Abstract

Layered synthetic microstructures (LSM’s) are manufactured structures consisting of alternating layers of two materials, A and B, that have been deposited from a vapor to obtain uniform layer thicknesses ta and tb. As a consequence, LSM’s diffract x rays as if they had a characteristic superlattice parameter d = ta + tb. The details of this reflection process can be modeled and shown to depend critically on the x-ray optical properties of both A and B layers. Thus measurements of the diffraction of x rays by such LSM’s permit determination of x-ray optical constants. In this paper we report our initial results obtained from this technique. The sample studied contained 70 26-Å-thick titanium layers separated by 30.4-Å-thickamorphous carbon layers sequentially deposited onto a (100) single-crystal silicon substrate using sputter-deposition techniques. The diffraction-reflection behavior over the 2θ range 0° to 3.2° was measured at photon energies of 4795, 4895, 4945, 4955, 4965, 4970, 4975, 4977.5, 4980, 4982.5, 4985, 4995, 5045, 5145, and 5195 eV, the titanium K edge lying at 4965 eV. The maximum value of the real part of the anomalous dispersion coefficient of titanium Δf′(Ti) occurred at an energy of 4980 eV and had a value of −8.24 to −8.68 electrons. Our results for Δf′(Ti) are compared on a normalized wavelength basis (λ/λk) with values of Δf′(Ni) obtained by Bonse and Materlik [ Z. Phys. B 24, 189 ( 1976)] at the nickel K edge by interferometry, and good agreement is shown.

© 1984 Optical Society of America

Full Article  |  PDF Article
More Like This
Layered synthetic microstructure technology considerations for the extreme ultraviolet

Ritva A. M. Keski-Kuha
Appl. Opt. 23(20) 3534-3537 (1984)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription