Abstract

The past two decades have seen great advances in developing color centers in diamond for sensing, quantum information processing, and tests of quantum foundations. Increasingly, the success of these applications as well as fundamental investigations of light–matter interaction depend on improved control of optical interactions with color centers—from better fluorescence collection to efficient and precise coupling with confined single optical modes. Wide ranging research efforts have been undertaken to address these demands through advanced nanofabrication of diamond. This review will cover recent advances in diamond nano- and microphotonic structures for efficient light collection, color center to nanocavity coupling, hybrid integration of diamond devices with other material systems, and the wide range of fabrication methods that have enabled these complex photonic diamond systems.

© 2016 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation

T. Schröder, M. Walsh, J. Zheng, S. Mouradian, L. Li, G. Malladi, H. Bakhru, M. Lu, A. Stein, M. Heuck, and D. Englund
Opt. Mater. Express 7(5) 1514-1524 (2017)

Coupling of silicon-vacancy centers to a single crystal diamond cavity

Jonathan C. Lee, Igor Aharonovich, Andrew P. Magyar, Fabian Rol, and Evelyn L. Hu
Opt. Express 20(8) 8891-8897 (2012)

Diamond waveguides fabricated by reactive ion etching

Mark P. Hiscocks, Kumaravelu Ganesan, Brant C. Gibson, Shane T. Huntington, François Ladouceur, and Steven Prawer
Opt. Express 16(24) 19512-19519 (2008)

References

  • View by:
  • |
  • |
  • |

  1. J. Wrachtrup and F. Jelezko, “Processing quantum information in diamond,” J. Phys. 18, S807–S824 (2006).
  2. L. Childress and R. Hanson, “Diamond NV centers for quantum computing and quantum networks,” MRS Bull. 38(02), 134–138 (2013).
    [Crossref]
  3. K. Nemoto, M. Trupke, S. J. Devitt, A. M. Stephens, K. Buczak, T. Nobauer, M. S. Everitt, J. Schmiedmayer, and W. J. Munro, “Photonic architecture for scalable quantum information processing in NV-diamond,” arXiv:1309.4277 [quant-ph] (2013).
  4. J. Wrachtrup, F. Jelezko, B. Grotz, and L. McGuinness, “Nitrogen-vacancy centers close to surfaces,” MRS Bull. 38(02), 149–154 (2013).
    [Crossref]
  5. S. Hong, M. S. Grinolds, L. M. Pham, D. Le Sage, L. Luan, R. L. Walsworth, and A. Yacoby, “Nanoscale magnetometry with NV centers in diamond,” MRS Bull. 38(02), 155–161 (2013).
    [Crossref]
  6. R. Schirhagl, K. Chang, M. Loretz, and C. L. Degen, “Nitrogen-vacancy centers in diamond: nanoscale sensors for physics and biology,” Annu. Rev. Phys. Chem. 65, 83–105 (2014).
    [Crossref]
  7. L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77, 056503 (2014).
    [Crossref]
  8. R. Brouri, A. Beveratos, J.-P. Poizat, and P. Grangier, “Photon antibunching in the fluorescence of individual color centers in diamond,” Opt. Lett. 25, 1294–1296 (2000).
    [Crossref]
  9. C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable solid-state source of single photons,” Phys. Rev. Lett. 85, 290–293 (2000).
    [Crossref]
  10. N. Bar-Gill, L. M. Pham, A. Jarmola, D. Budker, and R. L. Walsworth, “Solid-state electronic spin coherence time approaching one second,” Nat. Commun. 4, 1743 (2013).
    [Crossref]
  11. P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
    [Crossref]
  12. W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9, 363–373 (2015).
    [Crossref]
  13. J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cappellaro, L. Jiang, M. V. G. Dutt, E. Togan, A. S. Zibrov, A. Yacoby, R. L. Walsworth, and M. D. Lukin, “Nanoscale magnetic sensing with an individual electronic spin in diamond,” Nature 455, 644–647 (2008).
    [Crossref]
  14. F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
    [Crossref]
  15. P. Ovartchaiyapong, K. W. Lee, B. A. Myers, and A. C. B. Jayich, “Dynamic strain-mediated coupling of a single diamond spin to a mechanical resonator,” Nat. Commun. 5, 4429 (2014).
    [Crossref]
  16. J. Cai, F. Jelezko, and M. B. Plenio, “Hybrid sensors based on colour centres in diamond and piezoactive layers,” Nat. Commun. 5, 4065 (2014).
    [Crossref]
  17. P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
    [Crossref]
  18. H. Clevenson, M. E. Trusheim, C. Teale, T. Schröder, D. Braje, and D. Englund, “Broadband magnetometry and temperature sensing with a light-trapping diamond waveguide,” Nat. Phys. 11, 393–397 (2015).
    [Crossref]
  19. T. Wolf, P. Neumann, K. Nakamura, H. Sumiya, T. Ohshima, J. Isoya, and J. Wrachtrup, “Subpicotesla diamond magnetometry,” Phys. Rev. X 5, 041001 (2015).
    [Crossref]
  20. D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
    [Crossref]
  21. J. M. Taylor, P. Cappellaro, L. Childress, L. Jiang, D. Budker, P. R. Hemmer, A. Yacoby, R. Walsworth, and M. D. Lukin, “High-sensitivity diamond magnetometer with nanoscale resolution,” Nat. Phys. 4, 810–816 (2008).
    [Crossref]
  22. I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
    [Crossref]
  23. T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
    [Crossref]
  24. J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).
  25. A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
    [Crossref]
  26. J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
    [Crossref]
  27. L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
    [Crossref]
  28. I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
    [Crossref]
  29. Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, “Smooth and high-rate reactive ion etching of diamond,” Diam. Relat. Mater. 11, 824–827 (2002).
    [Crossref]
  30. B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diam. Relat. Mater. 19, 621–629 (2010).
    [Crossref]
  31. L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
    [Crossref]
  32. B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching,” Nano Lett. 15, 5131–5136 (2015).
    [Crossref]
  33. A. A. Martin, M. Toth, and I. Aharonovich, “Subtractive 3D printing of optically active diamond structures,” Sci. Rep. 4, 5022 (2014).
  34. S. Schietinger, M. Barth, T. Aichele, and O. Benson, “Plasmon-enhanced single photon emission from a nanoassembled metal–diamond hybrid structure at room temperature,” Nano Lett. 9, 1694–1698 (2009).
    [Crossref]
  35. M. Barth, S. Schietinger, T. Schröder, T. Aichele, and O. Benson, “Controlled coupling of NV defect centers to plasmonic and photonic nanostructures,” J. Lumin. 130, 1628–1634 (2010).
    [Crossref]
  36. I. Bulu, T. Babinec, B. Hausmann, J. T. Choy, and M. Lončar, “Plasmonic resonators for enhanced diamond NV- center single photon sources,” Opt. Express 19, 5268 (2011).
    [Crossref]
  37. J. T. Choy, I. Bulu, B. J. M. Hausmann, E. Janitz, I.-C. Huang, and M. Lončar, “Spontaneous emission and collection efficiency enhancement of single emitters in diamond via plasmonic cavities and gratings,” Appl. Phys. Lett. 103, 161101 (2013).
    [Crossref]
  38. B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
    [Crossref]
  39. R. P. Mildren and A. Sabella, “Highly efficient diamond Raman laser,” Opt. Lett. 34, 2811–2813 (2009).
    [Crossref]
  40. P. Ovartchaiyapong, L. M. A. Pascal, B. A. Myers, P. Lauria, and A. C. B. Jayich, “High quality factor single-crystal diamond mechanical resonators,” Appl. Phys. Lett. 101, 163505 (2012).
    [Crossref]
  41. O. Benson, “Assembly of hybrid photonic architectures from nanophotonic constituents,” Nature 480, 193–199 (2011).
    [Crossref]
  42. M. E. Trusheim, L. Li, A. Laraoui, E. H. Chen, H. Bakhru, T. Schröder, O. Gaathon, C. A. Meriles, and D. Englund, “Scalable fabrication of high purity diamond nanocrystals with long-spin-coherence nitrogen vacancy centers,” Nano Lett. 14, 32–36 (2014).
    [Crossref]
  43. H. S. Knowles, D. M. Kara, and M. Atatüre, “Observing bulk diamond spin coherence in high-purity nanodiamonds,” Nat. Mater. 13, 21–25 (2014).
    [Crossref]
  44. C. J. H. Wort and R. S. Balmer, “Diamond as an electronic material,” Mater. Today 11(1–2), 22–28 (2008).
    [Crossref]
  45. R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
    [Crossref]
  46. V. N. Mochalin, O. Shenderova, D. Ho, and Y. Gogotsi, “The properties and applications of nanodiamonds,” Nat. Nanotechnol. 7, 11–23 (2012).
    [Crossref]
  47. J. E. Desnoyehs and J. A. Morrison, “The heat capacity of diamond between 12·8° and 277°K,” Philos. Mag. 3(25), 42–48 (1958).
    [Crossref]
  48. G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
    [Crossref]
  49. T. Teraji, T. Taniguchi, S. Koizumi, K. Watanabe, M. Liao, Y. Koide, and J. Isoya, “Chemical vapor deposition of 12 C isotopically enriched polycrystalline diamond,” Jpn. J. Appl. Phys. 51, 090104 (2012).
  50. A. M. Zaitsev, Optical Properties of Diamond (Springer, 2001).
  51. I. Aharonovich and E. Neu, “Diamond nanophotonics,” Adv. Opt. Mater. 2, 911–928 (2014).
    [Crossref]
  52. A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. V. Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276, 2012–2014 (1997).
    [Crossref]
  53. H. J. Kimble, “The quantum internet,” Nature 453, 1023–1030 (2008).
    [Crossref]
  54. D. D. Awschalom, L. C. Bassett, A. S. Dzurak, E. L. Hu, and J. R. Petta, “Quantum spintronics: engineering and manipulating atom-like spins in semiconductors,” Science 339, 1174–1179 (2013).
    [Crossref]
  55. M. W. Doherty, N. B. Manson, P. Delaney, F. Jelezko, J. Wrachtrup, and L. C. L. Hollenberg, “The nitrogen-vacancy colour centre in diamond,” Phys. Rep. 528, 1–45 (2013).
    [Crossref]
  56. E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sørensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
    [Crossref]
  57. H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
    [Crossref]
  58. W. Pfaff, B. J. Hensen, H. Bernien, S. B. V. Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
    [Crossref]
  59. B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
    [Crossref]
  60. H. Kosaka and N. Niikura, “Entangled absorption of a single photon with a single spin in diamond,” Phys. Rev. Lett. 114, 053603 (2015).
    [Crossref]
  61. R. Yang, C. A. Zorman, and P. X. L. Feng, “High frequency torsional-mode nanomechanical resonators enabled by very thin nanocrystalline diamond diaphragms,” Diam. Relat. Mater. 54, 19–25 (2015).
    [Crossref]
  62. A. Sipahigil, K. Jahnke, L. Rogers, T. Teraji, J. Isoya, A. Zibrov, F. Jelezko, and M. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113, 113602 (2014).
    [Crossref]
  63. S. Furuyama, K. Tahara, T. Iwasaki, M. Shimizu, J. Yaita, M. Kondo, T. Kodera, and M. Hatano, “Improvement of fluorescence intensity of nitrogen vacancy centers in self-formed diamond microstructures,” Appl. Phys. Lett. 107, 163102 (2015).
    [Crossref]
  64. I. Aharonovich, J. C. Lee, A. P. Magyar, D. O. Bracher, and E. L. Hu, “Bottom-up engineering of diamond micro- and nano-structures,” Laser Photon. Rev. 7, L61–L65 (2013).
    [Crossref]
  65. D. Sovyk, V. Ralchenko, M. Komlenok, A. A. Khomich, V. Shershulin, V. Vorobyov, I. Vlasov, V. Konov, and A. Akimov, “Fabrication of diamond microstub photoemitters with strong photoluminescence of SiV color centers: bottom-up approach,” Appl. Phys. A 118, 17–21 (2014).
    [Crossref]
  66. Y. Tao and C. Degen, “Facile fabrication of single-crystal-diamond nanostructures with ultrahigh aspect ratio,” Adv. Mater. 25, 3962–3967 (2013).
    [Crossref]
  67. I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
    [Crossref]
  68. M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
    [Crossref]
  69. M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
    [Crossref]
  70. M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
    [Crossref]
  71. B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5, 041051 (2015).
    [Crossref]
  72. M. Schreck, J. Asmussen, S. Shikata, J.-C. Arnault, and N. Fujimori, “Large-area high-quality single crystal diamond,” MRS Bull. 39(06), 504–510 (2014).
    [Crossref]
  73. T. A. Kennedy, J. S. Colton, J. E. Butler, R. C. Linares, and P. J. Doering, “Long coherence times at 300  K for nitrogen-vacancy center spins in diamond grown by chemical vapor deposition,” Appl. Phys. Lett. 83, 4190–4192 (2003).
    [Crossref]
  74. K. Ohno, F. J. Heremans, L. C. Bassett, B. A. Myers, D. M. Toyli, A. C. B. Jayich, C. J. Palmstrøm, and D. D. Awschalom, “Engineering shallow spins in diamond with nitrogen delta-doping,” Appl. Phys. Lett. 101, 082413 (2012).
    [Crossref]
  75. L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
    [Crossref]
  76. J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
    [Crossref]
  77. T. Teraji, T. Yamamoto, K. Watanabe, Y. Koide, J. Isoya, S. Onoda, T. Ohshima, L. J. Rogers, F. Jelezko, P. Neumann, J. Wrachtrup, and S. Koizumi, “Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single color center formation,” Phys. Status Solidi A 212, 2365–2384 (2015).
    [Crossref]
  78. S. Gsell, T. Bauer, J. Goldfuß, M. Schreck, and B. Stritzker, “A route to diamond wafers by epitaxial deposition on silicon via iridium/yttria-stabilized zirconia buffer layers,” Appl. Phys. Lett. 84, 4541–4543 (2004).
    [Crossref]
  79. M. Schreck, F. Hörmann, H. Roll, J. K. N. Lindner, and B. Stritzker, “Diamond nucleation on iridium buffer layers and subsequent textured growth: a route for the realization of single-crystal diamond films,” Appl. Phys. Lett. 78, 192–194 (2001).
    [Crossref]
  80. M. Schreck, A. Schury, F. Hörmann, H. Roll, and B. Stritzker, “Mosaicity reduction during growth of heteroepitaxial diamond films on iridium buffer layers: experimental results and numerical simulations,” J. Appl. Phys. 91, 676–685 (2002).
    [Crossref]
  81. P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
    [Crossref]
  82. L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).
  83. J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV-spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
    [Crossref]
  84. C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
    [Crossref]
  85. B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
    [Crossref]
  86. A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
    [Crossref]
  87. J. C. Lee, A. P. Magyar, D. O. Bracher, I. Aharonovich, and E. L. Hu, “Fabrication of thin diamond membranes for photonic applications,” Diam. Relat. Mater. 33, 45–48 (2013).
    [Crossref]
  88. I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
  89. O. Gaathon, J. S. Hodges, E. H. Chen, L. Li, S. Bakhru, H. Bakhru, D. Englund, and R. M. Osgood, “Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers,” Opt. Mater. 35, 361–365 (2013).
    [Crossref]
  90. A. A. Martin, S. Randolph, A. Botman, M. Toth, and I. Aharonovich, “Maskless milling of diamond by a focused oxygen ion beam,” Sci. Rep. 5, 8958 (2015).
    [Crossref]
  91. J. T. Choy, B. J. M. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
    [Crossref]
  92. J. K. W. Yang, V. Anant, and K. K. Berggren, “Enhancing etch resistance of hydrogen silsesquioxane via postdevelop electron curing,” J. Vac. Sci. Technol. B 24, 3157 (2006).
    [Crossref]
  93. M. Lipson, “Silicon photonics: an exercise in self control,” Nat. Photonics 1, 18–19 (2007).
    [Crossref]
  94. X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4, 557–560 (2010).
    [Crossref]
  95. C. Peroz, S. Dhuey, M. Cornet, M. Vogler, D. Olynick, and S. Cabrini, “Single digit nanofabrication by step-and-repeat nanoimprint lithography,” Nanotechnology 23, 015305 (2012).
    [Crossref]
  96. I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
    [Crossref]
  97. R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
    [Crossref]
  98. J. Martin, R. Wannemacher, J. Teichert, L. Bischoff, and B. Köhler, “Generation and detection of fluorescent color centers in diamond with submicron resolution,” Appl. Phys. Lett. 75, 3096–3098 (1999).
    [Crossref]
  99. C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
    [Crossref]
  100. C. A. McLellan, B. A. Myers, S. Kraemer, K. Ohno, D. D. Awschalom, and A. C. B. Jayich, “Deterministic formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique,” arXiv:1512.08821 [cond-mat] (2015).
  101. I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
    [Crossref]
  102. G. Davies, “Charge states of the vacancy in diamond,” Nature 269, 498–500 (1977).
    [Crossref]
  103. V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
    [Crossref]
  104. S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12, 065017 (2010).
    [Crossref]
  105. J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
    [Crossref]
  106. G. Davies and M. F. Hamer, “Optical studies of the 1.945  eV vibronic band in diamond,” Proc. R. Soc. London A 348, 285–298 (1976).
  107. A. T. Collins and I. Kiflawi, “The annealing of radiation damage in type Ia diamond,” J. Phys. 21, 364209 (2009).
    [Crossref]
  108. P. Deák, B. Aradi, M. Kaviani, T. Frauenheim, and A. Gali, “Formation of NV centers in diamond: a theoretical study based on calculated transitions and migration of nitrogen and vacancy related defects,” Phys. Rev. B 89, 075203 (2014).
    [Crossref]
  109. J. Schwartz, S. Aloni, D. F. Ogletree, and T. Schenkel, “Effects of low-energy electron irradiation on formation of nitrogen-vacancy centers in single-crystal diamond,” New J. Phys. 14, 043024 (2012).
  110. J. Schwartz, S. Aloni, D. F. Ogletree, M. Tomut, M. Bender, D. Severin, C. Trautmann, I. W. Rangelow, and T. Schenkel, “Local formation of nitrogen-vacancy centers in diamond by swift heavy ions,” J. Appl. Phys. 116, 214107 (2014).
    [Crossref]
  111. C. Santori, P. E. Barclay, K.-M. C. Fu, and R. G. Beausoleil, “Vertical distribution of nitrogen-vacancy centers in diamond formed by ion implantation and annealing,” Phys. Rev. B 79, 125313 (2009).
    [Crossref]
  112. K. Ohno, F. J. Heremans, C. F. D. l. Casas, B. A. Myers, B. J. Alemán, A. C. B. Jayich, and D. D. Awschalom, “Three-dimensional localization of spins in diamond using 12c implantation,” Appl. Phys. Lett. 105, 052406 (2014).
    [Crossref]
  113. B. Naydenov, F. Reinhard, A. Lämmle, V. Richter, R. Kalish, U. F. S. D’Haenens-Johansson, M. Newton, F. Jelezko, and J. Wrachtrup, “Increasing the coherence time of single electron spins in diamond by high temperature annealing,” Appl. Phys. Lett. 97, 242511 (2010).
    [Crossref]
  114. R. E. Evans, A. Sipahigil, D. D. Sukachev, A. S. Zibrov, and M. D. Lukin, “Coherent optical emitters in diamond nanostructures via ion implantation,” arXiv:1512.03820 [cond-mat, physics:quant-ph] (2015).
  115. Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
    [Crossref]
  116. P. Tamarat, T. Gaebel, J. R. Rabeau, M. Khan, A. D. Greentree, H. Wilson, L. C. L. Hollenberg, S. Prawer, P. Hemmer, F. Jelezko, and J. Wrachtrup, “Stark shift control of single optical centers in diamond,” Phys. Rev. Lett. 97, 083002 (2006).
    [Crossref]
  117. S. Cui and E. L. Hu, “Effect of fluorinated diamond surface on charge state of nitrogen-vacancy centers,” arXiv:1304.1407 (2013).
  118. A. Mainwood, “Nitrogen and nitrogen-vacancy complexes and their formation in diamond,” Phys. Rev. B 49, 7934–7940 (1994).
    [Crossref]
  119. F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
    [Crossref]
  120. Z. Huang, W.-D. Li, C. Santori, V. M. Acosta, A. Faraon, T. Ishikawa, W. Wu, D. Winston, R. S. Williams, and R. G. Beausoleil, “Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing,” Appl. Phys. Lett. 103, 081906 (2013).
    [Crossref]
  121. D. McCloskey, D. Fox, N. O’Hara, V. Usov, D. Scanlan, N. McEvoy, G. S. Duesberg, G. L. W. Cross, H. Z. Zhang, and J. F. Donegan, “Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond,” Appl. Phys. Lett. 104, 031109 (2014).
    [Crossref]
  122. P. Andrich, B. J. Alemán, J. C. Lee, K. Ohno, C. F. de las Casas, F. J. Heremans, E. L. Hu, and D. D. Awschalom, “Engineered micro- and nanoscale diamonds as mobile probes for high-resolution sensing in fluid,” Nano Lett. 14, 4959–4964 (2014).
    [Crossref]
  123. T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
    [Crossref]
  124. J. Cai, A. Retzker, F. Jelezko, and M. B. Plenio, “A large-scale quantum simulator on a diamond surface at room temperature,” Nat. Phys. 9, 168–173 (2013).
    [Crossref]
  125. G. Waldherr, Y. Wang, S. Zaiser, M. Jamali, T. Schulte-Herbrüggen, H. Abe, T. Ohshima, J. Isoya, J. F. Du, P. Neumann, and J. Wrachtrup, “Quantum error correction in a solid-state hybrid spin register,” Nature 506, 204–207 (2014).
    [Crossref]
  126. T. H. Taminiau, J. Cramer, T. V. D. Sar, V. V. Dobrovitski, and R. Hanson, “Universal control and error correction in multi-qubit spin registers in diamond,” Nat. Nanotechnol. 9, 171–176 (2014).
    [Crossref]
  127. J. Meijer, B. Burchard, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, and J. Wrachtrup, “Generation of single color centers by focused nitrogen implantation,” Appl. Phys. Lett. 87, 261909 (2005).
    [Crossref]
  128. J. R. Rabeau, P. Reichart, G. Tamanyan, D. N. Jamieson, S. Prawer, F. Jelezko, T. Gaebel, I. Popa, M. Domhan, and J. Wrachtrup, “Implantation of labelled single nitrogen vacancy centers in diamond using N15,” Appl. Phys. Lett. 88, 023113 (2006).
    [Crossref]
  129. S. Pezzagna, D. Rogalla, D. Wildanger, J. Meijer, and A. Zaitsev, “Creation and nature of optical centres in diamond for single-photon emission-overview and critical remarks,” New J. Phys. 13, 035024 (2011).
    [Crossref]
  130. J. F. Ziegler and J. P. Biersack, “The stopping and range of ions in matter,” in Treatise on Heavy-Ion Science, D. A. Bromley, ed. (Springer, 1985), pp. 93–129.
  131. J. Ziegler, Interactions of Ions with Matter, http://srim.org/ .
  132. C. Wang, C. Kurtsiefer, H. Weinfurter, and B. Burchard, “Single photon emission from SiV centres in diamond produced by ion implantation,” J. Phys. B 39, 37–41 (2006).
    [Crossref]
  133. D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
    [Crossref]
  134. J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
    [Crossref]
  135. K. Y. Han, K. I. Willig, E. Rittweger, F. Jelezko, C. Eggeling, and S. W. Hell, “Three-dimensional stimulated emission depletion microscopy of nitrogen-vacancy centers in diamond using continuous-wave light,” Nano Lett. 9, 3323–3329 (2009).
    [Crossref]
  136. S. Pezzagna, D. Wildanger, P. Mazarov, A. D. Wieck, Y. Sarov, I. Rangelow, B. Naydenov, F. Jelezko, S. W. Hell, and J. Meijer, “Nanoscale engineering and optical addressing of single spins in diamond,” Small 6, 2117–2121 (2010).
    [Crossref]
  137. D. M. Toyli, C. D. Weis, G. D. Fuchs, T. Schenkel, and D. D. Awschalom, “Chip-scale nanofabrication of single spins and spin arrays in diamond,” Nano Lett. 10, 3168–3172 (2010).
    [Crossref]
  138. S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
    [Crossref]
  139. J. Riedrich-Möller, C. Arend, C. Pauly, F. Mücklich, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond,” Nano Lett. 14, 5281–5287 (2014).
    [Crossref]
  140. J. Riedrich-Möller, S. Pezzagna, J. Meijer, C. Pauly, F. Mücklich, M. Markham, A. M. Edmonds, and C. Becher, “Nanoimplantation and Purcell enhancement of single nitrogen-vacancy centers in photonic crystal cavities in diamond,” Appl. Phys. Lett. 106, 221103 (2015).
    [Crossref]
  141. T. Schröder, E. Chen, L. Li, M. Walsh, M. E. Trusheim, I. Bayn, and D. Englund, “Targeted creation and Purcell enhancement of NV centers within photonic crystal cavities in single-crystal diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2014), paper FW1B.6.
  142. T. Schröder, L. Li, E. Chen, M. Walsh, M. E. Trusheim, I. Bayn, J. Zheng, S. Mouradian, H. Bakhru, O. Gaathon, and D. R. Englund, “Deterministic high-yield creation of nitrogen vacancy centers in diamond photonic crystal cavities and photonic elements,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2015), paper FTh3B.1.
  143. A. M. Edmonds, U. F. S. D’Haenens-Johansson, R. J. Cruddace, M. E. Newton, K.-M. C. Fu, C. Santori, R. G. Beausoleil, D. J. Twitchen, and M. L. Markham, “Production of oriented nitrogen-vacancy color centers in synthetic diamond,” Phys. Rev. B 86, 035201 (2012).
    [Crossref]
  144. L. M. Pham, N. Bar-Gill, C. Belthangady, D. Le Sage, P. Cappellaro, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Enhanced solid-state multispin metrology using dynamical decoupling,” Phys. Rev. B 86, 045214 (2012).
    [Crossref]
  145. J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
    [Crossref]
  146. M. Lesik, J.-P. Tetienne, A. Tallaire, J. Achard, V. Mille, A. Gicquel, J.-F. Roch, and V. Jacques, “Perfect preferential orientation of nitrogen-vacancy defects in a synthetic diamond sample,” Appl. Phys. Lett. 104, 113107 (2014).
    [Crossref]
  147. K. Nemoto, M. Trupke, S. J. Devitt, B. Scharfenberger, K. Buczak, J. Schmiedmayer, and W. J. Munro, “Photonic quantum networks formed from NV- centers,” arXiv:1412.5950 [quant-ph] (2014).
  148. B. Shields, Q. Unterreithmeier, N. de Leon, H. Park, and M. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114, 136402 (2015).
    [Crossref]
  149. W. Lukosz and R. E. Kunz, “Light emission by magnetic and electric dipoles close to a plane interface. I. Total radiated power,” J. Opt. Soc. Am. 67, 1607–1615 (1977).
    [Crossref]
  150. K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166–169 (2011).
    [Crossref]
  151. T. Schröder, F. Gädeke, M. J. Banholzer, and O. Benson, “Ultrabright and efficient single-photon generation based on nitrogen-vacancy centres in nanodiamonds on a solid immersion lens,” New J. Phys. 13, 055017 (2011).
    [Crossref]
  152. E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
    [Crossref]
  153. S. A. Momenzadeh, R. J. Stöhr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
    [Crossref]
  154. S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
    [Crossref]
  155. B. J. M. Hausmann, T. M. Babinec, J. T. Choy, J. S. Hodges, S. Hong, I. Bulu, A. Yacoby, M. D. Lukin, and M. Lončar, “Single-color centers implanted in diamond nanostructures,” New J. Phys. 13, 045004 (2011).
    [Crossref]
  156. C. J. Widmann, C. Giese, M. Wolfer, D. Brink, N. Heidrich, and C. E. Nebel, “Fabrication and characterization of single crystalline diamond nanopillars with NV-centers,” Diam. Relat. Mater. 54, 2–8 (2015).
    [Crossref]
  157. P. Maletinsky, S. Hong, M. S. Grinolds, B. Hausmann, M. D. Lukin, R. L. Walsworth, M. Lončar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nature Nanotechnol. 7, 320–324 (2012).
    [Crossref]
  158. J. Love, W. Henry, W. Stewart, R. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: adiabaticity criteria,” IEE Proc. J. Optoelectron. 138, 343–354 (1991).
    [Crossref]
  159. M. Yoshita, K. Koyama, Y. Hayamizu, M. Baba, and H. Akiyama, “Improved high collection efficiency in fluorescence microscopy with a Weierstrass-sphere solid immersion lens,” Jpn. J. Appl. Phys. 41, L858–L860 (2002).
    [Crossref]
  160. A. W. Schell, T. Neumer, and O. Benson, “Numerical analysis of efficient light extraction with an elliptical solid immersion lens,” Opt. Lett. 39, 4639–4642 (2014).
    [Crossref]
  161. H. W. Choi, E. Gu, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, and M. D. Dawson, “Fabrication of natural diamond microlenses by plasma etching,” J. Vac. Sci. Technol. B 23, 130–132 (2005).
    [Crossref]
  162. C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diam. Relat. Mater. 15, 725–728 (2006).
    [Crossref]
  163. L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
    [Crossref]
  164. M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85, 123703 (2014).
    [Crossref]
  165. C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
    [Crossref]
  166. P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
    [Crossref]
  167. D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
    [Crossref]
  168. L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
    [Crossref]
  169. A. Young, C. Y. Hu, L. Marseglia, J. P. Harrison, J. L. O’Brien, and J. G. Rarity, “Cavity enhanced spin measurement of the ground state spin of an NV center in diamond,” New J. Phys. 11, 013007 (2009).
    [Crossref]
  170. K. J. Vahala, “Optical microcavities,” Nature 424, 839–846 (2003).
    [Crossref]
  171. T. G. Tiecke, J. D. Thompson, N. P. de Leon, L. R. Liu, V. Vuletić, and M. D. Lukin, “Nanophotonic quantum phase switch with a single atom,” Nature 508, 241–244 (2014).
    [Crossref]
  172. P. Meystre and M. Sargent, Elements of Quantum Optics (Springer, 2007).
  173. E. M. Purcell, “Spontaneous emission probabilities at radio frequencies,” Phys. Rev. 69, 37–38 (1946).
    [Crossref]
  174. C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “Towards a picosecond transform-limited nitrogen-vacancy based single photon source,” Opt. Express 16, 6240–6250 (2008).
    [Crossref]
  175. C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “High-performance diamond-based single-photon sources for quantum communication,” Phys. Rev. A 80, 052308 (2009).
    [Crossref]
  176. C. Santori, D. Fattal, and Y. Yamamoto, Single-Photon Devices and Applications (Wiley, 2010).
  177. H.-Q. Zhao, M. Fujiwara, and S. Takeuchi, “Suppression of fluorescence phonon sideband from nitrogen vacancy centers in diamond nanocrystals by substrate effect,” Opt. Express 20, 15628 (2012).
    [Crossref]
  178. C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett. 90, 081110 (2007).
    [Crossref]
  179. T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of single crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B 29, 010601 (2011).
    [Crossref]
  180. A. Faraon, Z. Huang, V. Acosta, C. Santori, and R. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal resonators in monocrystalline diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2012), paper QM3C.5.
  181. B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
    [Crossref]
  182. I. Bayn, B. Meyler, J. Salzman, V. Richter, and R. Kalish, “Single crystal diamond photonic crystal nanocavity: fabrication and initial characterization,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2010), paper QThL7.
  183. B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
    [Crossref]
  184. A. Faraon, C. Santori, Z. Huang, K.-M. C. Fu, V. M. Acosta, D. Fattal, and R. G. Beausoleil, “Quantum photonic devices in single-crystal diamond,” New J. Phys. 15, 025010 (2013).
    [Crossref]
  185. B. J. M. Hausmann, I. B. Bulu, P. B. Deotare, M. McCutcheon, V. Venkataraman, M. L. Markham, D. J. Twitchen, and M. Lončar, “Integrated high-quality factor optical resonators in diamond,” Nano Lett. 13, 1898–1902 (2013).
    [Crossref]
  186. Z. Huang, A. Faraon, C. Santori, V. Acosta, and R. G. Beausoleil, “Microring resonator-based diamond optothermal switch: a building block for a quantum computing network,” Proc. SPIE 8635, 86350E (2013).
  187. M. P. Hiscocks, K. Ganesan, B. C. Gibson, S. T. Huntington, F. Ladouceur, and S. Prawer, “Diamond waveguides fabricated by reactive ion etching,” Opt. Express 16, 19512–19519 (2008).
    [Crossref]
  188. C. Santori, P. E. Barclay, K.-M. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
    [Crossref]
  189. P. E. Barclay, K.-M. C. Fu, C. Santori, and R. G. Beausoleil, “Chip-based microcavities coupled to nitrogen-vacancy centers in single crystal diamond,” Appl. Phys. Lett. 95, 191115 (2009).
  190. N. Thomas, R. J. Barbour, Y. Song, M. L. Lee, and K.-M. C. Fu, “Waveguide-integrated single-crystalline GaP resonators on diamond,” Opt. Express 22, 13555–13564 (2014).
    [Crossref]
  191. P. E. Barclay, K.-M. C. Fu, C. Santori, A. Faraon, and R. G. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
    [Crossref]
  192. K.-M. C. Fu, P. E. Barclay, C. Santori, A. Faraon, and R. G. Beausoleil, “Low-temperature tapered-fiber probing of diamond nitrogen-vacancy ensembles coupled to GaP microcavities,” New J. Phys. 13, 055023 (2011).
    [Crossref]
  193. M. Larsson, K. N. Dinyari, and H. Wang, “Composite optical microcavity of diamond nanopillar and silica microsphere,” Nano Lett. 9, 1447–1450 (2009).
    [Crossref]
  194. M. Trupke, E. A. Hinds, S. Eriksson, E. A. Curtis, Z. Moktadir, E. Kukharenka, and M. Kraft, “Microfabricated high-finesse optical cavity with open access and small volume,” Appl. Phys. Lett. 87, 211106 (2005).
    [Crossref]
  195. D. Hunger, C. Deutsch, R. J. Barbour, R. J. Warburton, and J. Reichel, “Laser micro-fabrication of concave, low-roughness features in silica,” AIP Adv. 2, 012119 (2012).
    [Crossref]
  196. A. Muller, E. B. Flagg, J. R. Lawall, and G. S. Solomon, “Ultrahigh-finesse, low-mode-volume Fabry–Perot microcavity,” Opt. Lett. 35, 2293–2295 (2010).
    [Crossref]
  197. P. R. Dolan, G. M. Hughes, F. Grazioso, B. R. Patton, and J. M. Smith, “Femtoliter tunable optical cavity arrays,” Opt. Lett. 35, 3556–3558 (2010).
    [Crossref]
  198. T. Steinmetz, Y. Colombe, D. Hunger, T. W. Hänsch, A. Balocchi, R. J. Warburton, and J. Reichel, “Stable fiber-based Fabry–Pérot cavity,” Appl. Phys. Lett. 89, 111110 (2006).
    [Crossref]
  199. R. Albrecht, A. Bommer, C. Deutsch, J. Reichel, and C. Becher, “Coupling of a single nitrogen-vacancy center in diamond to a fiber-based microcavity,” Phys. Rev. Lett. 110, 243602 (2013).
    [Crossref]
  200. H. Kaupp, C. Deutsch, H.-C. Chang, J. Reichel, T. W. Hänsch, and D. Hunger, “Scaling laws of the cavity enhancement for NV centers in diamond,” arXiv:1304.0948 (2013).
  201. R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
    [Crossref]
  202. E. Janitz, M. Ruf, M. Dimock, A. Bourassa, J. Sankey, and L. Childress, “Fabry–Perot microcavity for diamond-based photonics,” Phys. Rev. A 92, 043844 (2015).
    [Crossref]
  203. K.-M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
    [Crossref]
  204. P. E. Barclay, K.-M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17, 9588–9601 (2009).
    [Crossref]
  205. M. Gould, S. Chakravarthi, I. R. Christen, N. Thomas, S. Dadgostar, Y. Song, M. L. Lee, F. Hatami, and K.-M. C. Fu, “A large-scale GaP-on-diamond integrated photonics platform for NV center-based quantum information,” arXiv:1510.05047 [cond-mat, physics:physics, physics:quant-ph] (2015).
  206. R. N. Patel, T. Schröder, N. Wan, L. Li, S. L. Mouradian, E. H. Chen, and D. R. Englund, “Efficient photon coupling from a diamond nitrogen vacancy center by integration with silica fiber,” Light Sci. Appl. 5, e16032 (2016).
    [Crossref]
  207. J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
    [Crossref]
  208. F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
    [Crossref]
  209. H. A. Atikian, A. Eftekharian, A. J. Salim, M. J. Burek, J. T. Choy, A. H. Majedi, and M. Lončar, “Superconducting nanowire single photon detector on diamond,” Appl. Phys. Lett. 104, 122602 (2014).
    [Crossref]
  210. P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
    [Crossref]
  211. L.-M. Duan and H. J. Kimble, “Scalable photonic quantum computation through cavity-assisted interactions,” Phys. Rev. Lett. 92, 127902 (2004).
    [Crossref]
  212. L.-M. Duan, M. D. Lukin, J. I. Cirac, and P. Zoller, “Long-distance quantum communication with atomic ensembles and linear optics,” Nature 414, 413–418 (2001).
    [Crossref]
  213. X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Enhanced resonance tuning of photonic crystal nanocavities by integration of optimized near-field multitip nanoprobes,” J. Nanophoton. 5, 059503 (2011).
    [Crossref]
  214. M. S. Blok, N. Kalb, A. Reiserer, T. H. Taminiau, and R. Hanson, “Towards quantum networks of single spins: analysis of a quantum memory with an optical interface in diamond,” Faraday Discuss. 184, 173–182 (2015).
    [Crossref]
  215. F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
    [Crossref]
  216. J. Cramer, N. Kalb, M. A. Rol, B. Hensen, M. S. Blok, M. Markham, D. J. Twitchen, R. Hanson, and T. H. Taminiau, “Repeated quantum error correction on a continuously encoded qubit by real-time feedback,” arXiv:1508.01388 [cond-mat, physics:quant-ph] (2015).

2016 (2)

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

R. N. Patel, T. Schröder, N. Wan, L. Li, S. L. Mouradian, E. H. Chen, and D. R. Englund, “Efficient photon coupling from a diamond nitrogen vacancy center by integration with silica fiber,” Light Sci. Appl. 5, e16032 (2016).
[Crossref]

2015 (24)

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

M. S. Blok, N. Kalb, A. Reiserer, T. H. Taminiau, and R. Hanson, “Towards quantum networks of single spins: analysis of a quantum memory with an optical interface in diamond,” Faraday Discuss. 184, 173–182 (2015).
[Crossref]

E. Janitz, M. Ruf, M. Dimock, A. Bourassa, J. Sankey, and L. Childress, “Fabry–Perot microcavity for diamond-based photonics,” Phys. Rev. A 92, 043844 (2015).
[Crossref]

C. J. Widmann, C. Giese, M. Wolfer, D. Brink, N. Heidrich, and C. E. Nebel, “Fabrication and characterization of single crystalline diamond nanopillars with NV-centers,” Diam. Relat. Mater. 54, 2–8 (2015).
[Crossref]

L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
[Crossref]

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref]

B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching,” Nano Lett. 15, 5131–5136 (2015).
[Crossref]

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9, 363–373 (2015).
[Crossref]

H. Clevenson, M. E. Trusheim, C. Teale, T. Schröder, D. Braje, and D. Englund, “Broadband magnetometry and temperature sensing with a light-trapping diamond waveguide,” Nat. Phys. 11, 393–397 (2015).
[Crossref]

T. Wolf, P. Neumann, K. Nakamura, H. Sumiya, T. Ohshima, J. Isoya, and J. Wrachtrup, “Subpicotesla diamond magnetometry,” Phys. Rev. X 5, 041001 (2015).
[Crossref]

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

H. Kosaka and N. Niikura, “Entangled absorption of a single photon with a single spin in diamond,” Phys. Rev. Lett. 114, 053603 (2015).
[Crossref]

R. Yang, C. A. Zorman, and P. X. L. Feng, “High frequency torsional-mode nanomechanical resonators enabled by very thin nanocrystalline diamond diaphragms,” Diam. Relat. Mater. 54, 19–25 (2015).
[Crossref]

S. Furuyama, K. Tahara, T. Iwasaki, M. Shimizu, J. Yaita, M. Kondo, T. Kodera, and M. Hatano, “Improvement of fluorescence intensity of nitrogen vacancy centers in self-formed diamond microstructures,” Appl. Phys. Lett. 107, 163102 (2015).
[Crossref]

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5, 041051 (2015).
[Crossref]

T. Teraji, T. Yamamoto, K. Watanabe, Y. Koide, J. Isoya, S. Onoda, T. Ohshima, L. J. Rogers, F. Jelezko, P. Neumann, J. Wrachtrup, and S. Koizumi, “Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single color center formation,” Phys. Status Solidi A 212, 2365–2384 (2015).
[Crossref]

A. A. Martin, S. Randolph, A. Botman, M. Toth, and I. Aharonovich, “Maskless milling of diamond by a focused oxygen ion beam,” Sci. Rep. 5, 8958 (2015).
[Crossref]

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

J. Riedrich-Möller, S. Pezzagna, J. Meijer, C. Pauly, F. Mücklich, M. Markham, A. M. Edmonds, and C. Becher, “Nanoimplantation and Purcell enhancement of single nitrogen-vacancy centers in photonic crystal cavities in diamond,” Appl. Phys. Lett. 106, 221103 (2015).
[Crossref]

B. Shields, Q. Unterreithmeier, N. de Leon, H. Park, and M. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114, 136402 (2015).
[Crossref]

S. A. Momenzadeh, R. J. Stöhr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
[Crossref]

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

2014 (40)

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
[Crossref]

J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
[Crossref]

M. Lesik, J.-P. Tetienne, A. Tallaire, J. Achard, V. Mille, A. Gicquel, J.-F. Roch, and V. Jacques, “Perfect preferential orientation of nitrogen-vacancy defects in a synthetic diamond sample,” Appl. Phys. Lett. 104, 113107 (2014).
[Crossref]

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

J. Riedrich-Möller, C. Arend, C. Pauly, F. Mücklich, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond,” Nano Lett. 14, 5281–5287 (2014).
[Crossref]

K. Ohno, F. J. Heremans, C. F. D. l. Casas, B. A. Myers, B. J. Alemán, A. C. B. Jayich, and D. D. Awschalom, “Three-dimensional localization of spins in diamond using 12c implantation,” Appl. Phys. Lett. 105, 052406 (2014).
[Crossref]

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

D. McCloskey, D. Fox, N. O’Hara, V. Usov, D. Scanlan, N. McEvoy, G. S. Duesberg, G. L. W. Cross, H. Z. Zhang, and J. F. Donegan, “Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond,” Appl. Phys. Lett. 104, 031109 (2014).
[Crossref]

P. Andrich, B. J. Alemán, J. C. Lee, K. Ohno, C. F. de las Casas, F. J. Heremans, E. L. Hu, and D. D. Awschalom, “Engineered micro- and nanoscale diamonds as mobile probes for high-resolution sensing in fluid,” Nano Lett. 14, 4959–4964 (2014).
[Crossref]

G. Waldherr, Y. Wang, S. Zaiser, M. Jamali, T. Schulte-Herbrüggen, H. Abe, T. Ohshima, J. Isoya, J. F. Du, P. Neumann, and J. Wrachtrup, “Quantum error correction in a solid-state hybrid spin register,” Nature 506, 204–207 (2014).
[Crossref]

T. H. Taminiau, J. Cramer, T. V. D. Sar, V. V. Dobrovitski, and R. Hanson, “Universal control and error correction in multi-qubit spin registers in diamond,” Nat. Nanotechnol. 9, 171–176 (2014).
[Crossref]

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

P. Deák, B. Aradi, M. Kaviani, T. Frauenheim, and A. Gali, “Formation of NV centers in diamond: a theoretical study based on calculated transitions and migration of nitrogen and vacancy related defects,” Phys. Rev. B 89, 075203 (2014).
[Crossref]

J. Schwartz, S. Aloni, D. F. Ogletree, M. Tomut, M. Bender, D. Severin, C. Trautmann, I. W. Rangelow, and T. Schenkel, “Local formation of nitrogen-vacancy centers in diamond by swift heavy ions,” J. Appl. Phys. 116, 214107 (2014).
[Crossref]

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

M. Schreck, J. Asmussen, S. Shikata, J.-C. Arnault, and N. Fujimori, “Large-area high-quality single crystal diamond,” MRS Bull. 39(06), 504–510 (2014).
[Crossref]

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

D. Sovyk, V. Ralchenko, M. Komlenok, A. A. Khomich, V. Shershulin, V. Vorobyov, I. Vlasov, V. Konov, and A. Akimov, “Fabrication of diamond microstub photoemitters with strong photoluminescence of SiV color centers: bottom-up approach,” Appl. Phys. A 118, 17–21 (2014).
[Crossref]

W. Pfaff, B. J. Hensen, H. Bernien, S. B. V. Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
[Crossref]

A. Sipahigil, K. Jahnke, L. Rogers, T. Teraji, J. Isoya, A. Zibrov, F. Jelezko, and M. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113, 113602 (2014).
[Crossref]

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

M. E. Trusheim, L. Li, A. Laraoui, E. H. Chen, H. Bakhru, T. Schröder, O. Gaathon, C. A. Meriles, and D. Englund, “Scalable fabrication of high purity diamond nanocrystals with long-spin-coherence nitrogen vacancy centers,” Nano Lett. 14, 32–36 (2014).
[Crossref]

H. S. Knowles, D. M. Kara, and M. Atatüre, “Observing bulk diamond spin coherence in high-purity nanodiamonds,” Nat. Mater. 13, 21–25 (2014).
[Crossref]

I. Aharonovich and E. Neu, “Diamond nanophotonics,” Adv. Opt. Mater. 2, 911–928 (2014).
[Crossref]

R. Schirhagl, K. Chang, M. Loretz, and C. L. Degen, “Nitrogen-vacancy centers in diamond: nanoscale sensors for physics and biology,” Annu. Rev. Phys. Chem. 65, 83–105 (2014).
[Crossref]

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77, 056503 (2014).
[Crossref]

A. A. Martin, M. Toth, and I. Aharonovich, “Subtractive 3D printing of optically active diamond structures,” Sci. Rep. 4, 5022 (2014).

P. Ovartchaiyapong, K. W. Lee, B. A. Myers, and A. C. B. Jayich, “Dynamic strain-mediated coupling of a single diamond spin to a mechanical resonator,” Nat. Commun. 5, 4429 (2014).
[Crossref]

J. Cai, F. Jelezko, and M. B. Plenio, “Hybrid sensors based on colour centres in diamond and piezoactive layers,” Nat. Commun. 5, 4065 (2014).
[Crossref]

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
[Crossref]

T. G. Tiecke, J. D. Thompson, N. P. de Leon, L. R. Liu, V. Vuletić, and M. D. Lukin, “Nanophotonic quantum phase switch with a single atom,” Nature 508, 241–244 (2014).
[Crossref]

A. W. Schell, T. Neumer, and O. Benson, “Numerical analysis of efficient light extraction with an elliptical solid immersion lens,” Opt. Lett. 39, 4639–4642 (2014).
[Crossref]

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85, 123703 (2014).
[Crossref]

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

N. Thomas, R. J. Barbour, Y. Song, M. L. Lee, and K.-M. C. Fu, “Waveguide-integrated single-crystalline GaP resonators on diamond,” Opt. Express 22, 13555–13564 (2014).
[Crossref]

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

H. A. Atikian, A. Eftekharian, A. J. Salim, M. J. Burek, J. T. Choy, A. H. Majedi, and M. Lončar, “Superconducting nanowire single photon detector on diamond,” Appl. Phys. Lett. 104, 122602 (2014).
[Crossref]

2013 (23)

R. Albrecht, A. Bommer, C. Deutsch, J. Reichel, and C. Becher, “Coupling of a single nitrogen-vacancy center in diamond to a fiber-based microcavity,” Phys. Rev. Lett. 110, 243602 (2013).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

A. Faraon, C. Santori, Z. Huang, K.-M. C. Fu, V. M. Acosta, D. Fattal, and R. G. Beausoleil, “Quantum photonic devices in single-crystal diamond,” New J. Phys. 15, 025010 (2013).
[Crossref]

B. J. M. Hausmann, I. B. Bulu, P. B. Deotare, M. McCutcheon, V. Venkataraman, M. L. Markham, D. J. Twitchen, and M. Lončar, “Integrated high-quality factor optical resonators in diamond,” Nano Lett. 13, 1898–1902 (2013).
[Crossref]

Z. Huang, A. Faraon, C. Santori, V. Acosta, and R. G. Beausoleil, “Microring resonator-based diamond optothermal switch: a building block for a quantum computing network,” Proc. SPIE 8635, 86350E (2013).

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

J. T. Choy, I. Bulu, B. J. M. Hausmann, E. Janitz, I.-C. Huang, and M. Lončar, “Spontaneous emission and collection efficiency enhancement of single emitters in diamond via plasmonic cavities and gratings,” Appl. Phys. Lett. 103, 161101 (2013).
[Crossref]

L. Childress and R. Hanson, “Diamond NV centers for quantum computing and quantum networks,” MRS Bull. 38(02), 134–138 (2013).
[Crossref]

J. Wrachtrup, F. Jelezko, B. Grotz, and L. McGuinness, “Nitrogen-vacancy centers close to surfaces,” MRS Bull. 38(02), 149–154 (2013).
[Crossref]

S. Hong, M. S. Grinolds, L. M. Pham, D. Le Sage, L. Luan, R. L. Walsworth, and A. Yacoby, “Nanoscale magnetometry with NV centers in diamond,” MRS Bull. 38(02), 155–161 (2013).
[Crossref]

N. Bar-Gill, L. M. Pham, A. Jarmola, D. Budker, and R. L. Walsworth, “Solid-state electronic spin coherence time approaching one second,” Nat. Commun. 4, 1743 (2013).
[Crossref]

D. D. Awschalom, L. C. Bassett, A. S. Dzurak, E. L. Hu, and J. R. Petta, “Quantum spintronics: engineering and manipulating atom-like spins in semiconductors,” Science 339, 1174–1179 (2013).
[Crossref]

M. W. Doherty, N. B. Manson, P. Delaney, F. Jelezko, J. Wrachtrup, and L. C. L. Hollenberg, “The nitrogen-vacancy colour centre in diamond,” Phys. Rep. 528, 1–45 (2013).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, D. O. Bracher, and E. L. Hu, “Bottom-up engineering of diamond micro- and nano-structures,” Laser Photon. Rev. 7, L61–L65 (2013).
[Crossref]

Y. Tao and C. Degen, “Facile fabrication of single-crystal-diamond nanostructures with ultrahigh aspect ratio,” Adv. Mater. 25, 3962–3967 (2013).
[Crossref]

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

O. Gaathon, J. S. Hodges, E. H. Chen, L. Li, S. Bakhru, H. Bakhru, D. Englund, and R. M. Osgood, “Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers,” Opt. Mater. 35, 361–365 (2013).
[Crossref]

J. C. Lee, A. P. Magyar, D. O. Bracher, I. Aharonovich, and E. L. Hu, “Fabrication of thin diamond membranes for photonic applications,” Diam. Relat. Mater. 33, 45–48 (2013).
[Crossref]

R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
[Crossref]

J. Cai, A. Retzker, F. Jelezko, and M. B. Plenio, “A large-scale quantum simulator on a diamond surface at room temperature,” Nat. Phys. 9, 168–173 (2013).
[Crossref]

Z. Huang, W.-D. Li, C. Santori, V. M. Acosta, A. Faraon, T. Ishikawa, W. Wu, D. Winston, R. S. Williams, and R. G. Beausoleil, “Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing,” Appl. Phys. Lett. 103, 081906 (2013).
[Crossref]

2012 (18)

A. M. Edmonds, U. F. S. D’Haenens-Johansson, R. J. Cruddace, M. E. Newton, K.-M. C. Fu, C. Santori, R. G. Beausoleil, D. J. Twitchen, and M. L. Markham, “Production of oriented nitrogen-vacancy color centers in synthetic diamond,” Phys. Rev. B 86, 035201 (2012).
[Crossref]

L. M. Pham, N. Bar-Gill, C. Belthangady, D. Le Sage, P. Cappellaro, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Enhanced solid-state multispin metrology using dynamical decoupling,” Phys. Rev. B 86, 045214 (2012).
[Crossref]

C. Peroz, S. Dhuey, M. Cornet, M. Vogler, D. Olynick, and S. Cabrini, “Single digit nanofabrication by step-and-repeat nanoimprint lithography,” Nanotechnology 23, 015305 (2012).
[Crossref]

J. Schwartz, S. Aloni, D. F. Ogletree, and T. Schenkel, “Effects of low-energy electron irradiation on formation of nitrogen-vacancy centers in single-crystal diamond,” New J. Phys. 14, 043024 (2012).

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).

J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV-spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
[Crossref]

M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
[Crossref]

K. Ohno, F. J. Heremans, L. C. Bassett, B. A. Myers, D. M. Toyli, A. C. B. Jayich, C. J. Palmstrøm, and D. D. Awschalom, “Engineering shallow spins in diamond with nitrogen delta-doping,” Appl. Phys. Lett. 101, 082413 (2012).
[Crossref]

T. Teraji, T. Taniguchi, S. Koizumi, K. Watanabe, M. Liao, Y. Koide, and J. Isoya, “Chemical vapor deposition of 12 C isotopically enriched polycrystalline diamond,” Jpn. J. Appl. Phys. 51, 090104 (2012).

V. N. Mochalin, O. Shenderova, D. Ho, and Y. Gogotsi, “The properties and applications of nanodiamonds,” Nat. Nanotechnol. 7, 11–23 (2012).
[Crossref]

P. Ovartchaiyapong, L. M. A. Pascal, B. A. Myers, P. Lauria, and A. C. B. Jayich, “High quality factor single-crystal diamond mechanical resonators,” Appl. Phys. Lett. 101, 163505 (2012).
[Crossref]

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

H.-Q. Zhao, M. Fujiwara, and S. Takeuchi, “Suppression of fluorescence phonon sideband from nitrogen vacancy centers in diamond nanocrystals by substrate effect,” Opt. Express 20, 15628 (2012).
[Crossref]

D. Hunger, C. Deutsch, R. J. Barbour, R. J. Warburton, and J. Reichel, “Laser micro-fabrication of concave, low-roughness features in silica,” AIP Adv. 2, 012119 (2012).
[Crossref]

P. Maletinsky, S. Hong, M. S. Grinolds, B. Hausmann, M. D. Lukin, R. L. Walsworth, M. Lončar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nature Nanotechnol. 7, 320–324 (2012).
[Crossref]

2011 (19)

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

P. E. Barclay, K.-M. C. Fu, C. Santori, A. Faraon, and R. G. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[Crossref]

K.-M. C. Fu, P. E. Barclay, C. Santori, A. Faraon, and R. G. Beausoleil, “Low-temperature tapered-fiber probing of diamond nitrogen-vacancy ensembles coupled to GaP microcavities,” New J. Phys. 13, 055023 (2011).
[Crossref]

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of single crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B 29, 010601 (2011).
[Crossref]

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Enhanced resonance tuning of photonic crystal nanocavities by integration of optimized near-field multitip nanoprobes,” J. Nanophoton. 5, 059503 (2011).
[Crossref]

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[Crossref]

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[Crossref]

I. Bulu, T. Babinec, B. Hausmann, J. T. Choy, and M. Lončar, “Plasmonic resonators for enhanced diamond NV- center single photon sources,” Opt. Express 19, 5268 (2011).
[Crossref]

F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

O. Benson, “Assembly of hybrid photonic architectures from nanophotonic constituents,” Nature 480, 193–199 (2011).
[Crossref]

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[Crossref]

J. T. Choy, B. J. M. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
[Crossref]

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

B. J. M. Hausmann, T. M. Babinec, J. T. Choy, J. S. Hodges, S. Hong, I. Bulu, A. Yacoby, M. D. Lukin, and M. Lončar, “Single-color centers implanted in diamond nanostructures,” New J. Phys. 13, 045004 (2011).
[Crossref]

K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166–169 (2011).
[Crossref]

T. Schröder, F. Gädeke, M. J. Banholzer, and O. Benson, “Ultrabright and efficient single-photon generation based on nitrogen-vacancy centres in nanodiamonds on a solid immersion lens,” New J. Phys. 13, 055017 (2011).
[Crossref]

S. Pezzagna, D. Rogalla, D. Wildanger, J. Meijer, and A. Zaitsev, “Creation and nature of optical centres in diamond for single-photon emission-overview and critical remarks,” New J. Phys. 13, 035024 (2011).
[Crossref]

2010 (14)

B. Naydenov, F. Reinhard, A. Lämmle, V. Richter, R. Kalish, U. F. S. D’Haenens-Johansson, M. Newton, F. Jelezko, and J. Wrachtrup, “Increasing the coherence time of single electron spins in diamond by high temperature annealing,” Appl. Phys. Lett. 97, 242511 (2010).
[Crossref]

S. Pezzagna, D. Wildanger, P. Mazarov, A. D. Wieck, Y. Sarov, I. Rangelow, B. Naydenov, F. Jelezko, S. W. Hell, and J. Meijer, “Nanoscale engineering and optical addressing of single spins in diamond,” Small 6, 2117–2121 (2010).
[Crossref]

D. M. Toyli, C. D. Weis, G. D. Fuchs, T. Schenkel, and D. D. Awschalom, “Chip-scale nanofabrication of single spins and spin arrays in diamond,” Nano Lett. 10, 3168–3172 (2010).
[Crossref]

S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12, 065017 (2010).
[Crossref]

X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4, 557–560 (2010).
[Crossref]

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sørensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[Crossref]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diam. Relat. Mater. 19, 621–629 (2010).
[Crossref]

M. Barth, S. Schietinger, T. Schröder, T. Aichele, and O. Benson, “Controlled coupling of NV defect centers to plasmonic and photonic nanostructures,” J. Lumin. 130, 1628–1634 (2010).
[Crossref]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
[Crossref]

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).

C. Santori, P. E. Barclay, K.-M. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[Crossref]

A. Muller, E. B. Flagg, J. R. Lawall, and G. S. Solomon, “Ultrahigh-finesse, low-mode-volume Fabry–Perot microcavity,” Opt. Lett. 35, 2293–2295 (2010).
[Crossref]

P. R. Dolan, G. M. Hughes, F. Grazioso, B. R. Patton, and J. M. Smith, “Femtoliter tunable optical cavity arrays,” Opt. Lett. 35, 3556–3558 (2010).
[Crossref]

P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
[Crossref]

2009 (13)

A. Young, C. Y. Hu, L. Marseglia, J. P. Harrison, J. L. O’Brien, and J. G. Rarity, “Cavity enhanced spin measurement of the ground state spin of an NV center in diamond,” New J. Phys. 11, 013007 (2009).
[Crossref]

C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “High-performance diamond-based single-photon sources for quantum communication,” Phys. Rev. A 80, 052308 (2009).
[Crossref]

M. Larsson, K. N. Dinyari, and H. Wang, “Composite optical microcavity of diamond nanopillar and silica microsphere,” Nano Lett. 9, 1447–1450 (2009).
[Crossref]

P. E. Barclay, K.-M. C. Fu, C. Santori, and R. G. Beausoleil, “Chip-based microcavities coupled to nitrogen-vacancy centers in single crystal diamond,” Appl. Phys. Lett. 95, 191115 (2009).

P. E. Barclay, K.-M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17, 9588–9601 (2009).
[Crossref]

S. Schietinger, M. Barth, T. Aichele, and O. Benson, “Plasmon-enhanced single photon emission from a nanoassembled metal–diamond hybrid structure at room temperature,” Nano Lett. 9, 1694–1698 (2009).
[Crossref]

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

R. P. Mildren and A. Sabella, “Highly efficient diamond Raman laser,” Opt. Lett. 34, 2811–2813 (2009).
[Crossref]

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

A. T. Collins and I. Kiflawi, “The annealing of radiation damage in type Ia diamond,” J. Phys. 21, 364209 (2009).
[Crossref]

C. Santori, P. E. Barclay, K.-M. C. Fu, and R. G. Beausoleil, “Vertical distribution of nitrogen-vacancy centers in diamond formed by ion implantation and annealing,” Phys. Rev. B 79, 125313 (2009).
[Crossref]

K. Y. Han, K. I. Willig, E. Rittweger, F. Jelezko, C. Eggeling, and S. W. Hell, “Three-dimensional stimulated emission depletion microscopy of nitrogen-vacancy centers in diamond using continuous-wave light,” Nano Lett. 9, 3323–3329 (2009).
[Crossref]

2008 (9)

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[Crossref]

C. J. H. Wort and R. S. Balmer, “Diamond as an electronic material,” Mater. Today 11(1–2), 22–28 (2008).
[Crossref]

H. J. Kimble, “The quantum internet,” Nature 453, 1023–1030 (2008).
[Crossref]

J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cappellaro, L. Jiang, M. V. G. Dutt, E. Togan, A. S. Zibrov, A. Yacoby, R. L. Walsworth, and M. D. Lukin, “Nanoscale magnetic sensing with an individual electronic spin in diamond,” Nature 455, 644–647 (2008).
[Crossref]

J. M. Taylor, P. Cappellaro, L. Childress, L. Jiang, D. Budker, P. R. Hemmer, A. Yacoby, R. Walsworth, and M. D. Lukin, “High-sensitivity diamond magnetometer with nanoscale resolution,” Nat. Phys. 4, 810–816 (2008).
[Crossref]

K.-M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
[Crossref]

M. P. Hiscocks, K. Ganesan, B. C. Gibson, S. T. Huntington, F. Ladouceur, and S. Prawer, “Diamond waveguides fabricated by reactive ion etching,” Opt. Express 16, 19512–19519 (2008).
[Crossref]

C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “Towards a picosecond transform-limited nitrogen-vacancy based single photon source,” Opt. Express 16, 6240–6250 (2008).
[Crossref]

2007 (4)

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett. 90, 081110 (2007).
[Crossref]

M. Lipson, “Silicon photonics: an exercise in self control,” Nat. Photonics 1, 18–19 (2007).
[Crossref]

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[Crossref]

F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
[Crossref]

2006 (9)

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

P. Tamarat, T. Gaebel, J. R. Rabeau, M. Khan, A. D. Greentree, H. Wilson, L. C. L. Hollenberg, S. Prawer, P. Hemmer, F. Jelezko, and J. Wrachtrup, “Stark shift control of single optical centers in diamond,” Phys. Rev. Lett. 97, 083002 (2006).
[Crossref]

C. Wang, C. Kurtsiefer, H. Weinfurter, and B. Burchard, “Single photon emission from SiV centres in diamond produced by ion implantation,” J. Phys. B 39, 37–41 (2006).
[Crossref]

J. R. Rabeau, P. Reichart, G. Tamanyan, D. N. Jamieson, S. Prawer, F. Jelezko, T. Gaebel, I. Popa, M. Domhan, and J. Wrachtrup, “Implantation of labelled single nitrogen vacancy centers in diamond using N15,” Appl. Phys. Lett. 88, 023113 (2006).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

J. K. W. Yang, V. Anant, and K. K. Berggren, “Enhancing etch resistance of hydrogen silsesquioxane via postdevelop electron curing,” J. Vac. Sci. Technol. B 24, 3157 (2006).
[Crossref]

J. Wrachtrup and F. Jelezko, “Processing quantum information in diamond,” J. Phys. 18, S807–S824 (2006).

T. Steinmetz, Y. Colombe, D. Hunger, T. W. Hänsch, A. Balocchi, R. J. Warburton, and J. Reichel, “Stable fiber-based Fabry–Pérot cavity,” Appl. Phys. Lett. 89, 111110 (2006).
[Crossref]

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diam. Relat. Mater. 15, 725–728 (2006).
[Crossref]

2005 (3)

H. W. Choi, E. Gu, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, and M. D. Dawson, “Fabrication of natural diamond microlenses by plasma etching,” J. Vac. Sci. Technol. B 23, 130–132 (2005).
[Crossref]

M. Trupke, E. A. Hinds, S. Eriksson, E. A. Curtis, Z. Moktadir, E. Kukharenka, and M. Kraft, “Microfabricated high-finesse optical cavity with open access and small volume,” Appl. Phys. Lett. 87, 211106 (2005).
[Crossref]

J. Meijer, B. Burchard, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, and J. Wrachtrup, “Generation of single color centers by focused nitrogen implantation,” Appl. Phys. Lett. 87, 261909 (2005).
[Crossref]

2004 (2)

S. Gsell, T. Bauer, J. Goldfuß, M. Schreck, and B. Stritzker, “A route to diamond wafers by epitaxial deposition on silicon via iridium/yttria-stabilized zirconia buffer layers,” Appl. Phys. Lett. 84, 4541–4543 (2004).
[Crossref]

L.-M. Duan and H. J. Kimble, “Scalable photonic quantum computation through cavity-assisted interactions,” Phys. Rev. Lett. 92, 127902 (2004).
[Crossref]

2003 (3)

K. J. Vahala, “Optical microcavities,” Nature 424, 839–846 (2003).
[Crossref]

C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
[Crossref]

T. A. Kennedy, J. S. Colton, J. E. Butler, R. C. Linares, and P. J. Doering, “Long coherence times at 300  K for nitrogen-vacancy center spins in diamond grown by chemical vapor deposition,” Appl. Phys. Lett. 83, 4190–4192 (2003).
[Crossref]

2002 (3)

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, “Smooth and high-rate reactive ion etching of diamond,” Diam. Relat. Mater. 11, 824–827 (2002).
[Crossref]

M. Schreck, A. Schury, F. Hörmann, H. Roll, and B. Stritzker, “Mosaicity reduction during growth of heteroepitaxial diamond films on iridium buffer layers: experimental results and numerical simulations,” J. Appl. Phys. 91, 676–685 (2002).
[Crossref]

M. Yoshita, K. Koyama, Y. Hayamizu, M. Baba, and H. Akiyama, “Improved high collection efficiency in fluorescence microscopy with a Weierstrass-sphere solid immersion lens,” Jpn. J. Appl. Phys. 41, L858–L860 (2002).
[Crossref]

2001 (2)

L.-M. Duan, M. D. Lukin, J. I. Cirac, and P. Zoller, “Long-distance quantum communication with atomic ensembles and linear optics,” Nature 414, 413–418 (2001).
[Crossref]

M. Schreck, F. Hörmann, H. Roll, J. K. N. Lindner, and B. Stritzker, “Diamond nucleation on iridium buffer layers and subsequent textured growth: a route for the realization of single-crystal diamond films,” Appl. Phys. Lett. 78, 192–194 (2001).
[Crossref]

2000 (2)

R. Brouri, A. Beveratos, J.-P. Poizat, and P. Grangier, “Photon antibunching in the fluorescence of individual color centers in diamond,” Opt. Lett. 25, 1294–1296 (2000).
[Crossref]

C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable solid-state source of single photons,” Phys. Rev. Lett. 85, 290–293 (2000).
[Crossref]

1999 (1)

J. Martin, R. Wannemacher, J. Teichert, L. Bischoff, and B. Köhler, “Generation and detection of fluorescent color centers in diamond with submicron resolution,” Appl. Phys. Lett. 75, 3096–3098 (1999).
[Crossref]

1997 (1)

A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. V. Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276, 2012–2014 (1997).
[Crossref]

1994 (1)

A. Mainwood, “Nitrogen and nitrogen-vacancy complexes and their formation in diamond,” Phys. Rev. B 49, 7934–7940 (1994).
[Crossref]

1991 (1)

J. Love, W. Henry, W. Stewart, R. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: adiabaticity criteria,” IEE Proc. J. Optoelectron. 138, 343–354 (1991).
[Crossref]

1977 (2)

1976 (1)

G. Davies and M. F. Hamer, “Optical studies of the 1.945  eV vibronic band in diamond,” Proc. R. Soc. London A 348, 285–298 (1976).

1958 (1)

J. E. Desnoyehs and J. A. Morrison, “The heat capacity of diamond between 12·8° and 277°K,” Philos. Mag. 3(25), 42–48 (1958).
[Crossref]

1946 (1)

E. M. Purcell, “Spontaneous emission probabilities at radio frequencies,” Phys. Rev. 69, 37–38 (1946).
[Crossref]

Abe, H.

G. Waldherr, Y. Wang, S. Zaiser, M. Jamali, T. Schulte-Herbrüggen, H. Abe, T. Ohshima, J. Isoya, J. F. Du, P. Neumann, and J. Wrachtrup, “Quantum error correction in a solid-state hybrid spin register,” Nature 506, 204–207 (2014).
[Crossref]

Abellán, C.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

Achard, J.

M. Lesik, J.-P. Tetienne, A. Tallaire, J. Achard, V. Mille, A. Gicquel, J.-F. Roch, and V. Jacques, “Perfect preferential orientation of nitrogen-vacancy defects in a synthetic diamond sample,” Appl. Phys. Lett. 104, 113107 (2014).
[Crossref]

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
[Crossref]

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

Acosta, V.

Z. Huang, A. Faraon, C. Santori, V. Acosta, and R. G. Beausoleil, “Microring resonator-based diamond optothermal switch: a building block for a quantum computing network,” Proc. SPIE 8635, 86350E (2013).

A. Faraon, Z. Huang, V. Acosta, C. Santori, and R. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal resonators in monocrystalline diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2012), paper QM3C.5.

Acosta, V. M.

A. Faraon, C. Santori, Z. Huang, K.-M. C. Fu, V. M. Acosta, D. Fattal, and R. G. Beausoleil, “Quantum photonic devices in single-crystal diamond,” New J. Phys. 15, 025010 (2013).
[Crossref]

Z. Huang, W.-D. Li, C. Santori, V. M. Acosta, A. Faraon, T. Ishikawa, W. Wu, D. Winston, R. S. Williams, and R. G. Beausoleil, “Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing,” Appl. Phys. Lett. 103, 081906 (2013).
[Crossref]

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

Aharonovich, I.

A. A. Martin, S. Randolph, A. Botman, M. Toth, and I. Aharonovich, “Maskless milling of diamond by a focused oxygen ion beam,” Sci. Rep. 5, 8958 (2015).
[Crossref]

I. Aharonovich and E. Neu, “Diamond nanophotonics,” Adv. Opt. Mater. 2, 911–928 (2014).
[Crossref]

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

A. A. Martin, M. Toth, and I. Aharonovich, “Subtractive 3D printing of optically active diamond structures,” Sci. Rep. 4, 5022 (2014).

I. Aharonovich, J. C. Lee, A. P. Magyar, D. O. Bracher, and E. L. Hu, “Bottom-up engineering of diamond micro- and nano-structures,” Laser Photon. Rev. 7, L61–L65 (2013).
[Crossref]

J. C. Lee, A. P. Magyar, D. O. Bracher, I. Aharonovich, and E. L. Hu, “Fabrication of thin diamond membranes for photonic applications,” Diam. Relat. Mater. 33, 45–48 (2013).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[Crossref]

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

K.-M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
[Crossref]

Aichele, T.

M. Barth, S. Schietinger, T. Schröder, T. Aichele, and O. Benson, “Controlled coupling of NV defect centers to plasmonic and photonic nanostructures,” J. Lumin. 130, 1628–1634 (2010).
[Crossref]

S. Schietinger, M. Barth, T. Aichele, and O. Benson, “Plasmon-enhanced single photon emission from a nanoassembled metal–diamond hybrid structure at room temperature,” Nano Lett. 9, 1694–1698 (2009).
[Crossref]

Aird, A.

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

Akimov, A.

D. Sovyk, V. Ralchenko, M. Komlenok, A. A. Khomich, V. Shershulin, V. Vorobyov, I. Vlasov, V. Konov, and A. Akimov, “Fabrication of diamond microstub photoemitters with strong photoluminescence of SiV color centers: bottom-up approach,” Appl. Phys. A 118, 17–21 (2014).
[Crossref]

Akiyama, H.

M. Yoshita, K. Koyama, Y. Hayamizu, M. Baba, and H. Akiyama, “Improved high collection efficiency in fluorescence microscopy with a Weierstrass-sphere solid immersion lens,” Jpn. J. Appl. Phys. 41, L858–L860 (2002).
[Crossref]

Albrecht, R.

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

R. Albrecht, A. Bommer, C. Deutsch, J. Reichel, and C. Becher, “Coupling of a single nitrogen-vacancy center in diamond to a fiber-based microcavity,” Phys. Rev. Lett. 110, 243602 (2013).
[Crossref]

Alemán, B.

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

Alemán, B. J.

K. Ohno, F. J. Heremans, C. F. D. l. Casas, B. A. Myers, B. J. Alemán, A. C. B. Jayich, and D. D. Awschalom, “Three-dimensional localization of spins in diamond using 12c implantation,” Appl. Phys. Lett. 105, 052406 (2014).
[Crossref]

P. Andrich, B. J. Alemán, J. C. Lee, K. Ohno, C. F. de las Casas, F. J. Heremans, E. L. Hu, and D. D. Awschalom, “Engineered micro- and nanoscale diamonds as mobile probes for high-resolution sensing in fluid,” Nano Lett. 14, 4959–4964 (2014).
[Crossref]

Allegri, S.

J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV-spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
[Crossref]

Aloni, S.

J. Schwartz, S. Aloni, D. F. Ogletree, M. Tomut, M. Bender, D. Severin, C. Trautmann, I. W. Rangelow, and T. Schenkel, “Local formation of nitrogen-vacancy centers in diamond by swift heavy ions,” J. Appl. Phys. 116, 214107 (2014).
[Crossref]

J. Schwartz, S. Aloni, D. F. Ogletree, and T. Schenkel, “Effects of low-energy electron irradiation on formation of nitrogen-vacancy centers in single-crystal diamond,” New J. Phys. 14, 043024 (2012).

Amaya, W.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

Anant, V.

J. K. W. Yang, V. Anant, and K. K. Berggren, “Enhancing etch resistance of hydrogen silsesquioxane via postdevelop electron curing,” J. Vac. Sci. Technol. B 24, 3157 (2006).
[Crossref]

Ando, Y.

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, “Smooth and high-rate reactive ion etching of diamond,” Diam. Relat. Mater. 11, 824–827 (2002).
[Crossref]

Andrich, P.

P. Andrich, B. J. Alemán, J. C. Lee, K. Ohno, C. F. de las Casas, F. J. Heremans, E. L. Hu, and D. D. Awschalom, “Engineered micro- and nanoscale diamonds as mobile probes for high-resolution sensing in fluid,” Nano Lett. 14, 4959–4964 (2014).
[Crossref]

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

Antonov, D.

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

Appel, P.

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
[Crossref]

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
[Crossref]

Aradi, B.

P. Deák, B. Aradi, M. Kaviani, T. Frauenheim, and A. Gali, “Formation of NV centers in diamond: a theoretical study based on calculated transitions and migration of nitrogen and vacancy related defects,” Phys. Rev. B 89, 075203 (2014).
[Crossref]

Arend, C.

J. Riedrich-Möller, C. Arend, C. Pauly, F. Mücklich, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond,” Nano Lett. 14, 5281–5287 (2014).
[Crossref]

Arnault, J.-C.

M. Schreck, J. Asmussen, S. Shikata, J.-C. Arnault, and N. Fujimori, “Large-area high-quality single crystal diamond,” MRS Bull. 39(06), 504–510 (2014).
[Crossref]

Asmussen, J.

M. Schreck, J. Asmussen, S. Shikata, J.-C. Arnault, and N. Fujimori, “Large-area high-quality single crystal diamond,” MRS Bull. 39(06), 504–510 (2014).
[Crossref]

Assefa, S.

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

Atatüre, M.

H. S. Knowles, D. M. Kara, and M. Atatüre, “Observing bulk diamond spin coherence in high-purity nanodiamonds,” Nat. Mater. 13, 21–25 (2014).
[Crossref]

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

Atikian, H. A.

H. A. Atikian, A. Eftekharian, A. J. Salim, M. J. Burek, J. T. Choy, A. H. Majedi, and M. Lončar, “Superconducting nanowire single photon detector on diamond,” Appl. Phys. Lett. 104, 122602 (2014).
[Crossref]

Awschalom, D.

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

Awschalom, D. D.

K. Ohno, F. J. Heremans, C. F. D. l. Casas, B. A. Myers, B. J. Alemán, A. C. B. Jayich, and D. D. Awschalom, “Three-dimensional localization of spins in diamond using 12c implantation,” Appl. Phys. Lett. 105, 052406 (2014).
[Crossref]

P. Andrich, B. J. Alemán, J. C. Lee, K. Ohno, C. F. de las Casas, F. J. Heremans, E. L. Hu, and D. D. Awschalom, “Engineered micro- and nanoscale diamonds as mobile probes for high-resolution sensing in fluid,” Nano Lett. 14, 4959–4964 (2014).
[Crossref]

D. D. Awschalom, L. C. Bassett, A. S. Dzurak, E. L. Hu, and J. R. Petta, “Quantum spintronics: engineering and manipulating atom-like spins in semiconductors,” Science 339, 1174–1179 (2013).
[Crossref]

K. Ohno, F. J. Heremans, L. C. Bassett, B. A. Myers, D. M. Toyli, A. C. B. Jayich, C. J. Palmstrøm, and D. D. Awschalom, “Engineering shallow spins in diamond with nitrogen delta-doping,” Appl. Phys. Lett. 101, 082413 (2012).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).

D. M. Toyli, C. D. Weis, G. D. Fuchs, T. Schenkel, and D. D. Awschalom, “Chip-scale nanofabrication of single spins and spin arrays in diamond,” Nano Lett. 10, 3168–3172 (2010).
[Crossref]

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[Crossref]

C. A. McLellan, B. A. Myers, S. Kraemer, K. Ohno, D. D. Awschalom, and A. C. B. Jayich, “Deterministic formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique,” arXiv:1512.08821 [cond-mat] (2015).

Baba, M.

M. Yoshita, K. Koyama, Y. Hayamizu, M. Baba, and H. Akiyama, “Improved high collection efficiency in fluorescence microscopy with a Weierstrass-sphere solid immersion lens,” Jpn. J. Appl. Phys. 41, L858–L860 (2002).
[Crossref]

Babinec, T.

Babinec, T. M.

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of single crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B 29, 010601 (2011).
[Crossref]

B. J. M. Hausmann, T. M. Babinec, J. T. Choy, J. S. Hodges, S. Hong, I. Bulu, A. Yacoby, M. D. Lukin, and M. Lončar, “Single-color centers implanted in diamond nanostructures,” New J. Phys. 13, 045004 (2011).
[Crossref]

J. T. Choy, B. J. M. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
[Crossref]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diam. Relat. Mater. 19, 621–629 (2010).
[Crossref]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
[Crossref]

Bakhru, H.

M. E. Trusheim, L. Li, A. Laraoui, E. H. Chen, H. Bakhru, T. Schröder, O. Gaathon, C. A. Meriles, and D. Englund, “Scalable fabrication of high purity diamond nanocrystals with long-spin-coherence nitrogen vacancy centers,” Nano Lett. 14, 32–36 (2014).
[Crossref]

O. Gaathon, J. S. Hodges, E. H. Chen, L. Li, S. Bakhru, H. Bakhru, D. Englund, and R. M. Osgood, “Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers,” Opt. Mater. 35, 361–365 (2013).
[Crossref]

J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV-spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
[Crossref]

T. Schröder, L. Li, E. Chen, M. Walsh, M. E. Trusheim, I. Bayn, J. Zheng, S. Mouradian, H. Bakhru, O. Gaathon, and D. R. Englund, “Deterministic high-yield creation of nitrogen vacancy centers in diamond photonic crystal cavities and photonic elements,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2015), paper FTh3B.1.

Bakhru, S.

O. Gaathon, J. S. Hodges, E. H. Chen, L. Li, S. Bakhru, H. Bakhru, D. Englund, and R. M. Osgood, “Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers,” Opt. Mater. 35, 361–365 (2013).
[Crossref]

Balasubramanian, G.

F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

Balmer, R. S.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

C. J. H. Wort and R. S. Balmer, “Diamond as an electronic material,” Mater. Today 11(1–2), 22–28 (2008).
[Crossref]

Balocchi, A.

T. Steinmetz, Y. Colombe, D. Hunger, T. W. Hänsch, A. Balocchi, R. J. Warburton, and J. Reichel, “Stable fiber-based Fabry–Pérot cavity,” Appl. Phys. Lett. 89, 111110 (2006).
[Crossref]

Balog, P.

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

Banholzer, M. J.

T. Schröder, F. Gädeke, M. J. Banholzer, and O. Benson, “Ultrabright and efficient single-photon generation based on nitrogen-vacancy centres in nanodiamonds on a solid immersion lens,” New J. Phys. 13, 055017 (2011).
[Crossref]

Barbour, R. J.

N. Thomas, R. J. Barbour, Y. Song, M. L. Lee, and K.-M. C. Fu, “Waveguide-integrated single-crystalline GaP resonators on diamond,” Opt. Express 22, 13555–13564 (2014).
[Crossref]

D. Hunger, C. Deutsch, R. J. Barbour, R. J. Warburton, and J. Reichel, “Laser micro-fabrication of concave, low-roughness features in silica,” AIP Adv. 2, 012119 (2012).
[Crossref]

Barclay, P. E.

B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching,” Nano Lett. 15, 5131–5136 (2015).
[Crossref]

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5, 041051 (2015).
[Crossref]

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[Crossref]

K.-M. C. Fu, P. E. Barclay, C. Santori, A. Faraon, and R. G. Beausoleil, “Low-temperature tapered-fiber probing of diamond nitrogen-vacancy ensembles coupled to GaP microcavities,” New J. Phys. 13, 055023 (2011).
[Crossref]

P. E. Barclay, K.-M. C. Fu, C. Santori, A. Faraon, and R. G. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[Crossref]

C. Santori, P. E. Barclay, K.-M. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[Crossref]

P. E. Barclay, K.-M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17, 9588–9601 (2009).
[Crossref]

P. E. Barclay, K.-M. C. Fu, C. Santori, and R. G. Beausoleil, “Chip-based microcavities coupled to nitrogen-vacancy centers in single crystal diamond,” Appl. Phys. Lett. 95, 191115 (2009).

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

C. Santori, P. E. Barclay, K.-M. C. Fu, and R. G. Beausoleil, “Vertical distribution of nitrogen-vacancy centers in diamond formed by ion implantation and annealing,” Phys. Rev. B 79, 125313 (2009).
[Crossref]

K.-M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
[Crossref]

Bar-Gill, N.

N. Bar-Gill, L. M. Pham, A. Jarmola, D. Budker, and R. L. Walsworth, “Solid-state electronic spin coherence time approaching one second,” Nat. Commun. 4, 1743 (2013).
[Crossref]

L. M. Pham, N. Bar-Gill, C. Belthangady, D. Le Sage, P. Cappellaro, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Enhanced solid-state multispin metrology using dynamical decoupling,” Phys. Rev. B 86, 045214 (2012).
[Crossref]

D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
[Crossref]

Barth, M.

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

M. Barth, S. Schietinger, T. Schröder, T. Aichele, and O. Benson, “Controlled coupling of NV defect centers to plasmonic and photonic nanostructures,” J. Lumin. 130, 1628–1634 (2010).
[Crossref]

S. Schietinger, M. Barth, T. Aichele, and O. Benson, “Plasmon-enhanced single photon emission from a nanoassembled metal–diamond hybrid structure at room temperature,” Nano Lett. 9, 1694–1698 (2009).
[Crossref]

Bassett, L. C.

D. D. Awschalom, L. C. Bassett, A. S. Dzurak, E. L. Hu, and J. R. Petta, “Quantum spintronics: engineering and manipulating atom-like spins in semiconductors,” Science 339, 1174–1179 (2013).
[Crossref]

K. Ohno, F. J. Heremans, L. C. Bassett, B. A. Myers, D. M. Toyli, A. C. B. Jayich, C. J. Palmstrøm, and D. D. Awschalom, “Engineering shallow spins in diamond with nitrogen delta-doping,” Appl. Phys. Lett. 101, 082413 (2012).
[Crossref]

Bauch, E.

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

Bauer, T.

S. Gsell, T. Bauer, J. Goldfuß, M. Schreck, and B. Stritzker, “A route to diamond wafers by epitaxial deposition on silicon via iridium/yttria-stabilized zirconia buffer layers,” Appl. Phys. Lett. 84, 4541–4543 (2004).
[Crossref]

Baur, A.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

Bayn, I.

L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref]

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[Crossref]

T. Schröder, L. Li, E. Chen, M. Walsh, M. E. Trusheim, I. Bayn, J. Zheng, S. Mouradian, H. Bakhru, O. Gaathon, and D. R. Englund, “Deterministic high-yield creation of nitrogen vacancy centers in diamond photonic crystal cavities and photonic elements,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2015), paper FTh3B.1.

T. Schröder, E. Chen, L. Li, M. Walsh, M. E. Trusheim, I. Bayn, and D. Englund, “Targeted creation and Purcell enhancement of NV centers within photonic crystal cavities in single-crystal diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2014), paper FW1B.6.

I. Bayn, B. Meyler, J. Salzman, V. Richter, and R. Kalish, “Single crystal diamond photonic crystal nanocavity: fabrication and initial characterization,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2010), paper QThL7.

Beausoleil, R.

A. Faraon, Z. Huang, V. Acosta, C. Santori, and R. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal resonators in monocrystalline diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2012), paper QM3C.5.

Beausoleil, R. G.

Z. Huang, A. Faraon, C. Santori, V. Acosta, and R. G. Beausoleil, “Microring resonator-based diamond optothermal switch: a building block for a quantum computing network,” Proc. SPIE 8635, 86350E (2013).

A. Faraon, C. Santori, Z. Huang, K.-M. C. Fu, V. M. Acosta, D. Fattal, and R. G. Beausoleil, “Quantum photonic devices in single-crystal diamond,” New J. Phys. 15, 025010 (2013).
[Crossref]

Z. Huang, W.-D. Li, C. Santori, V. M. Acosta, A. Faraon, T. Ishikawa, W. Wu, D. Winston, R. S. Williams, and R. G. Beausoleil, “Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing,” Appl. Phys. Lett. 103, 081906 (2013).
[Crossref]

A. M. Edmonds, U. F. S. D’Haenens-Johansson, R. J. Cruddace, M. E. Newton, K.-M. C. Fu, C. Santori, R. G. Beausoleil, D. J. Twitchen, and M. L. Markham, “Production of oriented nitrogen-vacancy color centers in synthetic diamond,” Phys. Rev. B 86, 035201 (2012).
[Crossref]

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[Crossref]

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

P. E. Barclay, K.-M. C. Fu, C. Santori, A. Faraon, and R. G. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[Crossref]

K.-M. C. Fu, P. E. Barclay, C. Santori, A. Faraon, and R. G. Beausoleil, “Low-temperature tapered-fiber probing of diamond nitrogen-vacancy ensembles coupled to GaP microcavities,” New J. Phys. 13, 055023 (2011).
[Crossref]

C. Santori, P. E. Barclay, K.-M. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[Crossref]

P. E. Barclay, K.-M. C. Fu, C. Santori, and R. G. Beausoleil, “Chip-based microcavities coupled to nitrogen-vacancy centers in single crystal diamond,” Appl. Phys. Lett. 95, 191115 (2009).

P. E. Barclay, K.-M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17, 9588–9601 (2009).
[Crossref]

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

C. Santori, P. E. Barclay, K.-M. C. Fu, and R. G. Beausoleil, “Vertical distribution of nitrogen-vacancy centers in diamond formed by ion implantation and annealing,” Phys. Rev. B 79, 125313 (2009).
[Crossref]

K.-M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
[Crossref]

Becher, C.

J. Riedrich-Möller, S. Pezzagna, J. Meijer, C. Pauly, F. Mücklich, M. Markham, A. M. Edmonds, and C. Becher, “Nanoimplantation and Purcell enhancement of single nitrogen-vacancy centers in photonic crystal cavities in diamond,” Appl. Phys. Lett. 106, 221103 (2015).
[Crossref]

J. Riedrich-Möller, C. Arend, C. Pauly, F. Mücklich, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond,” Nano Lett. 14, 5281–5287 (2014).
[Crossref]

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

R. Albrecht, A. Bommer, C. Deutsch, J. Reichel, and C. Becher, “Coupling of a single nitrogen-vacancy center in diamond to a fiber-based microcavity,” Phys. Rev. Lett. 110, 243602 (2013).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

Beck, J.

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

Becker, J. N.

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

Beetz, J.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Bellei, F.

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

Belthangady, C.

D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
[Crossref]

L. M. Pham, N. Bar-Gill, C. Belthangady, D. Le Sage, P. Cappellaro, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Enhanced solid-state multispin metrology using dynamical decoupling,” Phys. Rev. B 86, 045214 (2012).
[Crossref]

Bender, M.

J. Schwartz, S. Aloni, D. F. Ogletree, M. Tomut, M. Bender, D. Severin, C. Trautmann, I. W. Rangelow, and T. Schenkel, “Local formation of nitrogen-vacancy centers in diamond by swift heavy ions,” J. Appl. Phys. 116, 214107 (2014).
[Crossref]

Bennett, S. D.

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

Benson, O.

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

A. W. Schell, T. Neumer, and O. Benson, “Numerical analysis of efficient light extraction with an elliptical solid immersion lens,” Opt. Lett. 39, 4639–4642 (2014).
[Crossref]

T. Schröder, F. Gädeke, M. J. Banholzer, and O. Benson, “Ultrabright and efficient single-photon generation based on nitrogen-vacancy centres in nanodiamonds on a solid immersion lens,” New J. Phys. 13, 055017 (2011).
[Crossref]

O. Benson, “Assembly of hybrid photonic architectures from nanophotonic constituents,” Nature 480, 193–199 (2011).
[Crossref]

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

M. Barth, S. Schietinger, T. Schröder, T. Aichele, and O. Benson, “Controlled coupling of NV defect centers to plasmonic and photonic nanostructures,” J. Lumin. 130, 1628–1634 (2010).
[Crossref]

S. Schietinger, M. Barth, T. Aichele, and O. Benson, “Plasmon-enhanced single photon emission from a nanoassembled metal–diamond hybrid structure at room temperature,” Nano Lett. 9, 1694–1698 (2009).
[Crossref]

Berggren, K. K.

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

J. K. W. Yang, V. Anant, and K. K. Berggren, “Enhancing etch resistance of hydrogen silsesquioxane via postdevelop electron curing,” J. Vac. Sci. Technol. B 24, 3157 (2006).
[Crossref]

Bergholm, V.

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

Bernien, H.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9, 363–373 (2015).
[Crossref]

W. Pfaff, B. J. Hensen, H. Bernien, S. B. V. Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref]

Bersin, E.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

Beveratos, A.

Biamonte, J.

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

Biersack, J. P.

J. F. Ziegler and J. P. Biersack, “The stopping and range of ions in matter,” in Treatise on Heavy-Ion Science, D. A. Bromley, ed. (Springer, 1985), pp. 93–129.

Bischof, S.

P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
[Crossref]

Bischoff, L.

J. Martin, R. Wannemacher, J. Teichert, L. Bischoff, and B. Köhler, “Generation and detection of fluorescent color centers in diamond with submicron resolution,” Appl. Phys. Lett. 75, 3096–3098 (1999).
[Crossref]

Black, R.

J. Love, W. Henry, W. Stewart, R. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: adiabaticity criteria,” IEE Proc. J. Optoelectron. 138, 343–354 (1991).
[Crossref]

Blok, M. S.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

M. S. Blok, N. Kalb, A. Reiserer, T. H. Taminiau, and R. Hanson, “Towards quantum networks of single spins: analysis of a quantum memory with an optical interface in diamond,” Faraday Discuss. 184, 173–182 (2015).
[Crossref]

W. Pfaff, B. J. Hensen, H. Bernien, S. B. V. Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref]

J. Cramer, N. Kalb, M. A. Rol, B. Hensen, M. S. Blok, M. Markham, D. J. Twitchen, R. Hanson, and T. H. Taminiau, “Repeated quantum error correction on a continuously encoded qubit by real-time feedback,” arXiv:1508.01388 [cond-mat, physics:quant-ph] (2015).

Bommer, A.

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

R. Albrecht, A. Bommer, C. Deutsch, J. Reichel, and C. Becher, “Coupling of a single nitrogen-vacancy center in diamond to a fiber-based microcavity,” Phys. Rev. Lett. 110, 243602 (2013).
[Crossref]

Borczyskowski, C. V.

A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. V. Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276, 2012–2014 (1997).
[Crossref]

Botman, A.

A. A. Martin, S. Randolph, A. Botman, M. Toth, and I. Aharonovich, “Maskless milling of diamond by a focused oxygen ion beam,” Sci. Rep. 5, 8958 (2015).
[Crossref]

Bourassa, A.

E. Janitz, M. Ruf, M. Dimock, A. Bourassa, J. Sankey, and L. Childress, “Fabry–Perot microcavity for diamond-based photonics,” Phys. Rev. A 92, 043844 (2015).
[Crossref]

Bracher, D. O.

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, D. O. Bracher, and E. L. Hu, “Bottom-up engineering of diamond micro- and nano-structures,” Laser Photon. Rev. 7, L61–L65 (2013).
[Crossref]

J. C. Lee, A. P. Magyar, D. O. Bracher, I. Aharonovich, and E. L. Hu, “Fabrication of thin diamond membranes for photonic applications,” Diam. Relat. Mater. 33, 45–48 (2013).
[Crossref]

Braje, D.

H. Clevenson, M. E. Trusheim, C. Teale, T. Schröder, D. Braje, and D. Englund, “Broadband magnetometry and temperature sensing with a light-trapping diamond waveguide,” Nat. Phys. 11, 393–397 (2015).
[Crossref]

Brandon, J. R.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Brink, D.

C. J. Widmann, C. Giese, M. Wolfer, D. Brink, N. Heidrich, and C. E. Nebel, “Fabrication and characterization of single crystalline diamond nanopillars with NV-centers,” Diam. Relat. Mater. 54, 2–8 (2015).
[Crossref]

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

Brouri, R.

Brunner, A.

S. A. Momenzadeh, R. J. Stöhr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
[Crossref]

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

Buckley, B. B.

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).

Buczak, K.

K. Nemoto, M. Trupke, S. J. Devitt, B. Scharfenberger, K. Buczak, J. Schmiedmayer, and W. J. Munro, “Photonic quantum networks formed from NV- centers,” arXiv:1412.5950 [quant-ph] (2014).

K. Nemoto, M. Trupke, S. J. Devitt, A. M. Stephens, K. Buczak, T. Nobauer, M. S. Everitt, J. Schmiedmayer, and W. J. Munro, “Photonic architecture for scalable quantum information processing in NV-diamond,” arXiv:1309.4277 [quant-ph] (2013).

Budker, D.

N. Bar-Gill, L. M. Pham, A. Jarmola, D. Budker, and R. L. Walsworth, “Solid-state electronic spin coherence time approaching one second,” Nat. Commun. 4, 1743 (2013).
[Crossref]

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

J. M. Taylor, P. Cappellaro, L. Childress, L. Jiang, D. Budker, P. R. Hemmer, A. Yacoby, R. Walsworth, and M. D. Lukin, “High-sensitivity diamond magnetometer with nanoscale resolution,” Nat. Phys. 4, 810–816 (2008).
[Crossref]

Bukow, H. H.

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

Bulu, I.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

J. T. Choy, I. Bulu, B. J. M. Hausmann, E. Janitz, I.-C. Huang, and M. Lončar, “Spontaneous emission and collection efficiency enhancement of single emitters in diamond via plasmonic cavities and gratings,” Appl. Phys. Lett. 103, 161101 (2013).
[Crossref]

I. Bulu, T. Babinec, B. Hausmann, J. T. Choy, and M. Lončar, “Plasmonic resonators for enhanced diamond NV- center single photon sources,” Opt. Express 19, 5268 (2011).
[Crossref]

B. J. M. Hausmann, T. M. Babinec, J. T. Choy, J. S. Hodges, S. Hong, I. Bulu, A. Yacoby, M. D. Lukin, and M. Lončar, “Single-color centers implanted in diamond nanostructures,” New J. Phys. 13, 045004 (2011).
[Crossref]

J. T. Choy, B. J. M. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
[Crossref]

Bulu, I. B.

