Abstract

The dynamics of pulsed-laser annealing of an ion-implanted GaAs surface is studied by second-harmonic generation in reflection. The results are explained in terms of surface melting. Sum-frequency and second-harmonic generation in reflection are shown to be sensitive, convenient techniques having high temporal and spatial resolution for studying the structure of GaAs surfaces that have been laser annealed or randomized by ion implantation and of laser-induced phase transitions. The tensor nature of the second-order nonlinearity provides an opportunity to make polarizational measurements that are sensitive to small structural changes.

© 1985 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. I. B. Khaibullin, E. I. Shtyrkov, M. M. Zaripov, R. M. Bayazitov, and M. F. Galjautdinov, Radiat. Effects 36, 225 (1978).
    [Crossref]
  2. I. B. Khaibullin, M. F. Galjautdinov, M. M. Zaripov, and E. I. Shtyrkov, Sov. Phys. Dokl. 257, 110 (1981) (in Russian).
  3. M. Bertolotti, ed., Physical Processes in Laser-Materials Interactions (Plenum, New York, 1983).
    [Crossref]
  4. E. Kaldis, ed., Current Topics in Material Science (North-Holland, Amsterdam, 1982), Vol. 8.
  5. C. W. White and P. S. Peercy, eds., Laser and Electron Beam Processing of Material (Academic, New York, 1980).
  6. L. V. Dvurechensky, G. A. Kachurin, and L. S. Smirnov, Laser Annealing of Semiconductors (Nauka, Novosibirsk, 1981) (in Russian).
  7. I. A. Van Vechten and A. D. Compaan, Solid State Commun. 39, 867 (1981);I. A. Van Vechten, Solid State Commun. 39, 1285 (1981).
    [Crossref]
  8. A. Audinli, H. W. Lo, M. C. Lee, and A. D. Compaan, Phys. Rev. Lett. 46, 1640 (1981).B. Stritzker, A. Pospieszczyk, and J. A. Tagle, Phys. Rev. Lett. 47, 356 (1981).
    [Crossref]
  9. D. von der Linde, G. Wartman, and A. D. Compaan, Appl. Phys. Lett. 43, 613 (1983).
    [Crossref]
  10. A. Compaan, M. C. Lee, G. J. Trott, and A. Aydinli, J. Appl. Phys. 54, 5950 (1983).
    [Crossref]
  11. Z. I. Alferov, Yu. V. Kovalchuk, O. V. Smol’sky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 897 (1983) (in Russian).
  12. Z. I. Alferov, Yu. V. Kovalchuk, Yu. V. Pogorelsky, O. V. Smolsky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 1373 (1983) (in Russian).
  13. G. Della Mea, A. V. Drigo, P. Mazzold, G. Mardelli, and R. Zannoni, Phys. Status Solidi 4, 797 (1971).
    [Crossref]
  14. S. A. Akhmanov, N. I. Koroteev, G. A. Paitian, I. L. Shumay, M. F. Galjautdinov, I. B. Khaibullin, and E. I. Shtyrkov, XI National Conference on Quantum Electronics Technical Digest, Yerevan, 1982;Quantum Electron. 10, 1077 (1983) (in Russian);Opt. Commun. 47, 102 (1983).
  15. J. C. Diels, Laser Focus 19(5), 26, 1983.
  16. G. Guidotti, T. A. Driscoll, and H. J. Gerristen, Solid State Commun. 46, 337 (1983).
    [Crossref]
  17. T. A. Driskoll and D. Guidotti, Phys. Rev. B 28, 1171 (1983).
    [Crossref]
  18. C. V. Shank, R. Yen, and C. Hirlimann, Phys. Rev. Lett. 51, 900 (1983).
    [Crossref]
  19. H. W. K. Tom, T. F. Heinz, and Y. R. Shen, Phys. Rev. Lett. 51, 900 (1983).
    [Crossref]
  20. V. I. Yemel’anov, A. N. Belonozhko, G. A. Paitian, and A. A. Sumbatov, Vestn. Mosk. Univ. Ser. Fiz. Mat.25 (to be published).
  21. R. F. Wood and G. E. Giles, Phys. Rev. B 23, 2923 (1981).
    [Crossref]
  22. N. Bloembergen and P. S. Pershan, Phys. Rev. 128, 606 (1962).
    [Crossref]
  23. M. Bartolotti and G. Vitali, in Current Topics in Material Science, E. Kaldis, ed.(North-Holland, Amsterdam, 1983), Vol. 8, p. 96.
  24. S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

1984 (1)

S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

1983 (9)

J. C. Diels, Laser Focus 19(5), 26, 1983.

G. Guidotti, T. A. Driscoll, and H. J. Gerristen, Solid State Commun. 46, 337 (1983).
[Crossref]

T. A. Driskoll and D. Guidotti, Phys. Rev. B 28, 1171 (1983).
[Crossref]

C. V. Shank, R. Yen, and C. Hirlimann, Phys. Rev. Lett. 51, 900 (1983).
[Crossref]

H. W. K. Tom, T. F. Heinz, and Y. R. Shen, Phys. Rev. Lett. 51, 900 (1983).
[Crossref]

D. von der Linde, G. Wartman, and A. D. Compaan, Appl. Phys. Lett. 43, 613 (1983).
[Crossref]

A. Compaan, M. C. Lee, G. J. Trott, and A. Aydinli, J. Appl. Phys. 54, 5950 (1983).
[Crossref]

Z. I. Alferov, Yu. V. Kovalchuk, O. V. Smol’sky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 897 (1983) (in Russian).

Z. I. Alferov, Yu. V. Kovalchuk, Yu. V. Pogorelsky, O. V. Smolsky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 1373 (1983) (in Russian).

1982 (1)

S. A. Akhmanov, N. I. Koroteev, G. A. Paitian, I. L. Shumay, M. F. Galjautdinov, I. B. Khaibullin, and E. I. Shtyrkov, XI National Conference on Quantum Electronics Technical Digest, Yerevan, 1982;Quantum Electron. 10, 1077 (1983) (in Russian);Opt. Commun. 47, 102 (1983).

1981 (4)

I. B. Khaibullin, M. F. Galjautdinov, M. M. Zaripov, and E. I. Shtyrkov, Sov. Phys. Dokl. 257, 110 (1981) (in Russian).

I. A. Van Vechten and A. D. Compaan, Solid State Commun. 39, 867 (1981);I. A. Van Vechten, Solid State Commun. 39, 1285 (1981).
[Crossref]

A. Audinli, H. W. Lo, M. C. Lee, and A. D. Compaan, Phys. Rev. Lett. 46, 1640 (1981).B. Stritzker, A. Pospieszczyk, and J. A. Tagle, Phys. Rev. Lett. 47, 356 (1981).
[Crossref]

R. F. Wood and G. E. Giles, Phys. Rev. B 23, 2923 (1981).
[Crossref]

1978 (1)

I. B. Khaibullin, E. I. Shtyrkov, M. M. Zaripov, R. M. Bayazitov, and M. F. Galjautdinov, Radiat. Effects 36, 225 (1978).
[Crossref]

1971 (1)

G. Della Mea, A. V. Drigo, P. Mazzold, G. Mardelli, and R. Zannoni, Phys. Status Solidi 4, 797 (1971).
[Crossref]

1962 (1)

N. Bloembergen and P. S. Pershan, Phys. Rev. 128, 606 (1962).
[Crossref]

Akhmanov, S. A.

S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

S. A. Akhmanov, N. I. Koroteev, G. A. Paitian, I. L. Shumay, M. F. Galjautdinov, I. B. Khaibullin, and E. I. Shtyrkov, XI National Conference on Quantum Electronics Technical Digest, Yerevan, 1982;Quantum Electron. 10, 1077 (1983) (in Russian);Opt. Commun. 47, 102 (1983).

Alferov, Z. I.

Z. I. Alferov, Yu. V. Kovalchuk, O. V. Smol’sky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 897 (1983) (in Russian).

Z. I. Alferov, Yu. V. Kovalchuk, Yu. V. Pogorelsky, O. V. Smolsky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 1373 (1983) (in Russian).

Audinli, A.

A. Audinli, H. W. Lo, M. C. Lee, and A. D. Compaan, Phys. Rev. Lett. 46, 1640 (1981).B. Stritzker, A. Pospieszczyk, and J. A. Tagle, Phys. Rev. Lett. 47, 356 (1981).
[Crossref]

Aydinli, A.

A. Compaan, M. C. Lee, G. J. Trott, and A. Aydinli, J. Appl. Phys. 54, 5950 (1983).
[Crossref]

Bartolotti, M.

M. Bartolotti and G. Vitali, in Current Topics in Material Science, E. Kaldis, ed.(North-Holland, Amsterdam, 1983), Vol. 8, p. 96.

Bayazitov, R. M.

I. B. Khaibullin, E. I. Shtyrkov, M. M. Zaripov, R. M. Bayazitov, and M. F. Galjautdinov, Radiat. Effects 36, 225 (1978).
[Crossref]

Belonozhko, A. N.

V. I. Yemel’anov, A. N. Belonozhko, G. A. Paitian, and A. A. Sumbatov, Vestn. Mosk. Univ. Ser. Fiz. Mat.25 (to be published).

Bloembergen, N.

N. Bloembergen and P. S. Pershan, Phys. Rev. 128, 606 (1962).
[Crossref]

Compaan, A.

A. Compaan, M. C. Lee, G. J. Trott, and A. Aydinli, J. Appl. Phys. 54, 5950 (1983).
[Crossref]

Compaan, A. D.

D. von der Linde, G. Wartman, and A. D. Compaan, Appl. Phys. Lett. 43, 613 (1983).
[Crossref]

A. Audinli, H. W. Lo, M. C. Lee, and A. D. Compaan, Phys. Rev. Lett. 46, 1640 (1981).B. Stritzker, A. Pospieszczyk, and J. A. Tagle, Phys. Rev. Lett. 47, 356 (1981).
[Crossref]

I. A. Van Vechten and A. D. Compaan, Solid State Commun. 39, 867 (1981);I. A. Van Vechten, Solid State Commun. 39, 1285 (1981).
[Crossref]

Della Mea, G.

G. Della Mea, A. V. Drigo, P. Mazzold, G. Mardelli, and R. Zannoni, Phys. Status Solidi 4, 797 (1971).
[Crossref]

Diels, J. C.

J. C. Diels, Laser Focus 19(5), 26, 1983.

Drigo, A. V.

G. Della Mea, A. V. Drigo, P. Mazzold, G. Mardelli, and R. Zannoni, Phys. Status Solidi 4, 797 (1971).
[Crossref]

Driscoll, T. A.

G. Guidotti, T. A. Driscoll, and H. J. Gerristen, Solid State Commun. 46, 337 (1983).
[Crossref]

Driskoll, T. A.

T. A. Driskoll and D. Guidotti, Phys. Rev. B 28, 1171 (1983).
[Crossref]

Dvurechensky, L. V.

L. V. Dvurechensky, G. A. Kachurin, and L. S. Smirnov, Laser Annealing of Semiconductors (Nauka, Novosibirsk, 1981) (in Russian).

Galjautdinov, M. F.

S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

S. A. Akhmanov, N. I. Koroteev, G. A. Paitian, I. L. Shumay, M. F. Galjautdinov, I. B. Khaibullin, and E. I. Shtyrkov, XI National Conference on Quantum Electronics Technical Digest, Yerevan, 1982;Quantum Electron. 10, 1077 (1983) (in Russian);Opt. Commun. 47, 102 (1983).

I. B. Khaibullin, M. F. Galjautdinov, M. M. Zaripov, and E. I. Shtyrkov, Sov. Phys. Dokl. 257, 110 (1981) (in Russian).

I. B. Khaibullin, E. I. Shtyrkov, M. M. Zaripov, R. M. Bayazitov, and M. F. Galjautdinov, Radiat. Effects 36, 225 (1978).
[Crossref]

Gerristen, H. J.

G. Guidotti, T. A. Driscoll, and H. J. Gerristen, Solid State Commun. 46, 337 (1983).
[Crossref]

Giles, G. E.

R. F. Wood and G. E. Giles, Phys. Rev. B 23, 2923 (1981).
[Crossref]

Guidotti, D.

T. A. Driskoll and D. Guidotti, Phys. Rev. B 28, 1171 (1983).
[Crossref]

Guidotti, G.

G. Guidotti, T. A. Driscoll, and H. J. Gerristen, Solid State Commun. 46, 337 (1983).
[Crossref]

Heinz, T. F.

H. W. K. Tom, T. F. Heinz, and Y. R. Shen, Phys. Rev. Lett. 51, 900 (1983).
[Crossref]

Hirlimann, C.

C. V. Shank, R. Yen, and C. Hirlimann, Phys. Rev. Lett. 51, 900 (1983).
[Crossref]

Kachurin, G. A.

L. V. Dvurechensky, G. A. Kachurin, and L. S. Smirnov, Laser Annealing of Semiconductors (Nauka, Novosibirsk, 1981) (in Russian).

Khaibullin, I. B.

S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

S. A. Akhmanov, N. I. Koroteev, G. A. Paitian, I. L. Shumay, M. F. Galjautdinov, I. B. Khaibullin, and E. I. Shtyrkov, XI National Conference on Quantum Electronics Technical Digest, Yerevan, 1982;Quantum Electron. 10, 1077 (1983) (in Russian);Opt. Commun. 47, 102 (1983).

I. B. Khaibullin, M. F. Galjautdinov, M. M. Zaripov, and E. I. Shtyrkov, Sov. Phys. Dokl. 257, 110 (1981) (in Russian).

I. B. Khaibullin, E. I. Shtyrkov, M. M. Zaripov, R. M. Bayazitov, and M. F. Galjautdinov, Radiat. Effects 36, 225 (1978).
[Crossref]

Koroteev, N. I.

S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

S. A. Akhmanov, N. I. Koroteev, G. A. Paitian, I. L. Shumay, M. F. Galjautdinov, I. B. Khaibullin, and E. I. Shtyrkov, XI National Conference on Quantum Electronics Technical Digest, Yerevan, 1982;Quantum Electron. 10, 1077 (1983) (in Russian);Opt. Commun. 47, 102 (1983).

Kovalchuk, Yu. V.

Z. I. Alferov, Yu. V. Kovalchuk, Yu. V. Pogorelsky, O. V. Smolsky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 1373 (1983) (in Russian).

Z. I. Alferov, Yu. V. Kovalchuk, O. V. Smol’sky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 897 (1983) (in Russian).

Lee, M. C.

A. Compaan, M. C. Lee, G. J. Trott, and A. Aydinli, J. Appl. Phys. 54, 5950 (1983).
[Crossref]

A. Audinli, H. W. Lo, M. C. Lee, and A. D. Compaan, Phys. Rev. Lett. 46, 1640 (1981).B. Stritzker, A. Pospieszczyk, and J. A. Tagle, Phys. Rev. Lett. 47, 356 (1981).
[Crossref]

Lo, H. W.

A. Audinli, H. W. Lo, M. C. Lee, and A. D. Compaan, Phys. Rev. Lett. 46, 1640 (1981).B. Stritzker, A. Pospieszczyk, and J. A. Tagle, Phys. Rev. Lett. 47, 356 (1981).
[Crossref]

Mardelli, G.

G. Della Mea, A. V. Drigo, P. Mazzold, G. Mardelli, and R. Zannoni, Phys. Status Solidi 4, 797 (1971).
[Crossref]

Mazzold, P.

G. Della Mea, A. V. Drigo, P. Mazzold, G. Mardelli, and R. Zannoni, Phys. Status Solidi 4, 797 (1971).
[Crossref]

Paitian, G. A.

S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

S. A. Akhmanov, N. I. Koroteev, G. A. Paitian, I. L. Shumay, M. F. Galjautdinov, I. B. Khaibullin, and E. I. Shtyrkov, XI National Conference on Quantum Electronics Technical Digest, Yerevan, 1982;Quantum Electron. 10, 1077 (1983) (in Russian);Opt. Commun. 47, 102 (1983).

V. I. Yemel’anov, A. N. Belonozhko, G. A. Paitian, and A. A. Sumbatov, Vestn. Mosk. Univ. Ser. Fiz. Mat.25 (to be published).

Pershan, P. S.

N. Bloembergen and P. S. Pershan, Phys. Rev. 128, 606 (1962).
[Crossref]

Pogorelsky, Yu. V.

Z. I. Alferov, Yu. V. Kovalchuk, Yu. V. Pogorelsky, O. V. Smolsky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 1373 (1983) (in Russian).

Shank, C. V.

C. V. Shank, R. Yen, and C. Hirlimann, Phys. Rev. Lett. 51, 900 (1983).
[Crossref]

Shen, Y. R.

H. W. K. Tom, T. F. Heinz, and Y. R. Shen, Phys. Rev. Lett. 51, 900 (1983).
[Crossref]

Shtyrkov, E. I.

S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

S. A. Akhmanov, N. I. Koroteev, G. A. Paitian, I. L. Shumay, M. F. Galjautdinov, I. B. Khaibullin, and E. I. Shtyrkov, XI National Conference on Quantum Electronics Technical Digest, Yerevan, 1982;Quantum Electron. 10, 1077 (1983) (in Russian);Opt. Commun. 47, 102 (1983).

I. B. Khaibullin, M. F. Galjautdinov, M. M. Zaripov, and E. I. Shtyrkov, Sov. Phys. Dokl. 257, 110 (1981) (in Russian).

I. B. Khaibullin, E. I. Shtyrkov, M. M. Zaripov, R. M. Bayazitov, and M. F. Galjautdinov, Radiat. Effects 36, 225 (1978).
[Crossref]

Shumay, I. L.

S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

S. A. Akhmanov, N. I. Koroteev, G. A. Paitian, I. L. Shumay, M. F. Galjautdinov, I. B. Khaibullin, and E. I. Shtyrkov, XI National Conference on Quantum Electronics Technical Digest, Yerevan, 1982;Quantum Electron. 10, 1077 (1983) (in Russian);Opt. Commun. 47, 102 (1983).

Smirnov, L. S.

L. V. Dvurechensky, G. A. Kachurin, and L. S. Smirnov, Laser Annealing of Semiconductors (Nauka, Novosibirsk, 1981) (in Russian).

Smol’sky, O. V.

Z. I. Alferov, Yu. V. Kovalchuk, O. V. Smol’sky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 897 (1983) (in Russian).

Smolsky, O. V.

Z. I. Alferov, Yu. V. Kovalchuk, Yu. V. Pogorelsky, O. V. Smolsky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 1373 (1983) (in Russian).

Sokolov, I. A.

Z. I. Alferov, Yu. V. Kovalchuk, Yu. V. Pogorelsky, O. V. Smolsky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 1373 (1983) (in Russian).

Z. I. Alferov, Yu. V. Kovalchuk, O. V. Smol’sky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 897 (1983) (in Russian).

Sumbatov, A. A.

S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

V. I. Yemel’anov, A. N. Belonozhko, G. A. Paitian, and A. A. Sumbatov, Vestn. Mosk. Univ. Ser. Fiz. Mat.25 (to be published).

Tom, H. W. K.

H. W. K. Tom, T. F. Heinz, and Y. R. Shen, Phys. Rev. Lett. 51, 900 (1983).
[Crossref]

Trott, G. J.

A. Compaan, M. C. Lee, G. J. Trott, and A. Aydinli, J. Appl. Phys. 54, 5950 (1983).
[Crossref]

Van Vechten, I. A.

I. A. Van Vechten and A. D. Compaan, Solid State Commun. 39, 867 (1981);I. A. Van Vechten, Solid State Commun. 39, 1285 (1981).
[Crossref]

Vitali, G.

M. Bartolotti and G. Vitali, in Current Topics in Material Science, E. Kaldis, ed.(North-Holland, Amsterdam, 1983), Vol. 8, p. 96.

von der Linde, D.

D. von der Linde, G. Wartman, and A. D. Compaan, Appl. Phys. Lett. 43, 613 (1983).
[Crossref]

Wartman, G.

D. von der Linde, G. Wartman, and A. D. Compaan, Appl. Phys. Lett. 43, 613 (1983).
[Crossref]

Wood, R. F.

R. F. Wood and G. E. Giles, Phys. Rev. B 23, 2923 (1981).
[Crossref]

Yemel’anov, V. I.

V. I. Yemel’anov, A. N. Belonozhko, G. A. Paitian, and A. A. Sumbatov, Vestn. Mosk. Univ. Ser. Fiz. Mat.25 (to be published).

Yen, R.

C. V. Shank, R. Yen, and C. Hirlimann, Phys. Rev. Lett. 51, 900 (1983).
[Crossref]

Zannoni, R.

G. Della Mea, A. V. Drigo, P. Mazzold, G. Mardelli, and R. Zannoni, Phys. Status Solidi 4, 797 (1971).
[Crossref]

Zaripov, M. M.

I. B. Khaibullin, M. F. Galjautdinov, M. M. Zaripov, and E. I. Shtyrkov, Sov. Phys. Dokl. 257, 110 (1981) (in Russian).

I. B. Khaibullin, E. I. Shtyrkov, M. M. Zaripov, R. M. Bayazitov, and M. F. Galjautdinov, Radiat. Effects 36, 225 (1978).
[Crossref]

Appl. Phys. Lett. (1)

D. von der Linde, G. Wartman, and A. D. Compaan, Appl. Phys. Lett. 43, 613 (1983).
[Crossref]

J. Appl. Phys. (1)

A. Compaan, M. C. Lee, G. J. Trott, and A. Aydinli, J. Appl. Phys. 54, 5950 (1983).
[Crossref]

J. Tech. Phys. Lett. (3)

Z. I. Alferov, Yu. V. Kovalchuk, O. V. Smol’sky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 897 (1983) (in Russian).

Z. I. Alferov, Yu. V. Kovalchuk, Yu. V. Pogorelsky, O. V. Smolsky, and I. A. Sokolov, J. Tech. Phys. Lett. 9, 1373 (1983) (in Russian).

S. A. Akhmanov, M. F. Galjautdinov, N. I. Koroteev, G. A. Paitian, A. A. Sumbatov, I. L. Shumay, I. B. Khaibullin, and E. I. Shtyrkov, J. Tech. Phys. Lett. 10,(1984) (in Russian).

Laser Focus (1)

J. C. Diels, Laser Focus 19(5), 26, 1983.

Phys. Rev. (1)

N. Bloembergen and P. S. Pershan, Phys. Rev. 128, 606 (1962).
[Crossref]

Phys. Rev. B (2)

R. F. Wood and G. E. Giles, Phys. Rev. B 23, 2923 (1981).
[Crossref]

T. A. Driskoll and D. Guidotti, Phys. Rev. B 28, 1171 (1983).
[Crossref]

Phys. Rev. Lett. (3)

C. V. Shank, R. Yen, and C. Hirlimann, Phys. Rev. Lett. 51, 900 (1983).
[Crossref]

H. W. K. Tom, T. F. Heinz, and Y. R. Shen, Phys. Rev. Lett. 51, 900 (1983).
[Crossref]

A. Audinli, H. W. Lo, M. C. Lee, and A. D. Compaan, Phys. Rev. Lett. 46, 1640 (1981).B. Stritzker, A. Pospieszczyk, and J. A. Tagle, Phys. Rev. Lett. 47, 356 (1981).
[Crossref]

Phys. Status Solidi (1)

G. Della Mea, A. V. Drigo, P. Mazzold, G. Mardelli, and R. Zannoni, Phys. Status Solidi 4, 797 (1971).
[Crossref]

Radiat. Effects (1)

I. B. Khaibullin, E. I. Shtyrkov, M. M. Zaripov, R. M. Bayazitov, and M. F. Galjautdinov, Radiat. Effects 36, 225 (1978).
[Crossref]

Solid State Commun. (2)

I. A. Van Vechten and A. D. Compaan, Solid State Commun. 39, 867 (1981);I. A. Van Vechten, Solid State Commun. 39, 1285 (1981).
[Crossref]

