Abstract

In this work, we present efficient generation of a high-quality vector Bessel beam using an S-wave plate (radial/azimuth polarization converter) together with an ordinary glass axicon. We examine laser-induced modifications in glass with different pulse durations. We achieve material cracking and observe dominant crack propagation directions caused by the generated beam’s intensity asymmetry. By translating the beam, we demonstrate potential application of vector Bessel beams and their transverse polarization components for microprocessing of transparent materials using ultra-short pulses.

© 2020 Optical Society of America

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2020 (1)

P. Gotovski, P. Šlevas, E. Nacius, V. Jukna, S. Orlov, J. Baltrukonis, O. Ulčinas, and T. Gertus, “Formation of optical needles by Pancharatnam-Berry phase element for laser-induced modifications in transparent materials,” Proc. SPIE 11268, 112681Y (2020).
[Crossref]

2019 (1)

R. Stoian, M. K. Bhuyan, A. Rudenko, J.-P. Colombier, and G. Cheng, “High-resolution material structuring using ultrafast laser non-diffractive beams,” Adv. Phys. X 4, 1659180 (2019).
[Crossref]

2018 (6)

S. Orlov, V. Vosylius, P. Gotovski, A. Grabusovas, J. Baltrukonis, and T. Gertus, “Vector beams with parabolic and elliptic cross-sections for laser material processing applications,” J. Laser Micro Nanoeng. 13, 280–286 (2018).
[Crossref]

M. Lamperti, V. Jukna, O. Jedrkiewicz, P. Di Trapani, R. Stoian, T. E. Itina, C. Xie, F. Courvoisier, and A. Couairon, “Invited article: filamentary deposition of laser energy in glasses with Bessel beams,” APL Photon. 3, 120805 (2018).
[Crossref]

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7, 165–174 (2018).
[Crossref]

S. Orlov, A. Juršėnas, and E. Nacius, “Optical Bessel-like beams with engineered axial phase and intensity distribution,” J. Laser Micro Nanoeng. 13, 244–248 (2018).
[Crossref]

S. Orlov, A. Juršėnas, J. Baltrukonis, and V. Jukna, “Controllable spatial array of Bessel-like beams with independent axial intensity distributions for laser microprocessing,” J. Laser Micro Nanoeng. 13, 324–329 (2018).
[Crossref]

R. Li, X. Yu, T. Peng, Y. Yang, B. Yao, C. Zhang, and T. Ye, “Shaping the on-axis intensity profile of generalized Bessel beams by iterative optimization methods,” J. Opt. 20, 085603 (2018).
[Crossref]

2017 (4)

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

K. Mishchik, R. Beuton, O. D. Caulier, S. Skupin, B. Chimier, G. Duchateau, B. Chassagne, R. Kling, C. Hönninger, E. Mottay, and J. Lopez, “Improved laser glass cutting by spatio-temporal control of energy deposition using bursts of femtosecond pulses,” Opt. Express 25, 33271–33282 (2017).
[Crossref]

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J.-P. Colombier, and R. Stoian, “3D nano-fabrication using controlled Bessel-glass interaction in ultra-fast modes,” J. Laser Micro Nanoeng. 12, 274–280 (2017).
[Crossref]

R. Meyer, M. Jacquot, R. Giust, J. Safioui, L. Rapp, L. Furfaro, P.-A. Lacourt, J. M. Dudley, and F. Courvoisier, “Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams,” Opt. Lett. 42, 4307–4310 (2017).
[Crossref]

2016 (2)

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 013102 (2016).
[Crossref]

J. Dudutis, P. Gečys, and G. Račiukaitis, “Non-ideal axicon-generated Bessel beam application for intra-volume glass modification,” Opt. Express 24, 28433–28443 (2016).
[Crossref]

2015 (2)

M. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

W. H. Teh, D. S. Boning, and R. E. Welsch, “Multistrata subsurface laser-modified microstructure with backgrind-assisted controlled fracture for defect-free ultrathin die fabrication,” IEEE Trans. Compon. Packag. Technol. 5, 1006–1018 (2015).
[Crossref]

2014 (5)

M. Zhu, Q. Cao, and H. Gao, “Creation of a 50,000λ long needle-like field with 0.36λ width,” J. Opt. Soc. Am. A 31, 500–504 (2014).
[Crossref]

U. Aich, S. Banerjee, A. Bandyopadhyay, and P. K. Das, “Abrasive water jet cutting of borosilicate glass,” Procedia Mater. Sci. 6, 775–785 (2014).
[Crossref]

S. Butkus, D. Paipulas, Ž. Viburys, A. Alesenkov, E. Gaižauskas, D. Kaškelytė, M. Barkauskas, and V. Sirutkaitis, “Rapid microfabrication of transparent materials using a filamented beam of the IR femtosecond laser,” Proc. SPIE 8972, 897216 (2014).
[Crossref]

T. Bauer, S. Orlov, U. Peschel, P. Banzer, and G. Leuchs, “Nanointerferometric amplitude and phase reconstruction of tightly focused vector beams,” Nat. Photonics 8, 23–27 (2014).
[Crossref]

M. Bhuyan, P. K. Velpula, J.-P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104, 021107 (2014).
[Crossref]

2013 (2)

2012 (1)

M. Duocastella and C. B. Arnold, “Bessel and annular beams for materials processing,” Laser Photon. Rev. 6, 607–621 (2012).
[Crossref]

2011 (1)

M. Beresna, M. Gecevičius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett. 98, 201101 (2011).
[Crossref]

2010 (2)

2009 (1)

2008 (2)

C. Pan, C. Hsieh, C. Su, and Z. Liu, “Study of cutting quality for TFT-LCD glass substrate,” Int. J. Adv. Manuf. Technol. 39, 1071–1079 (2008).
[Crossref]

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77, 043814 (2008).
[Crossref]

2006 (2)

F. S. Roux, “Geometric phase lens,” J. Opt. Soc. Am. A 23, 476–482 (2006).
[Crossref]

P. Polesana, A. Dubietis, M. A. Porras, E. Kučinskas, D. Faccio, A. Couairon, and P. Di Trapani, “Near-field dynamics of ultrashort pulsed Bessel beams in media with Kerr nonlinearity,” Phys. Rev. E 73, 056612 (2006).
[Crossref]

2004 (1)

M. A. Porras, A. Parola, D. Faccio, A. Dubietis, and P. Di Trapani, “Nonlinear unbalanced Bessel beams: stationary conical waves supported by nonlinear losses,” Phys. Rev. Lett. 93, 153902 (2004).
[Crossref]

2000 (1)

V. Jarutis, R. Paškauskas, and A. Stabinis, “Focusing of Laguerre-Gaussian beams by axicon,” Opt. Commun. 184, 105–112 (2000).
[Crossref]

1987 (2)

F. Gori, G. Guattari, and C. Padovani, “Bessel-Gauss beams,” Opt. Commun. 64, 491–495 (1987).
[Crossref]

J. Durnin, “Exact solutions for nondiffracting beams. I. The scalar theory,” J. Opt. Soc. Am. A 4, 651–654 (1987).
[Crossref]

Aich, U.

U. Aich, S. Banerjee, A. Bandyopadhyay, and P. K. Das, “Abrasive water jet cutting of borosilicate glass,” Procedia Mater. Sci. 6, 775–785 (2014).
[Crossref]

Alesenkov, A.

S. Butkus, D. Paipulas, Ž. Viburys, A. Alesenkov, E. Gaižauskas, D. Kaškelytė, M. Barkauskas, and V. Sirutkaitis, “Rapid microfabrication of transparent materials using a filamented beam of the IR femtosecond laser,” Proc. SPIE 8972, 897216 (2014).
[Crossref]

Alpmann, C.

Aprea, A.

M. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

Arnold, C. B.

M. Duocastella and C. B. Arnold, “Bessel and annular beams for materials processing,” Laser Photon. Rev. 6, 607–621 (2012).
[Crossref]

Baltrukonis, J.

P. Gotovski, P. Šlevas, E. Nacius, V. Jukna, S. Orlov, J. Baltrukonis, O. Ulčinas, and T. Gertus, “Formation of optical needles by Pancharatnam-Berry phase element for laser-induced modifications in transparent materials,” Proc. SPIE 11268, 112681Y (2020).
[Crossref]

S. Orlov, V. Vosylius, P. Gotovski, A. Grabusovas, J. Baltrukonis, and T. Gertus, “Vector beams with parabolic and elliptic cross-sections for laser material processing applications,” J. Laser Micro Nanoeng. 13, 280–286 (2018).
[Crossref]

S. Orlov, A. Juršėnas, J. Baltrukonis, and V. Jukna, “Controllable spatial array of Bessel-like beams with independent axial intensity distributions for laser microprocessing,” J. Laser Micro Nanoeng. 13, 324–329 (2018).
[Crossref]

Bandyopadhyay, A.

U. Aich, S. Banerjee, A. Bandyopadhyay, and P. K. Das, “Abrasive water jet cutting of borosilicate glass,” Procedia Mater. Sci. 6, 775–785 (2014).
[Crossref]

Banerjee, S.

U. Aich, S. Banerjee, A. Bandyopadhyay, and P. K. Das, “Abrasive water jet cutting of borosilicate glass,” Procedia Mater. Sci. 6, 775–785 (2014).
[Crossref]

Banzer, P.

T. Bauer, S. Orlov, U. Peschel, P. Banzer, and G. Leuchs, “Nanointerferometric amplitude and phase reconstruction of tightly focused vector beams,” Nat. Photonics 8, 23–27 (2014).
[Crossref]

Barkauskas, M.

S. Butkus, D. Paipulas, Ž. Viburys, A. Alesenkov, E. Gaižauskas, D. Kaškelytė, M. Barkauskas, and V. Sirutkaitis, “Rapid microfabrication of transparent materials using a filamented beam of the IR femtosecond laser,” Proc. SPIE 8972, 897216 (2014).
[Crossref]

Bauer, T.

T. Bauer, S. Orlov, U. Peschel, P. Banzer, and G. Leuchs, “Nanointerferometric amplitude and phase reconstruction of tightly focused vector beams,” Nat. Photonics 8, 23–27 (2014).
[Crossref]

Beresna, M.

M. Beresna, M. Gecevičius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett. 98, 201101 (2011).
[Crossref]

Beuton, R.

Bhuyan, M.

M. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

M. Bhuyan, P. K. Velpula, J.-P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104, 021107 (2014).
[Crossref]

Bhuyan, M. K.

R. Stoian, M. K. Bhuyan, A. Rudenko, J.-P. Colombier, and G. Cheng, “High-resolution material structuring using ultrafast laser non-diffractive beams,” Adv. Phys. X 4, 1659180 (2019).
[Crossref]

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7, 165–174 (2018).
[Crossref]

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J.-P. Colombier, and R. Stoian, “3D nano-fabrication using controlled Bessel-glass interaction in ultra-fast modes,” J. Laser Micro Nanoeng. 12, 274–280 (2017).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. Withford, and J. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18, 566–574 (2010).
[Crossref]

Bollani, M.

M. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

Boning, D. S.

W. H. Teh, D. S. Boning, and R. E. Welsch, “Multistrata subsurface laser-modified microstructure with backgrind-assisted controlled fracture for defect-free ultrathin die fabrication,” IEEE Trans. Compon. Packag. Technol. 5, 1006–1018 (2015).
[Crossref]

Bowman, R.

Butkus, S.

S. Butkus, D. Paipulas, Ž. Viburys, A. Alesenkov, E. Gaižauskas, D. Kaškelytė, M. Barkauskas, and V. Sirutkaitis, “Rapid microfabrication of transparent materials using a filamented beam of the IR femtosecond laser,” Proc. SPIE 8972, 897216 (2014).
[Crossref]

Cao, Q.

Caulier, O. D.

Cerullo, G.

R. Osellame, G. Cerullo, and R. Ramponi, Femtosecond Laser Micromachining: Photonic and Microfluidic Devices in Transparent Materials (Springer, 2012), Vol. 123.

Chassagne, B.

Cheng, G.

R. Stoian, M. K. Bhuyan, A. Rudenko, J.-P. Colombier, and G. Cheng, “High-resolution material structuring using ultrafast laser non-diffractive beams,” Adv. Phys. X 4, 1659180 (2019).
[Crossref]

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7, 165–174 (2018).
[Crossref]

Cheng, Y.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

Chimier, B.

Chu, W.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

Cižmár, T.

Colombier, J.-P.

R. Stoian, M. K. Bhuyan, A. Rudenko, J.-P. Colombier, and G. Cheng, “High-resolution material structuring using ultrafast laser non-diffractive beams,” Adv. Phys. X 4, 1659180 (2019).
[Crossref]

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J.-P. Colombier, and R. Stoian, “3D nano-fabrication using controlled Bessel-glass interaction in ultra-fast modes,” J. Laser Micro Nanoeng. 12, 274–280 (2017).
[Crossref]

M. Bhuyan, P. K. Velpula, J.-P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104, 021107 (2014).
[Crossref]

Couairon, A.

M. Lamperti, V. Jukna, O. Jedrkiewicz, P. Di Trapani, R. Stoian, T. E. Itina, C. Xie, F. Courvoisier, and A. Couairon, “Invited article: filamentary deposition of laser energy in glasses with Bessel beams,” APL Photon. 3, 120805 (2018).
[Crossref]

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 013102 (2016).
[Crossref]

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77, 043814 (2008).
[Crossref]

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M. Lamperti, V. Jukna, O. Jedrkiewicz, P. Di Trapani, R. Stoian, T. E. Itina, C. Xie, F. Courvoisier, and A. Couairon, “Invited article: filamentary deposition of laser energy in glasses with Bessel beams,” APL Photon. 3, 120805 (2018).
[Crossref]

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7, 165–174 (2018).
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R. Meyer, M. Jacquot, R. Giust, J. Safioui, L. Rapp, L. Furfaro, P.-A. Lacourt, J. M. Dudley, and F. Courvoisier, “Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams,” Opt. Lett. 42, 4307–4310 (2017).
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M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. Withford, and J. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18, 566–574 (2010).
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V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 013102 (2016).
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M. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
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P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77, 043814 (2008).
[Crossref]

P. Polesana, A. Dubietis, M. A. Porras, E. Kučinskas, D. Faccio, A. Couairon, and P. Di Trapani, “Near-field dynamics of ultrashort pulsed Bessel beams in media with Kerr nonlinearity,” Phys. Rev. E 73, 056612 (2006).
[Crossref]

M. A. Porras, A. Parola, D. Faccio, A. Dubietis, and P. Di Trapani, “Nonlinear unbalanced Bessel beams: stationary conical waves supported by nonlinear losses,” Phys. Rev. Lett. 93, 153902 (2004).
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P. Polesana, A. Dubietis, M. A. Porras, E. Kučinskas, D. Faccio, A. Couairon, and P. Di Trapani, “Near-field dynamics of ultrashort pulsed Bessel beams in media with Kerr nonlinearity,” Phys. Rev. E 73, 056612 (2006).
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M. A. Porras, A. Parola, D. Faccio, A. Dubietis, and P. Di Trapani, “Nonlinear unbalanced Bessel beams: stationary conical waves supported by nonlinear losses,” Phys. Rev. Lett. 93, 153902 (2004).
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Dudley, A.

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P. Polesana, A. Dubietis, M. A. Porras, E. Kučinskas, D. Faccio, A. Couairon, and P. Di Trapani, “Near-field dynamics of ultrashort pulsed Bessel beams in media with Kerr nonlinearity,” Phys. Rev. E 73, 056612 (2006).
[Crossref]

M. A. Porras, A. Parola, D. Faccio, A. Dubietis, and P. Di Trapani, “Nonlinear unbalanced Bessel beams: stationary conical waves supported by nonlinear losses,” Phys. Rev. Lett. 93, 153902 (2004).
[Crossref]

Faure, N.

M. Bhuyan, P. K. Velpula, J.-P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104, 021107 (2014).
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Franco, M.

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77, 043814 (2008).
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Gaižauskas, E.

S. Butkus, D. Paipulas, Ž. Viburys, A. Alesenkov, E. Gaižauskas, D. Kaškelytė, M. Barkauskas, and V. Sirutkaitis, “Rapid microfabrication of transparent materials using a filamented beam of the IR femtosecond laser,” Proc. SPIE 8972, 897216 (2014).
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V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 013102 (2016).
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M. Beresna, M. Gecevičius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett. 98, 201101 (2011).
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Gertus, T.

P. Gotovski, P. Šlevas, E. Nacius, V. Jukna, S. Orlov, J. Baltrukonis, O. Ulčinas, and T. Gertus, “Formation of optical needles by Pancharatnam-Berry phase element for laser-induced modifications in transparent materials,” Proc. SPIE 11268, 112681Y (2020).
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S. Orlov, V. Vosylius, P. Gotovski, A. Grabusovas, J. Baltrukonis, and T. Gertus, “Vector beams with parabolic and elliptic cross-sections for laser material processing applications,” J. Laser Micro Nanoeng. 13, 280–286 (2018).
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M. Beresna, M. Gecevičius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett. 98, 201101 (2011).
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Giust, R.

Gori, F.

F. Gori, G. Guattari, and C. Padovani, “Bessel-Gauss beams,” Opt. Commun. 64, 491–495 (1987).
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Gotovski, P.

P. Gotovski, P. Šlevas, E. Nacius, V. Jukna, S. Orlov, J. Baltrukonis, O. Ulčinas, and T. Gertus, “Formation of optical needles by Pancharatnam-Berry phase element for laser-induced modifications in transparent materials,” Proc. SPIE 11268, 112681Y (2020).
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S. Orlov, V. Vosylius, P. Gotovski, A. Grabusovas, J. Baltrukonis, and T. Gertus, “Vector beams with parabolic and elliptic cross-sections for laser material processing applications,” J. Laser Micro Nanoeng. 13, 280–286 (2018).
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Grabusovas, A.

S. Orlov, V. Vosylius, P. Gotovski, A. Grabusovas, J. Baltrukonis, and T. Gertus, “Vector beams with parabolic and elliptic cross-sections for laser material processing applications,” J. Laser Micro Nanoeng. 13, 280–286 (2018).
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Grigutis, R.

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 013102 (2016).
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F. Gori, G. Guattari, and C. Padovani, “Bessel-Gauss beams,” Opt. Commun. 64, 491–495 (1987).
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F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

Hönninger, C.

Hsieh, C.

C. Pan, C. Hsieh, C. Su, and Z. Liu, “Study of cutting quality for TFT-LCD glass substrate,” Int. J. Adv. Manuf. Technol. 39, 1071–1079 (2008).
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M. Lamperti, V. Jukna, O. Jedrkiewicz, P. Di Trapani, R. Stoian, T. E. Itina, C. Xie, F. Courvoisier, and A. Couairon, “Invited article: filamentary deposition of laser energy in glasses with Bessel beams,” APL Photon. 3, 120805 (2018).
[Crossref]

Jacquot, M.

Jarutis, V.

V. Jarutis, R. Paškauskas, and A. Stabinis, “Focusing of Laguerre-Gaussian beams by axicon,” Opt. Commun. 184, 105–112 (2000).
[Crossref]

Jedrkiewicz, O.

M. Lamperti, V. Jukna, O. Jedrkiewicz, P. Di Trapani, R. Stoian, T. E. Itina, C. Xie, F. Courvoisier, and A. Couairon, “Invited article: filamentary deposition of laser energy in glasses with Bessel beams,” APL Photon. 3, 120805 (2018).
[Crossref]

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 013102 (2016).
[Crossref]

M. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

Jukna, V.

P. Gotovski, P. Šlevas, E. Nacius, V. Jukna, S. Orlov, J. Baltrukonis, O. Ulčinas, and T. Gertus, “Formation of optical needles by Pancharatnam-Berry phase element for laser-induced modifications in transparent materials,” Proc. SPIE 11268, 112681Y (2020).
[Crossref]

S. Orlov, A. Juršėnas, J. Baltrukonis, and V. Jukna, “Controllable spatial array of Bessel-like beams with independent axial intensity distributions for laser microprocessing,” J. Laser Micro Nanoeng. 13, 324–329 (2018).
[Crossref]

M. Lamperti, V. Jukna, O. Jedrkiewicz, P. Di Trapani, R. Stoian, T. E. Itina, C. Xie, F. Courvoisier, and A. Couairon, “Invited article: filamentary deposition of laser energy in glasses with Bessel beams,” APL Photon. 3, 120805 (2018).
[Crossref]

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 013102 (2016).
[Crossref]

Juodkazis, S.

H. Misawa and S. Juodkazis, 3D Laser Microfabrication: Principles and Applications (Wiley, 2006).

Juršenas, A.

S. Orlov, A. Juršėnas, and E. Nacius, “Optical Bessel-like beams with engineered axial phase and intensity distribution,” J. Laser Micro Nanoeng. 13, 244–248 (2018).
[Crossref]

S. Orlov, A. Juršėnas, J. Baltrukonis, and V. Jukna, “Controllable spatial array of Bessel-like beams with independent axial intensity distributions for laser microprocessing,” J. Laser Micro Nanoeng. 13, 324–329 (2018).
[Crossref]

Kaškelyte, D.

