Abstract

A rigorous electromagnetic analysis is developed for metallic gratings covered by a stack of pairs of dielectrics and absorbers. The thicknesses of the layers can be arbitrary. In particular, they can be much thinner than the groove depth, which permits the optimization of grating efficiencies for the soft-x-ray range. The non-scalar behavior of such gratings is established for high angles of incidence. Examples of performances under near-normal and grazing incidences are given.

© 1991 Optical Society of America

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