Abstract

The reflection of s- and p-polarized light from an N-layer system of inhomogeneous ultrathin dielectric films upon absorbing homogeneous substrates is investigated. The first-order approximate expressions for differential reflectance and changes in the ellipsometric parameters that are caused by a multilayer system are obtained in the long-wavelength limit. The possibilities of using these formulas for resolving the inverse problem for inhomogeneous ultrathin films are discussed. A number of novel options are developed for simultaneously determining the dielectric constant and thickness of a homogeneous ultrathin film by differential reflectance and ellipsometric measurements.

© 2003 Optical Society of America

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