S. Butkus, D. Paipulas, Ž. Viburys, A. Alesenkov, E. Gaižauskas, D. Kaškelytė, M. Barkauskas, and V. Sirutkaitis, “Rapid microfabrication of transparent materials using a filamented beam of the IR femtosecond laser,” Proc. SPIE 8972, 897216 (2014).
[Crossref]

Kazansky, P. G.

M. Beresna, M. Gecevičius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett. 98, 201101 (2011).
[Crossref]

Kling, R.

Kucinskas, E.

P. Polesana, A. Dubietis, M. A. Porras, E. Kučinskas, D. Faccio, A. Couairon, and P. Di Trapani, “Near-field dynamics of ultrashort pulsed Bessel beams in media with Kerr nonlinearity,” Phys. Rev. E 73, 056612 (2006).
[Crossref]

Lacourt, P.-A.

Lamperti, M.

M. Lamperti, V. Jukna, O. Jedrkiewicz, P. Di Trapani, R. Stoian, T. E. Itina, C. Xie, F. Courvoisier, and A. Couairon, “Invited article: filamentary deposition of laser energy in glasses with Bessel beams,” APL Photon. 3, 120805 (2018).
[Crossref]

Leuchs, G.

T. Bauer, S. Orlov, U. Peschel, P. Banzer, and G. Leuchs, “Nanointerferometric amplitude and phase reconstruction of tightly focused vector beams,” Nat. Photonics 8, 23–27 (2014).
[Crossref]

Li, L.

S. Nisar, L. Li, and M. Sheikh, “Laser glass cutting techniques—a review,” J. Laser Appl. 25, 042010 (2013).
[Crossref]

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R. Li, X. Yu, T. Peng, Y. Yang, B. Yao, C. Zhang, and T. Ye, “Shaping the on-axis intensity profile of generalized Bessel beams by iterative optimization methods,” J. Opt. 20, 085603 (2018).
[Crossref]

Li, Y.

Liu, Z.

C. Pan, C. Hsieh, C. Su, and Z. Liu, “Study of cutting quality for TFT-LCD glass substrate,” Int. J. Adv. Manuf. Technol. 39, 1071–1079 (2008).
[Crossref]

Lopez, J.

Meyer, R.

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7, 165–174 (2018).
[Crossref]

R. Meyer, M. Jacquot, R. Giust, J. Safioui, L. Rapp, L. Furfaro, P.-A. Lacourt, J. M. Dudley, and F. Courvoisier, “Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams,” Opt. Lett. 42, 4307–4310 (2017).
[Crossref]

Mhlanga, T.

Mikutis, M.

M. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

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H. Misawa and S. Juodkazis, 3D Laser Microfabrication: Principles and Applications (Wiley, 2006).

Mishchik, K.

Mottay, E.

Nacius, E.

P. Gotovski, P. Šlevas, E. Nacius, V. Jukna, S. Orlov, J. Baltrukonis, O. Ulčinas, and T. Gertus, “Formation of optical needles by Pancharatnam-Berry phase element for laser-induced modifications in transparent materials,” Proc. SPIE 11268, 112681Y (2020).
[Crossref]

S. Orlov, A. Juršėnas, and E. Nacius, “Optical Bessel-like beams with engineered axial phase and intensity distribution,” J. Laser Micro Nanoeng. 13, 244–248 (2018).
[Crossref]

Nisar, S.

S. Nisar, L. Li, and M. Sheikh, “Laser glass cutting techniques—a review,” J. Laser Appl. 25, 042010 (2013).
[Crossref]

Olivier, T.

M. Bhuyan, P. K. Velpula, J.-P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104, 021107 (2014).
[Crossref]

Orlov, S.

P. Gotovski, P. Šlevas, E. Nacius, V. Jukna, S. Orlov, J. Baltrukonis, O. Ulčinas, and T. Gertus, “Formation of optical needles by Pancharatnam-Berry phase element for laser-induced modifications in transparent materials,” Proc. SPIE 11268, 112681Y (2020).
[Crossref]

S. Orlov, V. Vosylius, P. Gotovski, A. Grabusovas, J. Baltrukonis, and T. Gertus, “Vector beams with parabolic and elliptic cross-sections for laser material processing applications,” J. Laser Micro Nanoeng. 13, 280–286 (2018).
[Crossref]

S. Orlov, A. Juršėnas, J. Baltrukonis, and V. Jukna, “Controllable spatial array of Bessel-like beams with independent axial intensity distributions for laser microprocessing,” J. Laser Micro Nanoeng. 13, 324–329 (2018).
[Crossref]

S. Orlov, A. Juršėnas, and E. Nacius, “Optical Bessel-like beams with engineered axial phase and intensity distribution,” J. Laser Micro Nanoeng. 13, 244–248 (2018).
[Crossref]

T. Bauer, S. Orlov, U. Peschel, P. Banzer, and G. Leuchs, “Nanointerferometric amplitude and phase reconstruction of tightly focused vector beams,” Nat. Photonics 8, 23–27 (2014).
[Crossref]

Osellame, R.

R. Osellame, G. Cerullo, and R. Ramponi, Femtosecond Laser Micromachining: Photonic and Microfluidic Devices in Transparent Materials (Springer, 2012), Vol. 123.

Padgett, M.

Padovani, C.

F. Gori, G. Guattari, and C. Padovani, “Bessel-Gauss beams,” Opt. Commun. 64, 491–495 (1987).
[Crossref]

Paipulas, D.

S. Butkus, D. Paipulas, Ž. Viburys, A. Alesenkov, E. Gaižauskas, D. Kaškelytė, M. Barkauskas, and V. Sirutkaitis, “Rapid microfabrication of transparent materials using a filamented beam of the IR femtosecond laser,” Proc. SPIE 8972, 897216 (2014).
[Crossref]

Pan, C.

C. Pan, C. Hsieh, C. Su, and Z. Liu, “Study of cutting quality for TFT-LCD glass substrate,” Int. J. Adv. Manuf. Technol. 39, 1071–1079 (2008).
[Crossref]

Parola, A.

M. A. Porras, A. Parola, D. Faccio, A. Dubietis, and P. Di Trapani, “Nonlinear unbalanced Bessel beams: stationary conical waves supported by nonlinear losses,” Phys. Rev. Lett. 93, 153902 (2004).
[Crossref]

Paškauskas, R.

V. Jarutis, R. Paškauskas, and A. Stabinis, “Focusing of Laguerre-Gaussian beams by axicon,” Opt. Commun. 184, 105–112 (2000).
[Crossref]

Peng, T.

R. Li, X. Yu, T. Peng, Y. Yang, B. Yao, C. Zhang, and T. Ye, “Shaping the on-axis intensity profile of generalized Bessel beams by iterative optimization methods,” J. Opt. 20, 085603 (2018).
[Crossref]

Peschel, U.

T. Bauer, S. Orlov, U. Peschel, P. Banzer, and G. Leuchs, “Nanointerferometric amplitude and phase reconstruction of tightly focused vector beams,” Nat. Photonics 8, 23–27 (2014).
[Crossref]

Polesana, P.

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77, 043814 (2008).
[Crossref]

P. Polesana, A. Dubietis, M. A. Porras, E. Kučinskas, D. Faccio, A. Couairon, and P. Di Trapani, “Near-field dynamics of ultrashort pulsed Bessel beams in media with Kerr nonlinearity,” Phys. Rev. E 73, 056612 (2006).
[Crossref]

Porras, M. A.

P. Polesana, A. Dubietis, M. A. Porras, E. Kučinskas, D. Faccio, A. Couairon, and P. Di Trapani, “Near-field dynamics of ultrashort pulsed Bessel beams in media with Kerr nonlinearity,” Phys. Rev. E 73, 056612 (2006).
[Crossref]

M. A. Porras, A. Parola, D. Faccio, A. Dubietis, and P. Di Trapani, “Nonlinear unbalanced Bessel beams: stationary conical waves supported by nonlinear losses,” Phys. Rev. Lett. 93, 153902 (2004).
[Crossref]

Raciukaitis, G.

Ramponi, R.

R. Osellame, G. Cerullo, and R. Ramponi, Femtosecond Laser Micromachining: Photonic and Microfluidic Devices in Transparent Materials (Springer, 2012), Vol. 123.

Rapp, L.

Recchia, S.

M. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

Roux, F. S.

Rudenko, A.

R. Stoian, M. K. Bhuyan, A. Rudenko, J.-P. Colombier, and G. Cheng, “High-resolution material structuring using ultrafast laser non-diffractive beams,” Adv. Phys. X 4, 1659180 (2019).
[Crossref]

Sabonis, V.

M. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

Safioui, J.

Sheikh, M.

S. Nisar, L. Li, and M. Sheikh, “Laser glass cutting techniques—a review,” J. Laser Appl. 25, 042010 (2013).
[Crossref]

Sirutkaitis, V.

S. Butkus, D. Paipulas, Ž. Viburys, A. Alesenkov, E. Gaižauskas, D. Kaškelytė, M. Barkauskas, and V. Sirutkaitis, “Rapid microfabrication of transparent materials using a filamented beam of the IR femtosecond laser,” Proc. SPIE 8972, 897216 (2014).
[Crossref]

Skupin, S.

Šlevas, P.

P. Gotovski, P. Šlevas, E. Nacius, V. Jukna, S. Orlov, J. Baltrukonis, O. Ulčinas, and T. Gertus, “Formation of optical needles by Pancharatnam-Berry phase element for laser-induced modifications in transparent materials,” Proc. SPIE 11268, 112681Y (2020).
[Crossref]

Somayaji, M.

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J.-P. Colombier, and R. Stoian, “3D nano-fabrication using controlled Bessel-glass interaction in ultra-fast modes,” J. Laser Micro Nanoeng. 12, 274–280 (2017).
[Crossref]

Stabinis, A.

V. Jarutis, R. Paškauskas, and A. Stabinis, “Focusing of Laguerre-Gaussian beams by axicon,” Opt. Commun. 184, 105–112 (2000).
[Crossref]

Stoian, R.

R. Stoian, M. K. Bhuyan, A. Rudenko, J.-P. Colombier, and G. Cheng, “High-resolution material structuring using ultrafast laser non-diffractive beams,” Adv. Phys. X 4, 1659180 (2019).
[Crossref]

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7, 165–174 (2018).
[Crossref]

M. Lamperti, V. Jukna, O. Jedrkiewicz, P. Di Trapani, R. Stoian, T. E. Itina, C. Xie, F. Courvoisier, and A. Couairon, “Invited article: filamentary deposition of laser energy in glasses with Bessel beams,” APL Photon. 3, 120805 (2018).
[Crossref]

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J.-P. Colombier, and R. Stoian, “3D nano-fabrication using controlled Bessel-glass interaction in ultra-fast modes,” J. Laser Micro Nanoeng. 12, 274–280 (2017).
[Crossref]

M. Bhuyan, P. K. Velpula, J.-P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104, 021107 (2014).
[Crossref]

Su, C.

C. Pan, C. Hsieh, C. Su, and Z. Liu, “Study of cutting quality for TFT-LCD glass substrate,” Int. J. Adv. Manuf. Technol. 39, 1071–1079 (2008).
[Crossref]

Sugioka, K.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

Tan, Y.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
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Teh, W. H.

W. H. Teh, D. S. Boning, and R. E. Welsch, “Multistrata subsurface laser-modified microstructure with backgrind-assisted controlled fracture for defect-free ultrathin die fabrication,” IEEE Trans. Compon. Packag. Technol. 5, 1006–1018 (2015).
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Ulcinas, O.

P. Gotovski, P. Šlevas, E. Nacius, V. Jukna, S. Orlov, J. Baltrukonis, O. Ulčinas, and T. Gertus, “Formation of optical needles by Pancharatnam-Berry phase element for laser-induced modifications in transparent materials,” Proc. SPIE 11268, 112681Y (2020).
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M. K. Bhuyan, P. K. Velpula, M. Somayaji, J.-P. Colombier, and R. Stoian, “3D nano-fabrication using controlled Bessel-glass interaction in ultra-fast modes,” J. Laser Micro Nanoeng. 12, 274–280 (2017).
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M. Bhuyan, P. K. Velpula, J.-P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104, 021107 (2014).
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Viburys, Ž.

S. Butkus, D. Paipulas, Ž. Viburys, A. Alesenkov, E. Gaižauskas, D. Kaškelytė, M. Barkauskas, and V. Sirutkaitis, “Rapid microfabrication of transparent materials using a filamented beam of the IR femtosecond laser,” Proc. SPIE 8972, 897216 (2014).
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Vosylius, V.

S. Orlov, V. Vosylius, P. Gotovski, A. Grabusovas, J. Baltrukonis, and T. Gertus, “Vector beams with parabolic and elliptic cross-sections for laser material processing applications,” J. Laser Micro Nanoeng. 13, 280–286 (2018).
[Crossref]

Welsch, R. E.

W. H. Teh, D. S. Boning, and R. E. Welsch, “Multistrata subsurface laser-modified microstructure with backgrind-assisted controlled fracture for defect-free ultrathin die fabrication,” IEEE Trans. Compon. Packag. Technol. 5, 1006–1018 (2015).
[Crossref]

Withford, M.

Woerdemann, M.

Xie, C.

M. Lamperti, V. Jukna, O. Jedrkiewicz, P. Di Trapani, R. Stoian, T. E. Itina, C. Xie, F. Courvoisier, and A. Couairon, “Invited article: filamentary deposition of laser energy in glasses with Bessel beams,” APL Photon. 3, 120805 (2018).
[Crossref]

Yang, Y.

R. Li, X. Yu, T. Peng, Y. Yang, B. Yao, C. Zhang, and T. Ye, “Shaping the on-axis intensity profile of generalized Bessel beams by iterative optimization methods,” J. Opt. 20, 085603 (2018).
[Crossref]

Yao, B.

R. Li, X. Yu, T. Peng, Y. Yang, B. Yao, C. Zhang, and T. Ye, “Shaping the on-axis intensity profile of generalized Bessel beams by iterative optimization methods,” J. Opt. 20, 085603 (2018).
[Crossref]

Ye, T.

R. Li, X. Yu, T. Peng, Y. Yang, B. Yao, C. Zhang, and T. Ye, “Shaping the on-axis intensity profile of generalized Bessel beams by iterative optimization methods,” J. Opt. 20, 085603 (2018).
[Crossref]

Yu, J.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

Yu, X.

R. Li, X. Yu, T. Peng, Y. Yang, B. Yao, C. Zhang, and T. Ye, “Shaping the on-axis intensity profile of generalized Bessel beams by iterative optimization methods,” J. Opt. 20, 085603 (2018).
[Crossref]

Zhang, C.

R. Li, X. Yu, T. Peng, Y. Yang, B. Yao, C. Zhang, and T. Ye, “Shaping the on-axis intensity profile of generalized Bessel beams by iterative optimization methods,” J. Opt. 20, 085603 (2018).
[Crossref]

Zhang, G.

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7, 165–174 (2018).
[Crossref]

Zhou, C.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

Zhu, M.

Adv. Opt. Technol. (1)

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7, 165–174 (2018).
[Crossref]

Adv. Phys. X (1)

R. Stoian, M. K. Bhuyan, A. Rudenko, J.-P. Colombier, and G. Cheng, “High-resolution material structuring using ultrafast laser non-diffractive beams,” Adv. Phys. X 4, 1659180 (2019).
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M. Lamperti, V. Jukna, O. Jedrkiewicz, P. Di Trapani, R. Stoian, T. E. Itina, C. Xie, F. Courvoisier, and A. Couairon, “Invited article: filamentary deposition of laser energy in glasses with Bessel beams,” APL Photon. 3, 120805 (2018).
[Crossref]

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M. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

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M. Bhuyan, P. K. Velpula, J.-P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104, 021107 (2014).
[Crossref]

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W. H. Teh, D. S. Boning, and R. E. Welsch, “Multistrata subsurface laser-modified microstructure with backgrind-assisted controlled fracture for defect-free ultrathin die fabrication,” IEEE Trans. Compon. Packag. Technol. 5, 1006–1018 (2015).
[Crossref]

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[Crossref]

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J.-P. Colombier, and R. Stoian, “3D nano-fabrication using controlled Bessel-glass interaction in ultra-fast modes,” J. Laser Micro Nanoeng. 12, 274–280 (2017).
[Crossref]

S. Orlov, V. Vosylius, P. Gotovski, A. Grabusovas, J. Baltrukonis, and T. Gertus, “Vector beams with parabolic and elliptic cross-sections for laser material processing applications,” J. Laser Micro Nanoeng. 13, 280–286 (2018).
[Crossref]

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R. Li, X. Yu, T. Peng, Y. Yang, B. Yao, C. Zhang, and T. Ye, “Shaping the on-axis intensity profile of generalized Bessel beams by iterative optimization methods,” J. Opt. 20, 085603 (2018).
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[Crossref]

S. Butkus, D. Paipulas, Ž. Viburys, A. Alesenkov, E. Gaižauskas, D. Kaškelytė, M. Barkauskas, and V. Sirutkaitis, “Rapid microfabrication of transparent materials using a filamented beam of the IR femtosecond laser,” Proc. SPIE 8972, 897216 (2014).
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F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
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“Laser-induced damage threshold (LIDT) measurement report,” 2020, https://www.wophotonics.com/wp-content/uploads/2020/03/LIDT-result-fs-regime.pdf .

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Figures (7)

Fig. 1.
Fig. 1. Simplified experimental setup for single transverse intensity component of radially polarized vector Bessel beam generation. Red arrows indicate polarization vectors. Lens 1 and lens 2 represent the 4f demagnifying imaging system. Azimuthally polarized vector Bessel beams can be generated by rotating polarization of incoming beam by 90° before the setup or by rotating the S-wave plate.
Fig. 2.
Fig. 2. Measured beam transverse fluence profiles of experimentally generated azimuthally (a) and radially (d) polarized vector Bessel beams and their single polarization components at different polarizer rotation angles (b), (c), (e), (f). Red arrows indicate polarization vectors.
Fig. 3.
Fig. 3. Measured beam intensity profile in the $xz$ plane of the experimentally generated radially polarized vector Bessel beam.
Fig. 4.
Fig. 4. Transmission microscopy images of the change in the UVFS sample volume modification with respect to pulse duration generated by single polarization of radially polarized VBB. The pulse energy was fixed to 67.25 µJ, and pulse duration varied from 2 ps to 10 ps FWHM.
Fig. 5.
Fig. 5. Transmission microscopy images of modifications in fused silica sample with (c) radially polarized vector Bessel beam (pulse energy 137.5 µJ) and (a), (b) its orthogonal polarization components (67.25 µJ). Pulse duration 5 ps. Images (a’)–(c’) in the blue rectangle indicate enlarged sections. Beam profiles on the right illustrate beam orientation and intensity distribution in each case.
Fig. 6.
Fig. 6. Microscope images of voids formed on SCHOTT D263T glass surface (top images, reflection microscopy) and visible cracks in volume (bottom images, transmission microscopy) with (a), (g) radially and (d), (j) azimuthally polarized VBB (pulse energy 232.3 µJ) and (b), (c), (e), (f), (h), (i), (k), (l) its orthogonal polarization components (pulse energy 114.1 µJ). Pulse duration 5 ps.
Fig. 7.
Fig. 7. Transmission microscopy images of joined cracks in volume (a), (b), reflection microscopy images of surface (c), (d), from side (e), (f), and surface topography images (g), (h) of SCHOTT D263t glass sample with radially polarized vector Bessel beam component, when the direction of the two intensity peaks coincides (left) and is perpendicular (right) to the direction of beam movement [pulse energy 291.6 µJ (a) and 175.1 µJ (b)]. Pulse duration 5 ps.

Equations (6)

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E ( r , φ ) = a 0 exp ( r 2 / d 2 i β 0 r ) ,
S ( β , θ ) = π d 2 I 0 ( β 0 β d 2 / 2 ) exp [ ( β 0 2 + β 2 ) d 2 / 4 ] ,
S ( β , θ ) exp [ ( β β 0 ) 2 d 2 / 4 ] d β 0 β / π .
T ( x , y ) = R 1 [ θ ( x , y ) ] M R [ θ ( x , y ) ] = [ cos 2 θ + e ikR sin 2 θ ( 1 e ikR ) cos θ sin θ ( 1 e ikR ) cos θ sin θ e ikR cos 2 θ + sin 2 θ ] ,
T ( x , y ) = [ cos 2 θ ( x , y ) sin 2 θ ( x , y ) sin 2 θ ( x , y ) cos 2 θ ( x , y ) ] .
E r a d ( x , y ) = [ cos φ sin φ sin φ cos φ ] [ 1 0 ] , E a z i ( x , y ) = [ cos φ sin φ sin φ cos φ ] [ 0 1 ] .

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