Abstract

We fabricate polycrystalline anatase TiO2 microring resonators with loaded quality factors as high as 25,000 and average losses of 0.58dB/mm in the telecommunications band. Additionally, we measure a negative thermo-optic coefficient dn/dT of 4.9±0.5×105K1. The presented fabrication uses CMOS-compatible lithographic techniques that take advantage of substrate-independent, non-epitaxial growth. These properties make polycrystalline anatase a promising candidate for the implementation of athermal, vertically integrated, CMOS-compatible nanophotonic devices for nonlinear applications.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Athermal silicon ring resonators clad with titanium dioxide for 1.3µm wavelength operation

Shaoqi Feng, Kuanping Shang, Jock T. Bovington, Rui Wu, Binbin Guan, Kwang-Ting Cheng, John E. Bowers, and S. J. Ben Yoo
Opt. Express 23(20) 25653-25660 (2015)

Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides for microphotonic devices

Jonathan D. B. Bradley, Christopher C. Evans, Jennifer T. Choy, Orad Reshef, Parag B. Deotare, François Parsy, Katherine C. Phillips, Marko Lončar, and Eric Mazur
Opt. Express 20(21) 23821-23831 (2012)

Spectral broadening in anatase titanium dioxide waveguides at telecommunication and near-visible wavelengths

Christopher C. Evans, Katia Shtyrkova, Jonathan D. B. Bradley, Orad Reshef, Erich Ippen, and Eric Mazur
Opt. Express 21(15) 18582-18591 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription