Abstract

The conventional formula for the ellipsometric ratio ρ = rp/rs diverges in the limit when the dielectric constants on either side of an inhomogeneous layer become equal, 1 = 2. The general case, including 1 = 2, necessitates going to second order in the layer thickness. A formula is derived that includes the 1 = 2 case without divergence; the predicted maximum in the imaginary part of ρ when 12 indicates that index matching (of the bounding media) can significantly increase the ellipsometric signal.

© 1988 Optical Society of America

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