Abstract

Ablation of metal targets by Ti:sapphire laser radiation is studied. The ablation depth per pulse is measured for laser pulse durations between 150 fs and 30 ps and fluences ranging from the ablation threshold 0.1 J/cm2 up to 10 J/cm2. Two different ablation regimes are observed for the first time. In both cases the ablation depth per pulse depends logarithmically on the laser fluence. A simple theoretical model for a qualitative description of the experimental results is presented.

© 1997 Optical Society of America

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1996 (5)

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, and H. Welling, Opt. Commun. 129, 134 (1996).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

P. Simon and J. Ihlemann, Appl. Phys. A 63, 505 (1996).
[CrossRef]

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. E. B. Campbell, Appl. Phys. A 62, 293 (1996).
[CrossRef]

W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, Appl. Phys. Lett. 69, 3146 (1996).
[CrossRef]

1995 (5)

P. P. Pronko, S. K. Dutta, D. Du, and R. K. Singh, J. Appl. Phys. 78, 6233 (1995).
[CrossRef]

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, Opt. Commun. 114, 106 (1995).
[CrossRef]

S. Preuss, A. Demchuk, and M. Stuke, Appl. Phys. A 61, 33 (1995).
[CrossRef]

J. Krüger and W. Kautek, in Laser-Induced Thin Film Processing, J. J. Dubowski, ed., Proc. SPIE 2403, 436 (1995).
[CrossRef]

D. F. Price, R. M. More, R. S. Walling, G. Guethlein, R. L. Shepherd, R. E. Stewart, and W. E. White, Phys. Rev. Lett. 75, 252 (1995).
[CrossRef] [PubMed]

1994 (3)

A. Ng, P. Celliers, A. Forsman, R. M. More, Y. T. Lee, F. Perrot, M. W. C. Dharma-wardana, and G. A. Rinker, Phys. Rev. Lett. 72, 3351 (1994).
[CrossRef] [PubMed]

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

X. Y. Wang, D. M. Riffe, Y.-S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).
[CrossRef]

1992 (1)

T. Juhasz, H. E. Elsayed-Ali, X. H. Hu, and W. E. Bron, Phys. Rev. B 45, 13819 (1992).
[CrossRef]

1989 (1)

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

1988 (2)

P. B. Corkum, F. Brunel, N. K. Sherman, and T. Srinivasan-Rao, Phys. Rev. Lett. 61, 2886 (1988).
[CrossRef] [PubMed]

G. A. Rinker, Phys. Rev. A 37, 1284 (1988).
[CrossRef] [PubMed]

1987 (2)

F. Perrot and M. W. C. Dharma-wardana, Phys. Rev. A 36, 238 (1987).
[CrossRef] [PubMed]

H. E. Elsayed-Ali, T. B. Norris, M. A. Pessot, and G. A. Mourou, Phys. Rev. Lett. 58, 1212 (1987).
[CrossRef] [PubMed]

1985 (1)

D. Strickland and G. Mourou, Opt. Commun. 56, 219 (1985).
[CrossRef]

1984 (1)

J. G. Fujimoto, J. M. Liu, E. P. Ippen, and N. Bloembergen, Phys. Rev. Lett. 53, 1837 (1984).
[CrossRef]

1983 (1)

Y. T. Lee and R. More, Phys. Fluids 27, 1273 (1983).
[CrossRef]

1980 (1)

S. I. Anisimov, M. I. Tribel'skii, and Ya. G. Epel'baum, Sov. Phys. JETP 51, 802 (1980).

1975 (1)

H. Brysk, P. M. Campbell, and P. Hammerling, Plasma Physics 17, 473 (1975).
[CrossRef]

1974 (1)

S. I. Anisimov, B. L. Kapeliovich, and T. L. Perel'man, Sov. Phys. JETP 39, 375 (1974).

1957 (1)

M. I. Kaganov, I. M. Lifshitz, and L. V. Tanatarov, Sov. Phys. JETP 4, 173 (1957).

Anisimov, S. I.

S. I. Anisimov, M. I. Tribel'skii, and Ya. G. Epel'baum, Sov. Phys. JETP 51, 802 (1980).

S. I. Anisimov, B. L. Kapeliovich, and T. L. Perel'man, Sov. Phys. JETP 39, 375 (1974).

Ashkenasi, D.

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. E. B. Campbell, Appl. Phys. A 62, 293 (1996).
[CrossRef]

Audebert, P.

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

Bado, P.

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
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J. G. Fujimoto, J. M. Liu, E. P. Ippen, and N. Bloembergen, Phys. Rev. Lett. 53, 1837 (1984).
[CrossRef]

Bron, W. E.

T. Juhasz, H. E. Elsayed-Ali, X. H. Hu, and W. E. Bron, Phys. Rev. B 45, 13819 (1992).
[CrossRef]

Brunel, F.

P. B. Corkum, F. Brunel, N. K. Sherman, and T. Srinivasan-Rao, Phys. Rev. Lett. 61, 2886 (1988).
[CrossRef] [PubMed]

Brysk, H.

H. Brysk, P. M. Campbell, and P. Hammerling, Plasma Physics 17, 473 (1975).
[CrossRef]

Campbell, E. E. B.

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. E. B. Campbell, Appl. Phys. A 62, 293 (1996).
[CrossRef]

Campbell, P. M.

H. Brysk, P. M. Campbell, and P. Hammerling, Plasma Physics 17, 473 (1975).
[CrossRef]

Celliers, P.

A. Ng, P. Celliers, A. Forsman, R. M. More, Y. T. Lee, F. Perrot, M. W. C. Dharma-wardana, and G. A. Rinker, Phys. Rev. Lett. 72, 3351 (1994).
[CrossRef] [PubMed]

Chaker, M.

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

Chichkov, B. N.

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, and H. Welling, Opt. Commun. 129, 134 (1996).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Corkum, P. B.

P. B. Corkum, F. Brunel, N. K. Sherman, and T. Srinivasan-Rao, Phys. Rev. Lett. 61, 2886 (1988).
[CrossRef] [PubMed]

Delettrez, J.

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

Demchuk, A.

S. Preuss, A. Demchuk, and M. Stuke, Appl. Phys. A 61, 33 (1995).
[CrossRef]

Dharma-wardana, M. W. C.

A. Ng, P. Celliers, A. Forsman, R. M. More, Y. T. Lee, F. Perrot, M. W. C. Dharma-wardana, and G. A. Rinker, Phys. Rev. Lett. 72, 3351 (1994).
[CrossRef] [PubMed]

F. Perrot and M. W. C. Dharma-wardana, Phys. Rev. A 36, 238 (1987).
[CrossRef] [PubMed]

Downer, M. C.

X. Y. Wang, D. M. Riffe, Y.-S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).
[CrossRef]

Du, D.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, Opt. Commun. 114, 106 (1995).
[CrossRef]

P. P. Pronko, S. K. Dutta, D. Du, and R. K. Singh, J. Appl. Phys. 78, 6233 (1995).
[CrossRef]

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Dutta, S. K.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, Opt. Commun. 114, 106 (1995).
[CrossRef]

P. P. Pronko, S. K. Dutta, D. Du, and R. K. Singh, J. Appl. Phys. 78, 6233 (1995).
[CrossRef]

Elsayed-Ali, H. E.

T. Juhasz, H. E. Elsayed-Ali, X. H. Hu, and W. E. Bron, Phys. Rev. B 45, 13819 (1992).
[CrossRef]

H. E. Elsayed-Ali, T. B. Norris, M. A. Pessot, and G. A. Mourou, Phys. Rev. Lett. 58, 1212 (1987).
[CrossRef] [PubMed]

Epel'baum, Ya. G.

S. I. Anisimov, M. I. Tribel'skii, and Ya. G. Epel'baum, Sov. Phys. JETP 51, 802 (1980).

Forsman, A.

A. Ng, P. Celliers, A. Forsman, R. M. More, Y. T. Lee, F. Perrot, M. W. C. Dharma-wardana, and G. A. Rinker, Phys. Rev. Lett. 72, 3351 (1994).
[CrossRef] [PubMed]

Fujimoto, J. G.

J. G. Fujimoto, J. M. Liu, E. P. Ippen, and N. Bloembergen, Phys. Rev. Lett. 53, 1837 (1984).
[CrossRef]

Guethlein, G.

D. F. Price, R. M. More, R. S. Walling, G. Guethlein, R. L. Shepherd, R. E. Stewart, and W. E. White, Phys. Rev. Lett. 75, 252 (1995).
[CrossRef] [PubMed]

Hammerling, P.

H. Brysk, P. M. Campbell, and P. Hammerling, Plasma Physics 17, 473 (1975).
[CrossRef]

Herrmann, R.

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. E. B. Campbell, Appl. Phys. A 62, 293 (1996).
[CrossRef]

Hu, X. H.

T. Juhasz, H. E. Elsayed-Ali, X. H. Hu, and W. E. Bron, Phys. Rev. B 45, 13819 (1992).
[CrossRef]

Ihlemann, J.

P. Simon and J. Ihlemann, Appl. Phys. A 63, 505 (1996).
[CrossRef]

Ippen, E. P.

J. G. Fujimoto, J. M. Liu, E. P. Ippen, and N. Bloembergen, Phys. Rev. Lett. 53, 1837 (1984).
[CrossRef]

Johnston, T. W.

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

Juhasz, T.

T. Juhasz, H. E. Elsayed-Ali, X. H. Hu, and W. E. Bron, Phys. Rev. B 45, 13819 (1992).
[CrossRef]

Kaganov, M. I.

M. I. Kaganov, I. M. Lifshitz, and L. V. Tanatarov, Sov. Phys. JETP 4, 173 (1957).

Kapeliovich, B. L.

S. I. Anisimov, B. L. Kapeliovich, and T. L. Perel'man, Sov. Phys. JETP 39, 375 (1974).

Kautek, W.

W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, Appl. Phys. Lett. 69, 3146 (1996).
[CrossRef]

J. Krüger and W. Kautek, in Laser-Induced Thin Film Processing, J. J. Dubowski, ed., Proc. SPIE 2403, 436 (1995).
[CrossRef]

Kieffer, J. C.

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

Korn, G.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Krausz, F.

W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, Appl. Phys. Lett. 69, 3146 (1996).
[CrossRef]

Krüger, J.

W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, Appl. Phys. Lett. 69, 3146 (1996).
[CrossRef]

J. Krüger and W. Kautek, in Laser-Induced Thin Film Processing, J. J. Dubowski, ed., Proc. SPIE 2403, 436 (1995).
[CrossRef]

Lee, Y. T.

A. Ng, P. Celliers, A. Forsman, R. M. More, Y. T. Lee, F. Perrot, M. W. C. Dharma-wardana, and G. A. Rinker, Phys. Rev. Lett. 72, 3351 (1994).
[CrossRef] [PubMed]

Y. T. Lee and R. More, Phys. Fluids 27, 1273 (1983).
[CrossRef]

Lee, Y.-S.

X. Y. Wang, D. M. Riffe, Y.-S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).
[CrossRef]

Lenzner, M.

W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, Appl. Phys. Lett. 69, 3146 (1996).
[CrossRef]

Lifshitz, I. M.

M. I. Kaganov, I. M. Lifshitz, and L. V. Tanatarov, Sov. Phys. JETP 4, 173 (1957).

Liu, J. M.

J. G. Fujimoto, J. M. Liu, E. P. Ippen, and N. Bloembergen, Phys. Rev. Lett. 53, 1837 (1984).
[CrossRef]

Liu, X.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Maine, P.

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

Matte, J. P.

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

Meyerhofer, D.

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

Momma, C.

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, and H. Welling, Opt. Commun. 129, 134 (1996).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

More, R.

Y. T. Lee and R. More, Phys. Fluids 27, 1273 (1983).
[CrossRef]

More, R. M.

D. F. Price, R. M. More, R. S. Walling, G. Guethlein, R. L. Shepherd, R. E. Stewart, and W. E. White, Phys. Rev. Lett. 75, 252 (1995).
[CrossRef] [PubMed]

A. Ng, P. Celliers, A. Forsman, R. M. More, Y. T. Lee, F. Perrot, M. W. C. Dharma-wardana, and G. A. Rinker, Phys. Rev. Lett. 72, 3351 (1994).
[CrossRef] [PubMed]

Mourou, G.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, Opt. Commun. 114, 106 (1995).
[CrossRef]

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

D. Strickland and G. Mourou, Opt. Commun. 56, 219 (1985).
[CrossRef]

Mourou, G. A.

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[CrossRef] [PubMed]

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A. Ng, P. Celliers, A. Forsman, R. M. More, Y. T. Lee, F. Perrot, M. W. C. Dharma-wardana, and G. A. Rinker, Phys. Rev. Lett. 72, 3351 (1994).
[CrossRef] [PubMed]

Noack, F.

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. E. B. Campbell, Appl. Phys. A 62, 293 (1996).
[CrossRef]

Nolte, S.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, and H. Welling, Opt. Commun. 129, 134 (1996).
[CrossRef]

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[CrossRef] [PubMed]

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[CrossRef] [PubMed]

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[CrossRef] [PubMed]

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H. E. Elsayed-Ali, T. B. Norris, M. A. Pessot, and G. A. Mourou, Phys. Rev. Lett. 58, 1212 (1987).
[CrossRef] [PubMed]

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[CrossRef]

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[CrossRef] [PubMed]

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[CrossRef]

P. P. Pronko, S. K. Dutta, D. Du, and R. K. Singh, J. Appl. Phys. 78, 6233 (1995).
[CrossRef]

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X. Y. Wang, D. M. Riffe, Y.-S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).
[CrossRef]

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A. Ng, P. Celliers, A. Forsman, R. M. More, Y. T. Lee, F. Perrot, M. W. C. Dharma-wardana, and G. A. Rinker, Phys. Rev. Lett. 72, 3351 (1994).
[CrossRef] [PubMed]

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[CrossRef] [PubMed]

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H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. E. B. Campbell, Appl. Phys. A 62, 293 (1996).
[CrossRef]

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P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, Opt. Commun. 114, 106 (1995).
[CrossRef]

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[CrossRef]

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D. F. Price, R. M. More, R. S. Walling, G. Guethlein, R. L. Shepherd, R. E. Stewart, and W. E. White, Phys. Rev. Lett. 75, 252 (1995).
[CrossRef] [PubMed]

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[CrossRef]

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P. P. Pronko, S. K. Dutta, D. Du, and R. K. Singh, J. Appl. Phys. 78, 6233 (1995).
[CrossRef]

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W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, Appl. Phys. Lett. 69, 3146 (1996).
[CrossRef]

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P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, Opt. Commun. 114, 106 (1995).
[CrossRef]

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[CrossRef]

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P. B. Corkum, F. Brunel, N. K. Sherman, and T. Srinivasan-Rao, Phys. Rev. Lett. 61, 2886 (1988).
[CrossRef] [PubMed]

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D. F. Price, R. M. More, R. S. Walling, G. Guethlein, R. L. Shepherd, R. E. Stewart, and W. E. White, Phys. Rev. Lett. 75, 252 (1995).
[CrossRef] [PubMed]

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J. C. Kieffer, P. Audebert, M. Chaker, J. P. Matte, H. Pepin, T. W. Johnston, P. Maine, D. Meyerhofer, J. Delettrez, D. Strickland, P. Bado, and G. Mourou, Phys. Rev. Lett. 62, 760 (1989).
[CrossRef] [PubMed]

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[CrossRef]

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S. Preuss, A. Demchuk, and M. Stuke, Appl. Phys. A 61, 33 (1995).
[CrossRef]

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S. I. Anisimov, M. I. Tribel'skii, and Ya. G. Epel'baum, Sov. Phys. JETP 51, 802 (1980).

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B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, and H. Welling, Opt. Commun. 129, 134 (1996).
[CrossRef]

Varel, H.

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. E. B. Campbell, Appl. Phys. A 62, 293 (1996).
[CrossRef]

von Alvensleben, F.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, and H. Welling, Opt. Commun. 129, 134 (1996).
[CrossRef]

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D. F. Price, R. M. More, R. S. Walling, G. Guethlein, R. L. Shepherd, R. E. Stewart, and W. E. White, Phys. Rev. Lett. 75, 252 (1995).
[CrossRef] [PubMed]

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X. Y. Wang, D. M. Riffe, Y.-S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).
[CrossRef]

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C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, and H. Welling, Opt. Commun. 129, 134 (1996).
[CrossRef]

White, W. E.

