Segmented waveguides in thin silicon-on-insulator

Abstract

We have developed new silicon-on-insulator waveguide designs for simultaneously achieving both low-loss optical confinement and electrical contacts, and we present a design methodology based on calculating the Bloch modes of such segmented waveguides. With this formalism, waveguides are designed in a single thin layer of silicon-on-insulator to achieve both optical confinement and minimal insertion loss. Waveguides were also fabricated and tested, and the measured data were found to closely agree with theoretical predictions, demonstrating input insertion loss and propagation loss better than 0.1 dB and $-16\mathrm{dB}∕\mathrm{cm}$, respectively.

© 2005 Optical Society of America

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