Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Multimode interferometric sensors on silicon optimized for fully integrated complementary-metal-oxide-semiconductor chemical–biological sensor systems

Not Accessible

Your library or personal account may give you access

Abstract

We demonstrate an integrated evanescent-field multimode Mach–Zehnder interferometric chemical–biological sensor, fabricated on silicon, with sensitivity of parts per 109 achieved by modal pattern tracking and analysis. This sensor is fully compatible with the fabrication constraints of the silicon–complementary-metal-oxide-semiconductor (Si-CMOS) process. Furthermore, using the separately measured ellipsometric response together with the mass uptake of agent by the polymer sensing layer, we validate sensor performance via simulation and measure an absolute index sensitivity of 2.5×106. We then extend this to a fully integrated chemical–biological sensor by considering the fundamental noise performance of CMOS detectors. We find that relatively short, <5000μm long, interferometric sensing elements, with modal pattern analysis, allow fully integrated optical sensors on Si-CMOS (assuming a 2.8μm pixel pitch) with an index sensitivity of 9.2×107 and a corresponding concentration sensitivity of 170 parts per 109 for methanol in N2.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Porous silicon integrated Mach-Zehnder interferometer waveguide for biological and chemical sensing

Kyowon Kim and Thomas E. Murphy
Opt. Express 21(17) 19488-19497 (2013)

Sensitivity of grating couplers as integrated-optical chemical sensors

K. Tiefenthaler and W. Lukosz
J. Opt. Soc. Am. B 6(2) 209-220 (1989)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved