Abstract

In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ < π/6 or Δ > 5π/6.

© 1988 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer

Shuichi Kawabata, Masahiro Motoki, and Hidesi Yokota
Appl. Opt. 36(10) 2178-2182 (1997)

Scanning ellipsometer by rotating polarizer and analyzer

L. Y. Chen and David W. Lynch
Appl. Opt. 26(24) 5221-5228 (1987)

Optimizing precision of rotating-analyzer and rotating-compensator ellipsometers

D. E. Aspnes
J. Opt. Soc. Am. A 21(3) 403-410 (2004)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (37)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription