Abstract

We show that reflection of a monochromatic light from a semi-infinite medium covered with a stack of layered media is equivalent to that from an effective “semi-infinite medium” characterized by two distinct optical dielectric constants for the s- and p-polarized components, respectively. Such an effective-substrate approach simplifies the analysis of ellipsometry measurements of a wide range of surface-bound processes including thin-film growth and surface-bound reactions.

© 2008 Optical Society of America

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