Abstract

HfO2 single layers, 800nm high-reflective (HR) coating, and 1064nm HR coating were prepared by electron-beam evaporation. The laser-induced damage thresholds (LIDTs) and damage morphologies of these samples were investigated with single-pulse femtosecond and nanosecond lasers. It is found that the LIDT of the HfO2 single layer is higher than the HfO2SiO2 HR coating in the femtosecond regime, while the situation is opposite in the nanosecond regime. Different damage mechanisms are applied to study this phenomenon. Damage morphologies of all samples due to different laser irradiations are displayed.

© 2007 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. T. W. Walker, A. H. Guenther, and P. E. Nielsen, "Pulsed laser-induced damage to thin-film optical coatings--Part 1: experimental," IEEE J. Quantum Electron. QE-17, 2041-2052 (1981).
    [CrossRef]
  2. M. R. Lange, J. K. Mclver, and A. H. Guenther, "Pulsed laser damage in thin film coatings: fluorides and oxides," Thin Solid Films 125, 143-155 (1985).
    [CrossRef]
  3. B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
    [CrossRef]
  4. M. Mero, J. Liu, and W. Rudolph, "Scaling laws of femtosecond laser pulse induced breakdown in oxide films," Phys. Rev. B 71, 115109 (2005).
    [CrossRef]
  5. M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
    [CrossRef]
  6. J. Jasapara, A. V. V. Nampoothiri, and W. Rudolph, "Femtosecond laser pulse induced breakdown in dielectric thin films," Phys. Rev. B 63, 045117 (2001).
    [CrossRef]
  7. M. Albisi, F. De Tomasi, M. R. Perrone, M. L. Protopapa, A. Rizzo, F. Sarto, and S. Scaglione, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001).
    [CrossRef]
  8. C. Giuri, M. R. Perrone, and V. Piccinno, "Output coupler design of unstable cavities for excimer lasers," Appl. Opt. 36, 1143-1148 (1997).
    [CrossRef] [PubMed]
  9. W. J. Kong, Y. A. Zhao, T. Wang, J. D. Shao, and Z. X. Fan, "Laser induced damage of multi-layer dielectric used in pulse compressor gratings," Chin. Opt. Lett. 3, 181-183 (2005).
  10. H. Zeng, J. Wu, H. Xu, K. Wu, and E. Wu, "Generation of accurately synchronized pump source for optical parametric chirped pulse amplification," Appl. Phys. B 79, 837-839 (2004).
    [CrossRef]
  11. J. Bonse, S. Baudach, W. Kautek, E. Welsch, and J. Krüger, "Femtosecond laser damage of a high reflecting mirror," Thin Solid Films 408, 297-301 (2002).
    [CrossRef]
  12. ISO 11254-1:2000, "Laser and laser-related equipment--determination of laser-induced damage threshold of optical surfaces--Part 1: 1-on-1 test" (International Organization For Standardization, 2000).
  13. Y. A. Zhao, W. D. Gao, J. D. Shao, and Z. X. Fan, "Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation," Appl. Surf. Sci. 227, 275-281 (2004).
    [CrossRef]
  14. X. F. Tang, Z. X. Fan, and Z. J. Wang, "Surface inclusion adhesion of optical coatings," Opt. Eng. 33, 3406-3410 (1994).
    [CrossRef]
  15. H. B. He, H. Y. Hu, Z. P. Tang, Z. X. Fan, and J. D. Shao, "Laser-induced damage morphology of high-reflective optical coatings," Appl. Surf. Sci. 241, 442-448 (2005).
    [CrossRef]
  16. Y. A. Zhao, T. Wang, D. P. Zhang, H. B. He, J. D. Shao, and Z. X. Fan, "Pulsed laser induced damage model of optical coatings with absorbing inclusion," Acta Photonica Sin. 34, 1372-1375 (2005) (in Chinese).
  17. A. Kaiser, B. Rethfeld, M. Vicanek, and G. Simon, "Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses," Phys. Rev. B 61, 11437-11450 (2000).
    [CrossRef]
  18. A. C. Tien, "Ultrafast electron dynamics in femtosecond laser dielectric breakdown," submitted Ph.D. dissertation (University of Michigan, 1999).
  19. B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Optical ablation by high-power short-pulse lasers," J. Opt. Soc. Am. B 13, 459-468 (1996).
    [CrossRef]
  20. L. V. Keldysh, "Ionization in the field of a strong electromagnetic wave," Sov. Phys. JETP 20, 1307-1314 (1965).
  21. V. Nathan and A. H. Guenther, "Review of multiphoton absorption in crystalline solids," J. Opt. Soc. Am. B 2, 294-316 (1995).
    [CrossRef]
  22. A. Vaidyanathan, T. W. Walker, and A. H. Guenther, "The relative roles of avalanche multiplication and multiphoton absorption in laser-induced damage of dielectrics," IEEE J. Quantum Electron. QE-16, 89-93 (1980).
    [CrossRef]
  23. V. E. Gruzdev, "Laser-induced ionization of solids: back to Keldysh," in Laser-Induced Damage in Optical Materials: 2004, G.J.Exarhos, A.H.Guenther, N.Kaiser, K.L.Lewis, M.J.Soileau, C.J.Stolz, eds., Proc. SPIE 5647, 480-491 (2005).

2005 (5)

M. Mero, J. Liu, and W. Rudolph, "Scaling laws of femtosecond laser pulse induced breakdown in oxide films," Phys. Rev. B 71, 115109 (2005).
[CrossRef]

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

H. B. He, H. Y. Hu, Z. P. Tang, Z. X. Fan, and J. D. Shao, "Laser-induced damage morphology of high-reflective optical coatings," Appl. Surf. Sci. 241, 442-448 (2005).
[CrossRef]

Y. A. Zhao, T. Wang, D. P. Zhang, H. B. He, J. D. Shao, and Z. X. Fan, "Pulsed laser induced damage model of optical coatings with absorbing inclusion," Acta Photonica Sin. 34, 1372-1375 (2005) (in Chinese).

W. J. Kong, Y. A. Zhao, T. Wang, J. D. Shao, and Z. X. Fan, "Laser induced damage of multi-layer dielectric used in pulse compressor gratings," Chin. Opt. Lett. 3, 181-183 (2005).

2004 (2)

Y. A. Zhao, W. D. Gao, J. D. Shao, and Z. X. Fan, "Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation," Appl. Surf. Sci. 227, 275-281 (2004).
[CrossRef]

H. Zeng, J. Wu, H. Xu, K. Wu, and E. Wu, "Generation of accurately synchronized pump source for optical parametric chirped pulse amplification," Appl. Phys. B 79, 837-839 (2004).
[CrossRef]

2002 (1)

J. Bonse, S. Baudach, W. Kautek, E. Welsch, and J. Krüger, "Femtosecond laser damage of a high reflecting mirror," Thin Solid Films 408, 297-301 (2002).
[CrossRef]

2001 (2)

J. Jasapara, A. V. V. Nampoothiri, and W. Rudolph, "Femtosecond laser pulse induced breakdown in dielectric thin films," Phys. Rev. B 63, 045117 (2001).
[CrossRef]

M. Albisi, F. De Tomasi, M. R. Perrone, M. L. Protopapa, A. Rizzo, F. Sarto, and S. Scaglione, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001).
[CrossRef]

2000 (1)

A. Kaiser, B. Rethfeld, M. Vicanek, and G. Simon, "Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses," Phys. Rev. B 61, 11437-11450 (2000).
[CrossRef]

1997 (1)

1996 (2)

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Optical ablation by high-power short-pulse lasers," J. Opt. Soc. Am. B 13, 459-468 (1996).
[CrossRef]

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
[CrossRef]

1995 (1)

1994 (1)

X. F. Tang, Z. X. Fan, and Z. J. Wang, "Surface inclusion adhesion of optical coatings," Opt. Eng. 33, 3406-3410 (1994).
[CrossRef]