D. F. Price, R. M. More, R. S. Walling, G. Guethlein, R. L. Shepherd, R. E. Stewart, and W. E. White, Phys. Rev. Lett. 75, 252 (1995).
[CrossRef] [PubMed]

Appl. Phys. A (4)

S. Preuss, A. Demchuk, and M. Stuke, Appl. Phys. A 61, 33 (1995).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

P. Simon and J. Ihlemann, Appl. Phys. A 63, 505 (1996).
[CrossRef]

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. E. B. Campbell, Appl. Phys. A 62, 293 (1996).
[CrossRef]

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D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, Appl. Phys. Lett. 69, 3146 (1996).
[CrossRef]

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P. P. Pronko, S. K. Dutta, D. Du, and R. K. Singh, J. Appl. Phys. 78, 6233 (1995).
[CrossRef]

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P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, Opt. Commun. 114, 106 (1995).
[CrossRef]

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C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, and H. Welling, Opt. Commun. 129, 134 (1996).
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[CrossRef] [PubMed]

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Figures (6)

Fig. 1
Fig. 1

(a) SEM photograph of the logo of the Laser Zentrum Hannover produced in a 1-mm polished copper target. The object is imaged with an f=150 mm achromatic lens (demagnification factor 30) onto the target surface (τL=150 fs, EL =700 µJ, 10,000 pulses). (b) SEM photograph of two cuts in a 80-µm-thick tantalum foil.

Fig. 2
Fig. 2

Ablation depth per pulse for copper versus the incident laser fluence for 150-fs laser pulses. The solid and the dashed lines represent the best fits according to Eqs. (30) and (31), where Fthδ=140 mJ/cm2 and Fthl=460 mJ/cm2.

Fig. 3
Fig. 3

Ablation depth per pulse for copper with 500-fs to 4.8-ps laser pulses.

Fig. 4
Fig. 4

Ablation depth per pulse for copper: (a) 7.6–14.4 ps (Fth,1=345, Fth,2=375, and Fth,3=423 mJ/cm2); and (b) 22.4- to 30.3-ps laser pulses.

Fig. 5
Fig. 5

Comparison of a numerically calculated ion temperature for a Gaussian-laser pulse (solid curve), with the analytical equation (23) (dashed curve).

Fig. 6
Fig. 6

SEM photograph of holes drilled in copper with a pulse duration of 120 fs. The holes are drilled with an imaging geometry with a demagnification factor of 40 (suprasil lens, f =100 mm). The hole diameter is 80 µm, and the spacing between two holes is 150 µm (from center to center). Second-harmonic radiation (λ=390 nm) was used (pulse energy 40 µJ, 5000 pulses per hole) to reduce the diffraction effects.

Equations (32)

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Ce Tet=-Q(z)z-γ(Te-Ti)+S,
Ci Tit=γ(Te-Ti),
Q(z)=-keTe/z,S=I(t)Aα exp(-αz),
Tet=zD zTe-Te-Tiτe+IAαCeexp(-αz),
Tit=Te-Tiτi,
Te(z, t=-)=Ti(z, t=-)=T00,
Tezz=0=Tezz==0.
Te=exptτLΘ(z),
Θ(z)=a exp(-αz)+b exp(-βz),
Ti=κTe,
κ=τLτL+τi,
Daα2-a/τeff+I0Aα/Ce=0,Dβ2-1/τeff=0,
τeff=1τL+1-κτe-1=τeτL(τL+τi)τe(τL+τi)+τLτi,
β-1=(Dτeff)1/2,a=I0AαDCe1β2-α2.
Te(0)=I0AαDCe1β2-α2exp(-αz)-αβexp(-βz),
Ti(0)=FaαDCe1τL+τi1β2-α2×exp(-αz)-αβexp(-βz),
Tet=-Te-Tiτe,Tit=Te-Tiτi,
Te=Teq+ΔT τiτe+τiexp(-t/τeq),
Ti=Teq-ΔT τeτe+τiexp(-t/τeq),
τeq=τeτi/(τe+τi),
Teq=τeTe(0)+τiTi(0)τe+τi=τLτeqτiτeffTe(0),
ΔT=Te(0)-Ti(0).
Teq=FaCiτiτe+τiβ2α2β2-α2×[α-1 exp(-αz)-β-1 exp(-βz)].
TiFaCi1l2-δ2[l exp(-z/l)-δ exp(-z/δ)],
V=V0 exp(-ρΩ/CiTi),
TiFaCiδexp(-z/δ)(δl),
TiFaCilexp(-z/l)(δl).
FaFthδ exp(z/δ),FthδρΩδ(δl),
FaFthl exp(z/l),FthlρΩl(δl),
Lδ ln(Fa/Fthδ)(δl),
Ll ln(Fa/Fthl)(δl).
la(Mi/3me)1/2=6080nm,

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