G. Guidotti, T. A. Driscoll, and H. J. Gerristen, Solid State Commun. 46, 337 (1983).
[Crossref]

Sov. Phys. Dokl. (1)

I. B. Khaibullin, M. F. Galjautdinov, M. M. Zaripov, and E. I. Shtyrkov, Sov. Phys. Dokl. 257, 110 (1981) (in Russian).

XI National Conference on Quantum Electronics Technical Digest, Yerevan (1)

S. A. Akhmanov, N. I. Koroteev, G. A. Paitian, I. L. Shumay, M. F. Galjautdinov, I. B. Khaibullin, and E. I. Shtyrkov, XI National Conference on Quantum Electronics Technical Digest, Yerevan, 1982;Quantum Electron. 10, 1077 (1983) (in Russian);Opt. Commun. 47, 102 (1983).

Other (6)

M. Bertolotti, ed., Physical Processes in Laser-Materials Interactions (Plenum, New York, 1983).
[Crossref]

E. Kaldis, ed., Current Topics in Material Science (North-Holland, Amsterdam, 1982), Vol. 8.

C. W. White and P. S. Peercy, eds., Laser and Electron Beam Processing of Material (Academic, New York, 1980).

L. V. Dvurechensky, G. A. Kachurin, and L. S. Smirnov, Laser Annealing of Semiconductors (Nauka, Novosibirsk, 1981) (in Russian).

V. I. Yemel’anov, A. N. Belonozhko, G. A. Paitian, and A. A. Sumbatov, Vestn. Mosk. Univ. Ser. Fiz. Mat.25 (to be published).

M. Bartolotti and G. Vitali, in Current Topics in Material Science, E. Kaldis, ed.(North-Holland, Amsterdam, 1983), Vol. 8, p. 96.

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (11)

Fig. 1
Fig. 1

Experimental arrangement for PLA dynamics study by SHG in reflection.

Fig. 2
Fig. 2

Typical experimental oscillograms: A, ruby-laser annealing pulse, τ = 20 μsec, λ = 6943 A; B, high reflection phase (HRP) signal measured with He–Ne laser (λ = 1.15 Å) for pure crystalline GaAs; C, HRP for laser annealing of ion-implanted GaAs; D, Nd:YAG laser pulse train (λ = 1.06 μm); E, SHG in reflection from crystalline GaAs surface; F, SHG in reflection from ion-implanted GaAs during pulsed-laser annealing.

Fig. 3
Fig. 3

Calculated temporal behavior of GaAs parameters during PLA (Wood’s thermal model).22

Fig. 4
Fig. 4

The dependence of SHG intensity on the polarization of probe beam.

Fig. 5
Fig. 5

Experimental arrangement for SH and SF probing of GaAs surface in reflection.

Fig. 6
Fig. 6

The dependence of SHG intensity in reflection from ion-implanted GaAs surface areas illuminated by ruby-laser pulse with different energy densities on the probe-beam polarization.

Fig. 7
Fig. 7

The dependence of relative SHG intensity in reflection from GaAs on the dose of ion implantation.

Fig. 8
Fig. 8

The dependence of relative SFG intensity in reflection from GaAs on the dose of ion implantation.

Fig. 9
Fig. 9

Spatial distribution of SFG efficiency from GaAs sample implanted by (a) S+ ions and (b) Te+ ions through a strip-shaped mask.

Fig. 10
Fig. 10

RBS parameter of amorphization dependence on the dose of ion implantation.

Fig. 11
Fig. 11

SFG probing of amorphous ring formed on GaAs surface following short NdrYAG laser-pulse absorption.

Tables (3)

Tables Icon

Table 1 Comparison of Experimental and Theoretical Characteristics of the Pulsed-Laser Annealing Dynamics of GaAs

Tables Icon

Table 2 Absorption Coefficients of Crystalline and Amorphous GaAs (According to Ref. 23)

Tables Icon

Table 3 Cumulative Effect in PLA

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

η = ( I SH max I SH min ) / I SH max + I SH min )
η SH = I SH a / I SH crystal .
η SF = I SF a / I SF crystal

Metrics