Abstract

The photoabsorption cross section of the Ar2F excimer in the lowest excited state (42Γ), which is produced by exciting an Ar/F2 gas mix by a short-pulse relativistic electron beam, has been determined at 248 nm to be (3.3 ± 1) × 10−18 cm2 by observing the depletion of Ar2F fluorescence induced by the irradiation of a short-pulse KrF laser beam. Observation of ArF fluorescence shows that the Ar2F excimer is directly dissociated into ArF and Ar by absorbing a 248-nm photon.

© 1988 Optical Society of America

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References

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  1. Ch. A. Brau, in Excimer Lasers, C. K. Rhodes, ed. (Springer-Verlag, Berlin, 1984), p. 121.
  2. K. Ueda, H. Nishioka, and H. Takuma, Proc. Soc. Photo-Opt. Instrum. Eng. 710, 7 (1986).
  3. K. Hakuta, H. Komori, N. Mukai, and H. Takuma, in Digest of International Quantum Electronics Conference (Optical Society of America, Washington, D.C., 1986), paper WGG4;J. Appl. Phys. 61, 2113 (1987).
  4. T. H. Johnson and A. M. Hunter, J. Appl. Phys. 51, 2406 (1980).
    [CrossRef]
  5. F. Kannari, M. Obara, and T. Fujioka, J. Appl. Phys. 57, 4309 (1985).
    [CrossRef]
  6. D. B. Geohegan and J. G. Eden, in Digest of International Laser Science Conference (American Physical Society, New York, 1986), paper FF12;J. G. Eden, Proc. Soc. Photo-Opt. Instrum. Eng. 710, 109 (1986).
  7. A. W. McCown, Appl. Phys. Lett. 50, 804 (1987).
    [CrossRef]
  8. R. Sauerbrey, Y. Zhu, F. K. Tittel, and W. L. Wilson, J. Chem. Phys. 85, 1299 (1986).
    [CrossRef]
  9. W. R. Wadt and P. J. Hay, J. Chem. Phys. 68, 3850 (1978).
    [CrossRef]
  10. D. L. Huestis and N. E. Schlotter, J. Chem. Phys. 69, 3100 (1978).
    [CrossRef]
  11. A. W. McCown and J. A. B. Godard, in Digest of Conference on Lasers and Electro-Optics (Optical Society of America, Washington, D.C., 1987), paper WR6.
  12. J. A. Mangano, J. H. Jacob, M. Rokni, and A. Hawryluk, Appl. Phys. Lett. 31, 26 (1977).
    [CrossRef]

1987 (1)

A. W. McCown, Appl. Phys. Lett. 50, 804 (1987).
[CrossRef]

1986 (2)

R. Sauerbrey, Y. Zhu, F. K. Tittel, and W. L. Wilson, J. Chem. Phys. 85, 1299 (1986).
[CrossRef]

K. Ueda, H. Nishioka, and H. Takuma, Proc. Soc. Photo-Opt. Instrum. Eng. 710, 7 (1986).

1985 (1)

F. Kannari, M. Obara, and T. Fujioka, J. Appl. Phys. 57, 4309 (1985).
[CrossRef]

1980 (1)

T. H. Johnson and A. M. Hunter, J. Appl. Phys. 51, 2406 (1980).
[CrossRef]

1978 (2)

W. R. Wadt and P. J. Hay, J. Chem. Phys. 68, 3850 (1978).
[CrossRef]

D. L. Huestis and N. E. Schlotter, J. Chem. Phys. 69, 3100 (1978).
[CrossRef]

1977 (1)

J. A. Mangano, J. H. Jacob, M. Rokni, and A. Hawryluk, Appl. Phys. Lett. 31, 26 (1977).
[CrossRef]

Brau, Ch. A.

Ch. A. Brau, in Excimer Lasers, C. K. Rhodes, ed. (Springer-Verlag, Berlin, 1984), p. 121.

Eden, J. G.

D. B. Geohegan and J. G. Eden, in Digest of International Laser Science Conference (American Physical Society, New York, 1986), paper FF12;J. G. Eden, Proc. Soc. Photo-Opt. Instrum. Eng. 710, 109 (1986).

Fujioka, T.

F. Kannari, M. Obara, and T. Fujioka, J. Appl. Phys. 57, 4309 (1985).
[CrossRef]

Geohegan, D. B.

