Abstract

A repeatable and relatively simple recipe is developed to fabricate optical metasurfaces with three-dimensional gold nanostructures. The recipe avoids any directional etching processes and is particularly useful in the fabrication of gold suspended structures such as air bridges and mushrooms, since dry etching of gold is difficult. Using the recipe, a sample metasurface with feature size of 100 nm is fabricated, and the results show smooth elliptical mushrooms and air bridges with very well-defined edges.

© 2016 Optical Society of America

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