. Florea and K. A. Winick, "Fabrication and characterization of photonic devices directly written in glass using femtosecond laser pulses," J. Lightwave Technol., vol. 21, pp. 246-253, 2003
    [CrossRef]
  6. Ik-Bu Sohn, Man-Seap Lee, Jung-Yong Chung, and Sung-Hak Cho, "Nano-structuring of transparent materials by femtosecond laser," J. Optical Society of Korea, vol. 9, pp. 1-5, 2005
    [CrossRef]
  7. E. N. Glezer, M. Milosavljevic, L. Juang, R. J. Finlay, T. H. Her, J. P. Callan, and E. Mazure, "Three-dimensional optical storage inside transparent materials," Opt. Lett., vol. 21, pp. 2023-2025, 1996
    [CrossRef]
  8. Ya Cheng, Koji Sugioka, Katsumi Midorikawa, "Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications," Appl. Surface Science, 2005
    [CrossRef]
  9. C. B. Schaffer, T. N. Kim, K. N. Campbell, A. N. Groisman, D. N. Kleinfeld, "Machining microfluidic devices in PDMS using femtosecond laser pulses," Photonics West, 5713A, 2005

2005

Ik-Bu Sohn, Man-Seap Lee, Jung-Yong Chung, and Sung-Hak Cho, "Nano-structuring of transparent materials by femtosecond laser," J. Optical Society of Korea, vol. 9, pp. 1-5, 2005
[CrossRef]

Ya Cheng, Koji Sugioka, Katsumi Midorikawa, "Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications," Appl. Surface Science, 2005
[CrossRef]

C. B. Schaffer, T. N. Kim, K. N. Campbell, A. N. Groisman, D. N. Kleinfeld, "Machining microfluidic devices in PDMS using femtosecond laser pulses," Photonics West, 5713A, 2005

2004

Ik-Bu Sohn, Man-Seop Lee, and Jeong-Sik Woo, "Femtosecond micromachining applications for optical devices," J. Optical Society of Korea, vol. 8, pp. 127-131, 2004
[CrossRef]

D. Grobnic, C. W. Smelser, S. J. Mihilov, R. B. Walker, and P. Lu, "Fiber Bragg gratings with suppressed cladding modes made in SMF-28 with a femtosecond IR laser and a phase mask," IEEE Photon. Technol. Lett., vol. 16, pp. 1864-1866, 2004
[CrossRef]

2003

C. Florea and K. A. Winick, "Fabrication and characterization of photonic devices directly written in glass using femtosecond laser pulses," J. Lightwave Technol., vol. 21, pp. 246-253, 2003
[CrossRef]

2002

S. Juodkazis, S. Matsuo, H. Misawa, V. Mizeikis, A. Marcinkevicius, H. B. Sun, Y. Tokuda, M. Takahashi, T. Yoko, J. Nushii, "Application of femtosecond laser pulse for microfabrication of transparent media," Appl. Surf Scien., 197-198, pp. 705-709, 2002
[CrossRef]

1998

K. Hirao and K. Miura, "Writing waveguides and gratings in silica and related materials by a femtosecond laser," J. Non-Cryst. Solids., vol. 239, pp. 91-95, 1998
[CrossRef]

1996

E. N. Glezer, M. Milosavljevic, L. Juang, R. J. Finlay, T. H. Her, J. P. Callan, and E. Mazure, "Three-dimensional optical storage inside transparent materials," Opt. Lett., vol. 21, pp. 2023-2025, 1996
[CrossRef]

Applied Surface Science

S. Juodkazis, S. Matsuo, H. Misawa, V. Mizeikis, A. Marcinkevicius, H. B. Sun, Y. Tokuda, M. Takahashi, T. Yoko, J. Nushii, "Application of femtosecond laser pulse for microfabrication of transparent media," Appl. Surf Scien., 197-198, pp. 705-709, 2002
[CrossRef]

Ya Cheng, Koji Sugioka, Katsumi Midorikawa, "Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications," Appl. Surface Science, 2005
[CrossRef]

Journal of Non-Crystalline Solids

K. Hirao and K. Miura, "Writing waveguides and gratings in silica and related materials by a femtosecond laser," J. Non-Cryst. Solids., vol. 239, pp. 91-95, 1998
[CrossRef]

Journal of the Optical Society of Korea

Ik-Bu Sohn, Man-Seop Lee, and Jeong-Sik Woo, "Femtosecond micromachining applications for optical devices," J. Optical Society of Korea, vol. 8, pp. 127-131, 2004
[CrossRef]

Ik-Bu Sohn, Man-Seap Lee, Jung-Yong Chung, and Sung-Hak Cho, "Nano-structuring of transparent materials by femtosecond laser," J. Optical Society of Korea, vol. 9, pp. 1-5, 2005
[CrossRef]

Lightwave Technology, Journal of

C. Florea and K. A. Winick, "Fabrication and characterization of photonic devices directly written in glass using femtosecond laser pulses," J. Lightwave Technol., vol. 21, pp. 246-253, 2003
[CrossRef]

Optics Letters

E. N. Glezer, M. Milosavljevic, L. Juang, R. J. Finlay, T. H. Her, J. P. Callan, and E. Mazure, "Three-dimensional optical storage inside transparent materials," Opt. Lett., vol. 21, pp. 2023-2025, 1996
[CrossRef]

Photonics Technology Letters, IEEE

D. Grobnic, C. W. Smelser, S. J. Mihilov, R. B. Walker, and P. Lu, "Fiber Bragg gratings with suppressed cladding modes made in SMF-28 with a femtosecond IR laser and a phase mask," IEEE Photon. Technol. Lett., vol. 16, pp. 1864-1866, 2004
[CrossRef]

Photonics West, 5713A

C. B. Schaffer, T. N. Kim, K. N. Campbell, A. N. Groisman, D. N. Kleinfeld, "Machining microfluidic devices in PDMS using femtosecond laser pulses," Photonics West, 5713A, 2005

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