D. B. Geohegan and J. G. Eden, in Digest of International Laser Science Conference (American Physical Society, New York, 1986), paper FF12;J. G. Eden, Proc. Soc. Photo-Opt. Instrum. Eng. 710, 109 (1986).

Godard, J. A. B.

A. W. McCown and J. A. B. Godard, in Digest of Conference on Lasers and Electro-Optics (Optical Society of America, Washington, D.C., 1987), paper WR6.

Hakuta, K.

K. Hakuta, H. Komori, N. Mukai, and H. Takuma, in Digest of International Quantum Electronics Conference (Optical Society of America, Washington, D.C., 1986), paper WGG4;J. Appl. Phys. 61, 2113 (1987).

Hawryluk, A.

J. A. Mangano, J. H. Jacob, M. Rokni, and A. Hawryluk, Appl. Phys. Lett. 31, 26 (1977).
[CrossRef]

Hay, P. J.

W. R. Wadt and P. J. Hay, J. Chem. Phys. 68, 3850 (1978).
[CrossRef]

Huestis, D. L.

D. L. Huestis and N. E. Schlotter, J. Chem. Phys. 69, 3100 (1978).
[CrossRef]

Hunter, A. M.

T. H. Johnson and A. M. Hunter, J. Appl. Phys. 51, 2406 (1980).
[CrossRef]

Jacob, J. H.

J. A. Mangano, J. H. Jacob, M. Rokni, and A. Hawryluk, Appl. Phys. Lett. 31, 26 (1977).
[CrossRef]

Johnson, T. H.

T. H. Johnson and A. M. Hunter, J. Appl. Phys. 51, 2406 (1980).
[CrossRef]

Kannari, F.

F. Kannari, M. Obara, and T. Fujioka, J. Appl. Phys. 57, 4309 (1985).
[CrossRef]

Komori, H.

K. Hakuta, H. Komori, N. Mukai, and H. Takuma, in Digest of International Quantum Electronics Conference (Optical Society of America, Washington, D.C., 1986), paper WGG4;J. Appl. Phys. 61, 2113 (1987).

Mangano, J. A.

J. A. Mangano, J. H. Jacob, M. Rokni, and A. Hawryluk, Appl. Phys. Lett. 31, 26 (1977).
[CrossRef]

McCown, A. W.

A. W. McCown, Appl. Phys. Lett. 50, 804 (1987).
[CrossRef]

A. W. McCown and J. A. B. Godard, in Digest of Conference on Lasers and Electro-Optics (Optical Society of America, Washington, D.C., 1987), paper WR6.

Mukai, N.

K. Hakuta, H. Komori, N. Mukai, and H. Takuma, in Digest of International Quantum Electronics Conference (Optical Society of America, Washington, D.C., 1986), paper WGG4;J. Appl. Phys. 61, 2113 (1987).

Nishioka, H.

K. Ueda, H. Nishioka, and H. Takuma, Proc. Soc. Photo-Opt. Instrum. Eng. 710, 7 (1986).

Obara, M.

F. Kannari, M. Obara, and T. Fujioka, J. Appl. Phys. 57, 4309 (1985).
[CrossRef]

Rokni, M.

J. A. Mangano, J. H. Jacob, M. Rokni, and A. Hawryluk, Appl. Phys. Lett. 31, 26 (1977).
[CrossRef]

Sauerbrey, R.

R. Sauerbrey, Y. Zhu, F. K. Tittel, and W. L. Wilson, J. Chem. Phys. 85, 1299 (1986).
[CrossRef]

Schlotter, N. E.

D. L. Huestis and N. E. Schlotter, J. Chem. Phys. 69, 3100 (1978).
[CrossRef]

Takuma, H.

K. Ueda, H. Nishioka, and H. Takuma, Proc. Soc. Photo-Opt. Instrum. Eng. 710, 7 (1986).

K. Hakuta, H. Komori, N. Mukai, and H. Takuma, in Digest of International Quantum Electronics Conference (Optical Society of America, Washington, D.C., 1986), paper WGG4;J. Appl. Phys. 61, 2113 (1987).

Tittel, F. K.

R. Sauerbrey, Y. Zhu, F. K. Tittel, and W. L. Wilson, J. Chem. Phys. 85, 1299 (1986).
[CrossRef]

Ueda, K.

K. Ueda, H. Nishioka, and H. Takuma, Proc. Soc. Photo-Opt. Instrum. Eng. 710, 7 (1986).

Wadt, W. R.

W. R. Wadt and P. J. Hay, J. Chem. Phys. 68, 3850 (1978).
[CrossRef]

Wilson, W. L.

