We have developed an all-solid-state tunable continuous-wave coherent light source near 202 nm by using sum-frequency mixing of 266- and 850-nm radiation in β-barium borate (BBO). The 266-nm radiation was generated by frequency doubling of a laser-diode-pumped frequency-doubled laser. The power of the 850-nm radiation, which was provided by a laser-diode-based master-oscillator power-amplifier system, was enhanced in an external cavity. An output power of 59 µW was generated at 202.6 nm. We obtained ultraviolet radiation from 201.5 to 203.1 nm by tuning the wavelength of the master oscillator.
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