B. J. M. Hausmann, I. B. Bulu, P. B. Deotare, M. McCutcheon, V. Venkataraman, M. L. Markham, D. J. Twitchen, and M. Lončar, “Integrated high-quality factor optical resonators in diamond,” Nano Lett. 13, 1898–1902 (2013).
[Crossref]

Burchard, B.

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

C. Wang, C. Kurtsiefer, H. Weinfurter, and B. Burchard, “Single photon emission from SiV centres in diamond produced by ion implantation,” J. Phys. B 39, 37–41 (2006).
[Crossref]

J. Meijer, B. Burchard, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, and J. Wrachtrup, “Generation of single color centers by focused nitrogen implantation,” Appl. Phys. Lett. 87, 261909 (2005).
[Crossref]

Burek, M. J.

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

H. A. Atikian, A. Eftekharian, A. J. Salim, M. J. Burek, J. T. Choy, A. H. Majedi, and M. Lončar, “Superconducting nanowire single photon detector on diamond,” Appl. Phys. Lett. 104, 122602 (2014).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
[Crossref]

Burk, C.

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

Butler, J. E.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[Crossref]

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett. 90, 081110 (2007).
[Crossref]

T. A. Kennedy, J. S. Colton, J. E. Butler, R. C. Linares, and P. J. Doering, “Long coherence times at 300  K for nitrogen-vacancy center spins in diamond grown by chemical vapor deposition,” Appl. Phys. Lett. 83, 4190–4192 (2003).
[Crossref]

Cabrini, S.

C. Peroz, S. Dhuey, M. Cornet, M. Vogler, D. Olynick, and S. Cabrini, “Single digit nanofabrication by step-and-repeat nanoimprint lithography,” Nanotechnology 23, 015305 (2012).
[Crossref]

Cai, J.

J. Cai, F. Jelezko, and M. B. Plenio, “Hybrid sensors based on colour centres in diamond and piezoactive layers,” Nat. Commun. 5, 4065 (2014).
[Crossref]

J. Cai, A. Retzker, F. Jelezko, and M. B. Plenio, “A large-scale quantum simulator on a diamond surface at room temperature,” Nat. Phys. 9, 168–173 (2013).
[Crossref]

Cann, B. L.

R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
[Crossref]

Cappellaro, P.

L. M. Pham, N. Bar-Gill, C. Belthangady, D. Le Sage, P. Cappellaro, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Enhanced solid-state multispin metrology using dynamical decoupling,” Phys. Rev. B 86, 045214 (2012).
[Crossref]

J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cappellaro, L. Jiang, M. V. G. Dutt, E. Togan, A. S. Zibrov, A. Yacoby, R. L. Walsworth, and M. D. Lukin, “Nanoscale magnetic sensing with an individual electronic spin in diamond,” Nature 455, 644–647 (2008).
[Crossref]

J. M. Taylor, P. Cappellaro, L. Childress, L. Jiang, D. Budker, P. R. Hemmer, A. Yacoby, R. Walsworth, and M. D. Lukin, “High-sensitivity diamond magnetometer with nanoscale resolution,” Nat. Phys. 4, 810–816 (2008).
[Crossref]

Cardenas, J.

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

Casas, C. F. D. l.

K. Ohno, F. J. Heremans, C. F. D. l. Casas, B. A. Myers, B. J. Alemán, A. C. B. Jayich, and D. D. Awschalom, “Three-dimensional localization of spins in diamond using 12c implantation,” Appl. Phys. Lett. 105, 052406 (2014).
[Crossref]

Chakravarthi, S.

M. Gould, S. Chakravarthi, I. R. Christen, N. Thomas, S. Dadgostar, Y. Song, M. L. Lee, F. Hatami, and K.-M. C. Fu, “A large-scale GaP-on-diamond integrated photonics platform for NV center-based quantum information,” arXiv:1510.05047 [cond-mat, physics:physics, physics:quant-ph] (2015).

Chang, H.-C.

H. Kaupp, C. Deutsch, H.-C. Chang, J. Reichel, T. W. Hänsch, and D. Hunger, “Scaling laws of the cavity enhancement for NV centers in diamond,” arXiv:1304.0948 (2013).

Chang, K.

R. Schirhagl, K. Chang, M. Loretz, and C. L. Degen, “Nitrogen-vacancy centers in diamond: nanoscale sensors for physics and biology,” Annu. Rev. Phys. Chem. 65, 83–105 (2014).
[Crossref]

Chau, F. S.

X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Enhanced resonance tuning of photonic crystal nanocavities by integration of optimized near-field multitip nanoprobes,” J. Nanophoton. 5, 059503 (2011).
[Crossref]

Chemerisov, S.

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

Chen, E.

T. Schröder, L. Li, E. Chen, M. Walsh, M. E. Trusheim, I. Bayn, J. Zheng, S. Mouradian, H. Bakhru, O. Gaathon, and D. R. Englund, “Deterministic high-yield creation of nitrogen vacancy centers in diamond photonic crystal cavities and photonic elements,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2015), paper FTh3B.1.

T. Schröder, E. Chen, L. Li, M. Walsh, M. E. Trusheim, I. Bayn, and D. Englund, “Targeted creation and Purcell enhancement of NV centers within photonic crystal cavities in single-crystal diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2014), paper FW1B.6.

Chen, E. H.

R. N. Patel, T. Schröder, N. Wan, L. Li, S. L. Mouradian, E. H. Chen, and D. R. Englund, “Efficient photon coupling from a diamond nitrogen vacancy center by integration with silica fiber,” Light Sci. Appl. 5, e16032 (2016).
[Crossref]

L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
[Crossref]

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

M. E. Trusheim, L. Li, A. Laraoui, E. H. Chen, H. Bakhru, T. Schröder, O. Gaathon, C. A. Meriles, and D. Englund, “Scalable fabrication of high purity diamond nanocrystals with long-spin-coherence nitrogen vacancy centers,” Nano Lett. 14, 32–36 (2014).
[Crossref]

O. Gaathon, J. S. Hodges, E. H. Chen, L. Li, S. Bakhru, H. Bakhru, D. Englund, and R. M. Osgood, “Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers,” Opt. Mater. 35, 361–365 (2013).
[Crossref]

J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV-spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
[Crossref]

Chen, X. W.

K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166–169 (2011).
[Crossref]

Cheng, C.-J.

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

Chew, X.

X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Enhanced resonance tuning of photonic crystal nanocavities by integration of optimized near-field multitip nanoprobes,” J. Nanophoton. 5, 059503 (2011).
[Crossref]

Childress, L.

E. Janitz, M. Ruf, M. Dimock, A. Bourassa, J. Sankey, and L. Childress, “Fabry–Perot microcavity for diamond-based photonics,” Phys. Rev. A 92, 043844 (2015).
[Crossref]

L. Childress and R. Hanson, “Diamond NV centers for quantum computing and quantum networks,” MRS Bull. 38(02), 134–138 (2013).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref]

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sørensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[Crossref]

J. M. Taylor, P. Cappellaro, L. Childress, L. Jiang, D. Budker, P. R. Hemmer, A. Yacoby, R. Walsworth, and M. D. Lukin, “High-sensitivity diamond magnetometer with nanoscale resolution,” Nat. Phys. 4, 810–816 (2008).
[Crossref]

Chisholm, N.

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

Choi, H. W.

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diam. Relat. Mater. 15, 725–728 (2006).
[Crossref]

H. W. Choi, E. Gu, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, and M. D. Dawson, “Fabrication of natural diamond microlenses by plasma etching,” J. Vac. Sci. Technol. B 23, 130–132 (2005).
[Crossref]

Choi, S.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

Choi, Y.-S.

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett. 90, 081110 (2007).
[Crossref]

Choy, J. T.

H. A. Atikian, A. Eftekharian, A. J. Salim, M. J. Burek, J. T. Choy, A. H. Majedi, and M. Lončar, “Superconducting nanowire single photon detector on diamond,” Appl. Phys. Lett. 104, 122602 (2014).
[Crossref]

J. T. Choy, I. Bulu, B. J. M. Hausmann, E. Janitz, I.-C. Huang, and M. Lončar, “Spontaneous emission and collection efficiency enhancement of single emitters in diamond via plasmonic cavities and gratings,” Appl. Phys. Lett. 103, 161101 (2013).
[Crossref]

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of single crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B 29, 010601 (2011).
[Crossref]

I. Bulu, T. Babinec, B. Hausmann, J. T. Choy, and M. Lončar, “Plasmonic resonators for enhanced diamond NV- center single photon sources,” Opt. Express 19, 5268 (2011).
[Crossref]

B. J. M. Hausmann, T. M. Babinec, J. T. Choy, J. S. Hodges, S. Hong, I. Bulu, A. Yacoby, M. D. Lukin, and M. Lončar, “Single-color centers implanted in diamond nanostructures,” New J. Phys. 13, 045004 (2011).
[Crossref]

J. T. Choy, B. J. M. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
[Crossref]

Christen, I. R.

M. Gould, S. Chakravarthi, I. R. Christen, N. Thomas, S. Dadgostar, Y. Song, M. L. Lee, F. Hatami, and K.-M. C. Fu, “A large-scale GaP-on-diamond integrated photonics platform for NV center-based quantum information,” arXiv:1510.05047 [cond-mat, physics:physics, physics:quant-ph] (2015).

Chu, Y.

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
[Crossref]

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sørensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[Crossref]

Cimmino, A.

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

Cirac, J. I.

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

L.-M. Duan, M. D. Lukin, J. I. Cirac, and P. Zoller, “Long-distance quantum communication with atomic ensembles and linear optics,” Nature 414, 413–418 (2001).
[Crossref]

Clark, R. G.

C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
[Crossref]

Clarke, D. R.

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[Crossref]

Clevenson, H.

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

H. Clevenson, M. E. Trusheim, C. Teale, T. Schröder, D. Braje, and D. Englund, “Broadband magnetometry and temperature sensing with a light-trapping diamond waveguide,” Nat. Phys. 11, 393–397 (2015).
[Crossref]

Clewes, S. L.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Collins, A. T.

A. T. Collins and I. Kiflawi, “The annealing of radiation damage in type Ia diamond,” J. Phys. 21, 364209 (2009).
[Crossref]

Colombe, Y.

T. Steinmetz, Y. Colombe, D. Hunger, T. W. Hänsch, A. Balocchi, R. J. Warburton, and J. Reichel, “Stable fiber-based Fabry–Pérot cavity,” Appl. Phys. Lett. 89, 111110 (2006).
[Crossref]

Colton, J. S.

T. A. Kennedy, J. S. Colton, J. E. Butler, R. C. Linares, and P. J. Doering, “Long coherence times at 300  K for nitrogen-vacancy center spins in diamond grown by chemical vapor deposition,” Appl. Phys. Lett. 83, 4190–4192 (2003).
[Crossref]

Cornet, M.

C. Peroz, S. Dhuey, M. Cornet, M. Vogler, D. Olynick, and S. Cabrini, “Single digit nanofabrication by step-and-repeat nanoimprint lithography,” Nanotechnology 23, 015305 (2012).
[Crossref]

Cotlet, M.

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

Cramer, J.

T. H. Taminiau, J. Cramer, T. V. D. Sar, V. V. Dobrovitski, and R. Hanson, “Universal control and error correction in multi-qubit spin registers in diamond,” Nat. Nanotechnol. 9, 171–176 (2014).
[Crossref]

J. Cramer, N. Kalb, M. A. Rol, B. Hensen, M. S. Blok, M. Markham, D. J. Twitchen, R. Hanson, and T. H. Taminiau, “Repeated quantum error correction on a continuously encoded qubit by real-time feedback,” arXiv:1508.01388 [cond-mat, physics:quant-ph] (2015).

Cross, G. L. W.

D. McCloskey, D. Fox, N. O’Hara, V. Usov, D. Scanlan, N. McEvoy, G. S. Duesberg, G. L. W. Cross, H. Z. Zhang, and J. F. Donegan, “Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond,” Appl. Phys. Lett. 104, 031109 (2014).
[Crossref]

Cruddace, R. J.

A. M. Edmonds, U. F. S. D’Haenens-Johansson, R. J. Cruddace, M. E. Newton, K.-M. C. Fu, C. Santori, R. G. Beausoleil, D. J. Twitchen, and M. L. Markham, “Production of oriented nitrogen-vacancy color centers in synthetic diamond,” Phys. Rev. B 86, 035201 (2012).
[Crossref]

Cui, S.

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

S. Cui and E. L. Hu, “Effect of fluorinated diamond surface on charge state of nitrogen-vacancy centers,” arXiv:1304.1407 (2013).

Curtis, E. A.

M. Trupke, E. A. Hinds, S. Eriksson, E. A. Curtis, Z. Moktadir, E. Kukharenka, and M. Kraft, “Microfabricated high-finesse optical cavity with open access and small volume,” Appl. Phys. Lett. 87, 211106 (2005).
[Crossref]

D’Haenens-Johansson, U. F. S.

A. M. Edmonds, U. F. S. D’Haenens-Johansson, R. J. Cruddace, M. E. Newton, K.-M. C. Fu, C. Santori, R. G. Beausoleil, D. J. Twitchen, and M. L. Markham, “Production of oriented nitrogen-vacancy color centers in synthetic diamond,” Phys. Rev. B 86, 035201 (2012).
[Crossref]

B. Naydenov, F. Reinhard, A. Lämmle, V. Richter, R. Kalish, U. F. S. D’Haenens-Johansson, M. Newton, F. Jelezko, and J. Wrachtrup, “Increasing the coherence time of single electron spins in diamond by high temperature annealing,” Appl. Phys. Lett. 97, 242511 (2010).
[Crossref]

Dadgostar, S.

M. Gould, S. Chakravarthi, I. R. Christen, N. Thomas, S. Dadgostar, Y. Song, M. L. Lee, F. Hatami, and K.-M. C. Fu, “A large-scale GaP-on-diamond integrated photonics platform for NV center-based quantum information,” arXiv:1510.05047 [cond-mat, physics:physics, physics:quant-ph] (2015).

Dam, S. B. V.

W. Pfaff, B. J. Hensen, H. Bernien, S. B. V. Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
[Crossref]

Dane, A.

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

Davies, G.

G. Davies, “Charge states of the vacancy in diamond,” Nature 269, 498–500 (1977).
[Crossref]

G. Davies and M. F. Hamer, “Optical studies of the 1.945  eV vibronic band in diamond,” Proc. R. Soc. London A 348, 285–298 (1976).

Dawson, M. D.

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diam. Relat. Mater. 15, 725–728 (2006).
[Crossref]

H. W. Choi, E. Gu, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, and M. D. Dawson, “Fabrication of natural diamond microlenses by plasma etching,” J. Vac. Sci. Technol. B 23, 130–132 (2005).
[Crossref]

de las Casas, C. F.

P. Andrich, B. J. Alemán, J. C. Lee, K. Ohno, C. F. de las Casas, F. J. Heremans, E. L. Hu, and D. D. Awschalom, “Engineered micro- and nanoscale diamonds as mobile probes for high-resolution sensing in fluid,” Nano Lett. 14, 4959–4964 (2014).
[Crossref]

de Leon, N.

B. Shields, Q. Unterreithmeier, N. de Leon, H. Park, and M. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114, 136402 (2015).
[Crossref]

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

de Leon, N. P.

T. G. Tiecke, J. D. Thompson, N. P. de Leon, L. R. Liu, V. Vuletić, and M. D. Lukin, “Nanophotonic quantum phase switch with a single atom,” Nature 508, 241–244 (2014).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
[Crossref]

de Oliveira, F. F.

S. A. Momenzadeh, R. J. Stöhr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
[Crossref]

Deák, P.

P. Deák, B. Aradi, M. Kaviani, T. Frauenheim, and A. Gali, “Formation of NV centers in diamond: a theoretical study based on calculated transitions and migration of nitrogen and vacancy related defects,” Phys. Rev. B 89, 075203 (2014).
[Crossref]

Degen, C.

Y. Tao and C. Degen, “Facile fabrication of single-crystal-diamond nanostructures with ultrahigh aspect ratio,” Adv. Mater. 25, 3962–3967 (2013).
[Crossref]

Degen, C. L.

R. Schirhagl, K. Chang, M. Loretz, and C. L. Degen, “Nitrogen-vacancy centers in diamond: nanoscale sensors for physics and biology,” Annu. Rev. Phys. Chem. 65, 83–105 (2014).
[Crossref]

Delaney, P.

M. W. Doherty, N. B. Manson, P. Delaney, F. Jelezko, J. Wrachtrup, and L. C. L. Hollenberg, “The nitrogen-vacancy colour centre in diamond,” Phys. Rep. 528, 1–45 (2013).
[Crossref]

Delobbe, A.

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

Deng, J.

X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Enhanced resonance tuning of photonic crystal nanocavities by integration of optimized near-field multitip nanoprobes,” J. Nanophoton. 5, 059503 (2011).
[Crossref]

Denisenko, A.

S. A. Momenzadeh, R. J. Stöhr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
[Crossref]

Deotare, P.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

Deotare, P. B.

B. J. M. Hausmann, I. B. Bulu, P. B. Deotare, M. McCutcheon, V. Venkataraman, M. L. Markham, D. J. Twitchen, and M. Lončar, “Integrated high-quality factor optical resonators in diamond,” Nano Lett. 13, 1898–1902 (2013).
[Crossref]

Desnoyehs, J. E.

J. E. Desnoyehs and J. A. Morrison, “The heat capacity of diamond between 12·8° and 277°K,” Philos. Mag. 3(25), 42–48 (1958).
[Crossref]

Deutsch, C.

R. Albrecht, A. Bommer, C. Deutsch, J. Reichel, and C. Becher, “Coupling of a single nitrogen-vacancy center in diamond to a fiber-based microcavity,” Phys. Rev. Lett. 110, 243602 (2013).
[Crossref]

D. Hunger, C. Deutsch, R. J. Barbour, R. J. Warburton, and J. Reichel, “Laser micro-fabrication of concave, low-roughness features in silica,” AIP Adv. 2, 012119 (2012).
[Crossref]

H. Kaupp, C. Deutsch, H.-C. Chang, J. Reichel, T. W. Hänsch, and D. Hunger, “Scaling laws of the cavity enhancement for NV centers in diamond,” arXiv:1304.0948 (2013).

Devitt, S. J.

K. Nemoto, M. Trupke, S. J. Devitt, A. M. Stephens, K. Buczak, T. Nobauer, M. S. Everitt, J. Schmiedmayer, and W. J. Munro, “Photonic architecture for scalable quantum information processing in NV-diamond,” arXiv:1309.4277 [quant-ph] (2013).

K. Nemoto, M. Trupke, S. J. Devitt, B. Scharfenberger, K. Buczak, J. Schmiedmayer, and W. J. Munro, “Photonic quantum networks formed from NV- centers,” arXiv:1412.5950 [quant-ph] (2014).

Dhillon, H. K.

R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
[Crossref]

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Dhuey, S.

C. Peroz, S. Dhuey, M. Cornet, M. Vogler, D. Olynick, and S. Cabrini, “Single digit nanofabrication by step-and-repeat nanoimprint lithography,” Nanotechnology 23, 015305 (2012).
[Crossref]

Dimock, M.

E. Janitz, M. Ruf, M. Dimock, A. Bourassa, J. Sankey, and L. Childress, “Fabry–Perot microcavity for diamond-based photonics,” Phys. Rev. A 92, 043844 (2015).
[Crossref]

Dinyari, K. N.

M. Larsson, K. N. Dinyari, and H. Wang, “Composite optical microcavity of diamond nanopillar and silica microsphere,” Nano Lett. 9, 1447–1450 (2009).
[Crossref]

Dobrovitski, V. V.

T. H. Taminiau, J. Cramer, T. V. D. Sar, V. V. Dobrovitski, and R. Hanson, “Universal control and error correction in multi-qubit spin registers in diamond,” Nat. Nanotechnol. 9, 171–176 (2014).
[Crossref]

Dodson, J.

P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
[Crossref]

Dodson, J. M.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Doering, P. J.

T. A. Kennedy, J. S. Colton, J. E. Butler, R. C. Linares, and P. J. Doering, “Long coherence times at 300  K for nitrogen-vacancy center spins in diamond grown by chemical vapor deposition,” Appl. Phys. Lett. 83, 4190–4192 (2003).
[Crossref]

Doherty, M. W.

J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
[Crossref]

M. W. Doherty, N. B. Manson, P. Delaney, F. Jelezko, J. Wrachtrup, and L. C. L. Hollenberg, “The nitrogen-vacancy colour centre in diamond,” Phys. Rep. 528, 1–45 (2013).
[Crossref]

F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

Dolan, P. R.

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

P. R. Dolan, G. M. Hughes, F. Grazioso, B. R. Patton, and J. M. Smith, “Femtoliter tunable optical cavity arrays,” Opt. Lett. 35, 3556–3558 (2010).
[Crossref]

Dolde, F.

L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
[Crossref]

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
[Crossref]

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

Domhan, M.

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

J. R. Rabeau, P. Reichart, G. Tamanyan, D. N. Jamieson, S. Prawer, F. Jelezko, T. Gaebel, I. Popa, M. Domhan, and J. Wrachtrup, “Implantation of labelled single nitrogen vacancy centers in diamond using N15,” Appl. Phys. Lett. 88, 023113 (2006).
[Crossref]

J. Meijer, B. Burchard, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, and J. Wrachtrup, “Generation of single color centers by focused nitrogen implantation,” Appl. Phys. Lett. 87, 261909 (2005).
[Crossref]

Donegan, J. F.

D. McCloskey, D. Fox, N. O’Hara, V. Usov, D. Scanlan, N. McEvoy, G. S. Duesberg, G. L. W. Cross, H. Z. Zhang, and J. F. Donegan, “Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond,” Appl. Phys. Lett. 104, 031109 (2014).
[Crossref]

Dräbenstedt, A.

A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. V. Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276, 2012–2014 (1997).
[Crossref]

Draganski, M.

F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
[Crossref]

Dréau, A. E.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

Du, J. F.

G. Waldherr, Y. Wang, S. Zaiser, M. Jamali, T. Schulte-Herbrüggen, H. Abe, T. Ohshima, J. Isoya, J. F. Du, P. Neumann, and J. Wrachtrup, “Quantum error correction in a solid-state hybrid spin register,” Nature 506, 204–207 (2014).
[Crossref]

Duan, L.-M.

L.-M. Duan and H. J. Kimble, “Scalable photonic quantum computation through cavity-assisted interactions,” Phys. Rev. Lett. 92, 127902 (2004).
[Crossref]

L.-M. Duan, M. D. Lukin, J. I. Cirac, and P. Zoller, “Long-distance quantum communication with atomic ensembles and linear optics,” Nature 414, 413–418 (2001).
[Crossref]

Duesberg, G. S.

D. McCloskey, D. Fox, N. O’Hara, V. Usov, D. Scanlan, N. McEvoy, G. S. Duesberg, G. L. W. Cross, H. Z. Zhang, and J. F. Donegan, “Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond,” Appl. Phys. Lett. 104, 031109 (2014).
[Crossref]

Dutt, M. V. G.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sørensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[Crossref]

J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cappellaro, L. Jiang, M. V. G. Dutt, E. Togan, A. S. Zibrov, A. Yacoby, R. L. Walsworth, and M. D. Lukin, “Nanoscale magnetic sensing with an individual electronic spin in diamond,” Nature 455, 644–647 (2008).
[Crossref]

Dzurak, A.

C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
[Crossref]

Dzurak, A. S.

D. D. Awschalom, L. C. Bassett, A. S. Dzurak, E. L. Hu, and J. R. Petta, “Quantum spintronics: engineering and manipulating atom-like spins in semiconductors,” Science 339, 1174–1179 (2013).
[Crossref]

Edmonds, A. M.

J. Riedrich-Möller, S. Pezzagna, J. Meijer, C. Pauly, F. Mücklich, M. Markham, A. M. Edmonds, and C. Becher, “Nanoimplantation and Purcell enhancement of single nitrogen-vacancy centers in photonic crystal cavities in diamond,” Appl. Phys. Lett. 106, 221103 (2015).
[Crossref]

A. M. Edmonds, U. F. S. D’Haenens-Johansson, R. J. Cruddace, M. E. Newton, K.-M. C. Fu, C. Santori, R. G. Beausoleil, D. J. Twitchen, and M. L. Markham, “Production of oriented nitrogen-vacancy color centers in synthetic diamond,” Phys. Rev. B 86, 035201 (2012).
[Crossref]

Eftekharian, A.

H. A. Atikian, A. Eftekharian, A. J. Salim, M. J. Burek, J. T. Choy, A. H. Majedi, and M. Lončar, “Superconducting nanowire single photon detector on diamond,” Appl. Phys. Lett. 104, 122602 (2014).
[Crossref]

Eggeling, C.

K. Y. Han, K. I. Willig, E. Rittweger, F. Jelezko, C. Eggeling, and S. W. Hell, “Three-dimensional stimulated emission depletion microscopy of nitrogen-vacancy centers in diamond using continuous-wave light,” Nano Lett. 9, 3323–3329 (2009).
[Crossref]

Eghlidi, H.

K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166–169 (2011).
[Crossref]

Elkouss, D.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

Engel, P.

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

Englund, D.

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
[Crossref]

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

H. Clevenson, M. E. Trusheim, C. Teale, T. Schröder, D. Braje, and D. Englund, “Broadband magnetometry and temperature sensing with a light-trapping diamond waveguide,” Nat. Phys. 11, 393–397 (2015).
[Crossref]

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref]

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

M. E. Trusheim, L. Li, A. Laraoui, E. H. Chen, H. Bakhru, T. Schröder, O. Gaathon, C. A. Meriles, and D. Englund, “Scalable fabrication of high purity diamond nanocrystals with long-spin-coherence nitrogen vacancy centers,” Nano Lett. 14, 32–36 (2014).
[Crossref]

O. Gaathon, J. S. Hodges, E. H. Chen, L. Li, S. Bakhru, H. Bakhru, D. Englund, and R. M. Osgood, “Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers,” Opt. Mater. 35, 361–365 (2013).
[Crossref]

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV-spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
[Crossref]

T. Schröder, E. Chen, L. Li, M. Walsh, M. E. Trusheim, I. Bayn, and D. Englund, “Targeted creation and Purcell enhancement of NV centers within photonic crystal cavities in single-crystal diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2014), paper FW1B.6.

Englund, D. R.

R. N. Patel, T. Schröder, N. Wan, L. Li, S. L. Mouradian, E. H. Chen, and D. R. Englund, “Efficient photon coupling from a diamond nitrogen vacancy center by integration with silica fiber,” Light Sci. Appl. 5, e16032 (2016).
[Crossref]

T. Schröder, L. Li, E. Chen, M. Walsh, M. E. Trusheim, I. Bayn, J. Zheng, S. Mouradian, H. Bakhru, O. Gaathon, and D. R. Englund, “Deterministic high-yield creation of nitrogen vacancy centers in diamond photonic crystal cavities and photonic elements,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2015), paper FTh3B.1.

Eriksson, S.

M. Trupke, E. A. Hinds, S. Eriksson, E. A. Curtis, Z. Moktadir, E. Kukharenka, and M. Kraft, “Microfabricated high-finesse optical cavity with open access and small volume,” Appl. Phys. Lett. 87, 211106 (2005).
[Crossref]

Evans, R.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

Evans, R. E.

R. E. Evans, A. Sipahigil, D. D. Sukachev, A. S. Zibrov, and M. D. Lukin, “Coherent optical emitters in diamond nanostructures via ion implantation,” arXiv:1512.03820 [cond-mat, physics:quant-ph] (2015).

Everitt, M. S.

K. Nemoto, M. Trupke, S. J. Devitt, A. M. Stephens, K. Buczak, T. Nobauer, M. S. Everitt, J. Schmiedmayer, and W. J. Munro, “Photonic architecture for scalable quantum information processing in NV-diamond,” arXiv:1309.4277 [quant-ph] (2013).

Fairchild, B. A.

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[Crossref]

Faraon, A.

Z. Huang, W.-D. Li, C. Santori, V. M. Acosta, A. Faraon, T. Ishikawa, W. Wu, D. Winston, R. S. Williams, and R. G. Beausoleil, “Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing,” Appl. Phys. Lett. 103, 081906 (2013).
[Crossref]

A. Faraon, C. Santori, Z. Huang, K.-M. C. Fu, V. M. Acosta, D. Fattal, and R. G. Beausoleil, “Quantum photonic devices in single-crystal diamond,” New J. Phys. 15, 025010 (2013).
[Crossref]

Z. Huang, A. Faraon, C. Santori, V. Acosta, and R. G. Beausoleil, “Microring resonator-based diamond optothermal switch: a building block for a quantum computing network,” Proc. SPIE 8635, 86350E (2013).

P. E. Barclay, K.-M. C. Fu, C. Santori, A. Faraon, and R. G. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[Crossref]

K.-M. C. Fu, P. E. Barclay, C. Santori, A. Faraon, and R. G. Beausoleil, “Low-temperature tapered-fiber probing of diamond nitrogen-vacancy ensembles coupled to GaP microcavities,” New J. Phys. 13, 055023 (2011).
[Crossref]

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[Crossref]

A. Faraon, Z. Huang, V. Acosta, C. Santori, and R. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal resonators in monocrystalline diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2012), paper QM3C.5.

Fattal, D.

A. Faraon, C. Santori, Z. Huang, K.-M. C. Fu, V. M. Acosta, D. Fattal, and R. G. Beausoleil, “Quantum photonic devices in single-crystal diamond,” New J. Phys. 15, 025010 (2013).
[Crossref]

C. Santori, D. Fattal, and Y. Yamamoto, Single-Photon Devices and Applications (Wiley, 2010).

Fedder, H.

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85, 123703 (2014).
[Crossref]

F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
[Crossref]

Feng, P. X. L.

R. Yang, C. A. Zorman, and P. X. L. Feng, “High frequency torsional-mode nanomechanical resonators enabled by very thin nanocrystalline diamond diaphragms,” Diam. Relat. Mater. 54, 19–25 (2015).
[Crossref]

Ferrari, S.

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

Feygelson, T.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[Crossref]

Fiore, A.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Fisch, M.

C. Santori, P. E. Barclay, K.-M. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[Crossref]

Fischer, M.

J. Riedrich-Möller, C. Arend, C. Pauly, F. Mücklich, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond,” Nano Lett. 14, 5281–5287 (2014).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

Flagg, E. B.

Fleury, L.

A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. V. Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276, 2012–2014 (1997).
[Crossref]

Fox, D.

D. McCloskey, D. Fox, N. O’Hara, V. Usov, D. Scanlan, N. McEvoy, G. S. Duesberg, G. L. W. Cross, H. Z. Zhang, and J. F. Donegan, “Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond,” Appl. Phys. Lett. 104, 031109 (2014).
[Crossref]

Frauenheim, T.

P. Deák, B. Aradi, M. Kaviani, T. Frauenheim, and A. Gali, “Formation of NV centers in diamond: a theoretical study based on calculated transitions and migration of nitrogen and vacancy related defects,” Phys. Rev. B 89, 075203 (2014).
[Crossref]

Freeth, J. J. P.

R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
[Crossref]

Frenner, K.

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85, 123703 (2014).
[Crossref]

Friel, I.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Frucci, G.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Fu, K. M. C.

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

Fu, K.-M.

Fu, K.-M. C.

