Abstract

We propose a method for microstructuring transparent materials by use of nondiffracting ultrashort pulse beams. Bulk glass arranged behind a diffractive axicon that creates a zero-order Bessel beam can be modified without being scanned in the depth direction. The whole region to be modified is irradiated by a spatially extended pulse beam; thus points at deeper depths are modified but are not affected by points at shallower depths. Not only the relationship of sample location to beam intensity field but also the pulse duration significantly influences bulk modification results. We have proved the effectiveness of method in forming microholes by applying it in silica substrates.

© 2003 Optical Society of America

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2002 (1)

2001 (3)

1998 (3)

S. H. Cho, H. Kumagai, I. Yokota, K. Midorikawa, and M. Obara, “Observation of self-channeled plasma formation and bulk modification in optical fibers using high-intensity femtosecond laser,” Jpn. J. Appl. Phys., Part 1 37, L737–L739 (1998).

A. G. Sedukhin, “Beam-preshaping axicon focusing,” J. Opt. Soc. Am. A 15, 3057–3066 (1998).

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72, 1442–1444 (1998).

1994 (1)

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64, 3071–3073 (1994).

1988 (1)

1987 (1)

1978 (1)

R. Magnusson and T. K. Gaylord, “Diffraction efficiencies of thin phase grating with arbitrary grating shape,” J. Opt. Soc. Am. A 68, 806–809 (1978).

Amako, J.

J. Amako, K. Nishida, and K. Nagasaka, “Chromatic-distortion compensation in splitting and focusing of femtosecond pulses by use of a pair of diffractive optical elements,” Opt. Lett. 5, 83–85 (2002).

J. Amako, K. Nagasaka, and E. Fujii, “Direct laser writing of diffractive array illuminators operable at two wavelengths,” in Optical Engineering for Sensing and Nanotechnology, K. Iwata, ed., Proc. SPIE 4416, 360–363 (2001).

Ashkenasi, D.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72, 1442–1444 (1998).

Cambell, E. E. B.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72, 1442–1444 (1998).

Cho, S. H.

S. H. Cho, H. Kumagai, I. Yokota, K. Midorikawa, and M. Obara, “Observation of self-channeled plasma formation and bulk modification in optical fibers using high-intensity femtosecond laser,” Jpn. J. Appl. Phys., Part 1 37, L737–L739 (1998).

Du, D.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64, 3071–3073 (1994).

Durnin, J.

Friberg, A. T.

Fujii, E.

J. Amako, K. Nagasaka, and E. Fujii, “Direct laser writing of diffractive array illuminators operable at two wavelengths,” in Optical Engineering for Sensing and Nanotechnology, K. Iwata, ed., Proc. SPIE 4416, 360–363 (2001).

Gaylord, T. K.

R. Magnusson and T. K. Gaylord, “Diffraction efficiencies of thin phase grating with arbitrary grating shape,” J. Opt. Soc. Am. A 68, 806–809 (1978).

Henz, S.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72, 1442–1444 (1998).

Herrmann, J.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72, 1442–1444 (1998).

Itoh, K.

Juodkazis, S.

Korn, G.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64, 3071–3073 (1994).

Kumagai, H.

S. H. Cho, H. Kumagai, I. Yokota, K. Midorikawa, and M. Obara, “Observation of self-channeled plasma formation and bulk modification in optical fibers using high-intensity femtosecond laser,” Jpn. J. Appl. Phys., Part 1 37, L737–L739 (1998).

Liu, X.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64, 3071–3073 (1994).

Magnusson, R.

R. Magnusson and T. K. Gaylord, “Diffraction efficiencies of thin phase grating with arbitrary grating shape,” J. Opt. Soc. Am. A 68, 806–809 (1978).

Marcinkevicius, A.

Matsuo, S.

Midorikawa, K.

S. H. Cho, H. Kumagai, I. Yokota, K. Midorikawa, and M. Obara, “Observation of self-channeled plasma formation and bulk modification in optical fibers using high-intensity femtosecond laser,” Jpn. J. Appl. Phys., Part 1 37, L737–L739 (1998).

Misawa, H.

Miwa, M.

Mourou, G.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64, 3071–3073 (1994).

Nagasaka, K.

J. Amako, K. Nishida, and K. Nagasaka, “Chromatic-distortion compensation in splitting and focusing of femtosecond pulses by use of a pair of diffractive optical elements,” Opt. Lett. 5, 83–85 (2002).

J. Amako, K. Nagasaka, and E. Fujii, “Direct laser writing of diffractive array illuminators operable at two wavelengths,” in Optical Engineering for Sensing and Nanotechnology, K. Iwata, ed., Proc. SPIE 4416, 360–363 (2001).

Nishida, K.

Nishii, J.

Obara, M.

S. H. Cho, H. Kumagai, I. Yokota, K. Midorikawa, and M. Obara, “Observation of self-channeled plasma formation and bulk modification in optical fibers using high-intensity femtosecond laser,” Jpn. J. Appl. Phys., Part 1 37, L737–L739 (1998).

Rosenfeld, A.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72, 1442–1444 (1998).

Sedukhin, A. G.

Squier, J.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64, 3071–3073 (1994).

Toma, T.

Turunen, J.

Varel, H.

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72, 1442–1444 (1998).

Vasara, A.

Watanabe, M.

Watanabe, W.

Yamada, K.

Yokota, I.

S. H. Cho, H. Kumagai, I. Yokota, K. Midorikawa, and M. Obara, “Observation of self-channeled plasma formation and bulk modification in optical fibers using high-intensity femtosecond laser,” Jpn. J. Appl. Phys., Part 1 37, L737–L739 (1998).

Appl. Opt. (1)

Appl. Phys. Lett. (2)

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64, 3071–3073 (1994).

D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett. 72, 1442–1444 (1998).

J. Opt. Soc. Am. A (3)

J. Durnin, “Exact solutions for nondiffracting beams,” J. Opt. Soc. Am. A 4, 651–654 (1987).

R. Magnusson and T. K. Gaylord, “Diffraction efficiencies of thin phase grating with arbitrary grating shape,” J. Opt. Soc. Am. A 68, 806–809 (1978).

A. G. Sedukhin, “Beam-preshaping axicon focusing,” J. Opt. Soc. Am. A 15, 3057–3066 (1998).

Jpn. J. Appl. Phys., Part 1 (1)

S. H. Cho, H. Kumagai, I. Yokota, K. Midorikawa, and M. Obara, “Observation of self-channeled plasma formation and bulk modification in optical fibers using high-intensity femtosecond laser,” Jpn. J. Appl. Phys., Part 1 37, L737–L739 (1998).

Opt. Lett. (3)

Proc. SPIE (1)

J. Amako, K. Nagasaka, and E. Fujii, “Direct laser writing of diffractive array illuminators operable at two wavelengths,” in Optical Engineering for Sensing and Nanotechnology, K. Iwata, ed., Proc. SPIE 4416, 360–363 (2001).

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