Abstract

We investigate the influence of structural fluctuations on the $Q$ factor of nanocavities at the surface of 3D photonic crystals with a stacked-stripe structure. We analyze the $Q$ factor of nanocavities by 3D finite-difference time-domain calculations in consideration of the misalignment of the position of the stacked layers and the fluctuation of the patterns in each layer. Misalignment of the order of $\sim 50\mathrm{nm}$ has almost no influence on the $Q$ factor, but the pattern fluctuations of the order of nanometers in each layer, especially in the surface layer, seriously impact the decrease of the $Q$ factor.

© 2013 Optical Society of America

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