N. Thomas, R. J. Barbour, Y. Song, M. L. Lee, and K.-M. C. Fu, “Waveguide-integrated single-crystalline GaP resonators on diamond,” Opt. Express 22, 13555–13564 (2014).
[Crossref]

A. Faraon, C. Santori, Z. Huang, K.-M. C. Fu, V. M. Acosta, D. Fattal, and R. G. Beausoleil, “Quantum photonic devices in single-crystal diamond,” New J. Phys. 15, 025010 (2013).
[Crossref]

A. M. Edmonds, U. F. S. D’Haenens-Johansson, R. J. Cruddace, M. E. Newton, K.-M. C. Fu, C. Santori, R. G. Beausoleil, D. J. Twitchen, and M. L. Markham, “Production of oriented nitrogen-vacancy color centers in synthetic diamond,” Phys. Rev. B 86, 035201 (2012).
[Crossref]

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[Crossref]

K.-M. C. Fu, P. E. Barclay, C. Santori, A. Faraon, and R. G. Beausoleil, “Low-temperature tapered-fiber probing of diamond nitrogen-vacancy ensembles coupled to GaP microcavities,” New J. Phys. 13, 055023 (2011).
[Crossref]

P. E. Barclay, K.-M. C. Fu, C. Santori, A. Faraon, and R. G. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[Crossref]

C. Santori, P. E. Barclay, K.-M. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[Crossref]

P. E. Barclay, K.-M. C. Fu, C. Santori, and R. G. Beausoleil, “Chip-based microcavities coupled to nitrogen-vacancy centers in single crystal diamond,” Appl. Phys. Lett. 95, 191115 (2009).

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

C. Santori, P. E. Barclay, K.-M. C. Fu, and R. G. Beausoleil, “Vertical distribution of nitrogen-vacancy centers in diamond formed by ion implantation and annealing,” Phys. Rev. B 79, 125313 (2009).
[Crossref]

K.-M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
[Crossref]

M. Gould, S. Chakravarthi, I. R. Christen, N. Thomas, S. Dadgostar, Y. Song, M. L. Lee, F. Hatami, and K.-M. C. Fu, “A large-scale GaP-on-diamond integrated photonics platform for NV center-based quantum information,” arXiv:1510.05047 [cond-mat, physics:physics, physics:quant-ph] (2015).

Fuchs, G. D.

D. M. Toyli, C. D. Weis, G. D. Fuchs, T. Schenkel, and D. D. Awschalom, “Chip-scale nanofabrication of single spins and spin arrays in diamond,” Nano Lett. 10, 3168–3172 (2010).
[Crossref]

Fujimori, N.

M. Schreck, J. Asmussen, S. Shikata, J.-C. Arnault, and N. Fujimori, “Large-area high-quality single crystal diamond,” MRS Bull. 39(06), 504–510 (2014).
[Crossref]

Fujiwara, M.

Furuyama, S.

S. Furuyama, K. Tahara, T. Iwasaki, M. Shimizu, J. Yaita, M. Kondo, T. Kodera, and M. Hatano, “Improvement of fluorescence intensity of nitrogen vacancy centers in self-formed diamond microstructures,” Appl. Phys. Lett. 107, 163102 (2015).
[Crossref]

Gaathon, O.

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

M. E. Trusheim, L. Li, A. Laraoui, E. H. Chen, H. Bakhru, T. Schröder, O. Gaathon, C. A. Meriles, and D. Englund, “Scalable fabrication of high purity diamond nanocrystals with long-spin-coherence nitrogen vacancy centers,” Nano Lett. 14, 32–36 (2014).
[Crossref]

O. Gaathon, J. S. Hodges, E. H. Chen, L. Li, S. Bakhru, H. Bakhru, D. Englund, and R. M. Osgood, “Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers,” Opt. Mater. 35, 361–365 (2013).
[Crossref]

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV-spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
[Crossref]

T. Schröder, L. Li, E. Chen, M. Walsh, M. E. Trusheim, I. Bayn, J. Zheng, S. Mouradian, H. Bakhru, O. Gaathon, and D. R. Englund, “Deterministic high-yield creation of nitrogen vacancy centers in diamond photonic crystal cavities and photonic elements,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2015), paper FTh3B.1.

Gädeke, F.

T. Schröder, F. Gädeke, M. J. Banholzer, and O. Benson, “Ultrabright and efficient single-photon generation based on nitrogen-vacancy centres in nanodiamonds on a solid immersion lens,” New J. Phys. 13, 055017 (2011).
[Crossref]

Gaebel, T.

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

J. R. Rabeau, P. Reichart, G. Tamanyan, D. N. Jamieson, S. Prawer, F. Jelezko, T. Gaebel, I. Popa, M. Domhan, and J. Wrachtrup, “Implantation of labelled single nitrogen vacancy centers in diamond using N15,” Appl. Phys. Lett. 88, 023113 (2006).
[Crossref]

P. Tamarat, T. Gaebel, J. R. Rabeau, M. Khan, A. D. Greentree, H. Wilson, L. C. L. Hollenberg, S. Prawer, P. Hemmer, F. Jelezko, and J. Wrachtrup, “Stark shift control of single optical centers in diamond,” Phys. Rev. Lett. 97, 083002 (2006).
[Crossref]

J. Meijer, B. Burchard, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, and J. Wrachtrup, “Generation of single color centers by focused nitrogen implantation,” Appl. Phys. Lett. 87, 261909 (2005).
[Crossref]

Gaggero, A.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Gali, A.

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

P. Deák, B. Aradi, M. Kaviani, T. Frauenheim, and A. Gali, “Formation of NV centers in diamond: a theoretical study based on calculated transitions and migration of nitrogen and vacancy related defects,” Phys. Rev. B 89, 075203 (2014).
[Crossref]

Ganesan, K.

Ganzhorn, M.

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
[Crossref]

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
[Crossref]

Gao, W. B.

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9, 363–373 (2015).
[Crossref]

Gauja, E.

C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
[Crossref]

Gawlik, W.

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

Gerhardt, I.

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85, 123703 (2014).
[Crossref]

P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
[Crossref]

Gertner, R.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

Gibson, B.

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

Gibson, B. C.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[Crossref]

M. P. Hiscocks, K. Ganesan, B. C. Gibson, S. T. Huntington, F. Ladouceur, and S. Prawer, “Diamond waveguides fabricated by reactive ion etching,” Opt. Express 16, 19512–19519 (2008).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

Gicquel, A.

M. Lesik, J.-P. Tetienne, A. Tallaire, J. Achard, V. Mille, A. Gicquel, J.-F. Roch, and V. Jacques, “Perfect preferential orientation of nitrogen-vacancy defects in a synthetic diamond sample,” Appl. Phys. Lett. 104, 113107 (2014).
[Crossref]

Giese, C.

C. J. Widmann, C. Giese, M. Wolfer, D. Brink, N. Heidrich, and C. E. Nebel, “Fabrication and characterization of single crystalline diamond nanopillars with NV-centers,” Diam. Relat. Mater. 54, 2–8 (2015).
[Crossref]

Girkin, J. M.

H. W. Choi, E. Gu, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, and M. D. Dawson, “Fabrication of natural diamond microlenses by plasma etching,” J. Vac. Sci. Technol. B 23, 130–132 (2005).
[Crossref]

Gogotsi, Y.

V. N. Mochalin, O. Shenderova, D. Ho, and Y. Gogotsi, “The properties and applications of nanodiamonds,” Nat. Nanotechnol. 7, 11–23 (2012).
[Crossref]

Goldfuß, J.

S. Gsell, T. Bauer, J. Goldfuß, M. Schreck, and B. Stritzker, “A route to diamond wafers by epitaxial deposition on silicon via iridium/yttria-stabilized zirconia buffer layers,” Appl. Phys. Lett. 84, 4541–4543 (2004).
[Crossref]

Goldstein, J.

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

Goldstein, J. A.

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

Gonthier, F.

J. Love, W. Henry, W. Stewart, R. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: adiabaticity criteria,” IEE Proc. J. Optoelectron. 138, 343–354 (1991).
[Crossref]

Götzinger, S.

K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166–169 (2011).
[Crossref]

Gould, M.

M. Gould, S. Chakravarthi, I. R. Christen, N. Thomas, S. Dadgostar, Y. Song, M. L. Lee, F. Hatami, and K.-M. C. Fu, “A large-scale GaP-on-diamond integrated photonics platform for NV center-based quantum information,” arXiv:1510.05047 [cond-mat, physics:physics, physics:quant-ph] (2015).

Grangier, P.

Grazioso, F.

Green, W. M. J.

X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4, 557–560 (2010).
[Crossref]

Greentree, A. D.

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “High-performance diamond-based single-photon sources for quantum communication,” Phys. Rev. A 80, 052308 (2009).
[Crossref]

C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “Towards a picosecond transform-limited nitrogen-vacancy based single photon source,” Opt. Express 16, 6240–6250 (2008).
[Crossref]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[Crossref]

F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
[Crossref]

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

P. Tamarat, T. Gaebel, J. R. Rabeau, M. Khan, A. D. Greentree, H. Wilson, L. C. L. Hollenberg, S. Prawer, P. Hemmer, F. Jelezko, and J. Wrachtrup, “Stark shift control of single optical centers in diamond,” Phys. Rev. Lett. 97, 083002 (2006).
[Crossref]

Greve, K. D.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

Griffin, C.

H. W. Choi, E. Gu, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, and M. D. Dawson, “Fabrication of natural diamond microlenses by plasma etching,” J. Vac. Sci. Technol. B 23, 130–132 (2005).
[Crossref]

Grinolds, M. S.

S. Hong, M. S. Grinolds, L. M. Pham, D. Le Sage, L. Luan, R. L. Walsworth, and A. Yacoby, “Nanoscale magnetometry with NV centers in diamond,” MRS Bull. 38(02), 155–161 (2013).
[Crossref]

P. Maletinsky, S. Hong, M. S. Grinolds, B. Hausmann, M. D. Lukin, R. L. Walsworth, M. Lončar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nature Nanotechnol. 7, 320–324 (2012).
[Crossref]

Grotz, B.

J. Wrachtrup, F. Jelezko, B. Grotz, and L. McGuinness, “Nitrogen-vacancy centers close to surfaces,” MRS Bull. 38(02), 149–154 (2013).
[Crossref]

Gruber, A.

A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. V. Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276, 2012–2014 (1997).
[Crossref]

Gsell, S.

J. Riedrich-Möller, C. Arend, C. Pauly, F. Mücklich, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond,” Nano Lett. 14, 5281–5287 (2014).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

S. Gsell, T. Bauer, J. Goldfuß, M. Schreck, and B. Stritzker, “A route to diamond wafers by epitaxial deposition on silicon via iridium/yttria-stabilized zirconia buffer layers,” Appl. Phys. Lett. 84, 4541–4543 (2004).
[Crossref]

Gu, E.

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diam. Relat. Mater. 15, 725–728 (2006).
[Crossref]

H. W. Choi, E. Gu, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, and M. D. Dawson, “Fabrication of natural diamond microlenses by plasma etching,” J. Vac. Sci. Technol. B 23, 130–132 (2005).
[Crossref]

Hadden, J. P.

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).

Hamer, M. F.

G. Davies and M. F. Hamer, “Optical studies of the 1.945  eV vibronic band in diamond,” Proc. R. Soc. London A 348, 285–298 (1976).

Han, K. Y.

K. Y. Han, K. I. Willig, E. Rittweger, F. Jelezko, C. Eggeling, and S. W. Hell, “Three-dimensional stimulated emission depletion microscopy of nitrogen-vacancy centers in diamond using continuous-wave light,” Nano Lett. 9, 3323–3329 (2009).
[Crossref]

Hänsch, T. W.

T. Steinmetz, Y. Colombe, D. Hunger, T. W. Hänsch, A. Balocchi, R. J. Warburton, and J. Reichel, “Stable fiber-based Fabry–Pérot cavity,” Appl. Phys. Lett. 89, 111110 (2006).
[Crossref]

H. Kaupp, C. Deutsch, H.-C. Chang, J. Reichel, T. W. Hänsch, and D. Hunger, “Scaling laws of the cavity enhancement for NV centers in diamond,” arXiv:1304.0948 (2013).

Hanson, R.

M. S. Blok, N. Kalb, A. Reiserer, T. H. Taminiau, and R. Hanson, “Towards quantum networks of single spins: analysis of a quantum memory with an optical interface in diamond,” Faraday Discuss. 184, 173–182 (2015).
[Crossref]

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9, 363–373 (2015).
[Crossref]

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

W. Pfaff, B. J. Hensen, H. Bernien, S. B. V. Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
[Crossref]

T. H. Taminiau, J. Cramer, T. V. D. Sar, V. V. Dobrovitski, and R. Hanson, “Universal control and error correction in multi-qubit spin registers in diamond,” Nat. Nanotechnol. 9, 171–176 (2014).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref]

L. Childress and R. Hanson, “Diamond NV centers for quantum computing and quantum networks,” MRS Bull. 38(02), 134–138 (2013).
[Crossref]

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[Crossref]

J. Cramer, N. Kalb, M. A. Rol, B. Hensen, M. S. Blok, M. Markham, D. J. Twitchen, R. Hanson, and T. H. Taminiau, “Repeated quantum error correction on a continuously encoded qubit by real-time feedback,” arXiv:1508.01388 [cond-mat, physics:quant-ph] (2015).

Happel, P.

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

Harris, N. C.

L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref]

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

Harrison, J. P.

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).

A. Young, C. Y. Hu, L. Marseglia, J. P. Harrison, J. L. O’Brien, and J. G. Rarity, “Cavity enhanced spin measurement of the ground state spin of an NV center in diamond,” New J. Phys. 11, 013007 (2009).
[Crossref]

Hartland, C. B.

R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
[Crossref]

Hatami, F.

M. Gould, S. Chakravarthi, I. R. Christen, N. Thomas, S. Dadgostar, Y. Song, M. L. Lee, F. Hatami, and K.-M. C. Fu, “A large-scale GaP-on-diamond integrated photonics platform for NV center-based quantum information,” arXiv:1510.05047 [cond-mat, physics:physics, physics:quant-ph] (2015).

Hatano, M.

S. Furuyama, K. Tahara, T. Iwasaki, M. Shimizu, J. Yaita, M. Kondo, T. Kodera, and M. Hatano, “Improvement of fluorescence intensity of nitrogen vacancy centers in self-formed diamond microstructures,” Appl. Phys. Lett. 107, 163102 (2015).
[Crossref]

Hausmann, B.

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

P. Maletinsky, S. Hong, M. S. Grinolds, B. Hausmann, M. D. Lukin, R. L. Walsworth, M. Lončar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nature Nanotechnol. 7, 320–324 (2012).
[Crossref]

I. Bulu, T. Babinec, B. Hausmann, J. T. Choy, and M. Lončar, “Plasmonic resonators for enhanced diamond NV- center single photon sources,” Opt. Express 19, 5268 (2011).
[Crossref]

Hausmann, B. J. M.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

J. T. Choy, I. Bulu, B. J. M. Hausmann, E. Janitz, I.-C. Huang, and M. Lončar, “Spontaneous emission and collection efficiency enhancement of single emitters in diamond via plasmonic cavities and gratings,” Appl. Phys. Lett. 103, 161101 (2013).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

B. J. M. Hausmann, I. B. Bulu, P. B. Deotare, M. McCutcheon, V. Venkataraman, M. L. Markham, D. J. Twitchen, and M. Lončar, “Integrated high-quality factor optical resonators in diamond,” Nano Lett. 13, 1898–1902 (2013).
[Crossref]

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
[Crossref]

J. T. Choy, B. J. M. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
[Crossref]

B. J. M. Hausmann, T. M. Babinec, J. T. Choy, J. S. Hodges, S. Hong, I. Bulu, A. Yacoby, M. D. Lukin, and M. Lončar, “Single-color centers implanted in diamond nanostructures,” New J. Phys. 13, 045004 (2011).
[Crossref]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
[Crossref]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diam. Relat. Mater. 19, 621–629 (2010).
[Crossref]

Häußermann, T.

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

Hayamizu, Y.

M. Yoshita, K. Koyama, Y. Hayamizu, M. Baba, and H. Akiyama, “Improved high collection efficiency in fluorescence microscopy with a Weierstrass-sphere solid immersion lens,” Jpn. J. Appl. Phys. 41, L858–L860 (2002).
[Crossref]

Heidrich, N.

C. J. Widmann, C. Giese, M. Wolfer, D. Brink, N. Heidrich, and C. E. Nebel, “Fabrication and characterization of single crystalline diamond nanopillars with NV-centers,” Diam. Relat. Mater. 54, 2–8 (2015).
[Crossref]

Hell, S. W.

S. Pezzagna, D. Wildanger, P. Mazarov, A. D. Wieck, Y. Sarov, I. Rangelow, B. Naydenov, F. Jelezko, S. W. Hell, and J. Meijer, “Nanoscale engineering and optical addressing of single spins in diamond,” Small 6, 2117–2121 (2010).
[Crossref]

K. Y. Han, K. I. Willig, E. Rittweger, F. Jelezko, C. Eggeling, and S. W. Hell, “Three-dimensional stimulated emission depletion microscopy of nitrogen-vacancy centers in diamond using continuous-wave light,” Nano Lett. 9, 3323–3329 (2009).
[Crossref]

Hemmer, P.

P. Tamarat, T. Gaebel, J. R. Rabeau, M. Khan, A. D. Greentree, H. Wilson, L. C. L. Hollenberg, S. Prawer, P. Hemmer, F. Jelezko, and J. Wrachtrup, “Stark shift control of single optical centers in diamond,” Phys. Rev. Lett. 97, 083002 (2006).
[Crossref]

Hemmer, P. R.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sørensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[Crossref]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diam. Relat. Mater. 19, 621–629 (2010).
[Crossref]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
[Crossref]

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

J. M. Taylor, P. Cappellaro, L. Childress, L. Jiang, D. Budker, P. R. Hemmer, A. Yacoby, R. Walsworth, and M. D. Lukin, “High-sensitivity diamond magnetometer with nanoscale resolution,” Nat. Phys. 4, 810–816 (2008).
[Crossref]

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

Henry, W.

J. Love, W. Henry, W. Stewart, R. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: adiabaticity criteria,” IEE Proc. J. Optoelectron. 138, 343–354 (1991).
[Crossref]

Hensen, B.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref]

J. Cramer, N. Kalb, M. A. Rol, B. Hensen, M. S. Blok, M. Markham, D. J. Twitchen, R. Hanson, and T. H. Taminiau, “Repeated quantum error correction on a continuously encoded qubit by real-time feedback,” arXiv:1508.01388 [cond-mat, physics:quant-ph] (2015).

Hensen, B. J.

W. Pfaff, B. J. Hensen, H. Bernien, S. B. V. Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
[Crossref]

Hepp, C.

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

Heremans, F. J.

P. Andrich, B. J. Alemán, J. C. Lee, K. Ohno, C. F. de las Casas, F. J. Heremans, E. L. Hu, and D. D. Awschalom, “Engineered micro- and nanoscale diamonds as mobile probes for high-resolution sensing in fluid,” Nano Lett. 14, 4959–4964 (2014).
[Crossref]

K. Ohno, F. J. Heremans, C. F. D. l. Casas, B. A. Myers, B. J. Alemán, A. C. B. Jayich, and D. D. Awschalom, “Three-dimensional localization of spins in diamond using 12c implantation,” Appl. Phys. Lett. 105, 052406 (2014).
[Crossref]

K. Ohno, F. J. Heremans, L. C. Bassett, B. A. Myers, D. M. Toyli, A. C. B. Jayich, C. J. Palmstrøm, and D. D. Awschalom, “Engineering shallow spins in diamond with nitrogen delta-doping,” Appl. Phys. Lett. 101, 082413 (2012).
[Crossref]

Hinds, E. A.

M. Trupke, E. A. Hinds, S. Eriksson, E. A. Curtis, Z. Moktadir, E. Kukharenka, and M. Kraft, “Microfabricated high-finesse optical cavity with open access and small volume,” Appl. Phys. Lett. 87, 211106 (2005).
[Crossref]

Hingant, T.

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77, 056503 (2014).
[Crossref]

Hirao, T.

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, “Smooth and high-rate reactive ion etching of diamond,” Diam. Relat. Mater. 11, 824–827 (2002).
[Crossref]

Hiscocks, M. P.

Ho, D.

V. N. Mochalin, O. Shenderova, D. Ho, and Y. Gogotsi, “The properties and applications of nanodiamonds,” Nat. Nanotechnol. 7, 11–23 (2012).
[Crossref]

Ho, Y. L. D.

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).

Ho, Y.-L. D.

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

Hodges, J. S.

O. Gaathon, J. S. Hodges, E. H. Chen, L. Li, S. Bakhru, H. Bakhru, D. Englund, and R. M. Osgood, “Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers,” Opt. Mater. 35, 361–365 (2013).
[Crossref]

J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV-spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
[Crossref]

B. J. M. Hausmann, T. M. Babinec, J. T. Choy, J. S. Hodges, S. Hong, I. Bulu, A. Yacoby, M. D. Lukin, and M. Lončar, “Single-color centers implanted in diamond nanostructures,” New J. Phys. 13, 045004 (2011).
[Crossref]

J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cappellaro, L. Jiang, M. V. G. Dutt, E. Togan, A. S. Zibrov, A. Yacoby, R. L. Walsworth, and M. D. Lukin, “Nanoscale magnetic sensing with an individual electronic spin in diamond,” Nature 455, 644–647 (2008).
[Crossref]

Höfling, S.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Hollenberg, L. C. L.

M. W. Doherty, N. B. Manson, P. Delaney, F. Jelezko, J. Wrachtrup, and L. C. L. Hollenberg, “The nitrogen-vacancy colour centre in diamond,” Phys. Rep. 528, 1–45 (2013).
[Crossref]

F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “High-performance diamond-based single-photon sources for quantum communication,” Phys. Rev. A 80, 052308 (2009).
[Crossref]

C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “Towards a picosecond transform-limited nitrogen-vacancy based single photon source,” Opt. Express 16, 6240–6250 (2008).
[Crossref]

P. Tamarat, T. Gaebel, J. R. Rabeau, M. Khan, A. D. Greentree, H. Wilson, L. C. L. Hollenberg, S. Prawer, P. Hemmer, F. Jelezko, and J. Wrachtrup, “Stark shift control of single optical centers in diamond,” Phys. Rev. Lett. 97, 083002 (2006).
[Crossref]

Holm, A. M.

K.-M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
[Crossref]

Honert, J.

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

Hong, S.

S. Hong, M. S. Grinolds, L. M. Pham, D. Le Sage, L. Luan, R. L. Walsworth, and A. Yacoby, “Nanoscale magnetometry with NV centers in diamond,” MRS Bull. 38(02), 155–161 (2013).
[Crossref]

P. Maletinsky, S. Hong, M. S. Grinolds, B. Hausmann, M. D. Lukin, R. L. Walsworth, M. Lončar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nature Nanotechnol. 7, 320–324 (2012).
[Crossref]

B. J. M. Hausmann, T. M. Babinec, J. T. Choy, J. S. Hodges, S. Hong, I. Bulu, A. Yacoby, M. D. Lukin, and M. Lončar, “Single-color centers implanted in diamond nanostructures,” New J. Phys. 13, 045004 (2011).
[Crossref]

J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cappellaro, L. Jiang, M. V. G. Dutt, E. Togan, A. S. Zibrov, A. Yacoby, R. L. Walsworth, and M. D. Lukin, “Nanoscale magnetic sensing with an individual electronic spin in diamond,” Nature 455, 644–647 (2008).
[Crossref]

Hong, W.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

Hörmann, F.

M. Schreck, A. Schury, F. Hörmann, H. Roll, and B. Stritzker, “Mosaicity reduction during growth of heteroepitaxial diamond films on iridium buffer layers: experimental results and numerical simulations,” J. Appl. Phys. 91, 676–685 (2002).
[Crossref]

M. Schreck, F. Hörmann, H. Roll, J. K. N. Lindner, and B. Stritzker, “Diamond nucleation on iridium buffer layers and subsequent textured growth: a route for the realization of single-crystal diamond films,” Appl. Phys. Lett. 78, 192–194 (2001).
[Crossref]

Hryciw, A. C.

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5, 041051 (2015).
[Crossref]

B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching,” Nano Lett. 15, 5131–5136 (2015).
[Crossref]

Hu, C. Y.

A. Young, C. Y. Hu, L. Marseglia, J. P. Harrison, J. L. O’Brien, and J. G. Rarity, “Cavity enhanced spin measurement of the ground state spin of an NV center in diamond,” New J. Phys. 11, 013007 (2009).
[Crossref]

Hu, E. L.

P. Andrich, B. J. Alemán, J. C. Lee, K. Ohno, C. F. de las Casas, F. J. Heremans, E. L. Hu, and D. D. Awschalom, “Engineered micro- and nanoscale diamonds as mobile probes for high-resolution sensing in fluid,” Nano Lett. 14, 4959–4964 (2014).
[Crossref]

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, D. O. Bracher, and E. L. Hu, “Bottom-up engineering of diamond micro- and nano-structures,” Laser Photon. Rev. 7, L61–L65 (2013).
[Crossref]

D. D. Awschalom, L. C. Bassett, A. S. Dzurak, E. L. Hu, and J. R. Petta, “Quantum spintronics: engineering and manipulating atom-like spins in semiconductors,” Science 339, 1174–1179 (2013).
[Crossref]

J. C. Lee, A. P. Magyar, D. O. Bracher, I. Aharonovich, and E. L. Hu, “Fabrication of thin diamond membranes for photonic applications,” Diam. Relat. Mater. 33, 45–48 (2013).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[Crossref]

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[Crossref]

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett. 90, 081110 (2007).
[Crossref]

S. Cui and E. L. Hu, “Effect of fluorinated diamond surface on charge state of nitrogen-vacancy centers,” arXiv:1304.1407 (2013).

Hu, X.

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

Huang, H.-C.

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

Huang, I.-C.

J. T. Choy, I. Bulu, B. J. M. Hausmann, E. Janitz, I.-C. Huang, and M. Lončar, “Spontaneous emission and collection efficiency enhancement of single emitters in diamond via plasmonic cavities and gratings,” Appl. Phys. Lett. 103, 161101 (2013).
[Crossref]

Huang, M.

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[Crossref]

Huang, Z.

Z. Huang, W.-D. Li, C. Santori, V. M. Acosta, A. Faraon, T. Ishikawa, W. Wu, D. Winston, R. S. Williams, and R. G. Beausoleil, “Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing,” Appl. Phys. Lett. 103, 081906 (2013).
[Crossref]

Z. Huang, A. Faraon, C. Santori, V. Acosta, and R. G. Beausoleil, “Microring resonator-based diamond optothermal switch: a building block for a quantum computing network,” Proc. SPIE 8635, 86350E (2013).

A. Faraon, C. Santori, Z. Huang, K.-M. C. Fu, V. M. Acosta, D. Fattal, and R. G. Beausoleil, “Quantum photonic devices in single-crystal diamond,” New J. Phys. 15, 025010 (2013).
[Crossref]

A. Faraon, Z. Huang, V. Acosta, C. Santori, and R. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal resonators in monocrystalline diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2012), paper QM3C.5.

Hughes, G. M.

Hunger, D.

D. Hunger, C. Deutsch, R. J. Barbour, R. J. Warburton, and J. Reichel, “Laser micro-fabrication of concave, low-roughness features in silica,” AIP Adv. 2, 012119 (2012).
[Crossref]

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

T. Steinmetz, Y. Colombe, D. Hunger, T. W. Hänsch, A. Balocchi, R. J. Warburton, and J. Reichel, “Stable fiber-based Fabry–Pérot cavity,” Appl. Phys. Lett. 89, 111110 (2006).
[Crossref]

H. Kaupp, C. Deutsch, H.-C. Chang, J. Reichel, T. W. Hänsch, and D. Hunger, “Scaling laws of the cavity enhancement for NV centers in diamond,” arXiv:1304.0948 (2013).

Huntington, S.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[Crossref]

Huntington, S. T.

M. P. Hiscocks, K. Ganesan, B. C. Gibson, S. T. Huntington, F. Ladouceur, and S. Prawer, “Diamond waveguides fabricated by reactive ion etching,” Opt. Express 16, 19512–19519 (2008).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

Ilin, K.

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

Imamoglu, A.

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9, 363–373 (2015).
[Crossref]

Inglis, P. N.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Ishikawa, T.

Z. Huang, W.-D. Li, C. Santori, V. M. Acosta, A. Faraon, T. Ishikawa, W. Wu, D. Winston, R. S. Williams, and R. G. Beausoleil, “Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing,” Appl. Phys. Lett. 103, 081906 (2013).
[Crossref]

Isoya, J.

T. Wolf, P. Neumann, K. Nakamura, H. Sumiya, T. Ohshima, J. Isoya, and J. Wrachtrup, “Subpicotesla diamond magnetometry,” Phys. Rev. X 5, 041001 (2015).
[Crossref]

T. Teraji, T. Yamamoto, K. Watanabe, Y. Koide, J. Isoya, S. Onoda, T. Ohshima, L. J. Rogers, F. Jelezko, P. Neumann, J. Wrachtrup, and S. Koizumi, “Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single color center formation,” Phys. Status Solidi A 212, 2365–2384 (2015).
[Crossref]

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

A. Sipahigil, K. Jahnke, L. Rogers, T. Teraji, J. Isoya, A. Zibrov, F. Jelezko, and M. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113, 113602 (2014).
[Crossref]

G. Waldherr, Y. Wang, S. Zaiser, M. Jamali, T. Schulte-Herbrüggen, H. Abe, T. Ohshima, J. Isoya, J. F. Du, P. Neumann, and J. Wrachtrup, “Quantum error correction in a solid-state hybrid spin register,” Nature 506, 204–207 (2014).
[Crossref]

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
[Crossref]

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

T. Teraji, T. Taniguchi, S. Koizumi, K. Watanabe, M. Liao, Y. Koide, and J. Isoya, “Chemical vapor deposition of 12 C isotopically enriched polycrystalline diamond,” Jpn. J. Appl. Phys. 51, 090104 (2012).

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

Iwasaki, T.

S. Furuyama, K. Tahara, T. Iwasaki, M. Shimizu, J. Yaita, M. Kondo, T. Kodera, and M. Hatano, “Improvement of fluorescence intensity of nitrogen vacancy centers in self-formed diamond microstructures,” Appl. Phys. Lett. 107, 163102 (2015).
[Crossref]

Jacques, V.

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
[Crossref]

M. Lesik, J.-P. Tetienne, A. Tallaire, J. Achard, V. Mille, A. Gicquel, J.-F. Roch, and V. Jacques, “Perfect preferential orientation of nitrogen-vacancy defects in a synthetic diamond sample,” Appl. Phys. Lett. 104, 113107 (2014).
[Crossref]

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77, 056503 (2014).
[Crossref]

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
[Crossref]

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

Jahanmirinejad, S.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Jahnke, K.

A. Sipahigil, K. Jahnke, L. Rogers, T. Teraji, J. Isoya, A. Zibrov, F. Jelezko, and M. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113, 113602 (2014).
[Crossref]

Jahnke, K. D.

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

Jakobi, I.

J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
[Crossref]

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

Jaksch, D.

F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
[Crossref]

Jamali, M.

G. Waldherr, Y. Wang, S. Zaiser, M. Jamali, T. Schulte-Herbrüggen, H. Abe, T. Ohshima, J. Isoya, J. F. Du, P. Neumann, and J. Wrachtrup, “Quantum error correction in a solid-state hybrid spin register,” Nature 506, 204–207 (2014).
[Crossref]

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85, 123703 (2014).
[Crossref]

Jamieson, D. N.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[Crossref]

F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
[Crossref]

J. R. Rabeau, P. Reichart, G. Tamanyan, D. N. Jamieson, S. Prawer, F. Jelezko, T. Gaebel, I. Popa, M. Domhan, and J. Wrachtrup, “Implantation of labelled single nitrogen vacancy centers in diamond using N15,” Appl. Phys. Lett. 88, 023113 (2006).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
[Crossref]

Janitz, E.

E. Janitz, M. Ruf, M. Dimock, A. Bourassa, J. Sankey, and L. Childress, “Fabry–Perot microcavity for diamond-based photonics,” Phys. Rev. A 92, 043844 (2015).
[Crossref]

J. T. Choy, I. Bulu, B. J. M. Hausmann, E. Janitz, I.-C. Huang, and M. Lončar, “Spontaneous emission and collection efficiency enhancement of single emitters in diamond via plasmonic cavities and gratings,” Appl. Phys. Lett. 103, 161101 (2013).
[Crossref]

Jarmola, A.

N. Bar-Gill, L. M. Pham, A. Jarmola, D. Budker, and R. L. Walsworth, “Solid-state electronic spin coherence time approaching one second,” Nat. Commun. 4, 1743 (2013).
[Crossref]

Jayakumar, H.

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5, 041051 (2015).
[Crossref]

Jayich, A. B.

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

Jayich, A. C. B.

K. Ohno, F. J. Heremans, C. F. D. l. Casas, B. A. Myers, B. J. Alemán, A. C. B. Jayich, and D. D. Awschalom, “Three-dimensional localization of spins in diamond using 12c implantation,” Appl. Phys. Lett. 105, 052406 (2014).
[Crossref]

P. Ovartchaiyapong, K. W. Lee, B. A. Myers, and A. C. B. Jayich, “Dynamic strain-mediated coupling of a single diamond spin to a mechanical resonator,” Nat. Commun. 5, 4429 (2014).
[Crossref]

K. Ohno, F. J. Heremans, L. C. Bassett, B. A. Myers, D. M. Toyli, A. C. B. Jayich, C. J. Palmstrøm, and D. D. Awschalom, “Engineering shallow spins in diamond with nitrogen delta-doping,” Appl. Phys. Lett. 101, 082413 (2012).
[Crossref]

P. Ovartchaiyapong, L. M. A. Pascal, B. A. Myers, P. Lauria, and A. C. B. Jayich, “High quality factor single-crystal diamond mechanical resonators,” Appl. Phys. Lett. 101, 163505 (2012).
[Crossref]

C. A. McLellan, B. A. Myers, S. Kraemer, K. Ohno, D. D. Awschalom, and A. C. B. Jayich, “Deterministic formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique,” arXiv:1512.08821 [cond-mat] (2015).

Jelezko, F.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

T. Teraji, T. Yamamoto, K. Watanabe, Y. Koide, J. Isoya, S. Onoda, T. Ohshima, L. J. Rogers, F. Jelezko, P. Neumann, J. Wrachtrup, and S. Koizumi, “Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single color center formation,” Phys. Status Solidi A 212, 2365–2384 (2015).
[Crossref]

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

A. Sipahigil, K. Jahnke, L. Rogers, T. Teraji, J. Isoya, A. Zibrov, F. Jelezko, and M. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113, 113602 (2014).
[Crossref]

J. Cai, F. Jelezko, and M. B. Plenio, “Hybrid sensors based on colour centres in diamond and piezoactive layers,” Nat. Commun. 5, 4065 (2014).
[Crossref]

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

J. Wrachtrup, F. Jelezko, B. Grotz, and L. McGuinness, “Nitrogen-vacancy centers close to surfaces,” MRS Bull. 38(02), 149–154 (2013).
[Crossref]

J. Cai, A. Retzker, F. Jelezko, and M. B. Plenio, “A large-scale quantum simulator on a diamond surface at room temperature,” Nat. Phys. 9, 168–173 (2013).
[Crossref]

M. W. Doherty, N. B. Manson, P. Delaney, F. Jelezko, J. Wrachtrup, and L. C. L. Hollenberg, “The nitrogen-vacancy colour centre in diamond,” Phys. Rep. 528, 1–45 (2013).
[Crossref]

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
[Crossref]

S. Pezzagna, D. Wildanger, P. Mazarov, A. D. Wieck, Y. Sarov, I. Rangelow, B. Naydenov, F. Jelezko, S. W. Hell, and J. Meijer, “Nanoscale engineering and optical addressing of single spins in diamond,” Small 6, 2117–2121 (2010).
[Crossref]

S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12, 065017 (2010).
[Crossref]

B. Naydenov, F. Reinhard, A. Lämmle, V. Richter, R. Kalish, U. F. S. D’Haenens-Johansson, M. Newton, F. Jelezko, and J. Wrachtrup, “Increasing the coherence time of single electron spins in diamond by high temperature annealing,” Appl. Phys. Lett. 97, 242511 (2010).
[Crossref]

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

K. Y. Han, K. I. Willig, E. Rittweger, F. Jelezko, C. Eggeling, and S. W. Hell, “Three-dimensional stimulated emission depletion microscopy of nitrogen-vacancy centers in diamond using continuous-wave light,” Nano Lett. 9, 3323–3329 (2009).
[Crossref]

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

J. R. Rabeau, P. Reichart, G. Tamanyan, D. N. Jamieson, S. Prawer, F. Jelezko, T. Gaebel, I. Popa, M. Domhan, and J. Wrachtrup, “Implantation of labelled single nitrogen vacancy centers in diamond using N15,” Appl. Phys. Lett. 88, 023113 (2006).
[Crossref]

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

P. Tamarat, T. Gaebel, J. R. Rabeau, M. Khan, A. D. Greentree, H. Wilson, L. C. L. Hollenberg, S. Prawer, P. Hemmer, F. Jelezko, and J. Wrachtrup, “Stark shift control of single optical centers in diamond,” Phys. Rev. Lett. 97, 083002 (2006).
[Crossref]

J. Wrachtrup and F. Jelezko, “Processing quantum information in diamond,” J. Phys. 18, S807–S824 (2006).

J. Meijer, B. Burchard, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, and J. Wrachtrup, “Generation of single color centers by focused nitrogen implantation,” Appl. Phys. Lett. 87, 261909 (2005).
[Crossref]

Jiang, L.

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sørensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[Crossref]

J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cappellaro, L. Jiang, M. V. G. Dutt, E. Togan, A. S. Zibrov, A. Yacoby, R. L. Walsworth, and M. D. Lukin, “Nanoscale magnetic sensing with an individual electronic spin in diamond,” Nature 455, 644–647 (2008).
[Crossref]

J. M. Taylor, P. Cappellaro, L. Childress, L. Jiang, D. Budker, P. R. Hemmer, A. Yacoby, R. Walsworth, and M. D. Lukin, “High-sensitivity diamond magnetometer with nanoscale resolution,” Nat. Phys. 4, 810–816 (2008).
[Crossref]

Kahl, O.

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

Kaiser, F.

P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
[Crossref]

Kalb, N.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

M. S. Blok, N. Kalb, A. Reiserer, T. H. Taminiau, and R. Hanson, “Towards quantum networks of single spins: analysis of a quantum memory with an optical interface in diamond,” Faraday Discuss. 184, 173–182 (2015).
[Crossref]

J. Cramer, N. Kalb, M. A. Rol, B. Hensen, M. S. Blok, M. Markham, D. J. Twitchen, R. Hanson, and T. H. Taminiau, “Repeated quantum error correction on a continuously encoded qubit by real-time feedback,” arXiv:1508.01388 [cond-mat, physics:quant-ph] (2015).

Kaldewey, T.

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
[Crossref]

Kalish, R.

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[Crossref]

B. Naydenov, F. Reinhard, A. Lämmle, V. Richter, R. Kalish, U. F. S. D’Haenens-Johansson, M. Newton, F. Jelezko, and J. Wrachtrup, “Increasing the coherence time of single electron spins in diamond by high temperature annealing,” Appl. Phys. Lett. 97, 242511 (2010).
[Crossref]

I. Bayn, B. Meyler, J. Salzman, V. Richter, and R. Kalish, “Single crystal diamond photonic crystal nanocavity: fabrication and initial characterization,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2010), paper QThL7.

Kamp, M.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Kara, D. M.

H. S. Knowles, D. M. Kara, and M. Atatüre, “Observing bulk diamond spin coherence in high-purity nanodiamonds,” Nat. Mater. 13, 21–25 (2014).
[Crossref]

Karaveli, S.

L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
[Crossref]

Kaupp, H.

H. Kaupp, C. Deutsch, H.-C. Chang, J. Reichel, T. W. Hänsch, and D. Hunger, “Scaling laws of the cavity enhancement for NV centers in diamond,” arXiv:1304.0948 (2013).

Kaviani, H.

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5, 041051 (2015).
[Crossref]

Kaviani, M.

P. Deák, B. Aradi, M. Kaviani, T. Frauenheim, and A. Gali, “Formation of NV centers in diamond: a theoretical study based on calculated transitions and migration of nitrogen and vacancy related defects,” Phys. Rev. B 89, 075203 (2014).
[Crossref]

Kennedy, T. A.

T. A. Kennedy, J. S. Colton, J. E. Butler, R. C. Linares, and P. J. Doering, “Long coherence times at 300  K for nitrogen-vacancy center spins in diamond grown by chemical vapor deposition,” Appl. Phys. Lett. 83, 4190–4192 (2003).
[Crossref]

Khan, M.

J. T. Choy, B. J. M. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
[Crossref]

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of single crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B 29, 010601 (2011).
[Crossref]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diam. Relat. Mater. 19, 621–629 (2010).
[Crossref]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
[Crossref]

P. Tamarat, T. Gaebel, J. R. Rabeau, M. Khan, A. D. Greentree, H. Wilson, L. C. L. Hollenberg, S. Prawer, P. Hemmer, F. Jelezko, and J. Wrachtrup, “Stark shift control of single optical centers in diamond,” Phys. Rev. Lett. 97, 083002 (2006).
[Crossref]

Khan, R. U. A.

R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
[Crossref]

Khanaliloo, B.

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5, 041051 (2015).
[Crossref]

B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching,” Nano Lett. 15, 5131–5136 (2015).
[Crossref]

Kharel, P.

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

Khomich, A. A.

D. Sovyk, V. Ralchenko, M. Komlenok, A. A. Khomich, V. Shershulin, V. Vorobyov, I. Vlasov, V. Konov, and A. Akimov, “Fabrication of diamond microstub photoemitters with strong photoluminescence of SiV color centers: bottom-up approach,” Appl. Phys. A 118, 17–21 (2014).
[Crossref]

Kiflawi, I.

A. T. Collins and I. Kiflawi, “The annealing of radiation damage in type Ia diamond,” J. Phys. 21, 364209 (2009).
[Crossref]

Kimble, H. J.

H. J. Kimble, “The quantum internet,” Nature 453, 1023–1030 (2008).
[Crossref]

L.-M. Duan and H. J. Kimble, “Scalable photonic quantum computation through cavity-assisted interactions,” Phys. Rev. Lett. 92, 127902 (2004).
[Crossref]

Kipfstuhl, L.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

Kisslinger, K.

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

Knowles, H. S.

H. S. Knowles, D. M. Kara, and M. Atatüre, “Observing bulk diamond spin coherence in high-purity nanodiamonds,” Nat. Mater. 13, 21–25 (2014).
[Crossref]

Kobashi, K.

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, “Smooth and high-rate reactive ion etching of diamond,” Diam. Relat. Mater. 11, 824–827 (2002).
[Crossref]

Kodera, T.

S. Furuyama, K. Tahara, T. Iwasaki, M. Shimizu, J. Yaita, M. Kondo, T. Kodera, and M. Hatano, “Improvement of fluorescence intensity of nitrogen vacancy centers in self-formed diamond microstructures,” Appl. Phys. Lett. 107, 163102 (2015).
[Crossref]

Köhler, B.

J. Martin, R. Wannemacher, J. Teichert, L. Bischoff, and B. Köhler, “Generation and detection of fluorescent color centers in diamond with submicron resolution,” Appl. Phys. Lett. 75, 3096–3098 (1999).
[Crossref]

Koide, Y.

T. Teraji, T. Yamamoto, K. Watanabe, Y. Koide, J. Isoya, S. Onoda, T. Ohshima, L. J. Rogers, F. Jelezko, P. Neumann, J. Wrachtrup, and S. Koizumi, “Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single color center formation,” Phys. Status Solidi A 212, 2365–2384 (2015).
[Crossref]

T. Teraji, T. Taniguchi, S. Koizumi, K. Watanabe, M. Liao, Y. Koide, and J. Isoya, “Chemical vapor deposition of 12 C isotopically enriched polycrystalline diamond,” Jpn. J. Appl. Phys. 51, 090104 (2012).

Koike, G.

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

Koizumi, S.

T. Teraji, T. Yamamoto, K. Watanabe, Y. Koide, J. Isoya, S. Onoda, T. Ohshima, L. J. Rogers, F. Jelezko, P. Neumann, J. Wrachtrup, and S. Koizumi, “Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single color center formation,” Phys. Status Solidi A 212, 2365–2384 (2015).
[Crossref]

T. Teraji, T. Taniguchi, S. Koizumi, K. Watanabe, M. Liao, Y. Koide, and J. Isoya, “Chemical vapor deposition of 12 C isotopically enriched polycrystalline diamond,” Jpn. J. Appl. Phys. 51, 090104 (2012).

Kolesov, R.

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

Komatsubara, A.

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

Komlenok, M.

D. Sovyk, V. Ralchenko, M. Komlenok, A. A. Khomich, V. Shershulin, V. Vorobyov, I. Vlasov, V. Konov, and A. Akimov, “Fabrication of diamond microstub photoemitters with strong photoluminescence of SiV color centers: bottom-up approach,” Appl. Phys. A 118, 17–21 (2014).
[Crossref]

Kondo, M.

S. Furuyama, K. Tahara, T. Iwasaki, M. Shimizu, J. Yaita, M. Kondo, T. Kodera, and M. Hatano, “Improvement of fluorescence intensity of nitrogen vacancy centers in self-formed diamond microstructures,” Appl. Phys. Lett. 107, 163102 (2015).
[Crossref]

Konov, V.

D. Sovyk, V. Ralchenko, M. Komlenok, A. A. Khomich, V. Shershulin, V. Vorobyov, I. Vlasov, V. Konov, and A. Akimov, “Fabrication of diamond microstub photoemitters with strong photoluminescence of SiV color centers: bottom-up approach,” Appl. Phys. A 118, 17–21 (2014).
[Crossref]

Koolstra, G.

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref]

Kosaka, H.

H. Kosaka and N. Niikura, “Entangled absorption of a single photon with a single spin in diamond,” Phys. Rev. Lett. 114, 053603 (2015).
[Crossref]

Koyama, K.

M. Yoshita, K. Koyama, Y. Hayamizu, M. Baba, and H. Akiyama, “Improved high collection efficiency in fluorescence microscopy with a Weierstrass-sphere solid immersion lens,” Jpn. J. Appl. Phys. 41, L858–L860 (2002).
[Crossref]

Kraemer, S.

C. A. McLellan, B. A. Myers, S. Kraemer, K. Ohno, D. D. Awschalom, and A. C. B. Jayich, “Deterministic formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique,” arXiv:1512.08821 [cond-mat] (2015).

Kraft, M.

M. Trupke, E. A. Hinds, S. Eriksson, E. A. Curtis, Z. Moktadir, E. Kukharenka, and M. Kraft, “Microfabricated high-finesse optical cavity with open access and small volume,” Appl. Phys. Lett. 87, 211106 (2005).
[Crossref]

Kranz, C.

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

Kubanek, A.

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

Kucsko, G.

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

Kukharenka, E.

M. Trupke, E. A. Hinds, S. Eriksson, E. A. Curtis, Z. Moktadir, E. Kukharenka, and M. Kraft, “Microfabricated high-finesse optical cavity with open access and small volume,” Appl. Phys. Lett. 87, 211106 (2005).
[Crossref]

Kukura, P.

K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166–169 (2011).
[Crossref]

Kunz, R. E.

Kurtsiefer, C.

C. Wang, C. Kurtsiefer, H. Weinfurter, and B. Burchard, “Single photon emission from SiV centres in diamond produced by ion implantation,” J. Phys. B 39, 37–41 (2006).
[Crossref]

C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable solid-state source of single photons,” Phys. Rev. Lett. 85, 290–293 (2000).
[Crossref]

Lacroix, S.

J. Love, W. Henry, W. Stewart, R. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: adiabaticity criteria,” IEE Proc. J. Optoelectron. 138, 343–354 (1991).
[Crossref]

Ladouceur, F.

Lahav, A.

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

Lake, D. P.

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5, 041051 (2015).
[Crossref]

Lämmle, A.

B. Naydenov, F. Reinhard, A. Lämmle, V. Richter, R. Kalish, U. F. S. D’Haenens-Johansson, M. Newton, F. Jelezko, and J. Wrachtrup, “Increasing the coherence time of single electron spins in diamond by high temperature annealing,” Appl. Phys. Lett. 97, 242511 (2010).
[Crossref]

Laraoui, A.

M. E. Trusheim, L. Li, A. Laraoui, E. H. Chen, H. Bakhru, T. Schröder, O. Gaathon, C. A. Meriles, and D. Englund, “Scalable fabrication of high purity diamond nanocrystals with long-spin-coherence nitrogen vacancy centers,” Nano Lett. 14, 32–36 (2014).
[Crossref]

Larsson, M.

M. Larsson, K. N. Dinyari, and H. Wang, “Composite optical microcavity of diamond nanopillar and silica microsphere,” Nano Lett. 9, 1447–1450 (2009).
[Crossref]

Latta, C.

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

Lauria, P.

P. Ovartchaiyapong, L. M. A. Pascal, B. A. Myers, P. Lauria, and A. C. B. Jayich, “High quality factor single-crystal diamond mechanical resonators,” Appl. Phys. Lett. 101, 163505 (2012).
[Crossref]

Lawall, J. R.

Le Sage, D.

S. Hong, M. S. Grinolds, L. M. Pham, D. Le Sage, L. Luan, R. L. Walsworth, and A. Yacoby, “Nanoscale magnetometry with NV centers in diamond,” MRS Bull. 38(02), 155–161 (2013).
[Crossref]

L. M. Pham, N. Bar-Gill, C. Belthangady, D. Le Sage, P. Cappellaro, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Enhanced solid-state multispin metrology using dynamical decoupling,” Phys. Rev. B 86, 045214 (2012).
[Crossref]

D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
[Crossref]

Ledbetter, M. P.

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

Lee, C.

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

Lee, C. L.

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diam. Relat. Mater. 15, 725–728 (2006).
[Crossref]

Lee, J. C.

P. Andrich, B. J. Alemán, J. C. Lee, K. Ohno, C. F. de las Casas, F. J. Heremans, E. L. Hu, and D. D. Awschalom, “Engineered micro- and nanoscale diamonds as mobile probes for high-resolution sensing in fluid,” Nano Lett. 14, 4959–4964 (2014).
[Crossref]

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, D. O. Bracher, and E. L. Hu, “Bottom-up engineering of diamond micro- and nano-structures,” Laser Photon. Rev. 7, L61–L65 (2013).
[Crossref]

J. C. Lee, A. P. Magyar, D. O. Bracher, I. Aharonovich, and E. L. Hu, “Fabrication of thin diamond membranes for photonic applications,” Diam. Relat. Mater. 33, 45–48 (2013).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[Crossref]

C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett. 90, 081110 (2007).
[Crossref]

Lee, K. G.

K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166–169 (2011).
[Crossref]

Lee, K. W.

P. Ovartchaiyapong, K. W. Lee, B. A. Myers, and A. C. B. Jayich, “Dynamic strain-mediated coupling of a single diamond spin to a mechanical resonator,” Nat. Commun. 5, 4429 (2014).
[Crossref]

Lee, M. L.

N. Thomas, R. J. Barbour, Y. Song, M. L. Lee, and K.-M. C. Fu, “Waveguide-integrated single-crystalline GaP resonators on diamond,” Opt. Express 22, 13555–13564 (2014).
[Crossref]

M. Gould, S. Chakravarthi, I. R. Christen, N. Thomas, S. Dadgostar, Y. Song, M. L. Lee, F. Hatami, and K.-M. C. Fu, “A large-scale GaP-on-diamond integrated photonics platform for NV center-based quantum information,” arXiv:1510.05047 [cond-mat, physics:physics, physics:quant-ph] (2015).

Leon, N. P. D.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

Leoni, R.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Lermer, M.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Lesik, M.

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
[Crossref]

M. Lesik, J.-P. Tetienne, A. Tallaire, J. Achard, V. Mille, A. Gicquel, J.-F. Roch, and V. Jacques, “Perfect preferential orientation of nitrogen-vacancy defects in a synthetic diamond sample,” Appl. Phys. Lett. 104, 113107 (2014).
[Crossref]

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

Lettow, R.

K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166–169 (2011).
[Crossref]

Lewes-Malandrakis, G.

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

Li, L.

R. N. Patel, T. Schröder, N. Wan, L. Li, S. L. Mouradian, E. H. Chen, and D. R. Englund, “Efficient photon coupling from a diamond nitrogen vacancy center by integration with silica fiber,” Light Sci. Appl. 5, e16032 (2016).
[Crossref]

L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
[Crossref]

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref]

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

M. E. Trusheim, L. Li, A. Laraoui, E. H. Chen, H. Bakhru, T. Schröder, O. Gaathon, C. A. Meriles, and D. Englund, “Scalable fabrication of high purity diamond nanocrystals with long-spin-coherence nitrogen vacancy centers,” Nano Lett. 14, 32–36 (2014).
[Crossref]

O. Gaathon, J. S. Hodges, E. H. Chen, L. Li, S. Bakhru, H. Bakhru, D. Englund, and R. M. Osgood, “Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers,” Opt. Mater. 35, 361–365 (2013).
[Crossref]

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV-spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
[Crossref]

T. Schröder, L. Li, E. Chen, M. Walsh, M. E. Trusheim, I. Bayn, J. Zheng, S. Mouradian, H. Bakhru, O. Gaathon, and D. R. Englund, “Deterministic high-yield creation of nitrogen vacancy centers in diamond photonic crystal cavities and photonic elements,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2015), paper FTh3B.1.

T. Schröder, E. Chen, L. Li, M. Walsh, M. E. Trusheim, I. Bayn, and D. Englund, “Targeted creation and Purcell enhancement of NV centers within photonic crystal cavities in single-crystal diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2014), paper FW1B.6.

Li, W.-D.

Z. Huang, W.-D. Li, C. Santori, V. M. Acosta, A. Faraon, T. Ishikawa, W. Wu, D. Winston, R. S. Williams, and R. G. Beausoleil, “Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing,” Appl. Phys. Lett. 103, 081906 (2013).
[Crossref]

Liao, M.

T. Teraji, T. Taniguchi, S. Koizumi, K. Watanabe, M. Liao, Y. Koide, and J. Isoya, “Chemical vapor deposition of 12 C isotopically enriched polycrystalline diamond,” Jpn. J. Appl. Phys. 51, 090104 (2012).

Liddy, M. S. Z.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

Limarga, A. M.

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[Crossref]

Linares, R. C.

T. A. Kennedy, J. S. Colton, J. E. Butler, R. C. Linares, and P. J. Doering, “Long coherence times at 300  K for nitrogen-vacancy center spins in diamond grown by chemical vapor deposition,” Appl. Phys. Lett. 83, 4190–4192 (2003).
[Crossref]

Lindner, J. K. N.

M. Schreck, F. Hörmann, H. Roll, J. K. N. Lindner, and B. Stritzker, “Diamond nucleation on iridium buffer layers and subsequent textured growth: a route for the realization of single-crystal diamond films,” Appl. Phys. Lett. 78, 192–194 (2001).
[Crossref]

Linget, H.

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

Lipson, M.

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

M. Lipson, “Silicon photonics: an exercise in self control,” Nat. Photonics 1, 18–19 (2007).
[Crossref]

Liu, C.

H. W. Choi, E. Gu, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, and M. D. Dawson, “Fabrication of natural diamond microlenses by plasma etching,” J. Vac. Sci. Technol. B 23, 130–132 (2005).
[Crossref]

Liu, L. R.

T. G. Tiecke, J. D. Thompson, N. P. de Leon, L. R. Liu, V. Vuletić, and M. D. Lukin, “Nanophotonic quantum phase switch with a single atom,” Nature 508, 241–244 (2014).
[Crossref]

Liu, M.

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

Liu, X.

X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4, 557–560 (2010).
[Crossref]

Loncar, M.

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

H. A. Atikian, A. Eftekharian, A. J. Salim, M. J. Burek, J. T. Choy, A. H. Majedi, and M. Lončar, “Superconducting nanowire single photon detector on diamond,” Appl. Phys. Lett. 104, 122602 (2014).
[Crossref]

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

J. T. Choy, I. Bulu, B. J. M. Hausmann, E. Janitz, I.-C. Huang, and M. Lončar, “Spontaneous emission and collection efficiency enhancement of single emitters in diamond via plasmonic cavities and gratings,” Appl. Phys. Lett. 103, 161101 (2013).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

B. J. M. Hausmann, I. B. Bulu, P. B. Deotare, M. McCutcheon, V. Venkataraman, M. L. Markham, D. J. Twitchen, and M. Lončar, “Integrated high-quality factor optical resonators in diamond,” Nano Lett. 13, 1898–1902 (2013).
[Crossref]

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
[Crossref]

P. Maletinsky, S. Hong, M. S. Grinolds, B. Hausmann, M. D. Lukin, R. L. Walsworth, M. Lončar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nature Nanotechnol. 7, 320–324 (2012).
[Crossref]

B. J. M. Hausmann, T. M. Babinec, J. T. Choy, J. S. Hodges, S. Hong, I. Bulu, A. Yacoby, M. D. Lukin, and M. Lončar, “Single-color centers implanted in diamond nanostructures,” New J. Phys. 13, 045004 (2011).
[Crossref]

J. T. Choy, B. J. M. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
[Crossref]

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of single crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B 29, 010601 (2011).
[Crossref]

I. Bulu, T. Babinec, B. Hausmann, J. T. Choy, and M. Lončar, “Plasmonic resonators for enhanced diamond NV- center single photon sources,” Opt. Express 19, 5268 (2011).
[Crossref]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
[Crossref]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diam. Relat. Mater. 19, 621–629 (2010).
[Crossref]

Loretz, M.

R. Schirhagl, K. Chang, M. Loretz, and C. L. Degen, “Nitrogen-vacancy centers in diamond: nanoscale sensors for physics and biology,” Annu. Rev. Phys. Chem. 65, 83–105 (2014).
[Crossref]

Lovchinsky, I.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

Love, J.

J. Love, W. Henry, W. Stewart, R. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: adiabaticity criteria,” IEE Proc. J. Optoelectron. 138, 343–354 (1991).
[Crossref]

Lu, M.

L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref]

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV-spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
[Crossref]

Luan, L.

S. Hong, M. S. Grinolds, L. M. Pham, D. Le Sage, L. Luan, R. L. Walsworth, and A. Yacoby, “Nanoscale magnetometry with NV centers in diamond,” MRS Bull. 38(02), 155–161 (2013).
[Crossref]

Lukin, M.

B. Shields, Q. Unterreithmeier, N. de Leon, H. Park, and M. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114, 136402 (2015).
[Crossref]

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

A. Sipahigil, K. Jahnke, L. Rogers, T. Teraji, J. Isoya, A. Zibrov, F. Jelezko, and M. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113, 113602 (2014).
[Crossref]

Lukin, M. D.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

T. G. Tiecke, J. D. Thompson, N. P. de Leon, L. R. Liu, V. Vuletić, and M. D. Lukin, “Nanophotonic quantum phase switch with a single atom,” Nature 508, 241–244 (2014).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
[Crossref]

D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
[Crossref]

P. Maletinsky, S. Hong, M. S. Grinolds, B. Hausmann, M. D. Lukin, R. L. Walsworth, M. Lončar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nature Nanotechnol. 7, 320–324 (2012).
[Crossref]

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

L. M. Pham, N. Bar-Gill, C. Belthangady, D. Le Sage, P. Cappellaro, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Enhanced solid-state multispin metrology using dynamical decoupling,” Phys. Rev. B 86, 045214 (2012).
[Crossref]

B. J. M. Hausmann, T. M. Babinec, J. T. Choy, J. S. Hodges, S. Hong, I. Bulu, A. Yacoby, M. D. Lukin, and M. Lončar, “Single-color centers implanted in diamond nanostructures,” New J. Phys. 13, 045004 (2011).
[Crossref]

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sørensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[Crossref]

J. M. Taylor, P. Cappellaro, L. Childress, L. Jiang, D. Budker, P. R. Hemmer, A. Yacoby, R. Walsworth, and M. D. Lukin, “High-sensitivity diamond magnetometer with nanoscale resolution,” Nat. Phys. 4, 810–816 (2008).
[Crossref]

J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cappellaro, L. Jiang, M. V. G. Dutt, E. Togan, A. S. Zibrov, A. Yacoby, R. L. Walsworth, and M. D. Lukin, “Nanoscale magnetic sensing with an individual electronic spin in diamond,” Nature 455, 644–647 (2008).
[Crossref]

L.-M. Duan, M. D. Lukin, J. I. Cirac, and P. Zoller, “Long-distance quantum communication with atomic ensembles and linear optics,” Nature 414, 413–418 (2001).
[Crossref]

R. E. Evans, A. Sipahigil, D. D. Sukachev, A. S. Zibrov, and M. D. Lukin, “Coherent optical emitters in diamond nanostructures via ion implantation,” arXiv:1512.03820 [cond-mat, physics:quant-ph] (2015).

Lukosz, W.

Macks, L.

C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
[Crossref]

Madgwick, T. D.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Magyar, A. P.

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, D. O. Bracher, and E. L. Hu, “Bottom-up engineering of diamond micro- and nano-structures,” Laser Photon. Rev. 7, L61–L65 (2013).
[Crossref]

J. C. Lee, A. P. Magyar, D. O. Bracher, I. Aharonovich, and E. L. Hu, “Fabrication of thin diamond membranes for photonic applications,” Diam. Relat. Mater. 33, 45–48 (2013).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[Crossref]

Mainwood, A.

A. Mainwood, “Nitrogen and nitrogen-vacancy complexes and their formation in diamond,” Phys. Rev. B 49, 7934–7940 (1994).
[Crossref]

Majedi, A. H.

H. A. Atikian, A. Eftekharian, A. J. Salim, M. J. Burek, J. T. Choy, A. H. Majedi, and M. Lončar, “Superconducting nanowire single photon detector on diamond,” Appl. Phys. Lett. 104, 122602 (2014).
[Crossref]

Maletinsky, P.

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77, 056503 (2014).
[Crossref]

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
[Crossref]

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
[Crossref]

P. Maletinsky, S. Hong, M. S. Grinolds, B. Hausmann, M. D. Lukin, R. L. Walsworth, M. Lončar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nature Nanotechnol. 7, 320–324 (2012).
[Crossref]

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

J. T. Choy, B. J. M. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
[Crossref]

Manson, N. B.

J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
[Crossref]

M. W. Doherty, N. B. Manson, P. Delaney, F. Jelezko, J. Wrachtrup, and L. C. L. Hollenberg, “The nitrogen-vacancy colour centre in diamond,” Phys. Rep. 528, 1–45 (2013).
[Crossref]

Markham, M.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

J. Riedrich-Möller, S. Pezzagna, J. Meijer, C. Pauly, F. Mücklich, M. Markham, A. M. Edmonds, and C. Becher, “Nanoimplantation and Purcell enhancement of single nitrogen-vacancy centers in photonic crystal cavities in diamond,” Appl. Phys. Lett. 106, 221103 (2015).
[Crossref]

W. Pfaff, B. J. Hensen, H. Bernien, S. B. V. Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
[Crossref]

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
[Crossref]

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

J. Cramer, N. Kalb, M. A. Rol, B. Hensen, M. S. Blok, M. Markham, D. J. Twitchen, R. Hanson, and T. H. Taminiau, “Repeated quantum error correction on a continuously encoded qubit by real-time feedback,” arXiv:1508.01388 [cond-mat, physics:quant-ph] (2015).

Markham, M. L.

L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
[Crossref]

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

B. J. M. Hausmann, I. B. Bulu, P. B. Deotare, M. McCutcheon, V. Venkataraman, M. L. Markham, D. J. Twitchen, and M. Lončar, “Integrated high-quality factor optical resonators in diamond,” Nano Lett. 13, 1898–1902 (2013).
[Crossref]

A. M. Edmonds, U. F. S. D’Haenens-Johansson, R. J. Cruddace, M. E. Newton, K.-M. C. Fu, C. Santori, R. G. Beausoleil, D. J. Twitchen, and M. L. Markham, “Production of oriented nitrogen-vacancy color centers in synthetic diamond,” Phys. Rev. B 86, 035201 (2012).
[Crossref]

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Marseglia, L.

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).

A. Young, C. Y. Hu, L. Marseglia, J. P. Harrison, J. L. O’Brien, and J. G. Rarity, “Cavity enhanced spin measurement of the ground state spin of an NV center in diamond,” New J. Phys. 11, 013007 (2009).
[Crossref]

Marsili, F.

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

Martin, A. A.

A. A. Martin, S. Randolph, A. Botman, M. Toth, and I. Aharonovich, “Maskless milling of diamond by a focused oxygen ion beam,” Sci. Rep. 5, 8958 (2015).
[Crossref]

A. A. Martin, M. Toth, and I. Aharonovich, “Subtractive 3D printing of optically active diamond structures,” Sci. Rep. 4, 5022 (2014).

Martin, J.

J. Martin, R. Wannemacher, J. Teichert, L. Bischoff, and B. Köhler, “Generation and detection of fluorescent color centers in diamond with submicron resolution,” Appl. Phys. Lett. 75, 3096–3098 (1999).
[Crossref]

Martineau, P. M.

R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
[Crossref]

Martinick, K.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diam. Relat. Mater. 19, 621–629 (2010).
[Crossref]

Mattioli, F.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Maurer, P. C.

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

Mayer, S.

C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable solid-state source of single photons,” Phys. Rev. Lett. 85, 290–293 (2000).
[Crossref]

Mazarov, P.

S. Pezzagna, D. Wildanger, P. Mazarov, A. D. Wieck, Y. Sarov, I. Rangelow, B. Naydenov, F. Jelezko, S. W. Hell, and J. Meijer, “Nanoscale engineering and optical addressing of single spins in diamond,” Small 6, 2117–2121 (2010).
[Crossref]

Maze, J.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sørensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[Crossref]

Maze, J. R.

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
[Crossref]

J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cappellaro, L. Jiang, M. V. G. Dutt, E. Togan, A. S. Zibrov, A. Yacoby, R. L. Walsworth, and M. D. Lukin, “Nanoscale magnetic sensing with an individual electronic spin in diamond,” Nature 455, 644–647 (2008).
[Crossref]

McCloskey, D.

D. McCloskey, D. Fox, N. O’Hara, V. Usov, D. Scanlan, N. McEvoy, G. S. Duesberg, G. L. W. Cross, H. Z. Zhang, and J. F. Donegan, “Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond,” Appl. Phys. Lett. 104, 031109 (2014).
[Crossref]

McCutcheon, M.

B. J. M. Hausmann, I. B. Bulu, P. B. Deotare, M. McCutcheon, V. Venkataraman, M. L. Markham, D. J. Twitchen, and M. Lončar, “Integrated high-quality factor optical resonators in diamond,” Nano Lett. 13, 1898–1902 (2013).
[Crossref]

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diam. Relat. Mater. 19, 621–629 (2010).
[Crossref]

McEvoy, N.

D. McCloskey, D. Fox, N. O’Hara, V. Usov, D. Scanlan, N. McEvoy, G. S. Duesberg, G. L. W. Cross, H. Z. Zhang, and J. F. Donegan, “Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond,” Appl. Phys. Lett. 104, 031109 (2014).
[Crossref]

McGuinness, L.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

J. Wrachtrup, F. Jelezko, B. Grotz, and L. McGuinness, “Nitrogen-vacancy centers close to surfaces,” MRS Bull. 38(02), 149–154 (2013).
[Crossref]

McGuinness, L. P.

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

McLellan, C. A.

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

C. A. McLellan, B. A. Myers, S. Kraemer, K. Ohno, D. D. Awschalom, and A. C. B. Jayich, “Deterministic formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique,” arXiv:1512.08821 [cond-mat] (2015).

Meesala, S.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

Meijer, J.

J. Riedrich-Möller, S. Pezzagna, J. Meijer, C. Pauly, F. Mücklich, M. Markham, A. M. Edmonds, and C. Becher, “Nanoimplantation and Purcell enhancement of single nitrogen-vacancy centers in photonic crystal cavities in diamond,” Appl. Phys. Lett. 106, 221103 (2015).
[Crossref]

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

S. Pezzagna, D. Rogalla, D. Wildanger, J. Meijer, and A. Zaitsev, “Creation and nature of optical centres in diamond for single-photon emission-overview and critical remarks,” New J. Phys. 13, 035024 (2011).
[Crossref]

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

S. Pezzagna, D. Wildanger, P. Mazarov, A. D. Wieck, Y. Sarov, I. Rangelow, B. Naydenov, F. Jelezko, S. W. Hell, and J. Meijer, “Nanoscale engineering and optical addressing of single spins in diamond,” Small 6, 2117–2121 (2010).
[Crossref]

S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12, 065017 (2010).
[Crossref]

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

J. Meijer, B. Burchard, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, and J. Wrachtrup, “Generation of single color centers by focused nitrogen implantation,” Appl. Phys. Lett. 87, 261909 (2005).
[Crossref]

Meriles, C. A.

M. E. Trusheim, L. Li, A. Laraoui, E. H. Chen, H. Bakhru, T. Schröder, O. Gaathon, C. A. Meriles, and D. Englund, “Scalable fabrication of high purity diamond nanocrystals with long-spin-coherence nitrogen vacancy centers,” Nano Lett. 14, 32–36 (2014).
[Crossref]

Meyer, N.

K.-M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
[Crossref]

Meyler, B.

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[Crossref]

I. Bayn, B. Meyler, J. Salzman, V. Richter, and R. Kalish, “Single crystal diamond photonic crystal nanocavity: fabrication and initial characterization,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2010), paper QThL7.

Meystre, P.

P. Meystre and M. Sargent, Elements of Quantum Optics (Springer, 2007).

Michl, J.

J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
[Crossref]

Miguel-Sánchez, J.

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
[Crossref]

Mildren, R. P.

Mille, V.

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
[Crossref]

M. Lesik, J.-P. Tetienne, A. Tallaire, J. Achard, V. Mille, A. Gicquel, J.-F. Roch, and V. Jacques, “Perfect preferential orientation of nitrogen-vacancy defects in a synthetic diamond sample,” Appl. Phys. Lett. 104, 113107 (2014).
[Crossref]

Mitchell, M.

B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching,” Nano Lett. 15, 5131–5136 (2015).
[Crossref]

Mitchell, M. W.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

Mizuochi, N.

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

Mochalin, V. N.

V. N. Mochalin, O. Shenderova, D. Ho, and Y. Gogotsi, “The properties and applications of nanodiamonds,” Nat. Nanotechnol. 7, 11–23 (2012).
[Crossref]

Moktadir, Z.

M. Trupke, E. A. Hinds, S. Eriksson, E. A. Curtis, Z. Moktadir, E. Kukharenka, and M. Kraft, “Microfabricated high-finesse optical cavity with open access and small volume,” Appl. Phys. Lett. 87, 211106 (2005).
[Crossref]

Mollart, T. P.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Momenzadeh, S. A.

S. A. Momenzadeh, R. J. Stöhr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
[Crossref]

Moore, D.

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

Morrison, J. A.

J. E. Desnoyehs and J. A. Morrison, “The heat capacity of diamond between 12·8° and 277°K,” Philos. Mag. 3(25), 42–48 (1958).
[Crossref]

Mouradian, S.

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

T. Schröder, L. Li, E. Chen, M. Walsh, M. E. Trusheim, I. Bayn, J. Zheng, S. Mouradian, H. Bakhru, O. Gaathon, and D. R. Englund, “Deterministic high-yield creation of nitrogen vacancy centers in diamond photonic crystal cavities and photonic elements,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2015), paper FTh3B.1.

Mouradian, S. L.

R. N. Patel, T. Schröder, N. Wan, L. Li, S. L. Mouradian, E. H. Chen, and D. R. Englund, “Efficient photon coupling from a diamond nitrogen vacancy center by integration with silica fiber,” Light Sci. Appl. 5, e16032 (2016).
[Crossref]

L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
[Crossref]

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

Mower, J.

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

Mücklich, F.

J. Riedrich-Möller, S. Pezzagna, J. Meijer, C. Pauly, F. Mücklich, M. Markham, A. M. Edmonds, and C. Becher, “Nanoimplantation and Purcell enhancement of single nitrogen-vacancy centers in photonic crystal cavities in diamond,” Appl. Phys. Lett. 106, 221103 (2015).
[Crossref]

J. Riedrich-Möller, C. Arend, C. Pauly, F. Mücklich, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond,” Nano Lett. 14, 5281–5287 (2014).
[Crossref]

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

Muller, A.

Müller, C.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

Müller, T.

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

Munro, W. J.

K. Nemoto, M. Trupke, S. J. Devitt, B. Scharfenberger, K. Buczak, J. Schmiedmayer, and W. J. Munro, “Photonic quantum networks formed from NV- centers,” arXiv:1412.5950 [quant-ph] (2014).

K. Nemoto, M. Trupke, S. J. Devitt, A. M. Stephens, K. Buczak, T. Nobauer, M. S. Everitt, J. Schmiedmayer, and W. J. Munro, “Photonic architecture for scalable quantum information processing in NV-diamond,” arXiv:1309.4277 [quant-ph] (2013).

Murphy, H.

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diam. Relat. Mater. 15, 725–728 (2006).
[Crossref]

Myers, B. A.

P. Ovartchaiyapong, K. W. Lee, B. A. Myers, and A. C. B. Jayich, “Dynamic strain-mediated coupling of a single diamond spin to a mechanical resonator,” Nat. Commun. 5, 4429 (2014).
[Crossref]

K. Ohno, F. J. Heremans, C. F. D. l. Casas, B. A. Myers, B. J. Alemán, A. C. B. Jayich, and D. D. Awschalom, “Three-dimensional localization of spins in diamond using 12c implantation,” Appl. Phys. Lett. 105, 052406 (2014).
[Crossref]

K. Ohno, F. J. Heremans, L. C. Bassett, B. A. Myers, D. M. Toyli, A. C. B. Jayich, C. J. Palmstrøm, and D. D. Awschalom, “Engineering shallow spins in diamond with nitrogen delta-doping,” Appl. Phys. Lett. 101, 082413 (2012).
[Crossref]

P. Ovartchaiyapong, L. M. A. Pascal, B. A. Myers, P. Lauria, and A. C. B. Jayich, “High quality factor single-crystal diamond mechanical resonators,” Appl. Phys. Lett. 101, 163505 (2012).
[Crossref]

C. A. McLellan, B. A. Myers, S. Kraemer, K. Ohno, D. D. Awschalom, and A. C. B. Jayich, “Deterministic formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique,” arXiv:1512.08821 [cond-mat] (2015).

Najafi, F.

F. Najafi, J. Mower, N. C. Harris, F. Bellei, A. Dane, C. Lee, X. Hu, P. Kharel, F. Marsili, S. Assefa, K. K. Berggren, and D. Englund, “On-chip detection of non-classical light by scalable integration of single-photon detectors,” Nat. Commun. 6, 5873 (2015).
[Crossref]

Nakamura, K.

T. Wolf, P. Neumann, K. Nakamura, H. Sumiya, T. Ohshima, J. Isoya, and J. Wrachtrup, “Subpicotesla diamond magnetometry,” Phys. Rev. X 5, 041001 (2015).
[Crossref]

Nam, C.-Y.

L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref]

Naydenov, B.

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

S. Pezzagna, D. Wildanger, P. Mazarov, A. D. Wieck, Y. Sarov, I. Rangelow, B. Naydenov, F. Jelezko, S. W. Hell, and J. Meijer, “Nanoscale engineering and optical addressing of single spins in diamond,” Small 6, 2117–2121 (2010).
[Crossref]

S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12, 065017 (2010).
[Crossref]

B. Naydenov, F. Reinhard, A. Lämmle, V. Richter, R. Kalish, U. F. S. D’Haenens-Johansson, M. Newton, F. Jelezko, and J. Wrachtrup, “Increasing the coherence time of single electron spins in diamond by high temperature annealing,” Appl. Phys. Lett. 97, 242511 (2010).
[Crossref]

Nebel, C.

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

Nebel, C. E.

C. J. Widmann, C. Giese, M. Wolfer, D. Brink, N. Heidrich, and C. E. Nebel, “Fabrication and characterization of single crystalline diamond nanopillars with NV-centers,” Diam. Relat. Mater. 54, 2–8 (2015).
[Crossref]

Nemoto, K.

K. Nemoto, M. Trupke, S. J. Devitt, B. Scharfenberger, K. Buczak, J. Schmiedmayer, and W. J. Munro, “Photonic quantum networks formed from NV- centers,” arXiv:1412.5950 [quant-ph] (2014).

K. Nemoto, M. Trupke, S. J. Devitt, A. M. Stephens, K. Buczak, T. Nobauer, M. S. Everitt, J. Schmiedmayer, and W. J. Munro, “Photonic architecture for scalable quantum information processing in NV-diamond,” arXiv:1309.4277 [quant-ph] (2013).

Neu, E.

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
[Crossref]

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sánchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104, 153108 (2014).
[Crossref]

I. Aharonovich and E. Neu, “Diamond nanophotonics,” Adv. Opt. Mater. 2, 911–928 (2014).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

Neumann, P.

T. Wolf, P. Neumann, K. Nakamura, H. Sumiya, T. Ohshima, J. Isoya, and J. Wrachtrup, “Subpicotesla diamond magnetometry,” Phys. Rev. X 5, 041001 (2015).
[Crossref]

T. Teraji, T. Yamamoto, K. Watanabe, Y. Koide, J. Isoya, S. Onoda, T. Ohshima, L. J. Rogers, F. Jelezko, P. Neumann, J. Wrachtrup, and S. Koizumi, “Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single color center formation,” Phys. Status Solidi A 212, 2365–2384 (2015).
[Crossref]

J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
[Crossref]

G. Waldherr, Y. Wang, S. Zaiser, M. Jamali, T. Schulte-Herbrüggen, H. Abe, T. Ohshima, J. Isoya, J. F. Du, P. Neumann, and J. Wrachtrup, “Quantum error correction in a solid-state hybrid spin register,” Nature 506, 204–207 (2014).
[Crossref]

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8, 383–387 (2009).
[Crossref]

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

Neumer, T.

Newton, M.

B. Naydenov, F. Reinhard, A. Lämmle, V. Richter, R. Kalish, U. F. S. D’Haenens-Johansson, M. Newton, F. Jelezko, and J. Wrachtrup, “Increasing the coherence time of single electron spins in diamond by high temperature annealing,” Appl. Phys. Lett. 97, 242511 (2010).
[Crossref]

Newton, M. E.

R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
[Crossref]

A. M. Edmonds, U. F. S. D’Haenens-Johansson, R. J. Cruddace, M. E. Newton, K.-M. C. Fu, C. Santori, R. G. Beausoleil, D. J. Twitchen, and M. L. Markham, “Production of oriented nitrogen-vacancy color centers in synthetic diamond,” Phys. Rev. B 86, 035201 (2012).
[Crossref]

Niikura, N.

H. Kosaka and N. Niikura, “Entangled absorption of a single photon with a single spin in diamond,” Phys. Rev. Lett. 114, 053603 (2015).
[Crossref]

Nishibayashi, Y.

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, “Smooth and high-rate reactive ion etching of diamond,” Diam. Relat. Mater. 11, 824–827 (2002).
[Crossref]

Nobauer, T.

K. Nemoto, M. Trupke, S. J. Devitt, A. M. Stephens, K. Buczak, T. Nobauer, M. S. Everitt, J. Schmiedmayer, and W. J. Munro, “Photonic architecture for scalable quantum information processing in NV-diamond,” arXiv:1309.4277 [quant-ph] (2013).

Nöbauer, T.

F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

Nunn, J.

F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
[Crossref]

O’Brien, J. L.

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).

A. Young, C. Y. Hu, L. Marseglia, J. P. Harrison, J. L. O’Brien, and J. G. Rarity, “Cavity enhanced spin measurement of the ground state spin of an NV center in diamond,” New J. Phys. 11, 013007 (2009).
[Crossref]

O’Hara, N.

D. McCloskey, D. Fox, N. O’Hara, V. Usov, D. Scanlan, N. McEvoy, G. S. Duesberg, G. L. W. Cross, H. Z. Zhang, and J. F. Donegan, “Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond,” Appl. Phys. Lett. 104, 031109 (2014).
[Crossref]

Ogletree, D. F.

J. Schwartz, S. Aloni, D. F. Ogletree, M. Tomut, M. Bender, D. Severin, C. Trautmann, I. W. Rangelow, and T. Schenkel, “Local formation of nitrogen-vacancy centers in diamond by swift heavy ions,” J. Appl. Phys. 116, 214107 (2014).
[Crossref]

J. Schwartz, S. Aloni, D. F. Ogletree, and T. Schenkel, “Effects of low-energy electron irradiation on formation of nitrogen-vacancy centers in single-crystal diamond,” New J. Phys. 14, 043024 (2012).

Ohno, K.

K. Ohno, F. J. Heremans, C. F. D. l. Casas, B. A. Myers, B. J. Alemán, A. C. B. Jayich, and D. D. Awschalom, “Three-dimensional localization of spins in diamond using 12c implantation,” Appl. Phys. Lett. 105, 052406 (2014).
[Crossref]

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

P. Andrich, B. J. Alemán, J. C. Lee, K. Ohno, C. F. de las Casas, F. J. Heremans, E. L. Hu, and D. D. Awschalom, “Engineered micro- and nanoscale diamonds as mobile probes for high-resolution sensing in fluid,” Nano Lett. 14, 4959–4964 (2014).
[Crossref]

K. Ohno, F. J. Heremans, L. C. Bassett, B. A. Myers, D. M. Toyli, A. C. B. Jayich, C. J. Palmstrøm, and D. D. Awschalom, “Engineering shallow spins in diamond with nitrogen delta-doping,” Appl. Phys. Lett. 101, 082413 (2012).
[Crossref]

C. A. McLellan, B. A. Myers, S. Kraemer, K. Ohno, D. D. Awschalom, and A. C. B. Jayich, “Deterministic formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique,” arXiv:1512.08821 [cond-mat] (2015).

Ohshima, T.

T. Teraji, T. Yamamoto, K. Watanabe, Y. Koide, J. Isoya, S. Onoda, T. Ohshima, L. J. Rogers, F. Jelezko, P. Neumann, J. Wrachtrup, and S. Koizumi, “Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single color center formation,” Phys. Status Solidi A 212, 2365–2384 (2015).
[Crossref]

T. Wolf, P. Neumann, K. Nakamura, H. Sumiya, T. Ohshima, J. Isoya, and J. Wrachtrup, “Subpicotesla diamond magnetometry,” Phys. Rev. X 5, 041001 (2015).
[Crossref]

G. Waldherr, Y. Wang, S. Zaiser, M. Jamali, T. Schulte-Herbrüggen, H. Abe, T. Ohshima, J. Isoya, J. F. Du, P. Neumann, and J. Wrachtrup, “Quantum error correction in a solid-state hybrid spin register,” Nature 506, 204–207 (2014).
[Crossref]

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

Olivero, P.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[Crossref]

F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

Olynick, D.

C. Peroz, S. Dhuey, M. Cornet, M. Vogler, D. Olynick, and S. Cabrini, “Single digit nanofabrication by step-and-repeat nanoimprint lithography,” Nanotechnology 23, 015305 (2012).
[Crossref]

Onoda, S.

T. Teraji, T. Yamamoto, K. Watanabe, Y. Koide, J. Isoya, S. Onoda, T. Ohshima, L. J. Rogers, F. Jelezko, P. Neumann, J. Wrachtrup, and S. Koizumi, “Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single color center formation,” Phys. Status Solidi A 212, 2365–2384 (2015).
[Crossref]

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

Orwa, J. O.

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

Osgood, R. M.

O. Gaathon, J. S. Hodges, E. H. Chen, L. Li, S. Bakhru, H. Bakhru, D. Englund, and R. M. Osgood, “Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers,” Opt. Mater. 35, 361–365 (2013).
[Crossref]

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4, 557–560 (2010).
[Crossref]

Oura, K.

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, “Smooth and high-rate reactive ion etching of diamond,” Diam. Relat. Mater. 11, 824–827 (2002).
[Crossref]

Ovartchaiyapong, P.

P. Ovartchaiyapong, K. W. Lee, B. A. Myers, and A. C. B. Jayich, “Dynamic strain-mediated coupling of a single diamond spin to a mechanical resonator,” Nat. Commun. 5, 4429 (2014).
[Crossref]

P. Ovartchaiyapong, L. M. A. Pascal, B. A. Myers, P. Lauria, and A. C. B. Jayich, “High quality factor single-crystal diamond mechanical resonators,” Appl. Phys. Lett. 101, 163505 (2012).
[Crossref]

Pakes, C.

C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
[Crossref]

Palmstrøm, C. J.

K. Ohno, F. J. Heremans, L. C. Bassett, B. A. Myers, D. M. Toyli, A. C. B. Jayich, C. J. Palmstrøm, and D. D. Awschalom, “Engineering shallow spins in diamond with nitrogen delta-doping,” Appl. Phys. Lett. 101, 082413 (2012).
[Crossref]

Park, H.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

B. Shields, Q. Unterreithmeier, N. de Leon, H. Park, and M. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114, 136402 (2015).
[Crossref]

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
[Crossref]

Pascal, L. M. A.

P. Ovartchaiyapong, L. M. A. Pascal, B. A. Myers, P. Lauria, and A. C. B. Jayich, “High quality factor single-crystal diamond mechanical resonators,” Appl. Phys. Lett. 101, 163505 (2012).
[Crossref]

Pastawski, F.

P. C. Maurer, G. Kucsko, C. Latta, L. Jiang, N. Y. Yao, S. D. Bennett, F. Pastawski, D. Hunger, N. Chisholm, M. Markham, D. J. Twitchen, J. I. Cirac, and M. D. Lukin, “Room-temperature quantum bit memory exceeding one second,” Science 336, 1283–1286 (2012).
[Crossref]

Patel, P.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

Patel, R. N.

R. N. Patel, T. Schröder, N. Wan, L. Li, S. L. Mouradian, E. H. Chen, and D. R. Englund, “Efficient photon coupling from a diamond nitrogen vacancy center by integration with silica fiber,” Light Sci. Appl. 5, e16032 (2016).
[Crossref]

Patton, B.

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

Patton, B. R.

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).

P. R. Dolan, G. M. Hughes, F. Grazioso, B. R. Patton, and J. M. Smith, “Femtoliter tunable optical cavity arrays,” Opt. Lett. 35, 3556–3558 (2010).
[Crossref]

Pauly, C.

J. Riedrich-Möller, S. Pezzagna, J. Meijer, C. Pauly, F. Mücklich, M. Markham, A. M. Edmonds, and C. Becher, “Nanoimplantation and Purcell enhancement of single nitrogen-vacancy centers in photonic crystal cavities in diamond,” Appl. Phys. Lett. 106, 221103 (2015).
[Crossref]

J. Riedrich-Möller, C. Arend, C. Pauly, F. Mücklich, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond,” Nano Lett. 14, 5281–5287 (2014).
[Crossref]

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

Perkins, N.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Pernice, W.

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

Peroz, C.

C. Peroz, S. Dhuey, M. Cornet, M. Vogler, D. Olynick, and S. Cabrini, “Single digit nanofabrication by step-and-repeat nanoimprint lithography,” Nanotechnology 23, 015305 (2012).
[Crossref]

Petta, J. R.

D. D. Awschalom, L. C. Bassett, A. S. Dzurak, E. L. Hu, and J. R. Petta, “Quantum spintronics: engineering and manipulating atom-like spins in semiconductors,” Science 339, 1174–1179 (2013).
[Crossref]

Pezzagna, S.

J. Riedrich-Möller, S. Pezzagna, J. Meijer, C. Pauly, F. Mücklich, M. Markham, A. M. Edmonds, and C. Becher, “Nanoimplantation and Purcell enhancement of single nitrogen-vacancy centers in photonic crystal cavities in diamond,” Appl. Phys. Lett. 106, 221103 (2015).
[Crossref]

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

S. Pezzagna, D. Rogalla, D. Wildanger, J. Meijer, and A. Zaitsev, “Creation and nature of optical centres in diamond for single-photon emission-overview and critical remarks,” New J. Phys. 13, 035024 (2011).
[Crossref]

S. Pezzagna, D. Wildanger, P. Mazarov, A. D. Wieck, Y. Sarov, I. Rangelow, B. Naydenov, F. Jelezko, S. W. Hell, and J. Meijer, “Nanoscale engineering and optical addressing of single spins in diamond,” Small 6, 2117–2121 (2010).
[Crossref]

S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12, 065017 (2010).
[Crossref]

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

Pfaff, W.

W. Pfaff, B. J. Hensen, H. Bernien, S. B. V. Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref]

Pham, L. M.

N. Bar-Gill, L. M. Pham, A. Jarmola, D. Budker, and R. L. Walsworth, “Solid-state electronic spin coherence time approaching one second,” Nat. Commun. 4, 1743 (2013).
[Crossref]

S. Hong, M. S. Grinolds, L. M. Pham, D. Le Sage, L. Luan, R. L. Walsworth, and A. Yacoby, “Nanoscale magnetometry with NV centers in diamond,” MRS Bull. 38(02), 155–161 (2013).
[Crossref]

L. M. Pham, N. Bar-Gill, C. Belthangady, D. Le Sage, P. Cappellaro, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Enhanced solid-state multispin metrology using dynamical decoupling,” Phys. Rev. B 86, 045214 (2012).
[Crossref]

D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
[Crossref]

Pingault, B.

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

Plenio, M. B.

J. Cai, F. Jelezko, and M. B. Plenio, “Hybrid sensors based on colour centres in diamond and piezoactive layers,” Nat. Commun. 5, 4065 (2014).
[Crossref]

J. Cai, A. Retzker, F. Jelezko, and M. B. Plenio, “A large-scale quantum simulator on a diamond surface at room temperature,” Nat. Phys. 9, 168–173 (2013).
[Crossref]

Plümel, I.

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

Poitras, C. B.

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

Poizat, J.-P.

Popa, I.

J. R. Rabeau, P. Reichart, G. Tamanyan, D. N. Jamieson, S. Prawer, F. Jelezko, T. Gaebel, I. Popa, M. Domhan, and J. Wrachtrup, “Implantation of labelled single nitrogen vacancy centers in diamond using N15,” Appl. Phys. Lett. 88, 023113 (2006).
[Crossref]

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

J. Meijer, B. Burchard, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, and J. Wrachtrup, “Generation of single color centers by focused nitrogen implantation,” Appl. Phys. Lett. 87, 261909 (2005).
[Crossref]

Prawer, S.

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[Crossref]

M. P. Hiscocks, K. Ganesan, B. C. Gibson, S. T. Huntington, F. Ladouceur, and S. Prawer, “Diamond waveguides fabricated by reactive ion etching,” Opt. Express 16, 19512–19519 (2008).
[Crossref]

K.-M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
[Crossref]

F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
[Crossref]

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

J. R. Rabeau, P. Reichart, G. Tamanyan, D. N. Jamieson, S. Prawer, F. Jelezko, T. Gaebel, I. Popa, M. Domhan, and J. Wrachtrup, “Implantation of labelled single nitrogen vacancy centers in diamond using N15,” Appl. Phys. Lett. 88, 023113 (2006).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

P. Tamarat, T. Gaebel, J. R. Rabeau, M. Khan, A. D. Greentree, H. Wilson, L. C. L. Hollenberg, S. Prawer, P. Hemmer, F. Jelezko, and J. Wrachtrup, “Stark shift control of single optical centers in diamond,” Phys. Rev. Lett. 97, 083002 (2006).
[Crossref]

C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
[Crossref]

Pruneri, V.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

Purcell, E. M.

E. M. Purcell, “Spontaneous emission probabilities at radio frequencies,” Phys. Rev. 69, 37–38 (1946).
[Crossref]

Quan, Q.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
[Crossref]

Rabeau, J. R.

P. Tamarat, T. Gaebel, J. R. Rabeau, M. Khan, A. D. Greentree, H. Wilson, L. C. L. Hollenberg, S. Prawer, P. Hemmer, F. Jelezko, and J. Wrachtrup, “Stark shift control of single optical centers in diamond,” Phys. Rev. Lett. 97, 083002 (2006).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

J. R. Rabeau, P. Reichart, G. Tamanyan, D. N. Jamieson, S. Prawer, F. Jelezko, T. Gaebel, I. Popa, M. Domhan, and J. Wrachtrup, “Implantation of labelled single nitrogen vacancy centers in diamond using N15,” Appl. Phys. Lett. 88, 023113 (2006).
[Crossref]

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

Ralchenko, V.

D. Sovyk, V. Ralchenko, M. Komlenok, A. A. Khomich, V. Shershulin, V. Vorobyov, I. Vlasov, V. Konov, and A. Akimov, “Fabrication of diamond microstub photoemitters with strong photoluminescence of SiV color centers: bottom-up approach,” Appl. Phys. A 118, 17–21 (2014).
[Crossref]

Randolph, S.

A. A. Martin, S. Randolph, A. Botman, M. Toth, and I. Aharonovich, “Maskless milling of diamond by a focused oxygen ion beam,” Sci. Rep. 5, 8958 (2015).
[Crossref]

Rangelow, I.

S. Pezzagna, D. Wildanger, P. Mazarov, A. D. Wieck, Y. Sarov, I. Rangelow, B. Naydenov, F. Jelezko, S. W. Hell, and J. Meijer, “Nanoscale engineering and optical addressing of single spins in diamond,” Small 6, 2117–2121 (2010).
[Crossref]

Rangelow, I. W.

J. Schwartz, S. Aloni, D. F. Ogletree, M. Tomut, M. Bender, D. Severin, C. Trautmann, I. W. Rangelow, and T. Schenkel, “Local formation of nitrogen-vacancy centers in diamond by swift heavy ions,” J. Appl. Phys. 116, 214107 (2014).
[Crossref]

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

Rarity, J. G.

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).

A. Young, C. Y. Hu, L. Marseglia, J. P. Harrison, J. L. O’Brien, and J. G. Rarity, “Cavity enhanced spin measurement of the ground state spin of an NV center in diamond,” New J. Phys. 11, 013007 (2009).
[Crossref]

Rasser, B.

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

Rath, P.

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

Reichart, P.

F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
[Crossref]

J. R. Rabeau, P. Reichart, G. Tamanyan, D. N. Jamieson, S. Prawer, F. Jelezko, T. Gaebel, I. Popa, M. Domhan, and J. Wrachtrup, “Implantation of labelled single nitrogen vacancy centers in diamond using N15,” Appl. Phys. Lett. 88, 023113 (2006).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

Reichel, J.

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

R. Albrecht, A. Bommer, C. Deutsch, J. Reichel, and C. Becher, “Coupling of a single nitrogen-vacancy center in diamond to a fiber-based microcavity,” Phys. Rev. Lett. 110, 243602 (2013).
[Crossref]

D. Hunger, C. Deutsch, R. J. Barbour, R. J. Warburton, and J. Reichel, “Laser micro-fabrication of concave, low-roughness features in silica,” AIP Adv. 2, 012119 (2012).
[Crossref]

T. Steinmetz, Y. Colombe, D. Hunger, T. W. Hänsch, A. Balocchi, R. J. Warburton, and J. Reichel, “Stable fiber-based Fabry–Pérot cavity,” Appl. Phys. Lett. 89, 111110 (2006).
[Crossref]

H. Kaupp, C. Deutsch, H.-C. Chang, J. Reichel, T. W. Hänsch, and D. Hunger, “Scaling laws of the cavity enhancement for NV centers in diamond,” arXiv:1304.0948 (2013).

Reinhard, F.

S. A. Momenzadeh, R. J. Stöhr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
[Crossref]

F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

B. Naydenov, F. Reinhard, A. Lämmle, V. Richter, R. Kalish, U. F. S. D’Haenens-Johansson, M. Newton, F. Jelezko, and J. Wrachtrup, “Increasing the coherence time of single electron spins in diamond by high temperature annealing,” Appl. Phys. Lett. 97, 242511 (2010).
[Crossref]

Reiserer, A.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

M. S. Blok, N. Kalb, A. Reiserer, T. H. Taminiau, and R. Hanson, “Towards quantum networks of single spins: analysis of a quantum memory with an optical interface in diamond,” Faraday Discuss. 184, 173–182 (2015).
[Crossref]

Rempp, F.

F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

Renn, A.