1985 (1)

M. R. Lange, J. K. Mclver, and A. H. Guenther, "Pulsed laser damage in thin film coatings: fluorides and oxides," Thin Solid Films 125, 143-155 (1985).
[CrossRef]

1981 (1)

T. W. Walker, A. H. Guenther, and P. E. Nielsen, "Pulsed laser-induced damage to thin-film optical coatings--Part 1: experimental," IEEE J. Quantum Electron. QE-17, 2041-2052 (1981).
[CrossRef]

1980 (1)

A. Vaidyanathan, T. W. Walker, and A. H. Guenther, "The relative roles of avalanche multiplication and multiphoton absorption in laser-induced damage of dielectrics," IEEE J. Quantum Electron. QE-16, 89-93 (1980).
[CrossRef]

1965 (1)

L. V. Keldysh, "Ionization in the field of a strong electromagnetic wave," Sov. Phys. JETP 20, 1307-1314 (1965).

Albisi, M.

M. Albisi, F. De Tomasi, M. R. Perrone, M. L. Protopapa, A. Rizzo, F. Sarto, and S. Scaglione, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001).
[CrossRef]

Baudach, S.

J. Bonse, S. Baudach, W. Kautek, E. Welsch, and J. Krüger, "Femtosecond laser damage of a high reflecting mirror," Thin Solid Films 408, 297-301 (2002).
[CrossRef]

Bonse, J.

J. Bonse, S. Baudach, W. Kautek, E. Welsch, and J. Krüger, "Femtosecond laser damage of a high reflecting mirror," Thin Solid Films 408, 297-301 (2002).
[CrossRef]

Clapp, B.

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

De Tomasi, F.

M. Albisi, F. De Tomasi, M. R. Perrone, M. L. Protopapa, A. Rizzo, F. Sarto, and S. Scaglione, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001).
[CrossRef]

Fan, Z. X.

W. J. Kong, Y. A. Zhao, T. Wang, J. D. Shao, and Z. X. Fan, "Laser induced damage of multi-layer dielectric used in pulse compressor gratings," Chin. Opt. Lett. 3, 181-183 (2005).

H. B. He, H. Y. Hu, Z. P. Tang, Z. X. Fan, and J. D. Shao, "Laser-induced damage morphology of high-reflective optical coatings," Appl. Surf. Sci. 241, 442-448 (2005).
[CrossRef]

Y. A. Zhao, T. Wang, D. P. Zhang, H. B. He, J. D. Shao, and Z. X. Fan, "Pulsed laser induced damage model of optical coatings with absorbing inclusion," Acta Photonica Sin. 34, 1372-1375 (2005) (in Chinese).

Y. A. Zhao, W. D. Gao, J. D. Shao, and Z. X. Fan, "Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation," Appl. Surf. Sci. 227, 275-281 (2004).
[CrossRef]

X. F. Tang, Z. X. Fan, and Z. J. Wang, "Surface inclusion adhesion of optical coatings," Opt. Eng. 33, 3406-3410 (1994).
[CrossRef]

Feit, M. D.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
[CrossRef]

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Optical ablation by high-power short-pulse lasers," J. Opt. Soc. Am. B 13, 459-468 (1996).
[CrossRef]

Gao, W. D.

Y. A. Zhao, W. D. Gao, J. D. Shao, and Z. X. Fan, "Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation," Appl. Surf. Sci. 227, 275-281 (2004).
[CrossRef]

Giuri, C.

Gruzdev, V. E.

V. E. Gruzdev, "Laser-induced ionization of solids: back to Keldysh," in Laser-Induced Damage in Optical Materials: 2004, G.J.Exarhos, A.H.Guenther, N.Kaiser, K.L.Lewis, M.J.Soileau, C.J.Stolz, eds., Proc. SPIE 5647, 480-491 (2005).

Guenther, A. H.

V. Nathan and A. H. Guenther, "Review of multiphoton absorption in crystalline solids," J. Opt. Soc. Am. B 2, 294-316 (1995).
[CrossRef]

M. R. Lange, J. K. Mclver, and A. H. Guenther, "Pulsed laser damage in thin film coatings: fluorides and oxides," Thin Solid Films 125, 143-155 (1985).
[CrossRef]

T. W. Walker, A. H. Guenther, and P. E. Nielsen, "Pulsed laser-induced damage to thin-film optical coatings--Part 1: experimental," IEEE J. Quantum Electron. QE-17, 2041-2052 (1981).
[CrossRef]

A. Vaidyanathan, T. W. Walker, and A. H. Guenther, "The relative roles of avalanche multiplication and multiphoton absorption in laser-induced damage of dielectrics," IEEE J. Quantum Electron. QE-16, 89-93 (1980).
[CrossRef]

He, H. B.

H. B. He, H. Y. Hu, Z. P. Tang, Z. X. Fan, and J. D. Shao, "Laser-induced damage morphology of high-reflective optical coatings," Appl. Surf. Sci. 241, 442-448 (2005).
[CrossRef]

Y. A. Zhao, T. Wang, D. P. Zhang, H. B. He, J. D. Shao, and Z. X. Fan, "Pulsed laser induced damage model of optical coatings with absorbing inclusion," Acta Photonica Sin. 34, 1372-1375 (2005) (in Chinese).

Herman, S.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
[CrossRef]

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Optical ablation by high-power short-pulse lasers," J. Opt. Soc. Am. B 13, 459-468 (1996).
[CrossRef]

Hu, H. Y.

H. B. He, H. Y. Hu, Z. P. Tang, Z. X. Fan, and J. D. Shao, "Laser-induced damage morphology of high-reflective optical coatings," Appl. Surf. Sci. 241, 442-448 (2005).
[CrossRef]

Jasapara, J.

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

J. Jasapara, A. V. V. Nampoothiri, and W. Rudolph, "Femtosecond laser pulse induced breakdown in dielectric thin films," Phys. Rev. B 63, 045117 (2001).
[CrossRef]

Kaiser, A.

A. Kaiser, B. Rethfeld, M. Vicanek, and G. Simon, "Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses," Phys. Rev. B 61, 11437-11450 (2000).
[CrossRef]

Kautek, W.

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

J. Bonse, S. Baudach, W. Kautek, E. Welsch, and J. Krüger, "Femtosecond laser damage of a high reflecting mirror," Thin Solid Films 408, 297-301 (2002).
[CrossRef]

Keldysh, L. V.

L. V. Keldysh, "Ionization in the field of a strong electromagnetic wave," Sov. Phys. JETP 20, 1307-1314 (1965).

Kong, W. J.

Krüger, J.

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

J. Bonse, S. Baudach, W. Kautek, E. Welsch, and J. Krüger, "Femtosecond laser damage of a high reflecting mirror," Thin Solid Films 408, 297-301 (2002).
[CrossRef]

Lange, M. R.

M. R. Lange, J. K. Mclver, and A. H. Guenther, "Pulsed laser damage in thin film coatings: fluorides and oxides," Thin Solid Films 125, 143-155 (1985).
[CrossRef]

Liu, J.

M. Mero, J. Liu, and W. Rudolph, "Scaling laws of femtosecond laser pulse induced breakdown in oxide films," Phys. Rev. B 71, 115109 (2005).
[CrossRef]

Martin, S.

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

Mclver, J. K.

M. R. Lange, J. K. Mclver, and A. H. Guenther, "Pulsed laser damage in thin film coatings: fluorides and oxides," Thin Solid Films 125, 143-155 (1985).
[CrossRef]

Mero, M.

M. Mero, J. Liu, and W. Rudolph, "Scaling laws of femtosecond laser pulse induced breakdown in oxide films," Phys. Rev. B 71, 115109 (2005).
[CrossRef]

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

Nampoothiri, A. V. V.

J. Jasapara, A. V. V. Nampoothiri, and W. Rudolph, "Femtosecond laser pulse induced breakdown in dielectric thin films," Phys. Rev. B 63, 045117 (2001).
[CrossRef]

Nathan, V.

Nielsen, P. E.

T. W. Walker, A. H. Guenther, and P. E. Nielsen, "Pulsed laser-induced damage to thin-film optical coatings--Part 1: experimental," IEEE J. Quantum Electron. QE-17, 2041-2052 (1981).
[CrossRef]

Perrone, M. R.

M. Albisi, F. De Tomasi, M. R. Perrone, M. L. Protopapa, A. Rizzo, F. Sarto, and S. Scaglione, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001).
[CrossRef]

C. Giuri, M. R. Perrone, and V. Piccinno, "Output coupler design of unstable cavities for excimer lasers," Appl. Opt. 36, 1143-1148 (1997).
[CrossRef] [PubMed]

Perry, M. D.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
[CrossRef]

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Optical ablation by high-power short-pulse lasers," J. Opt. Soc. Am. B 13, 459-468 (1996).
[CrossRef]

Piccinno, V.

Protopapa, M. L.

M. Albisi, F. De Tomasi, M. R. Perrone, M. L. Protopapa, A. Rizzo, F. Sarto, and S. Scaglione, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001).
[CrossRef]

Rethfeld, B.

A. Kaiser, B. Rethfeld, M. Vicanek, and G. Simon, "Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses," Phys. Rev. B 61, 11437-11450 (2000).
[CrossRef]

Ristau, D.

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

Rizzo, A.

M. Albisi, F. De Tomasi, M. R. Perrone, M. L. Protopapa, A. Rizzo, F. Sarto, and S. Scaglione, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001).
[CrossRef]

Roudolph, W.

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

Rubenchik, A. M.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
[CrossRef]

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Optical ablation by high-power short-pulse lasers," J. Opt. Soc. Am. B 13, 459-468 (1996).
[CrossRef]

Rudolph, W.

M. Mero, J. Liu, and W. Rudolph, "Scaling laws of femtosecond laser pulse induced breakdown in oxide films," Phys. Rev. B 71, 115109 (2005).
[CrossRef]

J. Jasapara, A. V. V. Nampoothiri, and W. Rudolph, "Femtosecond laser pulse induced breakdown in dielectric thin films," Phys. Rev. B 63, 045117 (2001).
[CrossRef]

Sarto, F.

M. Albisi, F. De Tomasi, M. R. Perrone, M. L. Protopapa, A. Rizzo, F. Sarto, and S. Scaglione, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001).
[CrossRef]

Scaglione, S.

M. Albisi, F. De Tomasi, M. R. Perrone, M. L. Protopapa, A. Rizzo, F. Sarto, and S. Scaglione, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001).
[CrossRef]

Shao, J. D.

Y. A. Zhao, T. Wang, D. P. Zhang, H. B. He, J. D. Shao, and Z. X. Fan, "Pulsed laser induced damage model of optical coatings with absorbing inclusion," Acta Photonica Sin. 34, 1372-1375 (2005) (in Chinese).

H. B. He, H. Y. Hu, Z. P. Tang, Z. X. Fan, and J. D. Shao, "Laser-induced damage morphology of high-reflective optical coatings," Appl. Surf. Sci. 241, 442-448 (2005).
[CrossRef]

W. J. Kong, Y. A. Zhao, T. Wang, J. D. Shao, and Z. X. Fan, "Laser induced damage of multi-layer dielectric used in pulse compressor gratings," Chin. Opt. Lett. 3, 181-183 (2005).

Y. A. Zhao, W. D. Gao, J. D. Shao, and Z. X. Fan, "Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation," Appl. Surf. Sci. 227, 275-281 (2004).
[CrossRef]

Shore, B. W.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
[CrossRef]

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Optical ablation by high-power short-pulse lasers," J. Opt. Soc. Am. B 13, 459-468 (1996).
[CrossRef]

Simon, G.

A. Kaiser, B. Rethfeld, M. Vicanek, and G. Simon, "Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses," Phys. Rev. B 61, 11437-11450 (2000).
[CrossRef]

Starke, K.

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

Stuart, B. C.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
[CrossRef]

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Optical ablation by high-power short-pulse lasers," J. Opt. Soc. Am. B 13, 459-468 (1996).
[CrossRef]

Tang, X. F.

X. F. Tang, Z. X. Fan, and Z. J. Wang, "Surface inclusion adhesion of optical coatings," Opt. Eng. 33, 3406-3410 (1994).
[CrossRef]

Tang, Z. P.

H. B. He, H. Y. Hu, Z. P. Tang, Z. X. Fan, and J. D. Shao, "Laser-induced damage morphology of high-reflective optical coatings," Appl. Surf. Sci. 241, 442-448 (2005).
[CrossRef]

Tien, A. C.

A. C. Tien, "Ultrafast electron dynamics in femtosecond laser dielectric breakdown," submitted Ph.D. dissertation (University of Michigan, 1999).

Vaidyanathan, A.

A. Vaidyanathan, T. W. Walker, and A. H. Guenther, "The relative roles of avalanche multiplication and multiphoton absorption in laser-induced damage of dielectrics," IEEE J. Quantum Electron. QE-16, 89-93 (1980).
[CrossRef]

Vicanek, M.

A. Kaiser, B. Rethfeld, M. Vicanek, and G. Simon, "Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses," Phys. Rev. B 61, 11437-11450 (2000).
[CrossRef]

Walker, T. W.

T. W. Walker, A. H. Guenther, and P. E. Nielsen, "Pulsed laser-induced damage to thin-film optical coatings--Part 1: experimental," IEEE J. Quantum Electron. QE-17, 2041-2052 (1981).
[CrossRef]

A. Vaidyanathan, T. W. Walker, and A. H. Guenther, "The relative roles of avalanche multiplication and multiphoton absorption in laser-induced damage of dielectrics," IEEE J. Quantum Electron. QE-16, 89-93 (1980).
[CrossRef]

Wang, T.

Y. A. Zhao, T. Wang, D. P. Zhang, H. B. He, J. D. Shao, and Z. X. Fan, "Pulsed laser induced damage model of optical coatings with absorbing inclusion," Acta Photonica Sin. 34, 1372-1375 (2005) (in Chinese).

W. J. Kong, Y. A. Zhao, T. Wang, J. D. Shao, and Z. X. Fan, "Laser induced damage of multi-layer dielectric used in pulse compressor gratings," Chin. Opt. Lett. 3, 181-183 (2005).

Wang, Z. J.

X. F. Tang, Z. X. Fan, and Z. J. Wang, "Surface inclusion adhesion of optical coatings," Opt. Eng. 33, 3406-3410 (1994).
[CrossRef]

Welsch, E.

J. Bonse, S. Baudach, W. Kautek, E. Welsch, and J. Krüger, "Femtosecond laser damage of a high reflecting mirror," Thin Solid Films 408, 297-301 (2002).
[CrossRef]

Wu, E.

H. Zeng, J. Wu, H. Xu, K. Wu, and E. Wu, "Generation of accurately synchronized pump source for optical parametric chirped pulse amplification," Appl. Phys. B 79, 837-839 (2004).
[CrossRef]

Wu, J.

H. Zeng, J. Wu, H. Xu, K. Wu, and E. Wu, "Generation of accurately synchronized pump source for optical parametric chirped pulse amplification," Appl. Phys. B 79, 837-839 (2004).
[CrossRef]

Wu, K.

H. Zeng, J. Wu, H. Xu, K. Wu, and E. Wu, "Generation of accurately synchronized pump source for optical parametric chirped pulse amplification," Appl. Phys. B 79, 837-839 (2004).
[CrossRef]

Xu, H.

H. Zeng, J. Wu, H. Xu, K. Wu, and E. Wu, "Generation of accurately synchronized pump source for optical parametric chirped pulse amplification," Appl. Phys. B 79, 837-839 (2004).
[CrossRef]

Zeng, H.

H. Zeng, J. Wu, H. Xu, K. Wu, and E. Wu, "Generation of accurately synchronized pump source for optical parametric chirped pulse amplification," Appl. Phys. B 79, 837-839 (2004).
[CrossRef]

Zhang, D. P.

Y. A. Zhao, T. Wang, D. P. Zhang, H. B. He, J. D. Shao, and Z. X. Fan, "Pulsed laser induced damage model of optical coatings with absorbing inclusion," Acta Photonica Sin. 34, 1372-1375 (2005) (in Chinese).

Zhao, Y. A.

Y. A. Zhao, T. Wang, D. P. Zhang, H. B. He, J. D. Shao, and Z. X. Fan, "Pulsed laser induced damage model of optical coatings with absorbing inclusion," Acta Photonica Sin. 34, 1372-1375 (2005) (in Chinese).

W. J. Kong, Y. A. Zhao, T. Wang, J. D. Shao, and Z. X. Fan, "Laser induced damage of multi-layer dielectric used in pulse compressor gratings," Chin. Opt. Lett. 3, 181-183 (2005).

Y. A. Zhao, W. D. Gao, J. D. Shao, and Z. X. Fan, "Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation," Appl. Surf. Sci. 227, 275-281 (2004).
[CrossRef]

Acta Photonica Sin. (1)

Y. A. Zhao, T. Wang, D. P. Zhang, H. B. He, J. D. Shao, and Z. X. Fan, "Pulsed laser induced damage model of optical coatings with absorbing inclusion," Acta Photonica Sin. 34, 1372-1375 (2005) (in Chinese).

Appl. Opt. (1)

Appl. Phys. B (1)

H. Zeng, J. Wu, H. Xu, K. Wu, and E. Wu, "Generation of accurately synchronized pump source for optical parametric chirped pulse amplification," Appl. Phys. B 79, 837-839 (2004).
[CrossRef]

Appl. Surf. Sci. (2)

Y. A. Zhao, W. D. Gao, J. D. Shao, and Z. X. Fan, "Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation," Appl. Surf. Sci. 227, 275-281 (2004).
[CrossRef]

H. B. He, H. Y. Hu, Z. P. Tang, Z. X. Fan, and J. D. Shao, "Laser-induced damage morphology of high-reflective optical coatings," Appl. Surf. Sci. 241, 442-448 (2005).
[CrossRef]

Chin. Opt. Lett. (1)

IEEE J. Quantum Electron. (2)

A. Vaidyanathan, T. W. Walker, and A. H. Guenther, "The relative roles of avalanche multiplication and multiphoton absorption in laser-induced damage of dielectrics," IEEE J. Quantum Electron. QE-16, 89-93 (1980).
[CrossRef]

T. W. Walker, A. H. Guenther, and P. E. Nielsen, "Pulsed laser-induced damage to thin-film optical coatings--Part 1: experimental," IEEE J. Quantum Electron. QE-17, 2041-2052 (1981).
[CrossRef]

J. Opt. Soc. Am. B (2)

Opt. Eng. (2)

M. Mero, B. Clapp, J. Jasapara, W. Roudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, "On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses," Opt. Eng. 44, 051107 (2005).
[CrossRef]

X. F. Tang, Z. X. Fan, and Z. J. Wang, "Surface inclusion adhesion of optical coatings," Opt. Eng. 33, 3406-3410 (1994).
[CrossRef]

Phys. Rev. B (4)

A. Kaiser, B. Rethfeld, M. Vicanek, and G. Simon, "Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses," Phys. Rev. B 61, 11437-11450 (2000).
[CrossRef]

J. Jasapara, A. V. V. Nampoothiri, and W. Rudolph, "Femtosecond laser pulse induced breakdown in dielectric thin films," Phys. Rev. B 63, 045117 (2001).
[CrossRef]

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
[CrossRef]

M. Mero, J. Liu, and W. Rudolph, "Scaling laws of femtosecond laser pulse induced breakdown in oxide films," Phys. Rev. B 71, 115109 (2005).
[CrossRef]

Sov. Phys. JETP (1)

L. V. Keldysh, "Ionization in the field of a strong electromagnetic wave," Sov. Phys. JETP 20, 1307-1314 (1965).

Thin Solid Films (3)

M. R. Lange, J. K. Mclver, and A. H. Guenther, "Pulsed laser damage in thin film coatings: fluorides and oxides," Thin Solid Films 125, 143-155 (1985).
[CrossRef]

M. Albisi, F. De Tomasi, M. R. Perrone, M. L. Protopapa, A. Rizzo, F. Sarto, and S. Scaglione, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001).
[CrossRef]

J. Bonse, S. Baudach, W. Kautek, E. Welsch, and J. Krüger, "Femtosecond laser damage of a high reflecting mirror," Thin Solid Films 408, 297-301 (2002).
[CrossRef]

Other (3)

ISO 11254-1:2000, "Laser and laser-related equipment--determination of laser-induced damage threshold of optical surfaces--Part 1: 1-on-1 test" (International Organization For Standardization, 2000).

V. E. Gruzdev, "Laser-induced ionization of solids: back to Keldysh," in Laser-Induced Damage in Optical Materials: 2004, G.J.Exarhos, A.H.Guenther, N.Kaiser, K.L.Lewis, M.J.Soileau, C.J.Stolz, eds., Proc. SPIE 5647, 480-491 (2005).

A. C. Tien, "Ultrafast electron dynamics in femtosecond laser dielectric breakdown," submitted Ph.D. dissertation (University of Michigan, 1999).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (7)

Fig. 1
Fig. 1

Experimental setup of femotsecond laser damage testing.

Fig. 2
Fig. 2

Experimental setup of nanosecond laser damage testing.

Fig. 3
Fig. 3

LIDT of all the samples under different laser pulses. Bar 1 , Hf O 2 single layer under nanosecond laser pulse; 2 , Hf O 2 Si O 2 HR coating ( λ 1064 nm ) under nanosecond laser pulse; 3 , Hf O 2 single layer under femtosecond laser pulse; 4 , Hf O 2 Si O 2 HR coating ( λ 800 nm ) under femtosecond laser pulse.

Fig. 4
Fig. 4

Electric field intensity profile in all samples normalized to the incident electric field value. Curve 1, HR ( λ 800 nm ) at 800 nm ; 2, single layer at 800 nm ; 3, HR ( λ 1064 nm ) at 1064 nm ; 4, single layer at 1064 nm .

Fig. 5
Fig. 5

Evolution of conduction-band electron density.

Fig. 6
Fig. 6

Damage morphology of the samples under nanosecond laser irradiation: (a) Hf O 2 single layer; (b) Hf O 2 Si O 2 HR coating ( λ 1064 nm ) .

Fig. 7
Fig. 7

Damage morphology of the samples under femtosecond laser irradiation: (a) Hf O 2 single layer; (b) Hf O 2 Si O 2 HR coating ( λ 800 nm ) .

Tables (1)

Tables Icon

Table 1 List of Parameters for Hf O 2 and Si O 2 Used in the Theoretical Calculation a

Equations (7)

Equations on this page are rendered with MathJax. Learn more.

ϕ ( r ) = ϕ 0 exp ( 2 r 2 ω 0 2 ) ,
ϕ 0 = 2 E pulse π ω 0 2 .
D 2 = 2 ω 0 2 ln ( ϕ 0 ϕ th ) .
d n e d t = W multpt + W impact n e ( t ) .
γ = ω m * E g e E
W multpt = 2 ω 9 π ( m * ω ) 3 2 ( e 2 E 2 16 m * ω 2 E g ) E g ω + 1 exp [ 2 E g ω + 1 ( 1 e 2 E 2 ) 4 m * ω 2 E g ] Φ [ ( 2 E g ω + 1 2 E g ω ) 1 2 ] ,
W impact = 0.693 e 2 E 2 τ K m e * E g ( 1 + ω 2 τ K 2 ) 0.693 ω p E g τ L ,

Metrics