R. Sauerbrey, Y. Zhu, F. K. Tittel, and W. L. Wilson, J. Chem. Phys. 85, 1299 (1986).
[CrossRef]

Zhu, Y.

R. Sauerbrey, Y. Zhu, F. K. Tittel, and W. L. Wilson, J. Chem. Phys. 85, 1299 (1986).
[CrossRef]

Appl. Phys. Lett. (2)

A. W. McCown, Appl. Phys. Lett. 50, 804 (1987).
[CrossRef]

J. A. Mangano, J. H. Jacob, M. Rokni, and A. Hawryluk, Appl. Phys. Lett. 31, 26 (1977).
[CrossRef]

J. Appl. Phys. (2)

T. H. Johnson and A. M. Hunter, J. Appl. Phys. 51, 2406 (1980).
[CrossRef]

F. Kannari, M. Obara, and T. Fujioka, J. Appl. Phys. 57, 4309 (1985).
[CrossRef]

J. Chem. Phys. (3)

R. Sauerbrey, Y. Zhu, F. K. Tittel, and W. L. Wilson, J. Chem. Phys. 85, 1299 (1986).
[CrossRef]

W. R. Wadt and P. J. Hay, J. Chem. Phys. 68, 3850 (1978).
[CrossRef]

D. L. Huestis and N. E. Schlotter, J. Chem. Phys. 69, 3100 (1978).
[CrossRef]

Proc. Soc. Photo-Opt. Instrum. Eng. (1)

K. Ueda, H. Nishioka, and H. Takuma, Proc. Soc. Photo-Opt. Instrum. Eng. 710, 7 (1986).

Other (4)

K. Hakuta, H. Komori, N. Mukai, and H. Takuma, in Digest of International Quantum Electronics Conference (Optical Society of America, Washington, D.C., 1986), paper WGG4;J. Appl. Phys. 61, 2113 (1987).

D. B. Geohegan and J. G. Eden, in Digest of International Laser Science Conference (American Physical Society, New York, 1986), paper FF12;J. G. Eden, Proc. Soc. Photo-Opt. Instrum. Eng. 710, 109 (1986).

A. W. McCown and J. A. B. Godard, in Digest of Conference on Lasers and Electro-Optics (Optical Society of America, Washington, D.C., 1987), paper WR6.

Ch. A. Brau, in Excimer Lasers, C. K. Rhodes, ed. (Springer-Verlag, Berlin, 1984), p. 121.

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Figures (5)

Fig. 1
Fig. 1

A typical display of the observed signals. The upper traces of (A) and (B) are the fluorescence signals of the Ar2F excimer at 290 nm with and without the laser irradiation. The lower trace (C) with two peaks shows the temporal relation between the e beam and the laser irradiation. The first peak is due to ArF fluorescence by the e beam, and the second peak is due to scattering of the laser irradiation.

Fig. 2
Fig. 2

Fluorescence suppression signals of Ar2F observed under three different buffer-gas conditions. Partial pressure of F2 gas and irradiating laser fluence are kept to 2 Torr and 0.75 J/cm2, respectively. The dashed lines are signals observed without laser irradiation.

Fig. 3
Fig. 3

Fluorescence signal of ArF observed at 193 nm. Signals of Ar2F with and without the laser irradiation are also shown. Irradiating laser fluence is 0.7 J/cm2. Total pressure of the sample gas is 1 atm, and the partial pressure of F2 gas is 2 Torr.

Fig. 4
Fig. 4

Power dependence of the fluorescence suppression measured under three different buffer-gas conditions. The solid lines show the calculated results obtained by Using the photoabsorption cross section of 3.3 × 10−18 cm2.

Fig. 5
Fig. 5

Laser-induced ArF emission signals observed (a) and calculated (b) under two different buffer-gas conditions. The irradiated laser waveform is shown in c, the fluence of which is 0.45 J/cm2. Time scales are 10 nsec/division for all cases.

Tables (1)

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Table 1 Photodissociation Process of Ar2F (42Γ) Possible by KrF Laser Radation (Photon Energy of 5 eV) and Population Recovery Processes

Equations (2)

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( d N Ar 2 F / d t ) = ( 1 / τ Ar 2 F ) N Ar 2 F [ σ I ( t ) / h ν ] N Ar 2 F ,
( d N ArF / d t ) = ( 1 / τ ArF ) N ArF + [ σ I ( t ) / h v ] N Ar 2 F ,

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