K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166–169 (2011).
[Crossref]

Retzker, A.

J. Cai, A. Retzker, F. Jelezko, and M. B. Plenio, “A large-scale quantum simulator on a diamond surface at room temperature,” Nat. Phys. 9, 168–173 (2013).
[Crossref]

Reuter, R.

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

Rezai, M.

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85, 123703 (2014).
[Crossref]

Richter, V.

B. Naydenov, F. Reinhard, A. Lämmle, V. Richter, R. Kalish, U. F. S. D’Haenens-Johansson, M. Newton, F. Jelezko, and J. Wrachtrup, “Increasing the coherence time of single electron spins in diamond by high temperature annealing,” Appl. Phys. Lett. 97, 242511 (2010).
[Crossref]

I. Bayn, B. Meyler, J. Salzman, V. Richter, and R. Kalish, “Single crystal diamond photonic crystal nanocavity: fabrication and initial characterization,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2010), paper QThL7.

Riedel, D.

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
[Crossref]

Riedrich-Möller, J.

J. Riedrich-Möller, S. Pezzagna, J. Meijer, C. Pauly, F. Mücklich, M. Markham, A. M. Edmonds, and C. Becher, “Nanoimplantation and Purcell enhancement of single nitrogen-vacancy centers in photonic crystal cavities in diamond,” Appl. Phys. Lett. 106, 221103 (2015).
[Crossref]

J. Riedrich-Möller, C. Arend, C. Pauly, F. Mücklich, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond,” Nano Lett. 14, 5281–5287 (2014).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

Rittweger, E.

K. Y. Han, K. I. Willig, E. Rittweger, F. Jelezko, C. Eggeling, and S. W. Hell, “Three-dimensional stimulated emission depletion microscopy of nitrogen-vacancy centers in diamond using continuous-wave light,” Nano Lett. 9, 3323–3329 (2009).
[Crossref]

Robledo, L.

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref]

Roch, J. F.

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

Roch, J.-F.

M. Lesik, J.-P. Tetienne, A. Tallaire, J. Achard, V. Mille, A. Gicquel, J.-F. Roch, and V. Jacques, “Perfect preferential orientation of nitrogen-vacancy defects in a synthetic diamond sample,” Appl. Phys. Lett. 104, 113107 (2014).
[Crossref]

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77, 056503 (2014).
[Crossref]

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

Rochman, J.

M. J. Burek, Y. Chu, M. S. Z. Liddy, P. Patel, J. Rochman, S. Meesala, W. Hong, Q. Quan, M. D. Lukin, and M. Lončar, “High quality-factor optical nanocavities in bulk single-crystal diamond,” Nat. Commun. 5, 5718 (2014).
[Crossref]

Rogalla, D.

S. Pezzagna, D. Rogalla, D. Wildanger, J. Meijer, and A. Zaitsev, “Creation and nature of optical centres in diamond for single-photon emission-overview and critical remarks,” New J. Phys. 13, 035024 (2011).
[Crossref]

Rogers, L.

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

A. Sipahigil, K. Jahnke, L. Rogers, T. Teraji, J. Isoya, A. Zibrov, F. Jelezko, and M. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113, 113602 (2014).
[Crossref]

Rogers, L. J.

T. Teraji, T. Yamamoto, K. Watanabe, Y. Koide, J. Isoya, S. Onoda, T. Ohshima, L. J. Rogers, F. Jelezko, P. Neumann, J. Wrachtrup, and S. Koizumi, “Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single color center formation,” Phys. Status Solidi A 212, 2365–2384 (2015).
[Crossref]

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

Rohner, D.

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
[Crossref]

Rol, F.

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[Crossref]

Rol, M. A.

J. Cramer, N. Kalb, M. A. Rol, B. Hensen, M. S. Blok, M. Markham, D. J. Twitchen, R. Hanson, and T. H. Taminiau, “Repeated quantum error correction on a continuously encoded qubit by real-time feedback,” arXiv:1508.01388 [cond-mat, physics:quant-ph] (2015).

Roll, H.

M. Schreck, A. Schury, F. Hörmann, H. Roll, and B. Stritzker, “Mosaicity reduction during growth of heteroepitaxial diamond films on iridium buffer layers: experimental results and numerical simulations,” J. Appl. Phys. 91, 676–685 (2002).
[Crossref]

M. Schreck, F. Hörmann, H. Roll, J. K. N. Lindner, and B. Stritzker, “Diamond nucleation on iridium buffer layers and subsequent textured growth: a route for the realization of single-crystal diamond films,” Appl. Phys. Lett. 78, 192–194 (2001).
[Crossref]

Rondin, L.

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77, 056503 (2014).
[Crossref]

Roth, J.

D. Antonov, T. Häußermann, A. Aird, J. Roth, H.-R. Trebin, C. Müller, L. McGuinness, F. Jelezko, T. Yamamoto, J. Isoya, S. Pezzagna, J. Meijer, and J. Wrachtrup, “Statistical investigations on nitrogen-vacancy center creation,” Appl. Phys. Lett. 104, 012105 (2014).
[Crossref]

Rubanov, S.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

Ruf, M.

E. Janitz, M. Ruf, M. Dimock, A. Bourassa, J. Sankey, and L. Childress, “Fabry–Perot microcavity for diamond-based photonics,” Phys. Rev. A 92, 043844 (2015).
[Crossref]

Ruggiero, C. A.

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

Ruitenberg, J.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

Russell, K. J.

J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. B. Jayich, D. Awschalom, and E. L. Hu, “Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity,” Appl. Phys. Lett. 105, 261101 (2014).
[Crossref]

Sabella, A.

Sahin, D.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Salim, A. J.

H. A. Atikian, A. Eftekharian, A. J. Salim, M. J. Burek, J. T. Choy, A. H. Majedi, and M. Lončar, “Superconducting nanowire single photon detector on diamond,” Appl. Phys. Lett. 104, 122602 (2014).
[Crossref]

Salord, O.

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

Salzman, J.

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[Crossref]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, “Characterization of three-dimensional microstructures in single-crystal diamond,” Diam. Relat. Mater. 15, 1614–1621 (2006).
[Crossref]

I. Bayn, B. Meyler, J. Salzman, V. Richter, and R. Kalish, “Single crystal diamond photonic crystal nanocavity: fabrication and initial characterization,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2010), paper QThL7.

Samartseva, J.

R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
[Crossref]

Sandoghdar, V.

K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166–169 (2011).
[Crossref]

Sanjines, R.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Sankey, J.

E. Janitz, M. Ruf, M. Dimock, A. Bourassa, J. Sankey, and L. Childress, “Fabry–Perot microcavity for diamond-based photonics,” Phys. Rev. A 92, 043844 (2015).
[Crossref]

Santori, C.

Z. Huang, A. Faraon, C. Santori, V. Acosta, and R. G. Beausoleil, “Microring resonator-based diamond optothermal switch: a building block for a quantum computing network,” Proc. SPIE 8635, 86350E (2013).

A. Faraon, C. Santori, Z. Huang, K.-M. C. Fu, V. M. Acosta, D. Fattal, and R. G. Beausoleil, “Quantum photonic devices in single-crystal diamond,” New J. Phys. 15, 025010 (2013).
[Crossref]

Z. Huang, W.-D. Li, C. Santori, V. M. Acosta, A. Faraon, T. Ishikawa, W. Wu, D. Winston, R. S. Williams, and R. G. Beausoleil, “Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing,” Appl. Phys. Lett. 103, 081906 (2013).
[Crossref]

A. M. Edmonds, U. F. S. D’Haenens-Johansson, R. J. Cruddace, M. E. Newton, K.-M. C. Fu, C. Santori, R. G. Beausoleil, D. J. Twitchen, and M. L. Markham, “Production of oriented nitrogen-vacancy color centers in synthetic diamond,” Phys. Rev. B 86, 035201 (2012).
[Crossref]

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[Crossref]

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

P. E. Barclay, K.-M. C. Fu, C. Santori, A. Faraon, and R. G. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[Crossref]

K.-M. C. Fu, P. E. Barclay, C. Santori, A. Faraon, and R. G. Beausoleil, “Low-temperature tapered-fiber probing of diamond nitrogen-vacancy ensembles coupled to GaP microcavities,” New J. Phys. 13, 055023 (2011).
[Crossref]

C. Santori, P. E. Barclay, K.-M. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[Crossref]

P. E. Barclay, K.-M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17, 9588–9601 (2009).
[Crossref]

P. E. Barclay, K.-M. C. Fu, C. Santori, and R. G. Beausoleil, “Chip-based microcavities coupled to nitrogen-vacancy centers in single crystal diamond,” Appl. Phys. Lett. 95, 191115 (2009).

V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E. Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemerisov, W. Gawlik, and D. Budker, “Diamonds with a high density of nitrogen-vacancy centers for magnetometry applications,” Phys. Rev. B 80, 115202 (2009).
[Crossref]

C. Santori, P. E. Barclay, K.-M. C. Fu, and R. G. Beausoleil, “Vertical distribution of nitrogen-vacancy centers in diamond formed by ion implantation and annealing,” Phys. Rev. B 79, 125313 (2009).
[Crossref]

K.-M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
[Crossref]

C. Santori, D. Fattal, and Y. Yamamoto, Single-Photon Devices and Applications (Wiley, 2010).

A. Faraon, Z. Huang, V. Acosta, C. Santori, and R. Beausoleil, “Coupling of nitrogen-vacancy centers to photonic crystal resonators in monocrystalline diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2012), paper QM3C.5.

Sar, T. V. D.

T. H. Taminiau, J. Cramer, T. V. D. Sar, V. V. Dobrovitski, and R. Hanson, “Universal control and error correction in multi-qubit spin registers in diamond,” Nat. Nanotechnol. 9, 171–176 (2014).
[Crossref]

Sargent, M.

P. Meystre and M. Sargent, Elements of Quantum Optics (Springer, 2007).

Sarov, Y.

S. Pezzagna, D. Wildanger, P. Mazarov, A. D. Wieck, Y. Sarov, I. Rangelow, B. Naydenov, F. Jelezko, S. W. Hell, and J. Meijer, “Nanoscale engineering and optical addressing of single spins in diamond,” Small 6, 2117–2121 (2010).
[Crossref]

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

Scanlan, D.

D. McCloskey, D. Fox, N. O’Hara, V. Usov, D. Scanlan, N. McEvoy, G. S. Duesberg, G. L. W. Cross, H. Z. Zhang, and J. F. Donegan, “Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond,” Appl. Phys. Lett. 104, 031109 (2014).
[Crossref]

Scarsbrook, G. A.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys. 21, 364221 (2009).
[Crossref]

Scharfenberger, B.

K. Nemoto, M. Trupke, S. J. Devitt, B. Scharfenberger, K. Buczak, J. Schmiedmayer, and W. J. Munro, “Photonic quantum networks formed from NV- centers,” arXiv:1412.5950 [quant-ph] (2014).

Schauffert, H.

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Müller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref]

Schell, A. W.

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

A. W. Schell, T. Neumer, and O. Benson, “Numerical analysis of efficient light extraction with an elliptical solid immersion lens,” Opt. Lett. 39, 4639–4642 (2014).
[Crossref]

Schenkel, T.

J. Schwartz, S. Aloni, D. F. Ogletree, M. Tomut, M. Bender, D. Severin, C. Trautmann, I. W. Rangelow, and T. Schenkel, “Local formation of nitrogen-vacancy centers in diamond by swift heavy ions,” J. Appl. Phys. 116, 214107 (2014).
[Crossref]

J. Schwartz, S. Aloni, D. F. Ogletree, and T. Schenkel, “Effects of low-energy electron irradiation on formation of nitrogen-vacancy centers in single-crystal diamond,” New J. Phys. 14, 043024 (2012).

D. M. Toyli, C. D. Weis, G. D. Fuchs, T. Schenkel, and D. D. Awschalom, “Chip-scale nanofabrication of single spins and spin arrays in diamond,” Nano Lett. 10, 3168–3172 (2010).
[Crossref]

Schietinger, S.

M. Barth, S. Schietinger, T. Schröder, T. Aichele, and O. Benson, “Controlled coupling of NV defect centers to plasmonic and photonic nanostructures,” J. Lumin. 130, 1628–1634 (2010).
[Crossref]

S. Schietinger, M. Barth, T. Aichele, and O. Benson, “Plasmon-enhanced single photon emission from a nanoassembled metal–diamond hybrid structure at room temperature,” Nano Lett. 9, 1694–1698 (2009).
[Crossref]

Schirhagl, R.

R. Schirhagl, K. Chang, M. Loretz, and C. L. Degen, “Nitrogen-vacancy centers in diamond: nanoscale sensors for physics and biology,” Annu. Rev. Phys. Chem. 65, 83–105 (2014).
[Crossref]

Schmidt-Kaler, F.

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

Schmiedmayer, J.

K. Nemoto, M. Trupke, S. J. Devitt, B. Scharfenberger, K. Buczak, J. Schmiedmayer, and W. J. Munro, “Photonic quantum networks formed from NV- centers,” arXiv:1412.5950 [quant-ph] (2014).

K. Nemoto, M. Trupke, S. J. Devitt, A. M. Stephens, K. Buczak, T. Nobauer, M. S. Everitt, J. Schmiedmayer, and W. J. Munro, “Photonic architecture for scalable quantum information processing in NV-diamond,” arXiv:1309.4277 [quant-ph] (2013).

Schnitzler, W.

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

Schouten, R. N.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref]

W. Pfaff, B. J. Hensen, H. Bernien, S. B. V. Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
[Crossref]

Schreck, M.

M. Schreck, J. Asmussen, S. Shikata, J.-C. Arnault, and N. Fujimori, “Large-area high-quality single crystal diamond,” MRS Bull. 39(06), 504–510 (2014).
[Crossref]

J. Riedrich-Möller, C. Arend, C. Pauly, F. Mücklich, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond,” Nano Lett. 14, 5281–5287 (2014).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7, 69–74 (2012).
[Crossref]

S. Gsell, T. Bauer, J. Goldfuß, M. Schreck, and B. Stritzker, “A route to diamond wafers by epitaxial deposition on silicon via iridium/yttria-stabilized zirconia buffer layers,” Appl. Phys. Lett. 84, 4541–4543 (2004).
[Crossref]

M. Schreck, A. Schury, F. Hörmann, H. Roll, and B. Stritzker, “Mosaicity reduction during growth of heteroepitaxial diamond films on iridium buffer layers: experimental results and numerical simulations,” J. Appl. Phys. 91, 676–685 (2002).
[Crossref]

M. Schreck, F. Hörmann, H. Roll, J. K. N. Lindner, and B. Stritzker, “Diamond nucleation on iridium buffer layers and subsequent textured growth: a route for the realization of single-crystal diamond films,” Appl. Phys. Lett. 78, 192–194 (2001).
[Crossref]

Schröder, T.

R. N. Patel, T. Schröder, N. Wan, L. Li, S. L. Mouradian, E. H. Chen, and D. R. Englund, “Efficient photon coupling from a diamond nitrogen vacancy center by integration with silica fiber,” Light Sci. Appl. 5, e16032 (2016).
[Crossref]

L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
[Crossref]

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

L. Li, T. Schröder, E. H. Chen, M. Walsh, I. Bayn, J. Goldstein, O. Gaathon, M. E. Trusheim, M. Lu, J. Mower, M. Cotlet, M. L. Markham, D. J. Twitchen, and D. Englund, “Coherent spin control of a nanocavity-enhanced qubit in diamond,” Nat. Commun. 6, 6173 (2015).
[Crossref]

L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref]

H. Clevenson, M. E. Trusheim, C. Teale, T. Schröder, D. Braje, and D. Englund, “Broadband magnetometry and temperature sensing with a light-trapping diamond waveguide,” Nat. Phys. 11, 393–397 (2015).
[Crossref]

S. L. Mouradian, T. Schröder, C. B. Poitras, L. Li, J. Goldstein, E. H. Chen, M. Walsh, J. Cardenas, M. L. Markham, D. J. Twitchen, M. Lipson, and D. Englund, “Scalable integration of long-lived quantum memories into a photonic circuit,” Phys. Rev. X 5, 031009 (2015).
[Crossref]

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

M. E. Trusheim, L. Li, A. Laraoui, E. H. Chen, H. Bakhru, T. Schröder, O. Gaathon, C. A. Meriles, and D. Englund, “Scalable fabrication of high purity diamond nanocrystals with long-spin-coherence nitrogen vacancy centers,” Nano Lett. 14, 32–36 (2014).
[Crossref]

R. Albrecht, A. Bommer, C. Pauly, F. Mücklich, A. W. Schell, P. Engel, T. Schröder, O. Benson, J. Reichel, and C. Becher, “Narrow-band single photon emission at room temperature based on a single nitrogen-vacancy center coupled to an all-fiber-cavity,” Appl. Phys. Lett. 105, 073113 (2014).
[Crossref]

T. Schröder, F. Gädeke, M. J. Banholzer, and O. Benson, “Ultrabright and efficient single-photon generation based on nitrogen-vacancy centres in nanodiamonds on a solid immersion lens,” New J. Phys. 13, 055017 (2011).
[Crossref]

M. Barth, S. Schietinger, T. Schröder, T. Aichele, and O. Benson, “Controlled coupling of NV defect centers to plasmonic and photonic nanostructures,” J. Lumin. 130, 1628–1634 (2010).
[Crossref]

T. Schröder, E. Chen, L. Li, M. Walsh, M. E. Trusheim, I. Bayn, and D. Englund, “Targeted creation and Purcell enhancement of NV centers within photonic crystal cavities in single-crystal diamond,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2014), paper FW1B.6.

T. Schröder, L. Li, E. Chen, M. Walsh, M. E. Trusheim, I. Bayn, J. Zheng, S. Mouradian, H. Bakhru, O. Gaathon, and D. R. Englund, “Deterministic high-yield creation of nitrogen vacancy centers in diamond photonic crystal cavities and photonic elements,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optical Society of America, 2015), paper FTh3B.1.

Schulte-Herbrüggen, T.

G. Waldherr, Y. Wang, S. Zaiser, M. Jamali, T. Schulte-Herbrüggen, H. Abe, T. Ohshima, J. Isoya, J. F. Du, P. Neumann, and J. Wrachtrup, “Quantum error correction in a solid-state hybrid spin register,” Nature 506, 204–207 (2014).
[Crossref]

F. Dolde, V. Bergholm, Y. Wang, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, P. Neumann, T. Schulte-Herbrüggen, J. Biamonte, and J. Wrachtrup, “High-fidelity spin entanglement using optimal control,” Nat. Commun. 5, 3371 (2014).
[Crossref]

Schury, A.

M. Schreck, A. Schury, F. Hörmann, H. Roll, and B. Stritzker, “Mosaicity reduction during growth of heteroepitaxial diamond films on iridium buffer layers: experimental results and numerical simulations,” J. Appl. Phys. 91, 676–685 (2002).
[Crossref]

Schwartz, J.

J. Schwartz, S. Aloni, D. F. Ogletree, M. Tomut, M. Bender, D. Severin, C. Trautmann, I. W. Rangelow, and T. Schenkel, “Local formation of nitrogen-vacancy centers in diamond by swift heavy ions,” J. Appl. Phys. 116, 214107 (2014).
[Crossref]

J. Schwartz, S. Aloni, D. F. Ogletree, and T. Schenkel, “Effects of low-energy electron irradiation on formation of nitrogen-vacancy centers in single-crystal diamond,” New J. Phys. 14, 043024 (2012).

Severin, D.

J. Schwartz, S. Aloni, D. F. Ogletree, M. Tomut, M. Bender, D. Severin, C. Trautmann, I. W. Rangelow, and T. Schenkel, “Local formation of nitrogen-vacancy centers in diamond by swift heavy ions,” J. Appl. Phys. 116, 214107 (2014).
[Crossref]

Shenderova, O.

V. N. Mochalin, O. Shenderova, D. Ho, and Y. Gogotsi, “The properties and applications of nanodiamonds,” Nat. Nanotechnol. 7, 11–23 (2012).
[Crossref]

Shershulin, V.

D. Sovyk, V. Ralchenko, M. Komlenok, A. A. Khomich, V. Shershulin, V. Vorobyov, I. Vlasov, V. Konov, and A. Akimov, “Fabrication of diamond microstub photoemitters with strong photoluminescence of SiV color centers: bottom-up approach,” Appl. Phys. A 118, 17–21 (2014).
[Crossref]

Shields, B.

B. Shields, Q. Unterreithmeier, N. de Leon, H. Park, and M. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114, 136402 (2015).
[Crossref]

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Lončar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref]

Shields, B. J.

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Lončar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref]

M. J. Burek, N. P. de Leon, B. J. Shields, B. J. M. Hausmann, Y. Chu, Q. Quan, A. S. Zibrov, H. Park, M. D. Lukin, and M. Lončar, “Free-standing mechanical and photonic nanostructures in single-crystal diamond,” Nano Lett. 12, 6084–6089 (2012).
[Crossref]

Shikata, S.

M. Schreck, J. Asmussen, S. Shikata, J.-C. Arnault, and N. Fujimori, “Large-area high-quality single crystal diamond,” MRS Bull. 39(06), 504–510 (2014).
[Crossref]

Shim, J. H.

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

Shimizu, M.

S. Furuyama, K. Tahara, T. Iwasaki, M. Shimizu, J. Yaita, M. Kondo, T. Kodera, and M. Hatano, “Improvement of fluorescence intensity of nitrogen vacancy centers in self-formed diamond microstructures,” Appl. Phys. Lett. 107, 163102 (2015).
[Crossref]

Shinada, T.

S. Tamura, G. Koike, A. Komatsubara, T. Teraji, S. Onoda, L. P. McGuinness, L. Rogers, B. Naydenov, E. Wu, L. Yan, F. Jelezko, T. Ohshima, J. Isoya, T. Shinada, and T. Tanii, “Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation,” Appl. Phys. Express 7, 115201 (2014).
[Crossref]

Sibley, S. J.

R. U. A. Khan, B. L. Cann, P. M. Martineau, J. Samartseva, J. J. P. Freeth, S. J. Sibley, C. B. Hartland, M. E. Newton, H. K. Dhillon, and D. J. Twitchen, “Colour-causing defects and their related optoelectronic transitions in single crystal CVD diamond,” J. Phys. 25, 275801 (2013).
[Crossref]

Siegel, M.

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

Simpson, D.

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

Singer, K.

J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H. H. Bukow, I. W. Rangelow, Y. Sarov, H. Wiggers, I. Plümel, F. Jelezko, J. Wrachtrup, F. Schmidt-Kaler, W. Schnitzler, and K. Singer, “Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution,” Appl. Phys. A 91, 567–571 (2008).
[Crossref]

Sipahigil, A.

A. Sipahigil, K. Jahnke, L. Rogers, T. Teraji, J. Isoya, A. Zibrov, F. Jelezko, and M. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113, 113602 (2014).
[Crossref]

R. E. Evans, A. Sipahigil, D. D. Sukachev, A. S. Zibrov, and M. D. Lukin, “Coherent optical emitters in diamond nanostructures via ion implantation,” arXiv:1512.03820 [cond-mat, physics:quant-ph] (2015).

Siyushev, P.

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diam. Relat. Mater. 20, 937–943 (2011).
[Crossref]

P. Siyushev, F. Kaiser, V. Jacques, I. Gerhardt, S. Bischof, H. Fedder, J. Dodson, M. Markham, D. Twitchen, F. Jelezko, and J. Wrachtrup, “Monolithic diamond optics for single photon detection,” Appl. Phys. Lett. 97, 241902 (2010).
[Crossref]

Smith, J. M.

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

P. R. Dolan, G. M. Hughes, F. Grazioso, B. R. Patton, and J. M. Smith, “Femtoliter tunable optical cavity arrays,” Opt. Lett. 35, 3556–3558 (2010).
[Crossref]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin single-crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[Crossref]

Smith, K. J. M.

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of single crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B 29, 010601 (2011).
[Crossref]

Solomon, G. S.

Song, Y.

N. Thomas, R. J. Barbour, Y. Song, M. L. Lee, and K.-M. C. Fu, “Waveguide-integrated single-crystalline GaP resonators on diamond,” Opt. Express 22, 13555–13564 (2014).
[Crossref]

M. Gould, S. Chakravarthi, I. R. Christen, N. Thomas, S. Dadgostar, Y. Song, M. L. Lee, F. Hatami, and K.-M. C. Fu, “A large-scale GaP-on-diamond integrated photonics platform for NV center-based quantum information,” arXiv:1510.05047 [cond-mat, physics:physics, physics:quant-ph] (2015).

Sørensen, A. S.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sørensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[Crossref]

Sovyk, D.

D. Sovyk, V. Ralchenko, M. Komlenok, A. A. Khomich, V. Shershulin, V. Vorobyov, I. Vlasov, V. Konov, and A. Akimov, “Fabrication of diamond microstub photoemitters with strong photoluminescence of SiV color centers: bottom-up approach,” Appl. Phys. A 118, 17–21 (2014).
[Crossref]

Spillane, S.

C. Santori, P. E. Barclay, K.-M. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[Crossref]

Spinicelli, P.

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

Spizziri, P.

C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
[Crossref]

Sprengers, J. P.

J. P. Sprengers, A. Gaggero, D. Sahin, S. Jahanmirinejad, G. Frucci, F. Mattioli, R. Leoni, J. Beetz, M. Lermer, M. Kamp, S. Höfling, R. Sanjines, and A. Fiore, “Waveguide superconducting single-photon detectors for integrated quantum photonic circuits,” Appl. Phys. Lett. 99, 181110 (2011).
[Crossref]

Sproll, F.

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light Sci. Appl. 4, e338 (2015).
[Crossref]

Stacey, A.

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
[Crossref]

J. O. Orwa, C. Santori, K. M. C. Fu, B. Gibson, D. Simpson, I. Aharonovich, A. Stacey, A. Cimmino, P. Balog, M. Markham, D. Twitchen, A. D. Greentree, R. G. Beausoleil, and S. Prawer, “Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing,” J. Appl. Phys. 109, 083530 (2011).
[Crossref]

Stanley, F.

C. Yang, D. N. Jamieson, C. Pakes, S. Prawer, A. Dzurak, F. Stanley, P. Spizziri, L. Macks, E. Gauja, and R. G. Clark, “Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication,” Jpn. J. Appl. Phys. 42, 4124–4128 (2003).
[Crossref]

Stanley-Clarke, A. C.

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).

Stanwix, P. L.

J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cappellaro, L. Jiang, M. V. G. Dutt, E. Togan, A. S. Zibrov, A. Yacoby, R. L. Walsworth, and M. D. Lukin, “Nanoscale magnetic sensing with an individual electronic spin in diamond,” Nature 455, 644–647 (2008).
[Crossref]

Stavrias, N.

T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J. R. Rabeau, N. Stavrias, A. D. Greentree, S. Prawer, J. Meijer, J. Twamley, P. R. Hemmer, and J. Wrachtrup, “Room-temperature coherent coupling of single spins in diamond,” Nat. Phys. 2, 408–413 (2006).
[Crossref]

Stein, A.

L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref]

I. Bayn, E. H. Chen, M. E. Trusheim, L. Li, T. Schröder, O. Gaathon, M. Lu, A. Stein, M. Liu, K. Kisslinger, H. Clevenson, and D. Englund, “Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks,” Nano Lett. 15, 1751–1758 (2015).
[Crossref]

I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zheng, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, and D. Englund, “Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks,” Appl. Phys. Lett. 105, 211101 (2014).
[Crossref]

Steinmetz, T.

T. Steinmetz, Y. Colombe, D. Hunger, T. W. Hänsch, A. Balocchi, R. J. Warburton, and J. Reichel, “Stable fiber-based Fabry–Pérot cavity,” Appl. Phys. Lett. 89, 111110 (2006).
[Crossref]

Steinmüller-Nethl, D.

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

Stephens, A. M.

K. Nemoto, M. Trupke, S. J. Devitt, A. M. Stephens, K. Buczak, T. Nobauer, M. S. Everitt, J. Schmiedmayer, and W. J. Munro, “Photonic architecture for scalable quantum information processing in NV-diamond,” arXiv:1309.4277 [quant-ph] (2013).

Sternschulte, H.

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref]

Stewart, W.

J. Love, W. Henry, W. Stewart, R. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: adiabaticity criteria,” IEE Proc. J. Optoelectron. 138, 343–354 (1991).
[Crossref]

Stöhr, R. J.

S. A. Momenzadeh, R. J. Stöhr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
[Crossref]

Stritzker, B.

S. Gsell, T. Bauer, J. Goldfuß, M. Schreck, and B. Stritzker, “A route to diamond wafers by epitaxial deposition on silicon via iridium/yttria-stabilized zirconia buffer layers,” Appl. Phys. Lett. 84, 4541–4543 (2004).
[Crossref]

M. Schreck, A. Schury, F. Hörmann, H. Roll, and B. Stritzker, “Mosaicity reduction during growth of heteroepitaxial diamond films on iridium buffer layers: experimental results and numerical simulations,” J. Appl. Phys. 91, 676–685 (2002).
[Crossref]

M. Schreck, F. Hörmann, H. Roll, J. K. N. Lindner, and B. Stritzker, “Diamond nucleation on iridium buffer layers and subsequent textured growth: a route for the realization of single-crystal diamond films,” Appl. Phys. Lett. 78, 192–194 (2001).
[Crossref]

Su, C.-H.

C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “High-performance diamond-based single-photon sources for quantum communication,” Phys. Rev. A 80, 052308 (2009).
[Crossref]

C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “Towards a picosecond transform-limited nitrogen-vacancy based single photon source,” Opt. Express 16, 6240–6250 (2008).
[Crossref]

Su, D.

L. Li, M. Trusheim, O. Gaathon, K. Kisslinger, C.-J. Cheng, M. Lu, D. Su, X. Yao, H.-C. Huang, I. Bayn, A. Wolcott, R. M. Osgood, and D. Englund, “Reactive ion etching: optimized diamond membrane fabrication for transmission electron microscopy,” J. Vac. Sci. Technol. B 31, 06FF01 (2013).

Sudraud, P.

M. Lesik, P. Spinicelli, S. Pezzagna, P. Happel, V. Jacques, O. Salord, B. Rasser, A. Delobbe, P. Sudraud, A. Tallaire, J. Meijer, and J.-F. Roch, “Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology,” Phys. Status Solidi A 210, 2055–2059 (2013).
[Crossref]

Sukachev, D. D.

R. E. Evans, A. Sipahigil, D. D. Sukachev, A. S. Zibrov, and M. D. Lukin, “Coherent optical emitters in diamond nanostructures via ion implantation,” arXiv:1512.03820 [cond-mat, physics:quant-ph] (2015).

Sumiya, H.

T. Wolf, P. Neumann, K. Nakamura, H. Sumiya, T. Ohshima, J. Isoya, and J. Wrachtrup, “Subpicotesla diamond magnetometry,” Phys. Rev. X 5, 041001 (2015).
[Crossref]

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

Surmacz, K.

F. C. Waldermann, P. Olivero, J. Nunn, K. Surmacz, Z. Y. Wang, D. Jaksch, R. A. Taylor, I. A. Walmsley, M. Draganski, P. Reichart, A. D. Greentree, D. N. Jamieson, and S. Prawer, “Creating diamond color centers for quantum optical applications,” Diam. Relat. Mater. 16, 1887–1895 (2007).
[Crossref]

Sushkov, A. O.

I. Lovchinsky, A. O. Sushkov, E. Urbach, N. P. D. Leon, S. Choi, K. D. Greve, R. Evans, R. Gertner, E. Bersin, C. Müller, L. McGuinness, F. Jelezko, R. L. Walsworth, H. Park, and M. D. Lukin, “Nuclear magnetic resonance detection and spectroscopy of single proteins using quantum logic,” Science 351, 836–841 (2016).
[Crossref]

Suter, D.

P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
[Crossref]

Tahara, K.

S. Furuyama, K. Tahara, T. Iwasaki, M. Shimizu, J. Yaita, M. Kondo, T. Kodera, and M. Hatano, “Improvement of fluorescence intensity of nitrogen vacancy centers in self-formed diamond microstructures,” Appl. Phys. Lett. 107, 163102 (2015).
[Crossref]

Takeuchi, S.